Arxiv:2008.10477V2 [Cond-Mat.Mes-Hall] 7 Oct 2020 Quantum Mechanics in Its Own Realm, Has Been Extraor- Terface

Prospects for observing gravitational forces between nonclassical mechanical oscillators

Yulong Liu,1, 2 Jay Mummery,3 Jingwei Zhou,2 and Mika A. Sillanpää2, ∗ 1Quantum states of matter, Beijing Academy of Quantum Information Sciences, Beijing 100193, China 2Department of Applied Physics, Aalto University, P.O. Box 15100, FI-00076 AALTO, Finland 3Department of Physics, The University of Western Australia 35 Stirling Highway, Crawley WA 6009, Australia (Dated: October 9, 2020) Interfacing quantum mechanics and gravity is one of the great open questions in natural science. Micromechanical oscillators have been suggested as a plausible platform to carry out these experiments. We present an experimental design aiming at these goals, inspired by Schmöle et al., Class. Quantum Grav. 33, 125031 (2016). Gold spheres weighing on the order a milligram will be positioned on large silicon nitride membranes, which are spaced at submillimeter distances from each other. These mass-loaded membranes are mechanical oscillators that vibrate at ∼ 2 kHz frequencies in a drum mode. They are operated and measured by coupling to microwave cavities. First, we show that it is possible to measure the gravitational force between the oscillators at deep cryogenic temperatures, where thermal mechanical noise is strongly suppressed. We investigate the measurement of gravity when the positions of the gravitating masses exhibit significant quantum fluctuations, including preparation of the massive oscillators in the ground state, or in a squeezed state. We also present a plausible scheme to realize an experiment where the two oscillators are prepared in a two-mode squeezed motional quantum state that exhibits nonlocal quantum correlations and gravity the same time. Although the gravity is classical, the experiment will pave the way for testing true quantum gravity in related experimental arrangements. In a proof-of-principle experiment, we operate a 1.7 mm diameter Si3N4 membrane loaded by a 1.3 mg gold sphere. At 10 mK temperature, we observe the drum mode with a quality factor above half a million at 1.7 kHz, showing strong promise for the experiments. Following implementation of vibration isolation, cryogenic positioning, and phase noise filtering, we foresee that realizing the experiments is in reach by combining known pieces of current technology.

I. INTRODUCTION not get along well at all. For example, time in quantum mechanics is an absolute quantity, whereas in relativity it It was not until the 1930’s that it became legitimate to is a dynamic variable. The theory resulting from blindly ask whether quantum-mechanics that holds for elemen- quantizing general relativity is not renormalizable and tary particles, could also be used to describe degrees of hence far from satisfactory at a fundamental level. It is freedom in larger bodies [1]. Such “secondary” macro- not even known if gravity is a quantum-mechanical entity scopic quantum phenomena are distinguished from, for whatsoever, or whether it is somehow disconnected from example, magnetism or many other properties of solid the rest of the universe that obeys quantum mechanics. matter that are of very quantum origin. In contemporary One can say the main point in the studies is to find out experimental research, secondary macroscopic quantum- if the gravitational field created by a quantum superpo- mechanical phenomena, for example superpositions, en- sition state is a quantum superposition of the two fields. tanglement, energy quantization and zero-point noise, On the experimental side, the situation is equally are routinely observed with large molecules [2], atomic bleak. Quantum gravity, if such an entity exists, plays ensembles [3], superconducting microcircuits [4], or in a role at the respective Planck length, time, or energy particular, in the motion of micromechanical oscillators, scales of approximately 10−35 meters, 10−44 seconds, and see e.g. [5]. As compared to normal atomic quantum 1019 GeV. Direct experimental access to these extraordi- phenomena, it is much more challenging to create and nary scales is not possible in the foreseeable future. observe macroscopic quantum effects since they are more fragile with respect to environmental decoherence. Interestingly, it has been realized recently that indi- The theory of general relativity, in the same way as rect measurements could probe the gravity-quantum in- arXiv:2008.10477v2 [cond-mat.mes-hall] 7 Oct 2020 quantum mechanics in its own realm, has been extraor- terface. Oscillating physical bodies in the motional quan- dinarily successful in describing huge objects interacting tum regime - vaguely speaking with a thermally excited via gravitational force. One of the greatest results pre- phonon number less than one - might be well suited for dicted by general relativity was the discovery of gravita- the purpose [7–12]. Since 2010 [5], nonclassical motional tional waves by the LIGO laser interferometer [6]. Re- states are quite routinely achieved in various types of grettably, general relativity and quantum mechanics do nano- and micromechanical oscillators in the size range up to approximately 10 microns, weighing up to a nano- gram. In many experiments, a setup known as cavity optomechanics has been utilized, where mechanical oscilla- ∗ Mika.Sillanpaa@aalto.fi tions are coupled to electromagnetic fields located inside 2 cavity resonators of various geometries and frequencies of source masses [35]. Very recently, the scheme was [13]. A benchmark would be to prepare a quantum state experimentally demonstrated [36]. According to the in an oscillator whose mass exceeds the mass equivalent scheme, the source mass is strongly actuated. The time- ∼ 20 µg of the Planck energy, which represents a plau- dependent gravitational pull can be sensed by taking ad- sible crossover above which quantum states have been vantage of resonant enhancement, where the test mass hypothesized to decohere [14, 15]. Experimental prepa- is sitting on a vibrating beam. In the current paper we rations have been going on to cool oscillators with this describe a concrete proposal that can realize, first of all, heavy effective masses towards the motional ground state the measurement of self-gravity in a system of mg parti- [16–21]. Microwave cavity optomechanics [22] offers an- cles. As compared to Ref. [35], which considered room- other possibility as a side product from the more complex temperature operation and frequencies < 100 Hz, our scheme we discuss below. scheme aims on higher frequencies of several kHz and Letting aside quantum gravity for a moment, measur- deep cryogenic temperatures in order to reach the quan- ing the effect of Earth’s gravity on a small quantum ob- tum regime. ject is an interesting goal, achieved with neutron inter- A sketch of the device scheme is shown in Fig. 1. We ferometry since the 1970’s [23, 24], and followed by ex- utilize microwave cavity optomechanics that is naturally periments on cold atoms [25, 26]. The next and more compatible with cryogenics, which also offers the benefit demanding step is arguably verifying the gravitational of reduced dissipation. The main interest is on finding force between very small objects. Being able to make a way to determine gravity when the source mass or the such measurement is likely a prerequisite for more deli- test mass, or both, are localized at the vacuum level and cate measurements that involve both gravity and quan- thus exhibit significant vacuum fluctuations. The pos- tum phenomena inside the system. Since the Cavendish sible experiment will not yet create superposed gravita- experiment at the end of the 18th century, the masses be- tional fields because the positions of the masses are not tween which gravitational forces have been directly mea- in any appreciably spatially separated superposition. In sured, have got smaller [27], reaching sub-gram source our view, however, this detailed proposal is unique in masses [28, 29] at ∼ 200 µm distance. Even lower source the sense that its implementation seems readily in reach masses consisting of a 0.2 gram hole have been claimed to touch the interface between quantum mechanics and [30]. The aim in these torsion balance experiments and in gravity, and it would present an important step on this many earlier [31–34] has been to test deviations from the very fundamental line of research. Newton’s law of gravity at very small distances, although typically they have been null measurements without directly measuring the gravity. II. THEORY AND MODELING

antenna chip In this section, we discuss various aspects on the un- h S derlying theory, and present results of numerical modeling and compare these against achievable experimental Source M H parameters. A decisive prerequisite for these sensitive measure- δFG(t) ments will be the elimination of thermal noise of the me- M D Test chanical mode. In thermal equilibrium, an oscillator of a

L resonance frequency ω0 has the thermally excited phonon hT T −1 antenna chip number nm = [exp(~ω0/kBT ) − 1] . Low-order ﬂexu- ral mechanical modes in whatever system tend to be of cavity wall SiN membrane a much lower frequency than say electromagnetic modes, T Si substrate support post and therefore usually nm 1 even at deep cryogenic Al metallization gold mass temperatures. Thus, reaching the pertaining quantum regime in mechanical systems in general is challenging. However, reaching this limit using various cooling tech- FIG. 1. Schematics of the proposed experiment. Two ﬂip- niques in cavity optomechanics is these days quite stan- chip assemblies with mass-loaded high-stress silicon nitride membranes are positioned at submillimeter distance from one dard. The basic requirement is that the phonon number T another. There can be an appreciable gravitational force nm nm associated to a remaining thermal population between the gold spheres, which can be observed using mi- is on the order one, or better, much less than one. crowave optomechanical techniques, for which the metallized antennas mediate coupling. A. Microwave cavity optomechanics

It has been proposed that micromechanical devices Traditionally, cavity optomechanics has studied the in- could push the mass limit of detecting a purely New- teraction between a mechanically vibrating mirror with tonian gravitational force down to the milligram range the light ﬁeld inside an optical Fabry-Perot resonator. 3

The coupling between light and motion is due to radi- been achieved with high-stress silicon nitride membranes ation pressure. The important parameters include the of several hundred microns in diameter that were imple- single-photon radiation-pressure coupling energy g0, the mented inside 3D microwave cavities [57, 58], which is mechanical resonance frequency ω0, mechanical damping the setup we are interested in. rate γ, and quality factor Q, as well as the resonance fre- The analog of radiation-pressure coupling arises quency ωc and damping rate κ of the cavity. The Hamil- through the fact that a conducting mechanical oscillator tonian is then modulates the cavity capacitance. Usually the capacitor is an approximate plate capacitor defined by a membrane † † † † H = ωca a + ω0b b + g0a a b + b , (1) oscillator and a counter electrode that is connected to the cavity. For example in Fig. 1, there are two such movable where the creation and annihilation operators for photons † † capacitors, with the vacuum gaps denoted as hS and hT . (phonons) are denoted by a, a (b, b ). The single-quantum radiation-pressure coupling, here Complicated quantum state control can be achieved given in frequency units, becomes via combinations of the basic operations created by applying coherent electromagnetic waves at frequencies cor- dω ω dC g ≡ c x = c x , (3) responding to Stokes or anti-Stokes motional sidebands of 0 dx zp 2C dx zp the cavity. Although the g0 parameter is small compared to other scales, the pumping tones can also be seen as cre- where C is the total capacitance of the LC cavity res- √ q ating a large effective coupling G = g n where n 1 ~ 0 P P onator, and xzp = 2Mω is the mechanical zero-point is the pump-induced photon number. One also defines 0 2 oscillation amplitude, where M is the effective mass. the cooperativity C = 4G /(κγ) that describes the in- If we suppose the empty cavity’s capacitance domi- teraction strength, and a corresponding optical damp- 2 nates over the movable one, we can write Eq. (3) as ing Γopt = 4G /κ. Nearly arbitrary (Gaussian) quantum operations can be performed by suitable pumping with ω ε A g ' c 0 x , (4) many coherent tones. The scheme is easily extended to 0 2C h2 zp multi-partite systems. A carefully designed pumping can also be seen to turn the cavity into a dissipative reservoir where A is the electrodes’ surface area, and h is the vac- such that the oscillator sees a dissipative bath that pulls uum gap. This shows that a narrow vacuum gap is a the oscillator into a nontrivial steady state. critical parameter for maximizing the coupling. Some of the important experimental advances in the field of quantum cavity optomechanics include sideband cooling to the ground state [37, 38], entangle- B. Mass-loaded membrane ment between microwave light and motion [39], radiation- pressure shot noise and optomechanical squeezing [40– We select stoichiometric, high-stress Si3N4 (thereafter 44], non-Gaussian mechanical states [45], motional entan- SiN) as the membrane material due to its well-known glement between mechanical oscillators [46, 47], Bell test excellent mechanical properties, and suitability for (mi- [48], and room-temperature quantum behavior [49, 50]. crowave) cavity optomechanics [57, 58]. The internal ma- The basic method to cool down mechanical oscillators terials loss is shunted by the high prestress, and very in cavity optomechanics at large is sideband cooling. The high Q ∼ 109 at MHz frequency can be reached even coherent pump tone is applied at a frequency that is at elevated temperatures [44, 59, 60]. Let us consider a one ω0 lower than the cavity frequency. Then, phonons rectangular SiN membrane with side length L, thickness are preferentially scattered into the cavity. In order for H, density ρ ' 3.2 · 103 kg/m3, and prestress σ ' 900 this protocol to work well, the good-cavity (resolved- MPa. Without any mass loading, the lowest drum mode q sideband) limit κ ω0 has to be satisfied. Includ- 0.71 σ has the frequency ω0/2π ' L ρ . For example, with ing bad-cavity correction (the last term below), the final ' thermal phonon occupation of the mode is given by L = 5 mm, ω0/2π 76 kHz. Let us now add the mass loading. A natural material γ κ 2 choice is gold due to its high density and well character- n = nT + . (2) ized properties. A spherical mass M with radius R is m m γ + Γ 4ω opt 0 glued in the center of the membrane. The glue is mod- Microwave-frequency “cavities” are one of the leading eled as a short cylinder of radius rglue < R. Due to the platforms to do cavity optomechanics in the wide sense. added mass overwhelming the membrane mass, the mode Usually these have been realized as on-chip supercon- frequency will substantially decrease. We are not aware ducting transmission line resonators. An overwhelming of expression for the frequency of a loaded rectangular benefit of the microwave-frequency realization is its com- membrane. We adapt the corresponding result for the patibility with standard cryogenic instrumentation. The circular eardrum [61]: mechanical resonators in this setup have usually been s either nanowires [22, 51–53], or aluminum drumheads σH f0 = ω0/2π ≈ . (5) [37, 46, 54–56]. A very promising recent advance has 2πM log(L/2rglue) 4

