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THE ELEMENTS C. R. Hammond and David R. Lide Each chemical element is characterized by the number of pro- Column heading Definition tons, Z, contained in the atomic nucleus. As of 2016, a total of 118 State at NTP Physical state of the element at normal room elements have been positively identified and assigned names and temperature (25 °C) and one atmosphere pressure symbols. Elements can occur as two or more isotopes, differing Primary valences The primary valence (oxidation) states the elements in forming stoichiometric chemical compounds in the number of neutrons, N, in the nucleus. An isotope is char- Mass number (protons plus neutrons) of stable acterized by the sum of the protons and neutrons in its nucleus, Mass no. of stable isotopes isotopes which is called the mass number A = Z + N. Including those pro- Melting point Normal melting point in °C; the notation “tp" duced artificially, over 3000 isotopes have been identified, most indicates a triple point, where solid, liquid, and gas of which are unstable to radioactive decay. A total of 288 stable are in equilibrium at the indicated pressure; other isotopes of 84 elementsCopyrighted exist on earth.a Materials - Taylor andnotes indicate Francis the phase involved The table below summarizes key properties of the 118 ele- Boiling point Normal boiling point in °C; This is the temperature at ments. More detailed information can be found in the tables of which the liquid phase is in equilibrium with the atomic weights and physical properties. Individual descriptions vapor at a pressure of 760 mmHg (101.325 kPa). A of the elements follow the table. The definition of the data col- notation “sp” following the value indicates a sublimation point, where the vapor pressure of the umns in the table is as follows. solid phase reaches 760 mmHg -3 Column heading Definition Density Density (mass per unit volume) in g cm ; the temperature in °C is indicated by a superscript; Element Name of the element; elements are listed alphabetically values refer to the liquid or solid phase, and all values are true densities, not specific gravities; the IUPAC symbol for the element Symbol number of decimal places gives a rough estimate of Z Atomic number (number of protons) the accuracy of the value Standard atomic weight; see also “Standard Atomic Atomic wt. a These numbers include radioactive isotopes whose half-lives are comparable to or Weights” table in Section 1 greater than the age of the earth, making it possible to define a terrestrial isotopic CAS Reg. No. Chemical Abstract Service Registry Number for the abundance. See Meija, J., et al., Isotopic Compositions of the Elements 2013, Pure element Appl. Chem. 2016; 88(3): 293–306. Boiling CAS Reg. Primary Mass no. of stable Melting point in Density Element Symbol Z Atomic wt. No. State at NTP valences isotopesa point in °C °C in g cm-3 Inorganic Actinium Ac 89 7440-34-8 sol +3 1050 ≈3200 10 Aluminum Al 13 26.9815385(7) 7429-90-5 sol +3 27 660.323 2519 2.70 Americium Am 95 7440-35-9 sol +3, +4, +5, 1176 ≈2011 12 +6 Antimony Sb 51 121.760(1) 7440-36-0 sol (gray Sb) +3, +5 121, 123 630.628 1587 6.68 Argon Ar 18 39.948(1) 7440-37-1 gas 0 36, 38, 40 -189.34 -185.848 1.395-185.8 liq Arsenic As 33 74.921595(6) 7440-38-2 sol (gray As) +3, +5, -3 75 817 616 sp 5.75 Astatine At 85 7440-68-8 sol 302 Barium Ba 56 137.327(7) 7440-39-3 sol +2 130, 132, 134, 135, 727 ≈1845 3.62 136, 137, 138 Berkelium Bk 97 7440-40-6 sol +3, +4 986 13.25 Beryllium Be 4 9.0121831(5) 7440-41-7 sol +2 9 1287 2468 1.85 Bismuth Bi 83 208.98040(1) 7440-69-9 sol +3, +5 209 271.402 1564 9.79 Bohrium Bh 107 54037-14-8 solb +7b Boron B 5 [10.806, 10.821] 7440-42-8 sol +3 10, 11 2077 4000 2.34 Bromine Br 35 [79.901, 79.907] 7726-95-6 liq +1, +5, -1 79, 81 -7.2 58.8 3.1028 Cadmium Cd 48 112.414(4) 7440-43-9 sol +2 106, 108, 110, 111, 321.069 767 8.69 112, 113, 114, 116 