sign in sign up
<<
Home , Home automation, Visual servoing

Smart skins Smart sensors Info processing systems Micro From an information-based society to an ACTION-oriented society

With the last century's revolution of electronics, more and more automatic systems are found in everyday life (for home , telecoms, energy saving, health or industrial plants monitoring etc.). These systems are generally made up of a limited number of interconnected building blocks attached to a physical structure and providing a "smart function".

By directly engineering , it is possible to integrate and distribute smart functions inside physical structures, giving rise to more sophisticated and cost-effective features, anticipating growing needs for security, reliability, functionality and environmental compliance.

For this purpose the Laboratory of Excellence ACTION has built a unique consortium, in which System Engineering is complemented by strong expertise in Physics, Photonics, Acoustics, Micro & , Mechanics & Materials and computing sciences, that will provide the fundamental and technological multidisciplinary basis for successful integration of smart systems inside materials.

Information Micro processing mechatronics systems

Compact thermo-optic filter Simulation of modular and based on lithium niobate self-reconfigurable surface for photonic crystal fast conveying of fragile items

Integrated Smart skins smart sensors

Distributed acoustic Multifunctional transducers impedance control for active to detect molecules at low noise control concentration About the Labex ACTION 2016

A 8-year programme of excellence (2012-2019) dedicated to the developpement of 2014 2015 smart matter and highly integrated smart structures

2013 2012 Context 24 nationalities The Laboratory of Excellence (Labex) ACTION was launched by the French government among PhDs, 4 main scientific topics in April 2012 after being selected by an international jury as part of the “Investments for Postdocs, internships 10 working groups the Future” programme (PIA). It has received from the French National Research Agency a €8 million grant for 8 years (ANR-11-LABX-0001-01).

The ”Laboratory of Excellence” programme aims to: • improve the international visibility of French research, THESIS 19 Collaboration with • guarantee the excellence of the university training by, among other actions, a strong 5,6M other PIA: IDEFI Figure, implication in postgraduate programmes, Budget devoted to calls for projects since 2012 Equipex Robotex, • integrate and reinforce the local and international strategies of their host institutions. Labex First-TF... 5 DEMONSTRATORS POST-DOCS 30 Vocation and mission of ACTION 2 technical days 260 PEER-REVIEW PAPERS ACTION is willing to become a pole of excellence dedicated to the integration of smart capabilities per year of which 14% have (perception, processing, decision, predictive or adaptive action) within structures (cars, medical 4 summer schools an impact factor >5 microdevices, manufacturing equipments, communication networks, etc.) in order to provide them with more sophisticated and cost-effective features. CHAIRS OF Dozens of academic and industrial EXCELLENCE 5 collaborations

INTERNSHIPS Labex High quality High education Valorization MERIT 25 29 Master's students ACTION research project SCHOLARSHIPS

To guarantee the excellence of To broadcast the scientific To promote the emergence of the program in close collaboration and technological results and ambitious and visible scientific with universities,doctoral and knowledge towards the projects at an international scale engineering schools socio-economic world

Local authorities ANR Regional councils of Investments for the future Franche-Comté-Burgundy, Local communities (PMA, CAGB) SATT Grand Est Technology transfert Fondation de coopération scientifique FCS BFC

Competitiveness clusters LNIO (Troyes) LICB (Dijon) Microtechniques, Véhicule du futur, UMR CNRS/UTT FEMTO-ST (Besançon) Vitagora, Plastipolis, Nucléaire de UMR CNRS/UFC/UTBM/ENSMM UMR CNRS/UB Bourgogne Besançon Technological facilities Doctoral (RENATECH clean room, Arcen, Staff about 50 FTEs schools Nano’Mat, Picasso...)