The frequency depends now on the membrane thickness, high losses even at cryogenic temperatures. As seen in but not directly on its width. However, the frequency de- Fig. 2, the mode profile exhibits a sharp kink at the joint pends significantly on the participation ratio of the glue between the membrane and the glue. A large curvature spot, and goes down when the spot size decreases. The is known to enhance the losses of the mode [59, 62]. In latter is because the less contact area there is between the FEM simulation we take care that the mesh around the mass and the membrane, the less tensile force will the kinks is small (0.5 µm) in comparison to the re- pull the mass. sulting bending radius (∼ 3 µm). For SiN, we use a low-temperature loss factor ∼ 10−5. Using the parameters mentioned in Fig. 2, we obtain that SiN losses set 8 Q . 2 × 10 . Although curvature is strongly enhanced at the kink, it is the same time decreased in the regions away from the center. This could also reduce the losses due to clamping, although this was not considered in the simulations. For gold or epoxy, the low-temperature loss is not readily available. For the epoxy, we use that of PMMA, on the order ∼ 10−3 [63], and assume the same for gold. mm Including all the estimated losses, the total Q value is mm −1 P −1 obtained from Q = Qi summing all the considered loss channels i. In the current example, Q ∼ 7 × 106 for the main mode, strongly dominated by losses of the FIG. 2. Mass-loaded drum mode. The finite-element simula- glue. The contributions by different loss channels are tion shows the profile of the lowest drum mode of an L = 5 listed in Table I, for a couple of plausible geometries. It mm wide, H = 100 nm thick, rectangular silicon nitride mem- is seen that a large glue radius and thin membrane are brane with a R = 0.25 mm radius gold sphere glued in the beneficial, and that gold losses are nearly irrelevant. The center. The glue spot radius is r = 100 µm. The mode glue wobbling modes are affected by nearly an order of mag- frequency becomes f0 ' 1.9 kHz. nitude more by all the losses, and in the end they have Q ∼ 106. The high predicted Q values, acquired without exhaus- We ran finite-element model (FEM) simulations to ver- tive optimization of the geometry, show a great promise ify the mode profiles. For the simulation, the glue is for the experimental realization. Below in the discussion, modeled as a cylinder connecting the membrane and the we suppose Q = 107 that seems achievable in real life. By sphere. An example mode shape is shown in Fig. 2. In a optimizing the contact between the membrane and the couple of tests using different parameter values, Eq. (5) mass, one could further achieve an order of magnitude holds to within 10 %. In addition to the main flexural increase in Q. mode, there are two ideally degenerate modes where the sphere wobbles horizontally. Their frequency depends sensitively of the glue spot size, and is typically lower TABLE I. Mechanical Q values due to materials losses. The than that of the main mode. There are no other modes last column gives the total Q with the parameters ηSiN = −5 −3 −3 within a decade in frequency of the main mode. One 10 , ηAu = 10 , ηglue = 10 . can easily verify from the simulations that the weight of the sphere does not significantly deflect the membrane L H rglue f0 QSiN QAu Qglue Q in comparison to a typical vacuum gap, neither does it (mm) (nm) (µm) (kHz) 3 5 4 affect the mode profiles almost independently on the ori- 5 50 100 1.3 3×10 2.3×10 2×10 17 × 106 ηSiN ηAu ηglue 2 4 3 entation of the chip with respect to horizontal. These are 5 100 50 1.7 8×10 6×10 5×10 4 × 106 ηSiN ηAu ηglue due to the high tension in the membrane. 3 5 4 5 100 100 1.9 1.4×10 1.1×10 8×10 7 × 106 With the high mass load, the optomechanical coupling, ηSiN ηAu ηglue 3 5 4 5 100 200 2.1 2×10 3×10 1.1×10 11 × 106 Eq. (3) will be reduced because the zero-point motion will ηSiN ηAu ηglue 3 5 3 go down, while the electrode geometry can be assumed 5 200 200 2.9 1.1×10 1.6×10 5×10 5 × 106 ηSiN ηAu ηglue unchanged. The dependence of g0 on the mass load is 1.6×103 1.6×105 1.3×104 6 −1/4 1.7 50 100 1.60 11 × 10 only weak, g0 ∝ M . Using the discussed parameters, ηSiN ηAu ηglue g0 amounts to about 30 % of that of a bare membrane. With a 0.5 µm vacuum gap between the electrodes, we have on the order g0/2π ∼ 0.2 Hz that is still a very decent value as will be discussed below in light of other experimental parameters. C. Displacement detection A critical consideration is how the mechanical losses are influenced by the exceptional geometry. It can be Let us recap the results for the continuous position expected that especially the glue, but also gold, can have monitoring of a single oscillator. Such a measurement is 5 typically carried out by probing a cavity-optomechanical cavity. In this scheme, the cavity yc quadrature measures system at the resonant frequency of the cavity. The aim the oscillator position x, and the measurement backac- is to find out how the different known noise contribution affects p directly, and also x via their coupling. All tions in the gravitational force measurements will affect the forces enter via the mechanical susceptibility the sensitivity. In the deep quantum case, it turns out 1 the measurement quantum backaction will pose limita- χm(ω) = , (11) M (ω2 − ω2 − iγω) tions for the sensitivity. It could then be beneficial to use 0 quantum backaction evading (BAE) measurement strate- that is, their effect is the strongest on resonance. The gies [64, 65]. spectral density of the position fluctuations becomes We write the linearized optomechanical Hamiltonian 2 2 Sx(ω) = |χm| Sf (ω) + |χqba| Sx,in(ω) from Eq. (1) in terms of position x and momentum p of (12) ≡ Szp + ST + SE + Sqba . the oscillator, and the dimensionless quadratures xc, yc x x x x of the cavity: In Eq. (12), the result is sorted into contributions by zp T 2 the zero-point mechanical noise Sx , thermal noise Sx , p 1 ~ωc 2~G E qba H = + Mω2x2 + x2 + y2 + xx . (6) vibration noise S , and the backaction noise S : 2M 2 0 4 c c x c x x zp zp 2 Sx = γM~ω0|χm| (13a) In addition, there is a noise force f(t) = f L(t) + f E(t) T T 2 Sx = 2γM~ω0nm|χm| (13b) driving the oscillator consisting of the thermal plus quan- E E 2 tum Langevin force f L(t), and of an external noise f E(t) Sx = Sf (ω)|χm| (13c) due to environmental vibrations. The external noise 1 Sqba = |χ |2 . (13d) f E(t) = MxË(t) can be modeled as an inertial force x 2 qba E arising from vibrations of the chip, x (t). Writing this The quantum backaction susceptibility grows with the way allows access to the most concrete technical noise, measurement strength (cooperativity): namely vibration noise in the refrigerator. The Langevin p force has the spectral density χqba = 2 Cγ~χm . (14) We now turn on discussing how the mechanical noise L T 1 T zp S (ω) = 2γM~ω0 n + ≡ S + S , (7) spectra appear as an apparent measurement sensitivity f m 2 f f after detection. The output field that leaks out from the cavity replicates the mechanical oscillator position. It is and the spectral density of the total force is Sf (ω) = L E given by Sf (ω) + Sf (ω). Above, the vacuum, thermal, and exter- √ nal noises are √ 2 Cγ y (t) = κy (t) − y (t) = y (t) − x(t) . c,out c c,in c,in x Szp(ω) = γM ω (8a) zp f ~ 0 (15) ST (ω) = 2γM ω nT (8b) f ~ 0 m Additionally, there will be a contribution by the signal E 2 4 E Sf (ω) = M ω0Sx (ω) , (8c) lost on the way, and in particular the noise added by the microwave amplifier. These contributions will be de- E and Sx (ω) is the spectral density of cryostat vibrations. scribed by the added noise Sadd in units of quanta. The We use the standard input-output modeling of the op- amplified and detected spectrum becomes tomechanical cavity, with the equations of motion: 1 4Cγ S (ω) = + S (ω) + S . √ y,out 2 x add (16) κ 2 xzp x˙c = − + κxc,in 2 We can rearrange Eq. (16) in order to secure the inferred 2G κ √ y˙c = − x − + κyc,in force noise spectrum, xzp 2 (9) x2 p eff ≡ zp x˙ = Sf (ω) 2 Sy,out(ω) m 4Cγ|χm| (17) zp qba imp 2 2~G = S + ST + SE + S + S . p˙ = −mω0x − xc − γp + f(t) f f f f f xzp qba Here, the backaction noise Sf and the imprecision noise We suppose the cavity mode to be at zero temperature, imp Sf read and the cavity input noises xc,in, yc,in have the spectrum qba 2C 2 1 Sf = 2 γ~ (18a) Sx,in(ω) = Sy,in(ω) = . (10) xzp 2 1 + Sadd Simp = 2 . (18b) We further suppose the bad-cavity limit κ ω0 which is f 4C 2 2 γ|χm| also relevant for the experiment, and a fully overcoupled xzp 6