Calcium Ca 20 40.078(4) 7440-70-2 sol +2 40, 42, 43, 44, 46, 842 1484 1.54 48 Californium Cf 98 7440-71-3 sol +3 900 15.1 Carbon C 6 [12.0096, 7440-44-0 sol (graphite) +2, +4, -4 12, 13 4489 tp 3825 sp 2.2 12.0106] (10.3 MPa) Carbon C 6 [12.0096, 7440-44-0 sol (diamond) +2, +4, -4 12, 13 4440 (12.4 3.513 12.0106] GPa) Cerium Ce 58 140.116(1) 7440-45-1 sol +3, +4 136, 138, 140, 142 799 3443 6.770 Cesium Cs 55 132.90545196(6) 7440-46-2 sol +1 133 28.5 671 1.873 Chlorine Cl 17 [35.446, 35.457] 7782-50-5 gas +1, +5, +7, 35,37 -101.5 -34.04 1.565-34.0 -1 liq 4-1 4-2 The Elements Boiling CAS Reg. Primary Mass no. of stable Melting point in Density Element Symbol Z Atomic wt. No. State at NTP valences isotopesa point in °C °C in g cm-3 Chromium Cr 24 51.9961(6) 7440-47-3 sol +2, +3, +6 50, 52, 53, 54 1907 2671 7.15 Cobalt Co 27 58.933194(4) 7440-48-4 sol +2, +3 59 1495 2927 8.86 Copernicium Cn 112 54084-26-3 liq/gasb +2, +4b Copper Cu 29 63.546(3) 7440-50-8 sol +1, +2 63, 65 1084.62 2560 8.96 Curium Cm 96 7440-51-9 sol +3 1345 13.51 Darmstadtium Ds 110 54083-77-1 solb +2,+4,+6b Dubnium Db 105 53850-35-4 solb +5b Dysprosium Dy 66 162.500(1) 7429-91-6 sol +3 156, 158, 160, 161, 1412 2567 8.55 162, 163, 164 Einsteinium Es 99 7429-92-7 sol +3 860 Erbium Er 68 167.259(3) 7440-52-0 sol +3 162, 164, 166, 167, 1529 2868 9.07 Copyrighted 168, 170 Europium Eu 63 151.964(1) 7440-53-1 sol +2, +3 151, 153 822 1529 5.24 Fermium Fm 100 7440-72-4 sol +3 1527 Flerovium Fl 114 54085-16-4 liq/gasb +2, +4b Fluorine F 9 18.998403163(6) 7782-41-4 gas -1 19 -219.67 -188.11 1.5127-188.1 liq Francium Fr 87 7440-73-5 sol/liqb +1 ≈21 Gadolinium Gd 64 157.25(3) 7440-54-2 sol +3 152, 154, 155, 156, 1313 3273 7.90 157, 158, 160 Inorganic Gallium Ga 31 69.723(1) 7440-55-3 sol +3 69, 71 29.7646 2229 5.91 Germanium Ge 32 72.630(8) 7440-56-4 sol +2, +4 70, 72, 73, 74, 76 938.25 2833 5.3234 Gold Au 79 196.966569(5) 7440-57-5Materials sol +1, +3 197 1064.18 2836 19.3 Hafnium Hf 72 178.49(2) 7440-58-6 sol +4 174, 176, 177, 178, 2233 4600 13.3 179, 180 Hassium Hs 108 54037-57-9 solb +8b Helium He 2 4.002602(2) 7440-59-7 gas 0 3, 4 -268.928 0.1250-268.9 liq Holmium Ho 67 164.93033(2) 7440-60-0 sol +3 165 1472 2700 8.80 Hydrogen H 1 [1.00784, 1333-74-0 gas +1 1, 2 -259.16 -252.879 0.07083- 1.00811] - 252.9 liq Indium In 49 114.818(1) 7440-74-6 sol Taylor+3 113, 115 156.5985 2027 7.31 Iodine I 53 126.90447(3) 7553-56-2 sol +1, +5, +7, 127 113.7 184.4 4.933 -1 Iridium Ir 77 192.217(3) 7439-88-5 sol +3, +4 191, 193 2446 4428 22.56220 Iron Fe 26 55.845(2) 7439-89-6 sol +2, +3 54, 56, 57, 58 1538 2861 7.87 Krypton Kr 36 83.798(2) 7439-90-9 gas 0 78, 80, 82, 83, 84, -157.37 -153.415 2.417-153.4 86and liq Lanthanum La 57 138.90547(7) 7439-91-0 sol +3 138, 139 920 3464 6.15 Lawrencium Lr 103 22537-19-5 sol +3 1627 Lead Pb 82 207.2(1) 7439-92-1 sol +2, +4 204, 206, 207, 208 327.462 1749 11.3 Lithium Li 3 [6.938, 6.997] 7439-93-2 sol +1 6, 7 Francis180.50 1342 0.534 Livermorium Lv 116 54100-71-9 solb +2, +4b Lutetium Lu 71 174.9668(1) 7439-94-3 sol +3 175, 176 1663 3402 9.84 Magnesium Mg 12 [24.304, 24.307] 7439-95-4 sol +2 24, 25, 26 650 1090 1.74 Manganese Mn 25 54.938044(3) 7439-96-5 sol +2, +3, +4, 55 1246 2061 7.3 +7 Meitnerium Mt 109 54038-01-6 solb +1, +3, +6b Mendelevium Md 101 7440-11-1 sol +2, +3 827 Mercury Hg 80 200.592(3) 7439-97-6 liq +1, +2 196, 198, 199, 200, -38.8290 356.619 13.5335925 201, 202, 204 liq Molybdenum Mo 42 95.95(1) 7439-98-7 sol +6 92, 94, 95, 96, 97, 2622 4639 10.2 98 Moscovium Mc 115 54085-64-2 solb +1, +3b Neodymium Nd 60 144.242(3) 7440-00-8 sol +3 142, 143, 144, 145, 1016 3074 7.01 146, 148, 150 Neon Ne 10 20.1797(6) 7440-01-9 gas 0 20, 21, 22 -248.59 -246.046 1.207-246.0 liq Neptunium Np 93 7439-99-8 sol +3, +4, +5, 644 ≈3902 20.2 +6 Nickel Ni 28 58.6934(4) 7440-02-0 sol +2, +3 58, 60, 61, 62, 64 1455 2913 8.90 Nihonium Nh 113 54084-70-7 solb +1, +3b The Elements 4-3 Boiling CAS Reg.