Universities: UBFC, ENSMM, UTBM, UTT, ISIFC

4 Labex ACTION 5 A consortium of 3 labs with scientific excellence in ”Mechanics, Energy, Processes” and ”Information and Communication Technologies” Scientific programme of the Labex ACTION

The ambition of the Labex ACTION is to develop new architectures ensuring integrated and distributed functions of: • Structural health monitoring (SHM) and Pronostic Health Management (PHM), • Self-adaptability and active control of shape/airflow/noise/vibrations, • Self-reconfigurability (for a better energy management), • Smart optical components and networks, • High complexity calculations, 750 • Data processing and decision making. 60 Franche-Comté Electronics, Mechanics, Thermics and Optics In order to achieve its goals, ACTION has been implementing 4 topics fed by 5 scientific workpackages Laboratory of , Siences and Technology (WPs) and 5 demonstrators (DEMOs): Instrumentation and Optics UMR CNRS 6174 - UFC, ENSMM, UTBM • The WPs correspond to the major scientific fields of ACTION. UMR CNRS 6281 - UTT Optics, acoustics, micro- & nanosystems, time- • The DEMOs correspond to ambitious still not existing systems for translating the Labex objectives into Nano-micro-optics, photonics, frequency, mechatronics, advanced control, spectroscopy, instrumentation computing, materials & structures, energy real systems. They can also bring during their development new ideas for new products and applications and nano sensors corresponding to economic and societal expectations.

Troyes NANO’MAT Nanophotonics Belfort Montbéliard Dijon ARCEN Besançon MIMENTO* Clean room Nanocharacterization Quartz-Tech pilot line PICASSO SAW devices Photonics characterization I-SITE UBFC (2016) Labex FIRST-TF Equipex Robotex Equipex REFIMEVE+ Equipex OSC IMP

Legend: 280 Lab sites Staff Interdisciplinary Carnot Laboratory Platforms Other PIA projects UMR CNRS 6303 - UB Materials, nanosciences, photonics * belongs to the French Renatech Network of the 6 major national micro-nano-technology platforms

Coordinator of the Labex ACTION: Michel de Labachelerie (CNRS research director)

Strategic board committee

President: Hugo Thienpont, Vrije Universiteit Brussel ACTION addresses the needs of many sectors:

Expert members: Public institutions: Transports, health, civil engineering, telecoms, defence, energy, environment, industry... • Sylvain Allano, PSA • Georges Akhras, CMRC • UFC, UB, ENSMM, UTT • Local public authorities • Jean Chazelas, THALES • Adrian Ionescu, EPFL UTBM, CNRS, FCS BFC • National Research Agency • Improved performance and reliability, Added value • Increased availability of systems, and reduction of maintenance costs, Steering committee Invited members: • Security and safety, • Valorization (SATT Grand Est) • Optimization of the energy consumption (structure ligthening...) Directors of founding labs: for users? • N. Chaillet, FEMTO-ST • Universities of Franche-Comté and Burgundy • Environmental impact reduction (noise, electromagnetic perturbation, pollution...). • R. Bachelot, LNIO • Technology and engineering schools: ENSMM, ISIFC, UTBM, UTT • A. Dereux, ICB • Doctoral schools: ED SPIM (UFC), Carnot-Pasteur (UB), Sciences et technol. (UTT)

6 Labex ACTION 7 and metasurfaces for vibroacoustics

Smart skins Semi-active distributed and tunable system for Self-tunable and integrated systems for vibroacoustics and health monitoring vibroacoustic control

This program aims mainly at developing new distributed Among others, this program will find applications in The distributed active system is reconfigurable through the tuning of a single devices for structural control. The concept is based structural weight reduction for aeronautics, aerospace or resistance in the shunt circuit and provides 2 configurations: on a network of passive and/or active cells distributed automotive, by integrating reconfigurable functionalities in • A vibration barrier which confines the energy on a specific part of the on a surface that constitutes a “smart skin”, which is non-planar composite structures, using either integrated structure, able to measure control the mechanical properties of the transducers/electronics or light/flexible nonintrusive skin. • A damping configuration inducing huge reduction of the vibration levels on structure. the whole structure (5 to 15dB on 250Hz-4000Hz range). A particular focus on energy management is also studied: Plate host structure equipped with a distributed semi-active interface The objective is to demonstrate the integration low power or autonomous systems are indeed required to of shunted piezoelectric patches of adaptive and energetically autonomous cells that have a chance to be deployed at large scale. can produce internal coupling mechanisms to program functionalities of interest, namely the structure’s reliability (Structural Health Monitoring of composite Smart skin for acoustic control in nacelles structures) and/or environmental perturbations control • Coupling of local and distributed strategies for acoustic (control of acoustic radiation, vibration damping, wave control trapping…). • Use of dedicated loudspeakers provided • Prototype design & manufacturing (structure, electronics, control) @FEMTO-ST • Fully reconfigurable control thanks to dedicated electronics Partners: Safran/Aircelle, EPFL