The standard quantum limit (SQL) indicates the min- imum noise that results from the competition between improving imprecision and increasing backaction while cooperativity becomes larger. Zero temperature is as- 10 µm sumed, as well as a noiseless single-quadrature readout of the output field. The latter implies Sadd = 0. The frequency-dependent, and resonant, SQL are 1 µm sql ~ Sf (ω) = γM~ω0 + |χm(ω)| (19) sql Sf (ω0) = 2γM~ω0 , respectively. The latter tells that the added noise equals 0.1 µm at best the vacuum noise. Using backaction evading (BAE) measurement, the backaction contribution in Eq. (17) is eliminated, and the SQL is no longer a limi- ωG/ωm tation. FIG. 3. Sensitivity to gravitational actuation. The black curves illustrate the effective force noise, Eq. (17), at three D. Observing gravitational force between two 6 7 8 oscillators different mechanical Q values (Q = 10 , 10 10 , from top to bottom at center). The dashed horizontal black lines are the corresponding thermal plus vacuum spectra, Eq. (7), which Gravitational force is often negligible in physical or meet the corresponding peak on resonance. The red horizon- chemical processes at the sub-mm scale, not to mention tal dashed line is the√ contribution by external vibration noise p E −19 gravitational interaction between particles under that with Sx = 10 / Hz. The solid horizontal blue lines are regime. The latter is not surprising given the fact that the gravitational signal SG from the displacements dxS as la- the electrostatic force between e.g. a proton and electron beled. The added noise is Sadd = 10 quanta. Cooperativity 2 is around forty orders of magnitude larger than the grav- C = 10 , and integration time is τ = 1 hour. itational force between them. These numbers seem to indicate that it is utterly impossible to observe gravitational interactions between small particles or even every- day objects, since gravity appears to be totally masked by first analyze the prospects of seeing the self-gravity with much stronger electromagnetic forces. This, however, is mg masses, also considering the quantum limits of detec- actually not the case, as hinted already by the Cavendish tion. experiment and later work [27–30]. The reason clearly is Recall the scheme in Fig. 1. Both membranes mass- that electromagnetic fields tend to become confined in- loaded by gold spheres have the same frequency ω0. Let side atoms or molecules, or canceled in conducting sys- us call one of the masses the source mass (S). Its motion tems, but gravity cannot be blocked. is actuated sinusoidally by an amplitude dxS, and near- According to Newton, the gravitational force between resonantly (frequency ωG). The test mass (T) will then two equal masses M with center-of-mass (COM) distance feel the time-dependent gravitational force dFG with D is dFG(t) = − |dFG| sin(ωGt) , (21a) 2 GM 2GM 2 FG = . (20) |dF | = dx (21b) D2 G D3 S −11 2 Here, G ' 6.67 × 10 N (m/kg) . For example, the and respond at the motion amplitude gravitational force is FG ∼ 0.1 fN between gold spheres weighing M ∼ 1 mg and separated by D ∼ 1 mm. Inter- 2GM dxT = 3 dxS . (22) estingly, this magnitude is well above a detection thresh- γω0D old given the extreme force sensitivities obtained with 7 nanomechanical mass sensors [66]. Although the latter For example, at Q = 10 , dxS = 1 µm, we have dxT ' are not relevant for the present problem, the benchmark- 35 fm that is nearly three orders of magnitude larger ing gives an indication that measuring such tiny forces is than the zero-point amplitude. Much better imprecision in principle possible. As a static force, however, one can- have been reached with optics [67, 68], and also with not distinguish it from other forces, but a suitable mod- microwaves [69], so the measurement sounds plausible, ulation that uses resonant enhancement of a test mass although it will be heavily challenged by the mechanical motion could accomplish the measurements. Such a pro- thermal noise as discussed next. posal was presented in Ref. [35]. In our work we translate The spectral density of the sinusoidal force in Eq. (21a) π 2 the scheme into cryogenic microwave optomechanics, and is SG(ω) = 2 |dFG| [δ(ω + ωG) + δ(ω − ωG)]. In the 7

the mechanical peak. Although the mechanical noise and TABLE II. Plausible experimental parameters. The table lists the parameters (refer to Fig. 1) used in estimating the susceptibility have opposite effects on the sensitivity in- prospects, unless other parameters are provided in the discus- dependent of frequency, the best sensitivity is reached on sion. It is likely that the mentioned g0 values can be increased resonance because of the imprecision noise plays the least by optimizing the cavity geometry. role there. At a better imprecision noise, the frequency dependence becomes less pronounced and the measure- symbol description value ment hence perhaps easier. Otherwise, a near-quantum L membrane width 5 mm limited amplifier in this example is not important because H membrane thickness 100 nm of the overwhelming mechanical thermal noise. R gold sphere radius 250 µm We√ also plot in Fig. 3 the predicted gravitational sig- M gold sphere mass 1.3 mg nals PG at different excitation amplitudes dxS of the ω0 mechanical resonance frequency 2π × 1.9 kHz source mass. If the effective force noise is below the grav- xzp mechanical zero-point amplitude 60 am itational signal (SNR > 1), the latter is observable. We D center-of-mass distance of spheres 700 µm see that near resonance, an amplitude dxS = 1 µm ex- hS vacuum gap at source oscillator 2 µm posed to our default Q = 107 oscillator provides SNR > 1 hS vacuum gap at test oscillator 0.5 µm 2 within a very reasonable integration time. It could even A electrode surface area (300 µm) 8 be possible to reach down to dxS = 100 nm if Q ∼ 10 g0,S g0 of source oscillator 2π × 40 mHz (which may not be realistic), or by integrating several g g of test oscillator 2π × 0.17 Hz 0,T 0 days. ωc microwave cavity frequency 2π × 7 GHz T equilibrium mode temperature 20 mK T 5 nm equilibrium phonon number 2.2 × 10 Q mechanical Q value, both oscillators 107 E. Gravitational forces in a system of quantum Γ mechanical decoherence rate 2π × 40 Hz oscillators

As mentioned, measuring gravity from a source mass that is in a spatially separated superposition seems out of measurement this is integrated over frequency, yielding reach for quite a while, although levitated nanoparticles π 2 the signal power PG = 2 |dFG| . This should be com- [70, 71] are showing promise to this end. The ﬁrst logical pared to the eﬀective force noise power, Eq. (17), when steps towards experimental tests of such a genuine quan- recorded within a bandwidth B: tum gravity would be to study gravity in a system which

eff eff −1 exhibits some macroscopic quantum properties of mas- PF = Sf (ωG)B ' Sf (ωG)τ , (23) sive objects. The latter could include the test mass, the source mass, or both. The states under consideration are where τ ' B−1 is the corresponding measurement time. pure states that are displaced by the gravitational field. Equation 23 gives the average value of noise power. This The list of foreseeable possibilities, in an expected order is not directly, however, the relevant figure of merit deter- of experimental difficulty, could look as follows: mining the possibility to see a signal peak in the detected spectrum, but instead the peak should be compared to (1) Ground state cooling of the test mass oscillator. the “noise of noise” σF viz. standard deviation of fluc- (2) Ground state cooling of the source mass oscillator. tuations of the average power. When averaging spectra (3) Squeezing of the test mass oscillator. calculated from a digitized data stream, σF behaves as τ −1/2. Now, instead, we have a coherent signal that can (4) Squeezing of the source mass oscillator. beneficially be recorded in a single continuous stream. (5) Prepare the system of both oscillators in a two- In the latter case, σF is independent on τ, but the signal mode squeezed state. builds up coherently, PG ∝ τ leading to a much more favorable scaling. Incidentally, Eq. (23) can be inter- In items (1), (3), the test mass oscillator’s state is close to a pure quantum state. In the sense that the gravity preted to hold for σF by the replacement PF ⇒ σF , if one thinks that the signal stays constant. The relevant is from an equally small source mass, the situation is signal-to-noise ratio is then more quantum plus gravitational than atomic particles in Earth’s gravitational field [23–26]. In case (3), moreover, P |dF |2 the test mass state exhibits some nonclassical properties. SNR = G ' G τ . eff (24) In item (2), gravity is produced by a source mass whose σF Sf (ωG) fluctuations are localized at the vacuum level. In case For details, see Appendix V. of item (4), the gravity is produced by a source whose At this point we give list of experimental parameters position is in a nonclassical state. The case (5), as a used in the rest of the paper for evaluating the experi- genuinely entangled and nonseparable state [72], is the mental opportunities, see Table II. The force noise with most nonclassical, and exhibits nonlocality and gravity these parameters, and with a measurement time τ = 1 at the same time. Ideally the actuation of the source hour is plotted in Fig. 3 as a function of frequency around mass does not spoil the entanglement of the fluctuations. 8

Below, we will review some protocols discussed in the literature for preparation of these states, and discuss the experimental challenges. We begin with dissipative protocols that create stabilized states, but require a high quality factor of the cavity. We then review alterna- tive solutions that work optimally in the bad-cavity limit κ ω0. It will be found that cooling via measurement appears the most promising method to operate our oscillators in the quantum regime given most plausible experimental parameters.

1. Detection of gravitational signal in the quantum limit

Before discussing the protocols to prepare the states, we will consider detection of the gravitational signal. We assume an oscillator that has been sideband-cooled close ωG/ωm to the ground state, nm = 1. One should bear in mind that although dissipative cooling reduces the noise, the FIG. 4. Force sensitivity for a sideband-cooled oscillator. The responsivity to external forces is reduced similarly. In black curves are the effective mechanical noise at different other words, the product γnT in Eqs. (8a,8b) stays un- cooperativities (C = 0.01, 0.1, 1, from top to bottom). Addi- m tionally, the SQL is plotted with thick red line, and the dotted changed in e.g. sideband cooling, so that in the stationary lines depict the results from BAE monitoring at the same co- case, force sensitivity is not enhanced (see, however dis- operativities as the adjacent solid line. The horizontal lines cussion on non-stationary detection [73]). In practical are as in Fig. 3. The mechanical Q = 107 in all cases, and the work, however, such broadening of the very sharp peak added noise is 1 quantum. is highly beneficial, offering relaxed tolerances for driving frequencies, and stability to drift. Also, via Eq. (13c), the sensitivity to external vibration noise is reduced, too. We plot the force sensitivity for the cooled oscillator optomechanics, internal cavity losses have not reached in Fig. 4. Because mechanical noise is nearly absent, the below ∼ 20 kHz [58, 82] likely due to the bulky chip as- imprecision noise and also backaction noise start to play semblies that occupy a large fraction of the mode volume. a role. Indeed, by comparing to Fig. 3, it is seen that Sideband cooling and other dissipative protocols [see with standard (non-BAE) measurements, the signal-to- bad-cavity correction term in Eq. (2)] work reasonably noise ratio is reduced as compared to the thermal limit. well if ω0 ' κ. This “not-bad-cavity” situation can be A good amplifier with Sadd . 1 is needed to get within in reach experimentally. To begin with, we suppose κ = a factor of 2 from the remaining thermal noise limit, but ω0 = 2π · 2 kHz is possible, and evaluate predictions going further than that, one needs BAE measurement. for cooling and squeezing using our set of parameters. In Fig. 4 we also display the SQL as a red line. This is Verification of the mechanics’ status can be done using the best one can get without BAE monitoring when the the same techniques used earlier in the corresponding oscillator is cooled to the ground state. experiments, and hence we do not discuss the specifics of the detection. We remark here that in cases (1) - (4) listed below, 2. Reservoir engineering via cavity driving the source and test oscillators will be in their separate 3D cavities (see Section III B 1), and operations on ei- A common protocol to prepare mechanical oscillators ther oscillator are less likely to disturb one another in into motional quantum states is reservoir engineering, in- comparison to case (5) where the oscillators are coupled cluding sideband cooling, and single-mode [74] and two- to the same cavity mode. mode [75–79] squeezing. The reservoir is constructed (1) Sideband cooling the test mass oscillator to the from the optomechanical cavity, with the interaction ground state, nm . 1, is very achievable. From Eq. (2) carefully designed via a suitable pumping such that the we obtain nm ' 1.0 using Γopt/2π ' 50 Hz and a very oscillator sees a dissipative bath that pulls the oscillator small input microwave power < 1 pW. The source mass into an interesting stabilized state. needs to be optomechanically accessible only in a min- A challenge in the current case is that dissipative imal amount such that it can be characterized, and its protocols are ideally devised for the good-cavity limit vacuum gap can be large, say hS ∼ 10 µm, even larger if κ ω0, which is difficult to reach with 2 kHz oscilla- needed. tors. Empty superconducting 3D cavities [80], or those (2) Cooling the source mass oscillator to the ground with only a small chip occupation volume [81] can at- state requires the source oscillator to be well coupled to tain the needed range. However, with SiN microwave its cavity mode, i.e., the vacuum gap to the antennas 9

