3D Incities the First Decade Magazine
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Volume 1, 2019 3DInCites.com Page 27 The Past, Present Page 36 Ten Years of Page 62 The First and Future of 3D Integration Invent, Innovate, Implement Decade in Pictures BREAKTHROUGH ALIGNMENT ACCURACY FOR 3D DEVICE STACKING Introducing the new SmartView® NT3 with sub-50 nm alignment accuracy on the GEMINI® FB XT bonding platform Fusion and hybrid wafer bonding enables leading-edge 3D Stacked CIS, Memory Stacking and 3D SoC devices GET2 IN TheTOUCH First Decade to discuss your manufacturing needs www.EVGroup.com GEMINI® FB XT CONTENTS The Past, Present, and Future of 3D Integration In this special section, industry experts talk about pivotal moments and future 27 expectations for 3D and heterogeneous integration. 27 3D InCites Turns 10: A Brief Analysis of the 3D Journey Yann Guillou, Trymax 28 3D Powered: From Image Sensors to Edge Computing Paul Werbaneth, Nor-Cal Products, Inc. 29 3D Integration’s Thousand Mile Journey Amy Leong, FormFactor 29 3D Enables More than Moore Paul Lindner, Executive Technology Director, EV Group 30 A Shift in Value from Single to Multi-die ICs Herb Reiter, eda2asic 31 Eliminating the Memory Wall Jan Vardaman, TechSearch International, Inc. 32 From 3D Pioneers to 3D Robots Dr. Phil Garrou, IFTLE, Microelectronics Consultants of North America 32 Thank 2.5D Interposers for the Success of 3D ICs Mark Scannell, CEA-Leti 34 Heterogeneous Integration Calls for Increased Materials Reliability Dr. Andy C. Mackie, PhD, Indium Corporation 34 Extending Moore’s Law through Advanced Packaging Carl McMahon, Genmark Automation ON THE COVER: 36 10 Years of Invent, Innovate, Implement Françoise von Trapp returns to EV Group for her fourth visit and reminisces about the past 10 years. FEATURES 8 Hybrid Bonding: From Concept to Commercialization An interview with Xperi’s Gil Fountain 12 Advanced Packaging: An IFTLE Historical Perspective By Dr. Phil Garrou, Microelectronics Consultants of NC 16 Why Today’s Advanced Packages Need Better Inspection By Françoise von Trapp 19 Diversification of Markets Calls for Hybrid Metrology with Multi-Sensor Technology An interview with Thomas Fries, FRT- The Art of Metrology 21 3D Test - No Longer a Bottleneck! By Eric Jan Marinissen, imec 43 Advanced Heterogeneous Packaging Solutions for High-Performance Computing By Ron Huemoeller, Mike Kelly, Curtis Zwenger, Dave Hiner, and George Scott, Amkor Technology, Inc. 3D InCites Magazine 3 CONTENTS CONTINUED 45 CoolCube™: Much more than a True 3DVLSI Alternative to Scaling By Jean-Eric Michalette, CEA-Leti 53 Addressing the Challenges of Surface Preparation for Advanced Wafer Level Packaging Q&A featuring Anil Vijayendran, Veeco Instruments 55 Reliable Process Control Solutions for the Growing Power Device Market By Dr. Dario Alliata, Unity-SC 57 3D NAND: Where Haste You So? By Andrew Walker, Schiltron, Corp. 62 The First Decade in Pictures 3D InCites has always been about the people in our industry. Here is a collection of photos from throughout the years. STAFF Françoise von Trapp, Ale Moreno, Dr. Maaike M. Visser Taklo, Editor-in-Chief Web Developer Disruptive Technologies, Norway [email protected] Ph: 978.340.0773 Technical Advisory Board E. Jan Vardaman, TechSearch International, Inc. Martijn Pierik, Publisher Sitaram R. Arkalgud, Ph.D., Xperi Corporation, USA [email protected] Paul Werbaneth, Ph: 602.366.5599 Nor-Cal Products, Inc. Rozalia Beica, DowDupont, USA Danielle Friedman, M. Juergen Wolf, Fraunhofer IZM-ASSID, Germany Director of Operations [email protected] Pascal Couderc, 3D PLUS, France Visit us at www.3DInCites.com Ph: 602.443.0030 Yann Guillou, Subscribe to our e-newsletter, Phil Garrou, Contributing Editor Trymax Semiconductor, 3D InCites In Review: https://ww- [email protected] Netherlands w.3dincites.com/subscribe-news- letter/ Herb Reiter, Contributing Editor [email protected] Dr. Phil Garrou, Microelectronic Consultants 3D InCites: The First Decade was of NC, USA published by: Creative/Production/Online 3D InCites, LLC , Erik Jan Marinissen, Rose Rover Principal Scientist at IMEC, Belgium 45 West Jackson St. Suite 700 Production Manager Phoenix, AZ, 85003 , Peter Ramm, Ph: 602.443.0030 Taylor Lineberger Fraunhofer EMFT, Germany Lead Designer Copyright ©2019 by 3D InCites, Herb Reiter, LLC. All rights reserved. Printed in , Juan Pence eda2asic Consulting, USA the US. Lead Web Designer/Developer Mark Scannell, Leti, France 4 The First Decade 3D InCites Magazine 5 6 The First Decade A Message from the Queen of 3D research institutes have made to bring about the commercialization of 3D and heterogeneous integra- tion technologies. This year marks the 7th year of the awards program. Our statue graces the award cases of Amkor Technology, Inc.; Brewer Science; Bob Patti; Bryan Black; Deca Technologies; Dow Corning (now Dupont); Dusan Petranovic; E-System Design; EV Group; and Fogale Nanotech (now UnitySC); Fraunhofer IZM; Fraunhofer Cluster for 3D Integration; FRT, the