Integrated structural health monitoring and residual life prediction of composites Acoustic comfort and sound insulation using acoustic metamaterials All-angle sonic insulator using subwavelength inclusions Conformable CMUTS for acoustic waves control Real-time health monitoring of composite The concept consists in creating reflector or absorber acoustic structures using acoustic emissions Our long-term objective is to create a flexible skin which screens by integrating several miniaturised cells. could be bonded to a structure at the boundary of an Experimental results achieved with a -based panel acoustic domain to be controlled. Development of Surface acoustic wave (SAW)-based 2 patents for have shown an attenuation exceeding 40dB ! technology for the health monitoring of composite containers (transportation of granulated or pulverized As energy converters from electrical to mechanical acoustic panels Degrees of freedom: goods and materials). domain and vice versa, the CMUTs (Capacitive 6x thinner • Adaptability in terms of choice of solid material wood, glass, Partners: Eurovrac Spitzer, Freq|n|Sys, SENSeOr, UHA Micromachined Ultrasound Transducer) will play the than the metal, polymers…(no need to use a inherently absorbing or role of loudspeakers realizing an impedance synthesis dense material) by a semi-distributed control strategy preventing the conventional ones 3D printed unit cells • Possibility of air circulation or heat exchange Diagnostics & prognostics: propagation of acoustic waves in a specific direction. • matrix cracking Towards mass • ” scalability ” in terms of frequency • delamination production of panels • Decrease space requirements • fiber breakage First prototype of a flexible skin with a network of CMUTs made of PMMA in the MIMENTO clean room

< Simulation of acoustic waves generation and Energy harvesting and integration propagation induced by damage in composite structures Smart composite skins with integrated transducers networks

The aim of this project is to demonstrate the feasability of integrating transducers in lightened complex structures in order to provide them with new functionalities (SHM) without compromising their robutness. Prognostics and health management Promising results were achieved with the fabrication of a glass fiber based Collaboration composite prototype (an automotive spoiler) which integrates a network of The NASA’s Prognostics Center of Excellence and the Labex ACTION has with the NASA’s 50 piezoelectric patches. Each transducer is electrically independent and published together a review paper about the start-of-the-art research methods Prognostics can be separately actuated. The useful frequency range of these elements used in the prognostics and health management of turbofan engines. Center of is compatible with the use in aeronautics and car industry. excellence A focus is particularly made on data-driven methods which rely on multidimensional time-series and include advanced statistical analysis and The next challenges are the full integration of the microcontroller-based machine learning techniques as well as the representation, quantification and devices and electronic circuits into the structure. propagation of uncertainty for reliable and robust in-service monitoring.

Performance Benchmarking and Analysis of Prognostic Methods for CMAPSS Datasets, Partners: MyOCCS, Freq|n|Sys, IRTES-M3M (UTBM), Espera SBARRO Int. Journal of Prognostics and Health Management (jan. 2015). design school (UTBM) Source: https://www.grc.nasa.gov

8 Labex ACTION 9 Information processing systems Lithium niobate micro-nanotechnologies & components Reconfigurable, self-tunable and miniaturised photonic solutions Micromodulators and compact electric field sensors for embedded systems (phones, drones, watches...)

This program aims at optimizing, on the physics and The key challenge is to master (multiphysical) waves FEMTO-ST has been developping an easy-to-implement technology to produce miniaturized technology levels, every step of an information in micro-nanostructured materials with unusual (e.g. (<2mm) and low power electro-photonic devices, based on confined optical waveguides with processing system for groundbreaking performances and, metamaterials) and nonlinear (extreme, complex) propagation losses lower than 1dB/cm. Partner: Kapteos foremost, at making it smarter while integrated. functionalities.