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    USOO9048183B2 (12) United States Patent (10) Patent No.: US 9,048,183 B2 Ganguli et al. (45) Date of Patent: Jun. 2, 2015 (54) NMOSMETAL GATE MATERIALS, (52) U.S. Cl. MANUFACTURING METHODS, AND CPC .......... HOIL 21/28008 (2013.01); C23C I6/06 EQUIPMENT USING CVD AND ALD (2013.01); C23C 16/32 (2013.01); PROCESSES WITH METAL BASED (Continued) PRECURSORS (58) Field of Classification Search (71) Applicant: Applied Materials, Inc., Santa Clara, None CA (US) See application file for complete search history. (56) References Cited (72) Inventors: Seshadri Ganguli, Sunnyvale, CA (US); Srinivas Gandikota, Santa Clara, CA U.S. PATENT DOCUMENTS (US); Yu Lei, Belmont, CA (US); Xinliang Lu, Fremont, CA (US); Sang 5,055,280 A 10/1991 Nakatani et al. Ho Yu, Cupertino, CA (US); Hoon Kim, 6,139,922 A 10/2000 Kaloyeros et al. Santa Clara, CA (US); Paul F. Ma, Santa (Continued) Clara, CA (US); Mei Chang, Saratoga, CA (US); Maitreyee Mahajani, FOREIGN PATENT DOCUMENTS Saratoga, CA (US); Patricia M. Liu, Saratoga, CA (US) KR 2003OOO9093. A 1, 2003 s OTHER PUBLICATIONS (73) Assignee: APPLIED MATERIALS, INC., Santa International Search Report PCT/US2011/033820 dated Jan. 5, Clara, CA (US) 2012. (*) Notice: Subject to any disclaimer, the term of this (Continued) patent is extended or adjusted under 35 Primary Examiner — Yasser A Abdelaziez U.S.C. 154(b) by 0 days. (74) Attorney, Agent, or Firm — Patterson & Sheridan, LLP (21) Appl. No.: 14/147,291 (57) ABSTRACT Embodiments provide methods for depositing metal-contain (22) Filed: Jan. 3, 2014 ing materials. The methods include deposition processes that form metal, metal carbide, metal silicide, metal nitride, and (65) Prior Publication Data metal carbide derivatives by a vapor deposition process, including thermal decomposition, CVD, pulsed-CVD, or US 2014/O12O712 A1 May 1, 2014 ALD.
  • Quest for Superheavy Nuclei Began in the 1940S with the Syn­ Time It Takes for Half of the Sample to Decay

    Quest for Superheavy Nuclei Began in the 1940S with the Syn­ Time It Takes for Half of the Sample to Decay

    FEATURES Quest for superheavy nuclei 2 P.H. Heenen l and W Nazarewicz -4 IService de Physique Nucleaire Theorique, U.L.B.-C.P.229, B-1050 Brussels, Belgium 2Department ofPhysics, University ofTennessee, Knoxville, Tennessee 37996 3Physics Division, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831 4Institute ofTheoretical Physics, University ofWarsaw, ul. Ho\.za 69, PL-OO-681 Warsaw, Poland he discovery of new superheavy nuclei has brought much The superheavy elements mark the limit of nuclear mass and T excitement to the atomic and nuclear physics communities. charge; they inhabit the upper right corner of the nuclear land­ Hopes of finding regions of long-lived superheavy nuclei, pre­ scape, but the borderlines of their territory are unknown. The dicted in the early 1960s, have reemerged. Why is this search so stability ofthe superheavy elements has been a longstanding fun­ important and what newknowledge can it bring? damental question in nuclear science. How can they survive the Not every combination ofneutrons and protons makes a sta­ huge electrostatic repulsion? What are their properties? How ble nucleus. Our Earth is home to 81 stable elements, including large is the region of superheavy elements? We do not know yet slightly fewer than 300 stable nuclei. Other nuclei found in all the answers to these questions. This short article presents the nature, although bound to the emission ofprotons and neutrons, current status ofresearch in this field. are radioactive. That is, they eventually capture or emit electrons and positrons, alpha particles, or undergo spontaneous fission. Historical Background Each unstable isotope is characterized by its half-life (T1/2) - the The quest for superheavy nuclei began in the 1940s with the syn­ time it takes for half of the sample to decay.