Fabricated Quartzware

The #1 choice for your fabricated quartzware Fabricated Quartzware solutions High purity, clear fused quartz From quartz process tubes to quartz gas injectors, our innovative designs will meet and exceed your requirements. CVD Equipment Corporation provides high quality quartz products and superior service. Our high purity, clear fused quartz product line is the result of years of precision engineering and custom fabrication experience. Whether you’re in the market for standard or custom fabricated quartzware, our capabilities in machining, grinding, polishing, fusing, and glass blowing, make CVD Equipment Corporation the clear choice. We can bring your ideas to fruition from your drawings and sketches.

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CVD Equipment Corporation 355 South Technology Drive, Central Islip, NY 11722 Tel: +1 631-981-7081 | Fax: +1 631-981-7095 E-mail: [email protected] www.cvdequipment.com

• Bell Jars • Gas Injectors • Discs • Hot Wall Process Tubes • Showerheads • Bubblers • Double Walled Water • Push/Pull Rods • Boat Holders Cooled Process Tubes • Thermocouple Sheaths • Thermal Baffles • Wafer Boat Carriers • Sleds • Custom Designs • Substrate Holders • Crucibles

Requirements for an Accurate Quartzware Solution CVD Equipment Corporation’s fabricated quartzware • Whenever possible, a drawing or sketch showing dimensions and tolerances is best. Please submit your 2D or 3D is used in research and commercial applications. drawings on our website. We accept .doc, .docx, .pdf for 2D file formats and .STEP for 3D file format. Our on-site quartzware manufacturing facility can • In general, how will your required quartzware be used? A general description of your requirements will allow produce prototype designs with rapid turnaround. us to suggest changes in dimensions and tolerances based upon our 33+ years of industry experience to ensure We also stock quartzware components available functionality and minimize cost. for immediate purchase and shipment. Our stock • What are the anticipated operating conditions of your required quartzware usage? By providing us with maximum includes spare components for our CVD and operating temperature, operating pressure range, and a list of anticipated process gases and chemical precursors FirstNano® process equipment, including substrate you plan to use with the quartzware, we can determine prior to manufacture if the requested design is suitable for paddles, wafer boats, process gas injectors, the intended application. process tubes, quartz bubblers, bell jars, etc.

CVD Equipment Corporation’s Computer Aided Design (CAD) systems help to crystallize your ideas and sketches into GE 214®: Fused Quartz Tubing* finished drawings. Our experience in the manufacturing of furnaces and Chemical Vapor Deposition(CVD) equipment helps us to give you the solutions you need for your critical projects. PROPERTIES VALUE At CVD Equipment Corporation, we aim to improve your process and production with our products. 3 Density 2.2 g/cm Call us at +1 631-981-7081 to discuss a product solution for your project. We can also be reached at Softening Point 1683 °C [email protected] or visit our website. Annealing Point 1215 °C Strain Point 1120 °C One Stop Shop Repair Services �7 Thermal Expansion 5.5 x 10 / °C Many industries benefit from CVD Equipment Corporation’s capability for high quality fabricated Refractive Index 1.4585 quartzware, competitive prices, and prompt delivery. One of our most important and productive Dielectric Constant 3.75 @ 1 MHz / 20 °C relationships has been with the semiconductor industry. Microelectronics manufacturing requires contamination-free handling systems, and CVD Equipment Corporation is especially proud to be Hardness 5.5 - 6.5 Mohs a major supplier of high purity quartz products to semiconductor companies worldwide. Electrical Resistivity 7 x 109 ohm-cm @ 350 °C Our highly skilled artisans are able to fabricate almost any quartzware product you require. We specialize in spare and replacement parts for chemical vapor deposition systems. Chemical Thermal Conductivity 1.4 W/m x °C processing and laboratory apparatus are also supported. Specific Heat 670 J/kg °K (0-50 °C) * Quartz properties are selected based on end user’s requirements

CVD Equipment Corporation enabling tomorrow’s technologies™