Our approach is based on a globally unique combination Some examples of applications: of scientific and technological competencies and know- • EO modulators and tunable spectral filters, how within ACTION and relies mainly on the following • Temperature, bio, electric & magnetic field 2 patents inputs: photonics, optoelectronics, acoustics, phononics, micro-nano-sensors, relative to plasmonics, nonlinear science, quantum science, • Spectrometers, electro-optical science, micronanotechnologies… • NL frequency converters, nanocomponents • µwave and optical resonators and oscillators, • Neuromorphic , • Fiber information processing systems...

Electro-optic modulator with an integrated Modulator with photonic crystal Fabry-Perot cavity, inscribed in a 4µm-thick

LiNbO3 membrane (SEM picture)

The future of EEG technology using integrated metal-free optrodes Phononics & opto-acoustics With two industrial partners, FEMTO-ST is developing a compact electric field sensor based on a lithium niobate photonic crystal

(LiNbO3 PhC), which has a mV sensitivity (1000 times higher than First demonstration of the optical generation of currently commercialized optical devices). A reconfigurable phononic circuit surface acoustic waves in photonic microwires This innovative metal-free micro sensor could be implemented Applications: RF information processing, acoustic FEMTO-ST and the Institut d’Optique (Paris) have discovered as an easy-to-use and powerful electroencephalogram (EEG) sensing, and acousto-electronic microfluidics a new type of Brillouin light scattering driven by surface technology, compatible with MRI (Magnetic Resonance Imaging). acoustic waves in a subwavelength optical fibre. Another application could be found in the field of the defense for the A phonon board is based on a solid membrane detection of wideband frequency signals. SEM view of the membrane (surface: perforated with a periodic array of holes. The diameter These hair-like slivers of silica glass, fabricated by tapering 400µm²). Hole diameter: 200 nm of the holes is chosen so that a complete band gap optical fibres, enable enhanced nonlinear optical effects and Partners: CHRU Besançon, LMB, iXBlue, Kapteos is obtained: no waves can propagate along the applications not currently possible with comparatively bulky membrane. When a single hole is filled with water, a optical fibres. number of localized modes are formed. Each mode has a unique pattern of pressure in water. In the Exploring this novel effect, researchers at FEMTO-ST have New production processes of electro-optic, piezoelectric, ferroelectric single-crystal thin films surrounding solid, the amplitude of the vibration decays observed that light can shake and distort the optical exponentially, thanks to the complete band gap. microwire through electrostriction, leading to mechanical The fabrication of single-crystal surface undulations of a few nanometers. More generally, by filling several holes, one can form ferroelectric, piezoelectric, channels within which the propagation of waves As these acoustic resonances are highly sensitive to photorefractive, electro-optic, remains confined. A totally reconfigurable phononic surface defects or features, surface acoustic wave Brillouin and nonlinear thin layers and components for radio-frequency, system can hence be formed simply by selecting the scattering opens new opportunities for various sensing electro-acoustic and photonic correct holes to be filled. applications, but also in other domains such as integrated applications is an microwave photonics and nonlinear plasmonics. important technological challenge at SEM view of a multiple monocrystalline Photography of a Periodically Poled Partners: EPFL, PhLAM Lille, CUDOS, Univ. McGill FEMTO-ST since several years. layers stack with different materials Lithium Niobate (PPLN) wafer In this frame, home-made room- temperature bonding and wafer Nonlinear optics in structured lithium niobate thinning techniques have been The advanced process techniques developped developed at MIMENTO in order within the RACE3 project paves the way to innova- Photonic devices to bond a large variety of different tive and diversified devices, such as: materials and to obtain micron- 50 times • Wavelength converters, size, thickness-controlled, • On-chip photo-induced waveguides for, e.g. homogeneous thin layers while thinner optofluidic applications, preserving the crystalline than a human hair • High sensitivity sensors or tunable filters based on properties of the bulk materials. photorefractive waveguides. On-chip high-efficiency Partners: Frec’n’sys, Femto frequency converter Engineering