T should be as small as possible to have a decent g0. At the ter, the decoherence rate, is given by Γ = γnm, and the 2 same time, the vacuum gap hS should be large enough to measurement rate is Γmeas = 4ηG /κ = ηΓopt. Here, η is avoid crashing the actuated membrane into its antenna the detection efficiency. With microwaves, it is related to chip. As a compromise, we choose hS = 2 µm. An addi- the added noise Sadd. Ideal amplifier and no signal losses tional challenge is to induce a large enough dxS now that imply η = 1. Systems with Josephson travelling wave the source oscillator has a considerably increased damp- parametric amplifiers (JTWPA) have reached a system ing. Based on the discussion in Section III B 2 below, the η ∼ 50 % [91], which number we use below. To reach the latter is deemed possible. Ground-state cooling becomes quantum limit, particularly to cool to the ground state, possible at a modest Pin ∼ 50 pW. strong measurements are required: Γmeas > Γ. Dissipative quantum squeezing of a mechanical oscil- (1) Cooling the test mass oscillator to the ground state lator is carried out using double-sideband pumping of is possible with the parameters given in Table II. We the cavity [74, 83–85]. In order to (3) prepare the test obtain [92] that nm < 1 is reached for example with Pin = oscillator in a squeezed state, we use the results includ- 0.1 nW, κ/2π = 20 kHz, which provide Γmeas/2π ' 500 ing bad cavity corrections from Ref. [86]. Squeezing of Hz. At κ/2π = 200 kHz ground state cooling is also ∼ 1.5 dB is expected with our parameters, and at ef- possible, but requires Pin = 10 nW, which otherwise is fective coupling of the red-detuned tone of 2π · 400 Hz, not a problem but necessitates careful canceling of the and with optimized pump power ratio. (4) Preparing the pump before the JTWPA. source oscillator in a squeezed state is otherwise similar, (2) Cooling the source mass to the ground state, nm < but since g0 is smaller, a higher input power ∼ 10 pW is 1, is feasible as well, although a smaller g0 necessitates a needed. higher Pin = 10 nW, with κ/2π = 20 kHz. (5) We consider the creation of two-mode squeezing, or (3) - (5) Squeezing using feedback [93, 94] requires entanglement of the gravitating system the most chal- interaction that currently is not available. However, lenging technically. Dissipative protocols require at least squeezing can also in principle be created by combin- a not-bad-cavity cavity situation, but this will be de- ing feedback cooling and parametric modulation [95, 96]. manding in the present case where we have to couple both The latter can be implemented (see Section III B 2 below) oscillators to the same cavity mode, while keeping the os- by the same means as mechanical actuation. cillators physically separated (see Section III B 1). There- fore, dissipative protocols, which are well understood in standard electromechanical systems, require cavity de- 4. Pulsed techniques sign that currently we do not have available. Additional challenge is that the oscillators should ideally be spaced Preparation of conditional mechanical quantum states in frequency by at least ∼ 0.1 · κ such that they see a using a few very strong measurement pulses has been different bath, which conflicts with an efficient actuation proposed [97, 98] and realized in a classical situation that favours equal frequencies. [99, 100]. In a single run, the measurement projects the Nonetheless, we evaluate the prospects using our pa- state of the oscillator according to the selected protocol, rameters (Table II), using standard analysis [46, 78]. We and the performance is highly insensitive to the ther- find that entanglement characterized by the Duan quan- mal population. The measurement pulse should be much tity is possible for example at κ/2π = 2 kHz, and with the shorter than the mechanical period, which requires a fast mechanical frequencies differing by 15 %. A solution for cavity response, i.e., the bad-cavity limit κ ω0. The the issue with mismatched mechanical frequencies is to important parameter in these techniques is the pertain- start the process from a heavily damped situation (recall ing measurement strength given as χ ' 4G/κ. While the dissipative protocols’ performance is proportional to promising in principle, the requirement for strong mea- the decoherence rate Γ that is not affected by e.g. side- surements χ > 1 is prohibitive for reaching the quantum band cooling), which allows actuation even the frequen- regime in this technique. Notice that very low-frequency cies are different. mechanical oscillators, such as ours, are beneficial because the requirement of large κ is strongly relaxed, while the reachable effective coupling G is less sensitive to the 3. Ground-state cooling by measurement-based feedback oscillator frequency. Let us assume κ/2π = 20 kHz, and the input microwave power Pin = 1 nW. Damping the oscillator by applying feedback built (1) Ground-state cooling of the test mass oscillator: upon the measurement record, dubbed cold-damping, is The parameters yield G ∼ 2π × 10 kHz, and χ ∼ 2. a popular cooling strategy in optical cavity optomechan- (2) Ground-state cooling of the source mass oscillator: ics [17, 67, 68, 87–90]. To obtain fast measurements, one At the same parameters, we can reach χ ∼ 0.4. needs here κ ω0 that is a natural parameter regime in It seems nonetheless that obtaining χ > 1 maybe chal- the current case. A challenge with entering the quantum lenging to reach, at least for both oscillators, due to the regime with feedback is that the measurements have to power handling capability of microwave cavities. In par- track the mechanics at a rate given by the rate at which ticular exceeding the threshold for the case of the source a phonon is transferred with the environment. The lat- oscillator would require a very high pump photon number 10

10 7 nP ∼ 10 that is well above nP ∼ 10 usually used in planar microwave optomechanics. At the same time we remark that 3D cavities accept much more power, and also the pump is on only a fraction of time such that heating is strongly suppressed. However, a combination Source of a very low frequency and still a decent g0 allow for a χ an order of magnitude higher than what is realis- tically possible with drumhead oscillators, or with bare SiN membranes. A stroboscopic measurement involves repeating the fast measurements synchronized with the mechanical period. It was introduced as a means to carry out quantum Test backaction-evading measurements [101]. The scheme was discussed in detail recently in Ref. [102]. The authors obtain that the requirement for the measurement strength can be relaxed in this case. The condition for hitting the quantum regime then reads according to Ref. [102] FIG. 5. Exploded view drawing of the scheme in Fig. 1. In p the lower set of chips (Test), the antennae for coupling to the χ 2πnT /Q, which with our parameters becomes & m 3D cavity are colored in white. Metallized electrodes on the χ & 0.4. Based on this analysis, strong enough strobo- membrane beneath gold are not shown. scopic measurements seem in reach. They can be used for (1)-(2) ground-state cooling, (3)-(4) single-mode squeezing, as well as for (5) two-mode squeezing of two degenerate oscillators, with properly timed pulse sequences. be used. However, in contrast to the chip assembly being As a summary of this section, reservoir engineering for in the center of the cavity [57, 58], now it will be close to operation in the quantum regime is possible, but requires the wall facing the other cavity, and the wall needs to be experimental progress to reduce the cavity losses by an much thinner (clearly below 100 µm) than what typical order of magnitude from the state-of-the art. With cur- bulky cavities exhibit. rently or reasonably likely available parameters, cooling Coupling both oscillators to the same cavity mode, as by measurement seems the most promising method for needed for creation of two-mode squeezed states, is more creation of the quantum states in the very-low frequency involved. The cavity then consists of two blocks facing oscillators. one another, with a shield in the center partially covering the opening. The design is shown in Fig. 6. The challenge is to contain the cavity mode within the desired volume. III. ENGINEERING ASPECTS With the complicated chip assemblies near the openings, the fields exhibit leakage that limits the cavity losses. A. Chip assembly Thus far we were not able to find a geometry where this would become insignificant given reasonable design error margins, and typically radiation losses limit the linewidth Drawings of the proposed chip assemblies are shown in in the range & 100 kHz. Thus, reaching good-cavity limit Figs. 1 and 5. The test and source mass side chip assem- in this scheme is not readily available. blies are quite similar. The membrane chips are glued to their respective antenna chips. It would be tempt- ing to proceed by rigidly attaching the two assemblies 2. Source mass actuation together with the gold spheres facing one another. We could not find by FEM simulations, however, a realistic The source oscillator should include frequency tuning way to do this without causing excessive stray mechani- capability in order to roughly match the mechanical fre- cal coupling of the actuation into the test mass. Hence, quencies. This is required for reaching a straightforward it is better that each of the assemblies resides in their resonant actuation of the source mass, which also is felt individual cavity block, which are brought close enough resonantly at the test mass oscillator. The tuning can be by nanopositioning. accomplished in a standard manner by a constant voltage Vdc applied to the antenna electrode. On top of the dc voltage, there is a resonant ac voltage Vac. These two B. Electromagnetic design cause an electrostatic driving force amplitude dC 1. Cavity F = V V S , (25) S ac dc dx

The design of the 3D cavity is straightforward for the and the actuation amplitude becomes dxS = FS/(γω0). cases where individual cavities for the two oscillators can Here, CS is the capacitance between the antennae and 11

Wshield Wcav

FIG. 6. Open cavity. Two oscillators are coupled to the same cavity mode for creation and detection of collective mechanical states. The grounded shield (yellow) partially isolates FIG. 7. Stray electrical coupling in open cavity. The plot the two blocks. Only the antenna chips are shown for clarity. shows the stray coupling due to electrostatic actuation, as a The cavity volumes continue ∼ 1 cm up and down outside the function of a shield coverage fraction. The data is obtained graphics. The gap between the blocks is less than a millime- from the electric potentials at the source mass vs. that of the ter, while the chips can extend closer to one another. test mass.

this gives the actuating force. We show in Fig. 7 the ratio the membrane electrode. If the source oscillator is not of the resulting motion of the two spheres plus their elec- optomechanically damped, we obtain that for example trode. We see that our design with ∼ 75 % of the cavity modest values Vac = 1 mV, Vdc = 0.1 V provide dxS ∼ 1 covered by the shield will be sufficient to attenuate the µm. However, the situation changes if the source oscilla- driving field by the required amount. We also find that tor is sideband cooled close to the ground state, and for at the room temperature conductivity of aluminium the the same amplitude, we need e.g. Vac ∼ 2 V, Vdc ∼ 10 penetration of electric fields through the shielding is sig- V. The latter are high values as compared to the nor- nificantly secondary to diffraction around the shielding. mal range in superconducting nanoelectronics, but we Superconductors are expected to provide even larger still consider them manageable. Another possibility is to shielding from electric fields. 1 µm thick superconduct- use a piezo shaker for actuation, instead of electrostatic ing shielding will attenuate high impedance near field actuation. radiation by over 400 dB (more than 100 dB better than It is critical to make sure that a false positive grav- room temperature copper at the same thickness) [103]. itational signal is not triggered by stray coupling of This would suggest that, as expected, our shielding will the source mass actuation into the test mass oscillator. not perform worse if the shield is superconducting. We The stray coupling of mechanical actuation has to be thus conclude that stray electrical coupling can be miti- much smaller than the corresponding gravitational sig- gated. nal, Eq. (22). The ratio dxT /dxS is typically about −140 dB with our parameters. One channel of stray coupling is via the electrical driving. In the suggested exper- C. Vibration isolation iments, besides the preparation of two-mode squeezed states, the two oscillators are naturally living in their Our situation with the design of vibration isolation has own very nearby 3D cavities, which provide an extreme some resemblance to that for gravitational wave detec- isolation against stray coupling of low-frequency electric tors that is well established. For LIGO, the designs are fields. Below we will present a design that describes by very bulky and thus not directly applicable to our case far the most demanding situation, that of using a single that works at 2 kHz and needs to have a decently small cavity mode for both oscillators, as needed for two-mode footprint to fit into a dilution refrigerator. However, the squeezing. resonant detector MiniGrail is an example of the latter, The schematics of the open cavity, Fig. 6, also shows where above 300 dB of attenuation is claimed [104]. the grounded metallic shield positioned in the middle of Isolation of our mass-loaded oscillators from vibration the cavity, between the two spheres. The shield covers disturbances is critical for two reasons. There are several a fraction s = Wshield/Wcav of the opening. Here, the vibration noise sources in cryogenic systems that emit cavity width Wcav ∼ 1 cm. Notice the antennae have vibrations in the kHz frequency range, and can drive the T to see the unshielded cavity volume in their ends in or- modes into high effective temperatures (nm higher than der to couple to the collective cavity mode. From the expected based on the refrigerator temperature). Second, FEM simulation, we extract the ac electric potential of a mechanically coupled stay actuation from the source the electrode beneath the gold spheres. As per Eq. (25), mass into the test mass must be mitigated. 12

