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Marsurf--3764323--FL--Profilometry MarSurf OPTICAL 3D PROFILOMETRY OPTICAL 3D SURFACE METROLOGY FOR INDUSTRY AND RESEARCH Proven technology High fl exibility and individual confi guration This is what we mean by EXACTLY! OPTICAL 3D SURFACE METROLOGY FOR INDUSTRY AND RESEARCH RESEARCH AND PROCESS PRODUCTION DEVELOPMENT CONTROL CONTROL 2 MarSurf | Optimar 3D Surface Metrology MarSurf | Optimar 3D Surface Metrology MarSurf CP & CL select - PLATFORM OPTICAL 3D PROFILOMETERS FOR THE LABORATORY AND PRODUCTION 1 High fl exibility 4 Intuitive operation Thanks to material-independent measurement and versatile The effi cient operation of the measurement system is pro- sensor combinations, MarSurf technology can be used in a vided by a refi ned operating concept, thanks to ergonomic large number of measurement applications. hardware and software. 2 Custom confi guration 5 High repeatability Depending on the measurement task, different sensors, hard- Stable construction on granite guarantees the highest possib- ware components, and software solutions can be assembled le repeatability of measurements, even when used in produc- fl exibly. tion environments. 3 Industrial-strength automation 6 High-quality construction Typical industrial requirements for user-independent series Powerful, low-maintenance high-end components guarantee measurements can be comprehensively satisfi ed. the highest possible measurement precision and service life of the measurement system. MarSurf | Optimar 3D Surface Metrology MarSurf | Optimar 3D Surface Metrology 3 MarSurf CP & CL select OPTICAL 3D PROFILOMETERS FOR THE LABORATORY AND PRODUCTION FLEXIBILITY AND EFFICIENCY • The measurement systems can be used in the laboratory as well as in production environments. • Measurements are possible on nearly any material. • The intuitive user guidance of the measurement software ensures an easy, quick start to the measurement process. • No time-consuming sample preparation is required (for example orientation, anti-refl ective coating, or sputtering). • Surface scans and 2D profi les can be completed in a few seconds. • The high measurement speed is accelerated even more by functions like bi-directional scanning. QUALITY AND STANDARDS COMPLIANCE • Numerous ISO-compliant profi le and surface parameters guaran- tee the comparability and usability of results. • Mahr always implements the latest standards in measuring systems and software. • Conventional 2D measured values can be supplemented at any time with current 3D measured values. These values provide new possibilities for evaluation and statistical metrics. • The measurement systems provide new information about surface structure and machining processes. 4 MarSurf | Optimar 3D Surface Metrology MarSurf | Optimar 3D Surface Metrology AUTOMATION • The measurement process and data analysis can be entirely automated. • Measurement data is placed into a complete measurement report without time-consuming intermediate steps. • Thanks to fi ducial mark detection, possible errors in sample positioning can be detected and corrected automatically. • Integrated measurement range tracking make industrial- strength fully automated measurement possible. • Industrial requirements for complete automation are satisfi ed by functions like user administration, database connections, tolerance checks, and SPC charts. REPRODUCIBILITY • Physical data collection leads to repeatably accurate and reproducible measurements. • The commissioning of all systems is based on calibration with certifi ed standards. A signed acceptance protocol including calibration certfi cates is provided. • The option of automation guarantees maximum reprodu- cibility of measurement results. • Measurement units from Mahr have a stable mechanical construction that minimizes environmental infl uences. MarSurf | Optimar 3D Surface Metrology MarSurf | Optimar 3D Surface Metrology 5 MarSurf OPTICAL 3D PROFILOMETRY 2D APPLICATIONS y Contour x Channels in a microfl uid chip Straightness Contact pads on an electronic board Cross-sectional area Wear marks on a metal sample 6 MarSurf | Optimar 3D Surface Metrology MarSurf | Optimar 3D Surface Metrology 3D APPLICATIONS z Form y x Channels in a microfl uid chip Flatness Contact pads on an electronic board Volume/Wear Wear marks on a metal sample MarSurf | Optimar 3D Surface Metrology MarSurf | Optimar 3D Surface Metrology 7 MARSURF OPTICAL 3D PROFILOMETRY 2D APPLICATIONS y Layer thickness x Paste on ceramic substrate Warpage/Coplanarity SMD component Profi le roughness Structured sheet metal 8 MarSurf | Optimar 3D Surface Metrology MarSurf | Optimar 3D Surface Metrology 3D APPLICATIONS z Layer thickness y x Paste on ceramic substrate Warpage/Coplanarity SMD component Surface roughness Structured sheet metal MarSurf | Optimar 3D