Appendix Material CompatibilityChart hlorine T *C Trifluoride *Bromine *Arsine *Silane *Phosphine *Oxygen Sulfide *Hydrogen * *Fluorine Key: S = Satisfactory for use with the intended gas (dry anhydrous) at a normal operating temperature of 70°F. U = Unsatisfactory forusewiththeintendedgas. Unsatisfactory = U of70°F. temperature anormaloperating anhydrous)at forusewiththe intendedgas(dry Satisfactory *THE USERSHOULDBECOME THOROUGHLY MATERIAL FAMILIAR COMPATIBILITY WITH DEPENDSONCONDITION OFUSE. THE SPECIFICPROPERTIES OF THIS GAS. = S Key: Pleasecallour Technical Centerforassistancewithyourspecificapplication. Information inthistablearepresented asaguideonly. The data Ethyl Chloride Ethane Disilane Di Dichlorosilane Deuterium Chlorine Monoxide Carbon Dioxide Carbon trans cis-2-Butene 1-Butene n-Butane 1,3-Butadiene Boron-11 Trifluoride Boron Trifluoride Boron Trichloride Argon Ammonia Air Acetylene Xenon T Sulfur Tetrafluoride Sulfur Hexafluoride Sulfur Dioxide Silicon Tetrafluoride Silicon Tetrachloride Propylene Propane Octafluoropropane Octafluorocyclobutane Nitrous Oxide Nitrogen Trifluoride Nitrogen Dioxide Nitrogen Neon Methyl Fluoride Methyl Chloride Methane Krypton Isobutylene Isobutane Hydrogen Chloride Bromide Hydrogen Hydrogen Helium Halocarbon-116 Halocarbon-23 Halocarbon-14 Ethylene Hydrogen Fluoride ungsten Hexafluoride ,Mn- n Trimethylamines and Mono-, -, -2-Butene Appendix (–) = Insufficient data available to determine the compatibility withtheintendedgas. todeterminethe compatibility available Insufficientdata = (–) rifluoride Gas

Asphyxiant Primary Hazards Primary Toxic

Flammable

Corrosive

Oxidizer U U U D D D D S S D D D U U U U S D D S S D D D U U U U U SS SUU UUUSSSS U U U U S D D S S – – U U U D S S S S D S S S U U U U U U U S U U S U S S S S S S S S S S S S S U S S U S U U U U U U U – – – – S S S S S D D U U U S S S S S S S U U U U U U S S S S S S U U U – U U S S S S S S U U U U U U S S S S S S U U U S S S S S S SSSSSSSSSSSS SSSDDSSSSSSS SSS SSSSSSSSSSSS SSSSSSSSSSSS SS SUUSUSSSSS S––SSSSSSSSS SSSSSSSSSSSS ––UUUSUUUSSS SSSSSSSSSSSS S S S SSSSSSSSSSSS S SSS SSUSSSS–SSSS S S S S S S S U S S U S S S S S S S S S S S S S S S S S U S S U S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S – S S – S – S – S – S S S S S S S S S S S – S – S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S U S S U S S S S S S – S S – S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S – S S S S S S – – – – – – – – S S S S S S S S S S D D D D – – Aluminum SSSSSSSSSSSSSS SSSSSSSSSSS SSSSSSSSSSS SSSSSSSSSSSSSS SS–––SSSSSS SSSSSSSSSSS SSSSSSSSSSS –SSSS–––––SSSS SSSSSSUUSSSSSS Brass Metals Copper SSSS SSS SS S S SS SSSS SUU SS S S SS Monel

Stainless Steel

Kel-F

Teflon Plastics

Suitabilitydependsoncondition ofuse. = D Tefzel

Kynar

Viton Elastomers

Buna-N

Neoprene w w ± ± ± ± ± ± ± ± ± ± w Pyrophoric. are pyrophoric. Highconcentrations Highly toxic. of certainplastics. Liquid mayleachplasticizerout compound. aluminum toformpyrophoric Flammable; mayreactwith requiredonallmetals. passivation Extremely reactive. requiredonallmetals. passivation Extremely reactive. Highly toxic requiredonallmetals. passivation Surface Extremely reactive. Highly toxic copper orcopperalloys. Causes stresscrackingof suitable. less than65%coppercontent, Brasswith exceeding 15psig. pressures Extremely hazardousat . a i Special Characteristics r g a s . c o Surface Surface m