Luckily, the frequency range of a few kHz is favorable for the design of the isolation. The lowest pendulum modes of typical filters that involve kg range masses are clearly below our range. The wavelength is large enough (a) such that the masses or springs act as rather ideal lumped elements, and a direct brute-force FEM simulation can be used to predict the filtering of a realistic assembly. The mxc latter is a considerable benefit since analytical modeling that can rely on heavy approximations may not properly capture the real situation. Let us discuss the vibration noise levels in a typical pulse-tube powered dry dilution refrigerator. Vibration T S noise in commercial dilution refrigerators have been re- ported up to 1 kHz frequencies√ in Ref. [105]. They ob- p E −13 tained Sx (1 kHz) . 10 m/ Hz. From the analysis in Section II D (see also Figs.√ 3 and 4), we judge a scale p E −19 Sx (2 kHz) < 10 m/ Hz. These numbers indicate (b) that a very substantial attenuation of 120 dB between the refrigerator and the sample is required. One could expect that optimizations of the refrigerator configura- tion will lead to lower initial noise levels. Encouragingly, in Ref. [106], 3 kHz oscillator was successfully thermal- ized down to ∼ 30 mK when filtering was installed in a dry dilution refrigerator. Similar to the case of electrical stray coupling (Section III B 2), the stray coupling of mechanical actuation has to be much smaller than the gravitational signal. The requirement is around −140 dB with our parameters. An estimate is then that there should be at least this much FIG. 8. Design of the suspension and vibration isolation. (a) attenuation between the anchoring points of the two chip Cavities containing the oscillators are each attached to the assemblies. We use as a criterion the attenuation between bottom of their own mechanical filtering systems. The filters anchoring points of the 3D cavities, which is a worst-case hang from the mixing chamber plate (mxc) of the dilution cryostat. One of the filters has cryogenic nanopositioning sys- estimate since in reality there will be attenuation between tem (not shown). The helices model flexible thermal contacts the chip and the cavity anchoring. Our isolation require- and/or cables. The scale is in millimeters. (b) Finite-element ment thus becomes: 120 dB between either oscillator and simulation of the transfer function of displacement excitation the refrigerator, and 140 dB between the oscillators (in between the mxc plate and the test mass block (solid lines), the classical experiment the source oscillator does not and between the test mass and source mass blocks (dashed necessarily need isolation). lines). Our design is shown in Fig. 8 (a). The vertical bars at top are regular support tubes of the cryostat, made of stainless steel, which is also the material we assume for the ring springs. Otherwise, the material is copper. For the FEM simulation, we supposed a rigid anchoring from the top surfaces of the support tubes. The wide plate is ∼ 1 kg is selected such that the pendulum modes are the mixing chamber plate. Below this there are hanging below ∼ 100 Hz. The mixing chamber plate needs to be two suspension assemblies, one for either oscillator. The rather massive, since otherwise its lowest flexural modes assemblies consist of two springs and two masses. Coil are close to the band of interest. springs are questionable due to the complicated mode structure they posses in our frequency range. Instead, we Figure 8 (b) displays, first of all, the predicted attenua- adapt ring springs [104, 107] that also keep the assem- tion between the lowermost masses of the two legs, shown bly more rigid and easy to control in a confined space, in a dashed line. The peaks at ∼ 500 Hz and ∼ 1.2 kHz without compromising the filtering capability. The de- are flexural modes of the plate, and the raise above 3 kHz vices are attached to the lowermost masses, and can be is due to modes in the thermalizations. The attenuation moved by nanopositioning system e.g. between the mix- between the masses around 2 kHz becomes ∼ 220 dB, ing chamber and the first springs. We employed a modest and between the refrigerator and a single mass ∼ 120 underdamping of the lowest modes, which can be realized dB. As a result, we can conclude that a rather simple by magnets. Asymmetry in the structure was included in filtering setup essentially satisfies the requirements, and order to model a realistic case. The weight of the masses leaves possibilities for development. 13

D. Phase noise of the microwave source E. Other forces

There are several forces between nearby objects that Microwave optomechanics needs ultrapure sinewave can mask the gravity. The most famous is the Casimir sources. High-frequency phase noise at frequencies off- force, which can be very strong at small separations. Its set from the pump by the mechanical frequency has to zero-temperature expression for a sphere of radius R and be suppressed below the vacuum level at the sample, oth- a plate at a distance d, in the limit R d, reads [108] erwise this noise will appear as an extra heating source. The suppression is normally done by room-temperature π3 cR − ~ tunable cavity filters typically in the amount of tens of FC = 3 . (27) dB. 360d In our current case, the challenge with filtering seems In our experiment, the Casimir force between the source at first sight drastically increased as compared to e.g. ex- mass and the shielding varies in time. This will cause the periments with 10 MHz mechanical devices. First of all, shielding to oscillate, and in turn the Casimir force on the the phase noise grows unavoidably towards lower fre- test mass will also vary. If the distance in Eq. (27) varies quency offsets from the pump. Second, our samples have sinusoidally with amplitude dxS around a mean value d, then the time dependent component will reduce to much smaller g0, which seems to pose a demand for high pump powers and hence more filtering since the phase π3~cR noise floor is a certain amount below the pump power. |dFC | = dxS . (28) Third, one needs filters with a very narrow bandwidth, 120d4 down to only a few kHz, which is not feasible with room- The amplitude of the oscillating force between the shield- temperature tunable cavities. ing and the test mass is strictly less than that between Let us estimate the needed filtering. The input power the source mass and the shielding, only becoming equal Pin and cavity photon number are related as in the limit of the Casimir force dominating the modulus of the shielding. This allows us to calculate an absolute upper bound on the Casimir driving using Eq. (28). If Pinκe 1 the source mass is at a mean distance of d = 100 µm from nP = 2 , (26) ~ωc 2 κ the shielding and is sinusoidally driven with an amplitude ∆ + 2 dxS = 1 µm then the amplitude of the Casimir driving will be less than 20 zN. This is three orders of magnitude where ∆ is the detuning of the pump frequency from the smaller than the gravitational force for a symmetrical cavity. In the case of dissipative protocols, |∆| ≈ ω0, and setup with the same dimensions. in measurement based protocols ∆ ≈ 0. Good commer- Other forces are discussed e.g. in Ref. [35]. These in- cial microwave generators have phase noise specifications clude those due to free charges, or electrostatic patch at 2 kHz of ∼ −110 dBc/Hz, which means that the noise potentials. We find that on the order 100 charges on the floor is by this amount below the pump level. Now we spheres at d = 100 µm separation gives a force equal to should compare the pump power at the sample plane, at a the gravity. Characterizing the amount of charges, and given effective coupling, with the noise floor. We assume getting rid of them in a cryogenic experiment will be dif- the bad-cavity limit, κ = 10 ω0. Using the parameters ficult. of the test mass oscillator in Table II, we obtain that in In spite of the other forces, some of which are very dif- order to have a large measurement strength ∼ 1 kHz, the ficult to independently calibrate out, we foresee that they input power is Pin ∼ 0.1 nW. The noise floor is then ∼ 20 do not pose a major challenge. First, we assume there is dB above the vacuum level, which requires suppression a grounded conductive shield between the spheres. Simi- by a rather modest amount ∼ 25 dB. The requirement is lar to the case of low-frequency electric fields (see Section substantially relaxed if one manages to obtain a not-bad III B 2), we argue that even a partial shield is very effec- cavity situation for the dissipative protocols, and barely tive at canceling these forces that occur between adjacent any filtering will be needed. surfaces. Second, gravity has a unique signature that it depends on the COM distance, whereas the other forces We hence obtain that the phase noise suppression re- depend on the surface separation. Tuning the distance quirement is barely affected in comparison to state-of- between the spheres can thus facilitate spotting the grav- the-art microwave optomechanics. This is associated to ity. the fact that in the bad cavity limit, Eq. (26) goes as We remark that at deep cryogenic temperatures, ∝ (κ)−1, and κ can be set according to ω by the exter- 0 damping by collisions with gas molecules is not an issue. nal coupling. We are not aware of pressure estimates inside dilution The still remaining issue is the need for narrow-band refrigerator, but one can expect that essentially all the notch filters. They can be implemented using a tunable particles will stick upon collision owing to a vanishing va- superconducting cryogenic cavity, which can operate at por pressure. If the experimental volume is shielded from 4 Kelvin environment. outside, the pressure is zero for all practical purposes. 14

(a) (b) (c) (d)

500 μm 500 μm 1 mm

FIG. 9. Preparing the sample. (a) The membrane chip with 1.7 mm wide, 50 nm thick SiN window has been flipped on top of an antenna chip, and firmly glued into it. Epoxy glue drop about 150 microns in diameter is micropositioned in the center of the membrane on top of an Al electrode. (b) 0.5 mm diameter gold sphere is micropositioned on top of the glue. (c) Photograph of entire chip. Reflections of the gold sphere appear at the oblique mirror-like sidewalls. (d) The assembled device attached to the lower half of the rectangular 3D microwave cavity.

IV. EXPERIMENT WITH MASS-LOADED spectrum over a large frequency range. The strongest MEMBRANE peak at ω0/2π ' 1.69 kHz is identified as the desired flexural mode. The peaks below 100 Hz are likely mo- We carried out a test of a fundamental part of the tion of the entire chip assembly. The two smaller peaks proposal, namely a single membrane oscillator loaded by at 580 Hz and 690 Hz are interpreted as the two wob- a 0.5 mm diameter gold sphere. The goals were to verify bling modes, which naturally have much lower optome- the predicted mode structure, and to show the possibility chanical coupling. The mode profiles are also displayed in for high mechanical Q values as predicted by simulations. Fig. 10(a). The measured ω0 agrees well with the result The membrane window chip we discus below was pur- from Eq. (5) and the FEM simulation with the known chases from Norcada. It was (1 mm x 10 mm x 10 mm) parameters and the glue radius rglue = 100 µm. The sized Si chip coated by 50 nm of SiN with roughly 900 wobbling modes in a fully symmetric case are degener- MPa tensile prestress. The SiN window was a 1.7 mm ate, but this is lifted by asymmetries in e.g. the position- wide rectangle made using KOH etch. Aluminum met- ing of the glue and the sphere. However, by distorting allization was applied in the center of the membrane as the symmetry in simulations by a reasonable amount, we a 200 µm circle. The antenna chips, of standard FZ sili- were not able to reproduce such a high nondegeneracy. con, were Al-metallized as well. The membrane chip was The reason could be distortion of the chip due to thermal flipped on top of the antenna chip. The natural gap be- contraction during cooldown, which currently is beyond tween the chips without any spacers in between becomes scope of the simulations. typically less than a micron, set by dust or irregulari- The mechanical peak of the main mode is displayed in ties, although in this assembly we believe the gap was Fig. 10(b), where we plot the total spectrum Sout(ω) = on the order a few microns. After flipping, the mem- Sx,out(ω) + Sy,out(ω). The Q value extracted from the fit brane chip was glued with epoxy from one corner, and is Q ' 6.4 × 105. The Q can be even higher, since the after the epoxy had cured, firmly glued around all edges. frequency resolution was limited by the time ∼ 5 min The latter was because we expect there can be modes we were able to run the fridge without the pulse tube involving the entire chip in the kHz range, if the chip is running. Supposing the Q is limited by losses in the not fully anchored. The 4N gold spheres were purchased adhesive, its loss factor in the idealized geometry becomes −2 from Goodfellow. The fabrication steps are shown in ηglue ∼ 2 × 10 (see Table I). Using e.g. PMMA [63] Fig. 9 for a device similar to the one measured. A sphere (η ∼ 10−3) as the glue, one could further improve the Q was positioned on the membrane as shown in Fig. 9 (a-c). value. We also expect the details of the glue attachment The chip assembly was fixed using PMMA resist into a point can be optimized. standard 3D copper cavity [Fig. 9 (d)]. The cavity frequency with the chip inside was 5.27 The measurements were carried out in a dry pulse- GHz, and internal linewidth 9 MHz. The latter is clearly tube dilution refrigerator at around 10 mK temperature. higher than ≈ 0.3 MHz we usually observe with our stan- The sample stage had a copper braid suspension, but dard bare 0.5 mm wide membrane chips in similar (non- there was no other vibration damping in the setup. We superconducting) cavities. We do not attribute the high found that normal operation of the refrigerator when the cavity losses to the gold spheres or the assembly in gen- pulse tube is running caused the mechanical modes to be eral, nonetheless. With a similar bare 1.7 mm window strongly excited. Thus the data were recorded when the chip, the cavity losses are also significantly enhanced. pulse tube was switched off momentarily. Moreover, a standard 0.5 mm window chip loaded by the In Fig. 10(a) we display the measured mechanical noise gold sphere, measured in an aluminum cavity, resulted 15

(b)

(a)

FIG. 10. Mechanical noise spectrum at 10 mK. (a) Large frequency range with respect to the pump frequency. Three peaks interpreted as drum modes are visible. The corresponding mode profiles predicted by finite-element simulation are displayed. 5 (b) Zoom into the lowest drum mode with f0 ' 1.69 kHz, and Q ' 6.4 × 10 . The red line is a Lorentzian fit.

in 0.3 MHz internal linewidth. Based on the measured acknowledge funding from the European Union’s Horizon cavity properties, one can see, however, that reaching 2020 research and innovation program under grant agree- the not-bad-cavity case with a few kHz oscillators is not ment No. 732894 (FETPRO HOT). We acknowledge the straightforward. facilities and technical support of Otaniemi research in- frastructure for Micro and Nanotechnologies (OtaNano).