10 Labex ACTION 11 Smart control of light polarization to secure data

Nonlinear dynamics in photonics and optoelectronics With the exponential growth of The transmission line set up at ICB light to dynamically adopt a unique generating and sharing information, Lab involves a data source, an end state-of-polarization, orthogonally to securing the transmitted data has user, as well as an Omnipolarizer on the probe’s state, thus making the Brain-inspired neuromorphic computer become of a paramount importance. either side of an indiscreet eye, which indiscreet eye completely blind to the One of the world’s fastest photonic processor for real-time diagnostic and pronostic of complex systems ACTION has developed an all-optical aims to use a continuous wave probe transmitted data. During experiments, technique that is able to temporally to copy the transmitted information. the method was able to cloak 100% Digital electronics and standard cloak a signal when attempted As the signal comes down in the fiber of a 10-Gbit/s transmission from computers have reached their limits Reservoir Computing (RC) refers to a new discipline -at the interface spying is taking place along a fiber link, the first Omnipolarizer forces the spying eyes. in dealing with complex tasks, such of physics, computer science and engineering- which studies and transmission link. as dynamical data classification, or develops calculation units based on a new kind of artificial neural processing information at ultra-high networks, which is schematically inspired by biological neurons. The key ingredient relies on a device speed with energy efficiency. called Omnipolarizer for which the Optics provides promising opportunities incident light self-organizes its state- to implement unconventional of-polarization upon a nonlinear FWM computational. interaction between the input signal To address these challenges, ACTION and its counter-propagating replica. has been designing and implementing a photonic processing system based on the principle of Reservoir computing and which is able to provide a high speech speed/efficient computational power recognition speed The first tunable and compact device for the real-time and ultrasensitive by using standard optical telecom components. of 1.2 Million detection of gas (frequency-agile dual-comb spectroscopy) Optoelectronic implementation using a delay system spoken digit 13 12 Spectroscopic gas sensing has many applications such as trace detection or chemical per second kinetics and requires ever more demanding measurement times, acquisition rates, Targeted applications: sensitivities, precisions and broad tuning ranges. In collaboration with MPQ Garching • Energy: diagnostic of Fuel Cell stacks (partner: FC Lab) (Germany), ICB has demonstrated a new approach to near- molecular spectroscopy, • Economy: forecasting of real stock exchange time series data utilizing advanced concepts of optical telecommunications and supercontinuum photonics. (partner: the Mathematics Laboratory of Besançon), A spectrum of carbon dioxide 12 13 • Health: analysis of high complexity electro-encephalogram (EEG) signals with a mixture CO2- CO2 of 90% - 10 % in the near-infrared With a dual-comb spectrometer, the teams recorded Doppler-limited spectra spanning (partner: INSERM), 60GHz within 13μs and an 80kHz refresh rate, at a tuning speed of 10nm s−1. • Nano-manufacturing: real-time control of a femtosecond laser chain in ultrafast spectral region micro-nano complex machining Nonlinear & quantum plasmonics and optical nano-antennas Breakthrough solutions for broadband fiber optic and microwave-photonic communications Tunable post-production control of optical Single-molecule nanosensors for Replacing complex WDM sources by a single coherently controlled multifrequency emitter will drastically increase nano-cavities biology and quantum information WDM performances. ACTION has demonstrated theoretically and experimentally the focusing of electromagnetic Optical frequency combs are characterized by their Potential applications of these radiation far beyond the diffraction limit. The exceptional spectral purity and their high coherence combs: 3x72Gb/s 16-QAM nanofocusing effect is based on the generation, in the lightwave and microwave frequency ranges. • WDM telecoms (generating Tb/s error-free repeaterless propagation, and confinement of surface plasmon They are therefore ideal candidates for coherent coherent carriers compatible with optical transmission polaritons (SPPs) supported by a tapered optical telecom systems, or for the generation of modern modulation formats, e.g. on 80kms (320Gb/s plasmonic nanostructure placed on top of a ultra-stable microwaves. for FTTH), back-to-back) silicon photonic waveguide. The photonic mode • Microwave photonics and derived efficiently excites the SPPs of the plasmonic ACTION aims at creating a fully integrated chip, applications, This is the world-class (left) Visualization of the cavity mode (right) structure. Because the structure gradually based on a nonlinear high Q (>106) whispering • Spectroscopy (mid-IR n-comb are coherent optical transmission FBNA Fibered Bowtie Nano-aperture Antenna decreases its width, the SPPs progressively gallery mode resonator, which would considerably highly needed for atmospheric result based on n-combs increase its sub-wavelength confinement and increase the information processing species sensing), carriers generated by optical Demonstration of a two-way tunability (red and blue shifts) enhancement, up to a typically 50-nm spot (>320Gbits/s) of a metropolitan • Health (n-comb Fourier transfom Kerr effect in a WGMR, of the resonance of an optical nano-cavity with a single diameter. spectroscopy for e.g. bacteria network using the WDM technology. which was obtained by perturbation element. screening), FEMTO-ST and Karlsruhe The proposed configuration is based on the coupling between This project is linked to the ERC starting grant • Integrated quantum information. Institute of Technology. a photonic crystal cavity and a metallo-dielectric bow-tie Nextphase and the Proof of concept Versyt. nanoantenna at the end of a fiber tip (FBNA), that exhibits polarization-selective electric field resonance.The result of this coupling shows a competition between an induced Chip-scale component: electric dipole (FBNA at resonance) that allows redshift, and • Low-cost and scalable an induced magnetic dipole (the fiber metal coating) leading • Low power consumption to a blueshift of the resonance wavelength of the nano-cavity. (~ mW) • Potentially Tb/s bandwidth We have demonstrated that the sign of the spectral shift • Ideal for components used can be simply controlled through the FBNA-to-cavity in Fiber To The Home Design and experimental study of plasmonic integrated distance. transducer based on a gold nanotaper