Art of Metrology; Gill Fountain; GLOBAL- FOUNDRIES; KLA; Kobus (now part of PlasmaTherm); imec; Mentor, A Siemens company; OmniVision; Novati Technologies; Paul En- Has it already been 10 years since behind 3D integration in a uniquely quist; Phil Garrou; Semblant/HZO; my first business partner, Leo Ar- personal way.” It’s what sets us SPTS; Sorin CRM; SSEC (now cher, and I started 3D InCites? apart from the other industry publi- Veeco);TSMC; Xilinx; and Xperi. cations, and we live by it. The past When we first conceived of the idea 10 years have been full of pivotal Thanks to your sponsorship and in 2009, I had no idea what I was moments for the companies and donations, we’ve made significant getting myself into or that 10 years people responsible for developing contributions to the IEEE Women later, 3D InCItes would be so well 3D and heterogeneous integration in Engineering Scholarship, SEMI recognized in the industry. technologies, and 3D InCites has High Tech U, the IMAPS Founda- been lucky to grow up alongside it. tion, G1ve-A-Buck, and Phoenix Leo and I parted ways in 2011, and Children’s Hospital. in 2012, I partnered with Martijn We were there when the EMC3D Pierik and Dave Richardson of Consortium put TSVs on the What does the future hold? 3D in- Impress Labs (now Kiterocket). roadmap, and drove cost reduction tegration has finally hit the big time, Bolstered by the support of these efforts to bring them to commercial- and we’ll continue to bring you the two partners and a web design and ization. We were there when imec, latest developments. Some of them development team, I was able to CEA-Leti, SEMATECH, Fraunhofer are in this issue. In October 2018, focus on creating valuable content EMFT, Fraunhofer IZM-ASSID, and Phil Garrou joined us as a contrib- and building a following. I remem- others developed back-end pro- uting editor, bringing with him his ber how excited I was when, in cesses that are now mainstream. well-known blog, re-christened our first year, we hit 116 registered Packaging InCites from the Leading members. Ten years later, we log in We were there when companies Edge. He joins Herb Reiter, our EDA over 80K users annually. like Alchimer, ALLVIA, NEXX Sys- expert, as a regular contributor. tems, Replisaurus, Tezzaron, and We’ve also launched the SemiSister Putting this 10th Anniversary issue Ziptronix were just getting started. project to support gender diversity together has been a nostalgia trip We were there for the launches of and inclusion efforts in the semi- for me, from searching through the Deca Technologies, Invensas, KO- conductor industry. archives and photos, to reading all BUS, and UnitySC. We remember the contributions from our friends in when Alchimer became Aveni, and In 2019, the 3D InCites leadership the industry. For that is how I think when Replisaurus went the way of changed again. Dave Richardson of all of you: not just readers, but a the dinosaurs; and when Ziptronix has gone on to pursue other inter- community of colleagues. was acquired by Invensas, and then ests, leaving Martijn and me at the became Xperi. We remember when helm of this particular ship. We are 3D InCites has always been more Applied Materials and TEL almost excited for what the next 10 years than just another source of technol- became Etaris, and then didn’t. has in store, and we hope this issue ogy news and information. Perhaps takes you on your own walk down Rajiv Roy, FormFactor, said it best In 2013, we created the 3D InCites memory lane. in a testimonial: “As a community, Awards to recognize the contri- 3D InCites brings to life the people, butions people, companies, and the personalities, and the minds 3D InCites Magazine 7 Hybrid Bonding: From Concept to Commercialization By Françoise von Trapp just an oxide bond,” explained Oxide to oxide initial Fountain. “ZiBond requires the wa- Hybrid bonding is quickly becom- bond at room temperature fer or die surface preparation to be ing recognized as the preferred done in such a way that you reach permanent bonding path for form- a certain bond strength at a certain ing high-density interconnects in temperature.” Exactly what those heterogeneous integration appli- parameters are is part of the secret cations, from 2.5D to 3D stacking sauce. ZiBond is the dielectric bond with or without through silicon that forms the basis for DBI. vias (TSVs), as well as MEMS and III-V applications. In this exclusive Ziptronix and the Road to DBI interview with Gill Fountain, Xperi, winner of the 2018 3DInCites Armed with the ZiBond patent, Engineer of the Year award for his Fountain, Enquist, Tong and several work in this area, we embark on the other colleagues founded Ziptro- journey of how one hybrid bonding nix in 2000 as a spin-out of RTI. technology came to be. Heating Closes Dishing Gap What was Fountain’s vision for the (Metal CTE > Oxide CTE) company next? To combine the di- What Do We Mean by electric bond with embedded metal Hybrid Bonding? to simultaneously bond wafers and form the interconnects.