V. CONCLUSIONS Appendix A: Signal-to-noise in the detection of a In conclusion, we have presented a detailed experi- coherent signal mental proposal for; (1) Observing gravity between milligram range masses using microwave optomechanics at We discuss here an important issue that is often over- deep cryogenic temperatures; (2) Pushing the experiment looked. The question is simple: How long does one have down to the quantum limit where the positions of source to average a coherent signal in order to see it? The deriva- mass or test mass, or both, exhibit significant quantum tion below is not fully rigorous, but we hope it will clar- fluctuations. Although the massive quantum state will ify the issue. In order to properly analyze the situation, be created microwave-optomechanically and not through one has to know how the measurements are performed gravity, the measurement will open a new regime of ex- and processed inside an instrument (such as spectrum perimental study on the overlap of quantum mechanics analyzer). Since this information is not easy to find or and gravity. One can even foresee that when these two digest, we select a conceptually simple but even the most disparate entities are forced closer to another than ever important measurement system: data digitizer. It can before, one can experimentally achieve a limit where fun- be assumed to make instantaneous snapshots of the data damentally new physics may be revealed, possibly revis- stream. ing our understanding of quantum mechanics and gravity. We discuss the quantity x(t), such as the amplified Additionally, observing highly massive mechanical oscil- voltage from the sample. It is characterized by the cor- lators in the quantum regime is, in itself, an important relation function R(t) and the spectral density S(ω): step in this direction. 1 Z T0/2 R(t) = hx(t0)x(t0 − t)it0 = dt0x(t0)x(t0 − t) T0 −T0/2 ACKNOWLEDGMENTS Z S(ω) = F[R(t)] = dωR(t) exp(−iωt) . We would like to thank Matt Woolley and Laure (A1) Mercier de Lépinay for useful discussions. This work was supported by the Academy of Finland (contracts 308290, We suppose the measurement of x(t) is a continuous 307757), by the European Research Council (contract sampling that lasts over the time τ. Let us sample the 615755), by the Centre for Quantum Engineering at quantity x(t) at time intervals T . Then there are a total Aalto University, by The Finnish Foundation for Tech- of N = τ/T data readings. The sampling provides the nology Promotion, and by the Wihuri Foundation. We readings xn = x(nT ), where n goes from 0 to N − 1. 16

In order to satisfy the Nyquist sampling criterion, be- 1. White noise fore sampling the data has to be restricted into the spectral bandwidth We now treat the case that the incoming signal is un- correlated white noise: R(t) = S δ(t), and S(ω) = S . |ω /2π| = |f | < (2T )−1 (A2) 0 0 B B The filtered correlation function in Eq. (A4) becomes by analog low-pass filtering. The frequency response of RB(t) = S0u(t), with the discrete version [Eq. (A5)] an ideal low-pass filter equals the box function; U(ω) = 1 ωB ωB Rnm = S0 sinc[ωBT (n − m)] = S0 sinc[π(n − m)] . when −ωB < ω < ωB, and U(ω) = 0 elsewhere. In time 2π 2π domain, the filtering function is (A11) 1 Z u(t) = F −1[U(ω)] = dωU(ω) exp(iωt) For the latter form, we used Eq. (A2). Equation (A11) is 2π (A3) used in Eq. (A8) to evaluate the average spectrum. The ωB sinc(y) function can be approximated to be zero at argu- = sinc(ωBt) . 2π ment values y & 1. Therefore, only n = m gives a con- After filtering, the spectral density and the correlation tribution to Rnm. The complex exponential in Eq. (A8) function are in principle makes the terms oscillate as a function of n and m. However, the condition n = m also guarantees SB(ω) = U(ω)S(ω) , the exponential factor equals one. The average value of −1 (A4) RB(t) = F [SB(ω)] . the sampled white noise then becomes

Below we will use the following discrete correlator of hSki = S0fB , (A12) the sampled data: which is the anticipated result of noise power within the Rnm ≡ hx(nT )x(mT )i bandwidth defined by the analog low-pass filter. Notice Z Z the result does not depend on the sampling rate nor the 0 0 − 00 00 − h 0 00 i = dt δ(t nT ) dt δ(t mT ) x(t )x(t ) (A5) averaging time. h i = R (T (n − m)) The fourth moment xnxmxpxq of the signal in B Eq. (A10) can be written, using Wick’s theorem, in terms For the last form in Eq. (A5), we used time translation of second moments: invariance. Aiming at obtaining the spectral density, the process- hxnxmxpxqi = RnmRpq + RnpRmq + RnqRmp , (A13) ing starts by evaluating the discrete Fourier-transform: where Rij are those given in Eq. (A11). Again, in or- N−1 der to obtain non-zero contributions, we require i = j X Xk = xn exp(−2iπnk/N) . (A6) in all Rij in Eq. (A13). The two first terms on the rhs n=0 are treated similar to the discussion following Eq. (A11). Here, the index k refers to the frequency values. An For the last term RnqRmp, the requirement reads as usual estimate of the power spectral density S(ω) is then given n = q, m = p, however the exponent in Eq. (A10) cannot by equal to zero simultaneous to this requirement. There- fore, this term gives oscillatory values whose contribution 1 1 X S = |X |2 = x x exp[2iπ(m − n)k/N] . will vanish. Equation (A10) becomes k N k N n m n,m hS2i = 2S2f 2 , (A14) (A7) k 0 B and the standard deviation is Equation (A7) is known as the periodogram. The interesting figures now are the average and variance of the std[Sk] = S0fB . (A15) periodogram. The average is Equation (A15) is the main quantity of interest. It de- 1 X hS i = R exp[2iπ(m − n)k/N] . scribes the “noise of noise”, fluctuations of the spectrum k N nm (A8) n,m around the mean value around Eq. (A8). If a signal peak in the spectrum is larger than std[S ], the signal becomes For evaluating the variance k visible (in practice, the signal peak should be a small nu- 2 2 merical factor larger than std[Sk]). Var[Sk] = hSki − hSki (A9) Notice that std[Sk] does not depend on the integration we need the second moment of the periodogram: time. This seems at first sight to be in stark contrast to intuition telling that uncertainty does decrease with 1 X hS2i = hx x x x i exp[2iπ(m − n + p − q)k/N] longer integration time. In order to resolve this contro- k N 2 n m p q n,m,p,q versy, we have to make more detailed considerations of (A10) the measurement. 17

2. Coherent signal hold, and as a result, the noise grows due to aliasing, and SNR is not improved. The optimum is reached at The main model of detection of an external force is via the threshold fB = 1/(2T ), and Eq. (A18) becomes coherent actuation of the oscillator. This is also the case in the current work. We will now calculate the average hS i = P τf , (A19) spectrum, Eq. (A8), for a sinusoidal signal kG G B

2 F (t) = dF sin(ωGt) . (A16) dF where PG = 2 is the signal power. Notice that in the classical situation, its variance is zero After a surprisingly tedious calculation, we obtain the because the signal is deterministic. The continuous and final result the discrete correlation functions are hSk i PG dF 2 SNR = G = τ , (A20) R(t) = cos(ωGt) , std[Sk] S0 2 (A17) dF 2 R = cos [ω T (n − m)] . nm 2 G which is essentially Eq. (24). Equation (24) is often wrongly justified by comparing the mean noise level, Since the spectrum is empty anywhere else other than at Eq. (A12), to the signal. ωG, the only requirement for the sampling rate is fG < The integration time needed to make the signal visi- 1/(2T ). Moreover, the signal should pass the low-pass ble, SNR > 1, based on Eq. (24) scales rather favorably filter, that is, fG < fB. Given the Nyquist criterion is with the noise level. In order to reach this, the detection satisfied, the overall criterion is fG < 1/(2T ). must occur as a single time-domain run (or built based From Eq. (A8) we see that non-oscillatory terms will be on trigger events). In this case, the signal adds up coher- obtained only if k = ωGτ/2π ≡ kG, i.e., at the frequency ently. If one averages individual periodograms instead of the sinewave. At this frequency we have of averaging one long periodogram, the scaling will be 2 τ ∝ (PG/S0) . dF 2 X hS i = [1 + cos(2ω T (n − m)))+ We will still briefly comment on the detection of a sig- kG 4N G n,m (A18) nal peak of a finite width. This occurs when the signal dF 2 dF 2 τ is of a natural origin instead of a coherent driving sig- i sin(2ω T (n − m))] =⇒ N = . G 4 4 T nal. In cavity optomechanics, this measurement is by far more important than that using a coherent drive. Based on Eq. (A18), the power of the coherent spectral Now, there is no benefit of averaging in time domain in- peak grows, first of all, with the integration time τ. This stead of averaging periodograms. The average noise level can be interpreted so that a long measurement implies Eq. (A8) reflects the original spectral lineshape, and the higher frequency resolution, which allows for a more ac- noise of noise, Eq. (A14), does not depend on the inte- curate construction of the delta function peak. Since the gration time. Where does it then appear that a longer noise of noise std[Sk] stays constant, the signal-to-noise measurement should improve the SNR? A longer mea- ratio will improve over a longer measurement as it should. surement implies more information because it increases We also see that the peak grows without limit when the frequency resolution ∝ τ −1, that is, there are more the sampling rate T −1 is increased. This again seems to independent data points available. Adjacent frequency contradict intuition and give unlimited SNR by just sam- bins can then be processed by a moving average filter pling faster, since std[Sk] does not depend on T . How- with a bandwidth less than the peak width. Such aver- ever, by sampling too fast the Nyquist criterion fails to aging of data points will then reduce the noise of noise.

[1] Erwin Schrödinger, “Die gegenwärtigeSituation in der ent control of macroscopic quantum states in a single- Quantenmechanik,” Die Naturwissenschaften 23, 807 Cooper-pair box,” Nature 398, 786 (1999). (1935). [5] A D O’Connell, M Hofheinz, M Ansmann, Radoslaw C [2] Markus Arndt, Olaf Nairz, Julian Vos-Andreae, Claudia Bialczak, M Lenander, Erik Lucero, M Neeley, D Sank, Keller, Gerbrand van der Zouw, and Anton Zeilinger, H Wang, M Weides, J Wenner, John M Martinis, and “Wave–particle duality of C60 molecules,” Nature 401, A N Cleland, “Quantum ground state and single-phonon 680–682 (1999). control of a mechanical resonator,” Nature 464, 697–703 [3] Brian Julsgaard, Alexander Kozhekin, and Eugene S. (2010). Polzik, “Experimental long-lived entanglement of two [6] B. P. Abbott et al. (LIGO Scientific Collaboration macroscopic objects,” Nature 413, 400–403 (2001). and Virgo Collaboration), “Observation of gravitational [4] Y. Nakamura, Y. A. Pashkin, and J. S. Tsai, “Coher- waves from a binary black hole merger,” Phys. Rev. 18