12 Labex ACTION 13 1 patent Ultracompact optical biosensors relative to Integrated smart sensors Integrated SPR Biosensor system for smart sensor networks CoBISS spectrometer for Optical/mechanical/plasmonic integrated sensors and networks The project aims at developing an State-of-the-art: integrated solution of nano-bio- • Selectivity, sensibility, versatility, 2D sampling sensor network for environmental robustness (no mechanical part), applications (continuous monitoring • Temperature insensitive (metallic The global market for sensors is expected to The programme has been built around 3 scientific of air or water systems). nanocrystals LSPR substrate), increase up to nearly $91.5 billion in 2016 with and technological directions: • Fast time processing, annual growth rate of 7.8%. • miniaturization/integration of smart sensors with Work in progress include: • Liquid phase, gas phase. already established concepts, • improvement of the optical sensor The goal of ACTION is to take advantage of • proof of new concepts for integration of sensors sensitivity for the detection of In the mid-term, a portable system recent scientific progress in nanofabrication, into matter, selected analytes, would be developed for other photonics, acoustics and decision-making • smart networking of sensors. • optimization and integration of applications (gas, pollution and science to foster breakthrough solutions for an ultra compact spectrometer pathogens detection). miniaturizing sensors, integrating them into called CoBiss (patent n° matter and/or making them communicate WO2009127794), Partner: Resolution Spectra together. • implementation of an efficient data Systems processing system which would ensure the robustness of the global decision-making.