Surface Metrology MarSurf | Optimar 3D Surface Metrology 9 MARSURF OPTICAL 3D PROFILOMETRY 3D APPLICATIONS FOR AREAL MEASUREMENT Surface roughness according to ISO 25178, surface area ratio, isotropy Automotive industry • Electronics • Interior Geometry Energy • Batteries • Fuel cells 10 MarSurf | Optimar 3D Surface Metrology MarSurf | Optimar 3D Surface Metrology Coplanarity, flatness, layer thickness Electronics • Chips • Semiconductors Volume Printing industry • Decors • Interior MarSurf | Optimar 3D Surface Metrology MarSurf | Optimar 3D Surface Metrology 11 MarSurf OPTICAL 3D PROFILOMETRY INDUSTRIES Automotive industry • Electronics • Interior • Glass components • Drivetrain Power engineering • Fuel cells • Batteries • Turbines Electronics and semiconductors • BGA • MEMS • High-performance electronics • Microelectronics • Microvias • Hybrid technology • Conductor tracks and circuit boards Microsystem technology • Microoptics • LED • Pressure sensors • Microfluidics 12 MarSurf | Optimar 3D Surface Metrology MarSurf | Optimar 3D Surface Metrology Printing and paper industry • Printing plates • Banknotes • Paper screens • Security features Medical technology • Microfluidics • Sensors • Smart materials • Microtomes • Implants Tool systems • Razor blades • Microtools • Sandpaper • Cutting and grinding tools Material science • Surface machining • New materials • Laminates • Fibers MarSurf | Optimar 3D Surface Metrology MarSurf | Optimar 3D Surface Metrology 13 MarSurf OPTICAL 3D PROFILOMETRY EXAMPLES OF APPLICATION Grinding Stamping • Tools • Coins • Sandpaper • Laminate edging • Contactor armature • Artifi cial leather • Chip cards Measurement parameters: surface quality, • Plastic channels fl atness, grain size, grain density • Rollers Measurement parameters: structural depths, roughness, channel width and Screen printing height • Circuit boards • Electrical circuits Tribology • Solar cells • Rear window heaters • Bearings • Guides Measurement parameters: layer heights, • Gears layer widths, screen stretching • Motors • Contacts Measurement parameters: wear volume, Injection molding depth, contact burning • Razor blades • Housings • Technical plastics Fine machining Measurement parameters: angle, width, • Diesel injectors height, contour • Contact surfaces • Membranes • Precision components Laser processing Measurement parameters: fl atness, • Printing rollers waviness • Laser marking • Microvias Measurement parameters: hole diame- ter, trough width, raised collars, erosion volume 14 MarSurf | Optimar 3D Surface Metrology MarSurf | Optimar 3D Surface Metrology MarSurf OPTICAL 3D PROFILOMETRY TECHNOLOGY Different sensors available for fast, contact-free and nondestructive measurement. Chromatic sensor CLA Chromatic sensor CLA • Sensors with vertical measurement ranges from 0.1 Spectrometer I mm to 10 mm depending on application White light source • High vertical resolution with optimized signal/noise ratio • Measurement rates up to 4 kHz z • Dynamic brightness adjustment λmin λ1 λmax Beam splitter • Long-lasting, powerful LED light source • Precise measurements in hard-to-reach places thanks to compact construction • Suitable for roughness measurement White light • Layer thickness measurement and measurement of transparent materials possible Color-corrected imaging lens Lens with longitudinal chromatic aberration The CLA chromatic sensor works on the confocal principle. Du- λmin ring recording of measurement values the dispersive property of light is used. A lens with a pronounced chromatic length Sample aberration focuses the blue portion of the light closer to the surface Measuring range lens and the red farther away. A spectrometer detects the re- λmax sulting color differences, from which the height of the samp- le surface can be calculated. This permits the surface to be imaged at different distances without the need for a sampling movement along the optical axis. Layer thickness measurement with chromatic sensors Spectrometer Chromatic sensor CLS Lens with high longitudinal Chromatic sensor CLS chromatic aberration • Sensors with vertical measurement range I1 I2 Distance 2 Distance 1 up to 4 mm • Line width up to 4.8 mm I1 • 384,000 points/s Coating I2 Measuring range Layer thickness The chromatic line sensor CLS focuses 192 points along a line Substrate of light onto the surface of the workpiece. For each of the 192 In transparent layers, the light is refl ected at the air-coating channels, the refl ected light is spectrally analyzed to determi- interface and on the coating-substrate interface. Both layers ne the height. can be detected by the sensor, allowing the layer thickness to be determined. MarSurf | Optimar 3D Surface Metrology MarSurf | Optimar 3D Surface Metrology 15 POWERFUL SOFTWARE SOLUTIONS INTUITIVE MEASUREMENT
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