Lett. 116, 061102 (2016). suring nanomechanical motion with a microwave cavity [7] Igor Pikovski, Michael R. Vanner, Markus Aspelmeyer, interferometer,” Nature Physics 4, 555–560 (2008). M. S. Kim, and Caslav Brukner, “Probing Planck-scale [23] R. Colella, A. W. Overhauser, and S. A. Werner, “Ob- physics with quantum optics,” Nature Physics 8, 393– servation of gravitationally induced quantum interfer- 397 (2012). ence,” Phys. Rev. Lett. 34, 1472–1474 (1975). [8] Francesco Marin, Francesco Marino, Michele Bonaldi, [24] Valery V. Nesvizhevsky, Hans G. Börner,Alexander K. Massimo Cerdonio, Livia Conti, Paolo Falferi, Renato Petukhov, Hartmut Abele, Stefan Baeßler, Frank J. Mezzena, Antonello Ortolan, Giovanni A. Prodi, Luca Rueß, Thilo Stöferle,Alexander Westphal, Alexei M. Taffarello, Gabriele Vedovato, Andrea Vinante, and Gagarski, Guennady A. Petrov, and Alexander V. Jean-Pierre Zendri, “Gravitational bar detectors set Strelkov, “Quantum states of neutrons in the Earth’s limits to Planck-scale physics on macroscopic variables,” gravitational field,” Nature 415, 297–299 (2002). Nature Physics 9, 71–73 (2013). [25] Achim Peters, Keng Yeow Chung, and Steven Chu, [9] Alessio Belenchia, Dionigi M. T. Benincasa, Stefano “Measurement of gravitational acceleration by dropping Liberati, Francesco Marin, Francesco Marino, and An- atoms,” Nature 400, 849–852 (1999). tonello Ortolan, “Testing quantum gravity induced non- [26] G. Rosi, F. Sorrentino, L. Cacciapuoti, M. Prevedelli, locality via optomechanical quantum oscillators,” Phys. and G. M. Tino, “Precision measurement of the Newto- Rev. Lett. 116, 161303 (2016). nian gravitational constant using cold atoms,” Nature [10] Marios Christodoulou and Carlo Rovelli, “On the possi- 510, 518–521 (2014). bility of laboratory evidence for quantum superposition [27] Rogers C. Ritter, Charles E. Goldblum, Wei-Tou Ni, of geometries,” Physics Letters B 792, 64–68 (2019). George T. Gillies, and Clive C. Speake, “Experimen- [11] Abdulrahim Al Balushi, Wan Cong, and Robert B. tal test of equivalence principle with polarized masses,” Mann, “Optomechanical quantum Cavendish experi- Phys. Rev. D 42, 977–991 (1990). ment,” Phys. Rev. A 98, 043811 (2018). [28] Wen-Hai Tan, Shan-Qing Yang, Cheng-Gang Shao, Jia [12] Haixing Miao, Denis Martynov, Huan Yang, and Ani- Li, An-Bin Du, Bi-Fu Zhan, Qing-Lan Wang, Peng- mesh Datta, “Quantum correlations of light mediated Shun Luo, Liang-Cheng Tu, and Jun Luo, “New test by gravity,” Phys. Rev. A 101, 063804 (2020). of the gravitational inverse-square law at the submil- [13] Markus Aspelmeyer, Tobias J. Kippenberg, and Florian limeter range with dual modulation and compensation,” Marquardt, “Cavity optomechanics,” Rev. Mod. Phys. Phys. Rev. Lett. 116, 131101 (2016). 86, 1391–1452 (2014). [29] Wen-Hai Tan, An-Bin Du, Wen-Can Dong, Shan-Qing [14] Roger Penrose, “On gravity’s role in quantum state re- Yang, Cheng-Gang Shao, Sheng-Guo Guan, Qing-Lan duction,” General Relativity and Gravitation 28, 581– Wang, Bi-Fu Zhan, Peng-Shun Luo, Liang-Cheng Tu, 600 (1996). and Jun Luo, “Improvement for testing the gravitational [15] Brahim Lamine, Rémy Hervé, Astrid Lambrecht, inverse-square law at the submillimeter range,” Phys. and Serge Reynaud, “Ultimate decoherence border Rev. Lett. 124, 051301 (2020). for matter-wave interferometry,” Phys. Rev. Lett. 96, [30] J. G. Lee, E. G. Adelberger, T. S. Cook, S. M. Fleischer, 050405 (2006). and B. R. Heckel, “New test of the gravitational 1/r2 [16] O Arcizet, P F Cohadon, T Briant, M Pinard, and law at separations down to 52 µm,” Phys. Rev. Lett. A Heidmann, “Radiation-pressure cooling and optome- 124, 101101 (2020). chanical instability of a micromirror,” Nature 444, 71– [31] J. Chiaverini, S. J. Smullin, A. A. Geraci, D. M. Weld, 74 (2006). and A. Kapitulnik, “New Experimental Constraints on [17] B Abbott et al., “Observation of a kilogram-scale oscil- Non-Newtonian Forces below 100 µm,” Phys. Rev. Lett. lator near its quantum ground state,” New Journal of 90, 151101 (2003). Physics 11, 073032 (2009). [32] R. S. Decca, D. López, H. B. Chan, E. Fischbach, D. E. [18] J T Santos, J Li, J Ilves, C F Ockeloen-Korppi, Krause, and C. R. Jamell, “Constraining new forces in and M. Sillanpää,“Optomechanical measurement of a the Casimir regime using the isoelectronic technique,” millimeter-sized mechanical oscillator approaching the Phys. Rev. Lett. 94, 240401 (2005). quantum ground state,” New Journal of Physics 19, [33] Cheng-Gang Shao, Yu-Jie Tan, Wen-Hai Tan, Shan- 103014 (2017). Qing Yang, Jun Luo, and Michael Edmund Tobar, [19] Nobuyuki Matsumoto, Seth B. Cataño Lopez, “Search for Lorentz invariance violation through tests Masakazu Sugawara, Seiya Suzuki, Naofumi Abe, of the gravitational inverse square law at short ranges,” Kentaro Komori, Yuta Michimura, Yoichi Aso, and Phys. Rev. D 91, 102007 (2015). Keiichi Edamatsu, “Demonstration of displacement [34] J. C. Long and V. Alan Kostelecký,“Search for Lorentz sensing of a mg-scale pendulum for mm- and mg-scale violation in short-range gravity,” Phys. Rev. D 91, gravity measurements,” Phys. Rev. Lett. 122, 071101 092003 (2015). (2019). [35] Jonas Schmöle, Mathias Dragosits, Hans Hepach, [20] Seth B. Cataño Lopez, Jordy G. Santiago-Condori, and Markus Aspelmeyer, “A micromechanical proof- Keiichi Edamatsu, and Nobuyuki Matsumoto, “High- of-principle experiment for measuring the gravitational Q Milligram-Scale Monolithic Pendulum for Quantum- force of milligram masses,” Classical and Quantum Limited Gravity Measurements,” Phys. Rev. Lett. 124, Gravity 33, 125031 (2016). 221102 (2020). [36] Tobias Westphal, Hans Hepach, Jeremias Pfaff, [21] Haocun Yu et al., “Quantum correlations between light and Markus Aspelmeyer, “Measurement of Gravi- and the kilogram-mass mirrors of LIGO,” Nature 583, tational Coupling between Millimeter-Sized Masses,” 43–47 (2020). arXiv:2009.09546 (2020). [22] C A Regal, J D Teufel, and K. W. Lehnert, “Mea- [37] J. D. Teufel, T. Donner, Dale Li, J. W. Harlow, M. S. 19

Allman, K. Cicak, A. J. Sirois, J. D. Whittaker, K. W. M. Davan¸co,K. Srinivasan, and O. Painter, “Quantum Lehnert, and R. W. Simmonds, “Sideband cooling of electromechanics on silicon nitride nanomembranes,” micromechanical motion to the quantum ground state,” Nature Communications 7, 12396 (2016). Nature 475, 359–363 (2011). [52] S. Barzanjeh, M. Wulf, M. Peruzzo, M. Kalaee, P. B. [38] Jasper Chan, T. P. Mayer Alegre, Amir H. Safavi- Dieterle, O. Painter, and J. M. Fink, “Mechanical on- Naeini, Jeff T. Hill, Alex Krause, Simon Gröblacher, chip microwave circulator,” Nature Communications 8, Markus Aspelmeyer, and Oskar Painter, “Laser cooling 953 (2017). of a nanomechanical oscillator into its quantum ground [53] X. Zhou, D. Cattiaux, R. R. Gazizulin, A. Luck, state,” Nature 478, 89–92 (2011). O. Maillet, T. Crozes, J.-F. Motte, O. Bourgeois, A. Fef- [39] T. A. Palomaki, J. D. Teufel, R. W. Simmonds, and ferman, and E. Collin, “On-chip thermometry for mi- K. W. Lehnert, “Entangling mechanical motion with crowave optomechanics implemented in a nuclear de- microwave fields,” Science 342, 710–713 (2013). magnetization cryostat,” Phys. Rev. Applied 12, 044066 [40] T. P. Purdy, R. W. Peterson, and C. A. Regal, “Obser- (2019). vation of radiation pressure shot noise on a macroscopic [54] J D Teufel, Dale Li, M S Allman, K Cicak, A J Sirois, object,” Science 339, 801–804 (2013). J D Whittaker, and R W Simmonds, “Circuit cavity [41] Amir H. Safavi-Naeini, Simon Gröblacher, Jeff T. Hill, electromechanics in the strong-coupling regime,” Nature Jasper Chan, Markus Aspelmeyer, and Oskar Painter, 471, 204–208 (2011). “Squeezed light from a silicon micromechanical res- [55] J. Suh, A. J. Weinstein, C. U. Lei, E. E. Wollman, S. K. onator,” Nature 500, 185–189 (2013). Steinke, P. Meystre, A. A. Clerk, and K. C. Schwab, [42] V. Sudhir, D. J. Wilson, R. Schilling, H. Schütz,S. A. “Mechanically detecting and avoiding the quantum fluc- Fedorov, A. H. Ghadimi, A. Nunnenkamp, and T. J. tuations of a microwave field,” Science 344, 1262–1265 Kippenberg, “Appearance and disappearance of quan- (2014). tum correlations in measurement-based feedback con- [56] N.R. Bernier, L.D. Tóth, A. Koottandavida, M. A. trol of a mechanical oscillator,” Phys. Rev. X 7, 011001 Ioannou, A. Nunnenkamp D. Malz, A.K. Feofanov, (2017). and T.J. Kippenberg, “Nonreciprocal reconfigurable mi- [43] C. F. Ockeloen-Korppi, E. Damskägg, J.-M. crowave optomechanical circuit,” Nature Communica- Pirkkalainen, T. T. Heikkilä,F. Massel, and M. A. tions 8, 604 (2017). Sillanpää, “Noiseless quantum measurement and [57] Mingyun Yuan, Vibhor Singh, Yaroslav M. Blanter, and squeezing of microwave fields utilizing mechanical Gary A. Steele, “Large cooperativity and microkelvin vibrations,” Phys. Rev. Lett. 118, 103601 (2017). cooling with a three-dimensional optomechanical cav- [44] David Mason, Junxin Chen, Massimiliano Rossi, ity,” Nat. Commun. 6, 8491 (2015). Yeghishe Tsaturyan, and Albert Schliesser, “Contin- [58] Atsushi Noguchi, Rekishu Yamazaki, Manabu Ataka, uous force and displacement measurement below the Hiroyuki Fujita, Yutaka Tabuchi, Toyofumi Ishikawa, standard quantum limit,” Nature Physics 15, 745–749 Koji Usami, and Yasunobu Nakamura, “Ground state (2019). cooling of a quantum electromechanical system with a [45] Sungkun Hong, Ralf Riedinger, Igor Marinković,An- silicon nitride membrane in a 3D loop-gap cavity,” New dreas Wallucks, Sebastian G. Hofer, Richard A. Norte, Journal of Physics 18, 103036 (2016). Markus Aspelmeyer, and Simon Gröblacher, “Hanbury [59] Y. Tsaturyan, A. Barg, E. S. Polzik, and A. Schliesser, Brown and Twiss interferometry of single phonons from “Ultracoherent nanomechanical resonators via soft an optomechanical resonator,” Science 358, 203–206 clamping and dissipation dilution,” Nature Nanotech- (2017). nology 12, 776 (2017). [46] C. F. Ockeloen-Korppi, E. Damskägg, J. M. [60] A. H. Ghadimi, S. A. Fedorov, N. J. Engelsen, M. J. Pirkkalainen, M. Asjad, A. A. Clerk, F. Massel, Bereyhi, R. Schilling, D. J. Wilson, and T. J. Kippen- M. J. Woolley, and M. A. Sillanpää,“Stabilized en- berg, “Elastic strain engineering for ultralow mechanical tanglement of massive mechanical oscillators,” Nature dissipation,” Science 360, 764–768 (2018). 556, 478–482 (2018). [61] Neville H. Fletcher, Acoustic Systems in Biology (Ox- [47] Ralf Riedinger, Andreas Wallucks, Igor Marinković, ford University Press, New York, 1992). Clemens Löschnauer, Markus Aspelmeyer, Sungkun [62] Quirin P. Unterreithmeier, Thomas Faust, and JörgP. Hong, and Simon Gröblacher, “Remote quantum en- Kotthaus, “Damping of nanomechanical resonators,” tanglement between two micromechanical oscillators,” Phys. Rev. Lett. 105, 027205 (2010). Nature 556, 473–477 (2018). [63] Robert O. Pohl, Xiao Liu, and EunJoo Thompson, [48] Igor Marinković, Andreas Wallucks, Ralf Riedinger, “Low-temperature thermal conductivity and acoustic Sungkun Hong, Markus Aspelmeyer, and Simon attenuation in amorphous solids,” Rev. Mod. Phys. 74, Gröblacher, “Optomechanical Bell Test,” Phys. Rev. 991–1013 (2002). Lett. 121, 220404 (2018). [64] Carlton M Caves, Kip S Thorne, Ronald W P Drever, [49] T. P. Purdy, K. E. Grutter, K. Srinivasan, and Vernon D Sandberg, and Mark Zimmermann, “On J. M. Taylor, “Quantum correlations from a room- the measurement of a weak classical force coupled to temperature optomechanical cavity,” Science 356, a quantum-mechanical oscillator. I. Issues of principle,” 1265–1268 (2017). Rev. Mod. Phys. 52, 341–392 (1980). [50] V. Sudhir, R. Schilling, S. A. Fedorov, H. Schütz,D. J. [65] Mark F. Bocko and Roberto Onofrio, “On the measure- Wilson, and T. J. Kippenberg, “Quantum correlations ment of a weak classical force coupled to a harmonic of light from a room-temperature mechanical oscilla- oscillator: experimental progress,” Rev. Mod. Phys. 68, tor,” Phys. Rev. X 7, 031055 (2017). 755–799 (1996). [51] J. M. Fink, M. Kalaee, A. Pitanti, R. Norte, L. Heinzle, [66] J. Moser, J. Güttinger,A. Eichler, M. J. Esplandiu, 20