Optical lab-on-a-chip for biomarkers detection Smart GaAs sensors network

In collaboration with NTU taiwan (Biomedical Eng.), Design of a highly sensitive network of transducers with the LNIO has been developping a smart and low cost specific bio-interfaces to detect molecules of interest such Towards a novel generation of strain sensors integrated into matter integrated interferometer based on Generalized Lock-in as bacteria at low concentration in biological liquid. Amplifier (GLIA) and consumer electronic device. Some nano deformations visible to the naked eye thanks to innovative integrated optical New structures of resonant transducers were made in nanosensors Perspectives by 2019: to take advantage of piezoelectric Gallium Arsenide crystal, which presents the smartphones to develop a smart network of sensors. ability to be directly biofunctionalized and micromachined. These ultra sensitive and accurate acoustic wave sensors Metal NanoParticles (MNPs) are known to A fruitful collaboration between the LNIO also offer the opportunity to deliver several signals support Localized Surface Plasmons (LSP) and Laval University (Québec) has been depending on the resonance mode. that are highly sensitive, not only to the started to self-organize dense Au NPs rings 1 patent MNPs chemical composition or size, but onto elastomeric film in order to increase relative to also to interparticle resonant coupling when sensitivity. plasmo the gap between MNPs is less than the nanoparticle diameter. The first prototype, made in collaboration mechanics with Univ. Geneva and Univ. Calabria, This open the way to new smart sensors consisted of 23 nm Au NPs immobilized onto integrated into matter: some color-changing a PDMS substrate with an average distance plasmonic strain sensors based on the of 39 nm between neighbouring NPs. spectral variation of plasmonic coupling versus interparticle distances when In this way plasmonic coupling effects stretching a composite film that incorporates become visible and the resulting gold- MNPs. coated flexible tape can be utilized as a Wireless sensors networks Key issue: Optimization of Optimizing the packaging of SAW sensors MNPs self-organization for color-changing strain sensor. spectrally agile plasmo- (UAV) This challenge has been taken-up in the frame mechanical strain sensing As nanoparticules act as nanosensors control for autonomous wireless of the joint laboratory “PhASE*” between able to predict deformations (SHM), some passive sensor measurement FEMTO-ST and SENSeOR company. A potential applications could be found in single-material (LiNbO3) wafer level packaging packaging, nanoimprint or industrial paint. This multi-disciplinary project (automation, procedure using polymer adhesive bonding and a microwave electronics, UAV control, hard capping material has been developed and is now under computer science, signal processing) aims ....with the at combining the sensor measurement characterization. Perfectly reversible! for UAV control in a feedback loop and The goal is to demonstrate an joint lab the ability of the system to perfom a real innovative packaging solution PhASE time transmission of passive sensor suitable for wireless SAW measurement from UAV. sensing of either temperature or stress, embedded into Partners: CM-Drones (UAV design), mechanical or composite structures. SENSeOR (wireless sensor reader & sensor chips), LM2S/UTT *PhASE: Physical Acoustics, Sensors and Embedded Systems

14 Labex ACTION 15 Smart OCT active endoscope for the mini invasive and early detection of cancer Micro mechatronics OCT allows non-contact and non-invasive in vivo diagnosis with high resolution and reasonable penetration depth Micro-, MEMS & MOEMS components, DiMEMS

Micromechatronics - a combination of mechatronics and The Labex ACTION offers skills in microsystem microtechnologies -is part of the key skills of excellence design (sensors, MEMS, MOEMS, microactuators, at FEMTO-ST, which hosts one of the largest groups in microfluidics, microrobots) and technologies EU in this field. (micromachining & microoptics, heterogeneous integration, multi-wafer bonding). the study of functional A unique specificity of ACTION is the combination of materials, multiscale modelling a control and computer micromechatronics with vision and robotics on one hand engineering. and microphotonics on the other hand. Concept of optical biopsy and illustration of a cancer of Through its project of microendoscope for gastrointestinal track (source: National institute of cancer) Multifunctional mechatronic systems include a in vivo applications, ACTION wishes to develop combination of mechanics, electronics, control to demonstrate several functions of complex engineering, computer engineering as well as photonics embedded smart systems that provide Embedded actuation on deformable tubes OCT-based visual servoing and vision. reconfigurability and adaptability. Design of an Electro Active Polymer actuated Using the OCT signal to guide the concentric tube for dextereous intracorporeal Perspectives: to develop a 6-degrees of freedom micromanipulation control on volumetric OCT images

Outer tube End-effector (laser)

Micro robotics and control technologies Inner tube

The world’s smallest microrobotic hand performing dexterous manipulation EAP electrodes

The dexterous system is composed of 3 fingers (7-μm-diameter fibers actuated using stick-slip piezo-electric actuators) having 2 degrees of Mirau micro-interferometer 2-axis MEMS micro-scanner freedom each (either 6 degrees of freedom in total) A miniature imaging systems based on a MOEMS A dual-reflective electrothermal micromirror with to perform in-hand manipulation (translations and integrated probe torsion beam allows to acquire real-time OCT 3D rotations) of micro-parts (polygonal micro-objects images down to 120µm) in the micrometer scale. World record achieved by the device in terms 40° These performances contribute significantly to of angles of scan (40°) An automatic the state-of-the art and will enable the versatile fabricated in collab. a world 180° rotation assembly of complex 3D smart systems. with the Univ. of Florida record! performed by (Prof. Huikai Xie, 3 fingers lab ”Biophotonics & Microsystems”). (above left) 3 cylindrical fingers are mounted on a support and trans- Project leader: Equipex Robotex lated by an actuation system (right) SEM image of a 7µm diameter Industrial partner: Percipio Robotics carbon fiber glued on a silicon tip Partners: CHU Besançon, Equipec Robotex, CHU, Centre d’Investigation Clinique de Besançon (INSERM CIC 1431), UTINAM (UMR UFC CNRS), Univ Florida, Univ Joseph Fourier... Precise micro manipulation in confined environments