D. E. Liu, M. I. Dykman, and A. Bachtold, “Ultrasen- memory with millisecond coherence in circuit QED,” sitive force detection with a nanotube mechanical res- Phys. Rev. B 94, 014506 (2016). onator,” Nature Nanotechnology 8, 493–496 (2013). [82] Mingyun Yuan, Martijn A. Cohen, and Gary A. Steele, [67] D. J. Wilson, V. Sudhir, N. Piro, R. Schilling, “Silicon nitride membrane resonators at millikelvin tem- A. Ghadimi, and T. J. Kippenberg, “Measurement- peratures with quality factors exceeding 108,” Applied based control of a mechanical oscillator at its thermal Physics Letters 107, 263501 (2015). decoherence rate,” Nature 524, 325–329 (2015). [83] E. E. Wollman, C. U. Lei, A. J. Weinstein, J. Suh, [68] Massimiliano Rossi, David Mason, Junxin Chen, A. Kronwald, F. Marquardt, A. A. Clerk, and K. C. Yeghishe Tsaturyan, and Albert Schliesser, Schwab, “Quantum squeezing of motion in a mechani- “Measurement-based quantum control of mechanical resonator,” Science 349, 952–955 (2015). cal motion,” Nature 563, 53–58 (2018). [84] J.-M. Pirkkalainen, E. Damskägg,M. Brandt, F. Mas- [69] J. D. Teufel, F. Lecocq, and R. W. Simmonds, “Over- sel, and M. A. Sillanpää, “Squeezing of quantum whelming thermomechanical motion with microwave ra- noise of motion in a micromechanical resonator,” diation pressure shot noise,” Phys. Rev. Lett. 116, Phys. Rev. Lett. 115, 243601 (2015). 013602 (2016). [85] F. Lecocq, J. B. Clark, R. W. Simmonds, J. Aumen- [70] UroˇsDelić,Manuel Reisenbauer, Kahan Dare, David tado, and J. D. Teufel, “Quantum nondemolition mea- Grass, Vladan Vuletić,Nikolai Kiesel, and Markus As- surement of a nonclassical state of a massive object,” pelmeyer, “Cooling of a levitated nanoparticle to the Phys. Rev. X 5, 041037 (2015). motional quantum ground state,” Science 367, 892–895 [86] Rong Zhang, Yinan Fang, Yang-Yang Wang, Ste- (2020). fano Chesi, and Ying-Dan Wang, “Strong mechani- [71] Felix Tebbenjohanns, Martin Frimmer, Vijay Jain, Do- cal squeezing in an unresolved-sideband optomechanical minik Windey, and Lukas Novotny, “Motional sideband system,” Phys. Rev. A 99, 043805 (2019). asymmetry of a nanoparticle optically levitated in free [87] Stefano Mancini, David Vitali, and Paolo Tombesi, space,” Phys. Rev. Lett. 124, 013603 (2020). “Optomechanical cooling of a macroscopic oscillator [72] A. Einstein, B. Podolsky, and N. Rosen, “Can by homodyne feedback,” Phys. Rev. Lett. 80, 688–691 quantum-mechanical description of physical reality be (1998). considered complete?” Phys. Rev. 47, 777 (1935). [88] P. F. Cohadon, A. Heidmann, and M. Pinard, “Cooling [73] D. N. Bernal-Garc´ıa, H. Vinck-Posada, and M. J. of a mirror by radiation pressure,” Phys. Rev. Lett. 83, Woolley, “Nonstationary force sensing under dis- 3174–3177 (1999). sipative mechanical quantum squeezing,” (2020), [89] M. Poggio, C. L. Degen, H. J. Mamin, and D. Rugar, arXiv:2007.13051. “Feedback cooling of a cantilever’s fundamental mode [74] Andreas Kronwald, Florian Marquardt, and Aashish A. below 5 mK,” Phys. Rev. Lett. 99, 017201 (2007). Clerk, “Arbitrarily large steady-state bosonic squeezing [90] Clemens Schäfermeier,Hugo Kerdoncuff, Ulrich B. Hoff, via dissipation,” Phys. Rev. A 88, 063833 (2013). Hao Fu, Alexander Huck, Jan Bilek, Glen I. Harris, [75] Ying-Dan Wang and Aashish A. Clerk, “Reservoir- Warwick P. Bowen, Tobias Gehring, and Ulrik L. engineered entanglement in optomechanical systems,” Andersen, “Quantum enhanced feedback cooling of a Phys. Rev. Lett. 110, 253601 (2013). mechanical oscillator using nonclassical light,” Nature [76] Huatang Tan, Gaoxiang Li, and P. Meystre, Communications 7, 13628 (2016). “Dissipation-driven two-mode mechanical squeezed [91] C. Macklin, K. O’Brien, D. Hover, M. E. Schwartz, states in optomechanical systems,” Phys. Rev. A 87, V. Bolkhovsky, X. Zhang, W. D. Oliver, and I. Sid- 033829 (2013). diqi, “A near-quantum-limited Josephson traveling- [77] Lin Tian, “Robust photon entanglement via quantum wave parametric amplifier,” Science 350, 307–310 interference in optomechanical interfaces,” Phys. Rev. (2015). Lett. 110, 233602 (2013). [92] C Genes, D Vitali, P Tombesi, S Gigan, and Markus As- [78] M. J. Woolley and A. A. Clerk, “Two-mode squeezed pelmeyer, “Ground-state cooling of a micromechanical states in cavity optomechanics via engineering of a sin- oscillator: Comparing cold damping and cavity-assisted gle reservoir,” Phys. Rev. A 89, 063805 (2014). cooling schemes,” Phys. Rev. A 77, 033804 (2008). [79] J Li, I Moaddel Haghighi, N Malossi, S Zippilli, and [93] Stefano Mancini, David Vitali, and Paolo Tombesi, D Vitali, “Generation and detection of large and ro- “Motional squashed states,” Journal of Optics B: Quan- bust entanglement between two different mechanical tum and Semiclassical Optics 2, 190–195 (2000). resonators in cavity optomechanics,” New Journal of [94] David Vitali, Stefano Mancini, Luciano Ribichini, and Physics 17, 103037 (2015). Paolo Tombesi, “Mirror quiescence and high-sensitivity [80] Matthew Reagor, Hanhee Paik, Gianluigi Catelani, position measurements with feedback,” Phys. Rev. A Luyan Sun, Christopher Axline, Eric Holland, Ioan M. 65, 063803 (2002). Pop, Nicholas A. Masluk, Teresa Brecht, Luigi Frunzio, [95] A. Szorkovszky, A. C. Doherty, G. I. Harris, and W. P. Michel H. Devoret, Leonid Glazman, and Robert J. Bowen, “Mechanical squeezing via parametric amplifi- Schoelkopf, “Reaching 10 ms single photon lifetimes for cation and weak measurement,” Phys. Rev. Lett. 107, superconducting aluminum cavities,” Applied Physics 213603 (2011). Letters 102, 192604 (2013). [96] A. Vinante and P. Falferi, “Feedback-enhanced para- [81] Matthew Reagor, Wolfgang Pfaff, Christopher Axline, metric squeezing of mechanical motion,” Phys. Rev. Reinier W. Heeres, Nissim Ofek, Katrina Sliwa, Eric Lett. 111, 207203 (2013). Holland, Chen Wang, Jacob Blumoff, Kevin Chou, [97] M. R. Vanner, I. Pikovski, G. D. Cole, M. S. Kim, Michael J. Hatridge, Luigi Frunzio, Michel H. Devoret, C.ˇ Brukner, K. Hammerer, G. J. Milburn, and M. As- Liang Jiang, and Robert J. Schoelkopf, “Quantum pelmeyer, “Pulsed quantum optomechanics,” Proceed- 21

ings of the National Academy of Sciences 108, 16182– O. Usenko, A. de Waard, A. de Waard, Jakob Flokstra, 16187 (2011). M. Podt, M. Bassan, E. Coccia, V. Fafone, Y. Minenkov, [98] J Clarke, P Sahium, K E Khosla, I Pikovski, M S Kim, A. Moleti, G.V. Pallottino, A. Rocchi, and M. Visco, and M R Vanner, “Generating mechanical and optome- “Present status of MiniGrail,” in Proceedings of the 10th chanical entanglement via pulsed interaction and mea- Marcel Grossmann meeting on general Relativity (2003). surement,” New Journal of Physics 22, 063001 (2020). [105] E. Olivieri, J. Billard, M. De Jesus, A. Juillard, and [99] M. R. Vanner, J. Hofer, G. D. Cole, and M. Aspelmeyer, A. Leder, “Vibrations on pulse tube based dry dilution “Cooling-by-measurement and mechanical state tomog- refrigerators for low noise measurements,” Nuclear In- raphy via pulsed optomechanics,” Nature Communica- struments and Methods in Physics Research 858, 73 – tions 4, 2295 (2013). 79 (2017). [100] Juha T. Muhonen, Giada R. La Gala, Rick Leijssen, [106] Martin de Wit, Gesa Welker, Kier Heeck, Frank M. and Ewold Verhagen, “State preparation and tomog- Buters, Hedwig J. Eerkens, Gert Koning, Harmen raphy of a nanomechanical resonator with fast light van der Meer, Dirk Bouwmeester, and Tjerk H. Oost- pulses,” Phys. Rev. Lett. 123, 113601 (2019). erkamp, “Vibration isolation with high thermal conduc- [101] Vladimir B. Braginsky, Yuri I. Vorontsov, and Kip S. tance for a cryogen-free dilution refrigerator,” Review of Thorne, “Quantum nondemolition measurements,” Sci- Scientiﬁc Instruments 90, 015112 (2019). ence 209, 547–557 (1980). [107] A. M. J. den Haan, G. H. C. J. Wijts, F. Galli, [102] Matteo Brunelli, Daniel Malz, Albert Schliesser, and O. Usenko, G. J. C. van Baarle, D. J. van der Zalm, and Andreas Nunnenkamp, “Stroboscopic quantum optome- T. H. Oosterkamp, “Atomic resolution scanning tunnel- chanics,” Phys. Rev. Research 2, 023241 (2020). ing microscopy in a cryogen free dilution refrigerator [103] Alok Tripathi and T.S. Vedavathy, “Electromagnetic at 15 mk,” Review of Scientiﬁc Instruments 85, 035112 shielding using superconductors,” Applied Supercon- (2014). ductivity 2, 1 – 5 (1994). [108] S. K. Lamoreaux, “Demonstration of the Casimir Force [104] R. Ackermann, Y. Benzaim, G. Frossati, L. Got- in the 0.6 to 6µm Range,” Phys. Rev. Lett. 78, 5–8 tardi, A. Karbalai-Sadegh, W Reincke, A. Shumack, (1997).