The use of bistable modules opens very interesting A 4 monolithic bistable module fabricated on SOI wafer in the : with mm-scale computers perspectives for designing integrated smart devices MIMENTO clean room compared to the advent of the digital electronics. Claytronics is an abstract future Claytronics has the potential to With Claytronics, things come to life as real Based on modules which have two robust stable positions concept that combines modular greatly affect many areas of daily 3D interactive objects participating at the with “blocking force”, the micro digital robot can perform robotics, systems nano life, such as telecommunication, (IoT) binary actions in displacement and in force. technology and computer human-computer interfaces, and science to create individual entertainment. This bottom-up approach called “digital microrobotics” nanometer-scale computers called The main simulator for takes advantage of MEMS technology and open-loop Claytronics atoms, or catoms, Claytronics, called VisibleSim has digital control to offer a flexible way to experiment various which can interact with each other been developed by the Labex kinematics adapted to the microworld. to form tangible 3D objects (sca- ACTION. It is the first online starting point lable to life size or larger) that a simulator for modular and Advantages of the digital robotics: user can interact with. multicore systems. • Open loop control (no sensor) Workspace (size: 25 x 15 mm2): • No noises sensibility • 169 positions Catoms are electrostatically • Low energy consumption • 2 multistable modules actuated and self Partners: Carnegie Mellon • Adapted to confined environment (SEM, TEM) • (13 positions each) contained. ending University, PSA Peugeot-Citroën, • Robust and easy to fabricate (monolithic microfabrication) • Resolution: 4,2µm With the point permission of Hong-Kong Polytechnic University, Emre Karagozler University of Tokyo/LIMMS

16 Labex ACTION 17 Let’s share our knowledge! Lots of opportunities to meet the Labex’s teams wherever you come from industry, university or as individual

AIM2014

kick off meeting IEEE/ASME International Conference on Advanced First meeting for the communauty Intelligent Mechatronics Summer school involved in the Labex ACTION 330 att., 36 nations programme ”From Diagnostics to Fault Tolerant Control of Fuel Cell Systems” 1st technical day Scientific events (Chair N. Steiner)

Experimental reservoir computing Conference on Phononics From concepts to first demonstrations, Forum on Microscopy towards market applications International seminar ”Nonlinear phenomena in optics” 2012 2014 2016

2013 2015 PHM Data challenge EMP16 Workshop Smyle An international challenge on the International Conference on Energy, Prediction of the remaining useful Materials and Photonics (Troyes, LNIO) Participation to the workshop life of a Fuel Cell Wth the participation of the UNESCO SMYLE (collegium EPFL Chair in Renewable Energies MATECSS switzerland/FEMTO-ST)

Labex ACTION as sponsor of the International Year of Light What’s behind? The IYL 2015 is a global initiative adopted by the United Nations to raise awareness of how optical technologies promote sustainable development and provide solutions to worldwide challenges in energy, education, agriculture, communications and health.

2 technical days per year In the Burgundy Franche-Comté region Micro Nano Photonics (2015, see the above (France), more than one thousands of picture) with Thales R&T, Oclaro, Heptagon, Lionix, people celebrated the IYL with LUX! CNES, ICFO, ORC Southampton, INL, Blumorpho.. T. Chikhaoui (PhD within ACTION) and LED. during the Lux! event (Besançon, 2015) Structural dynamics & Laser vibrometer (2015) (PSA, Airbus, EDF, Vibratec, IRT JV)

Piezoelectric energy harvesters (2014) From advanced lead-free materials to smart devices and self-powered systems Since 2012, ACTION is member of InfoGap: Model-based design, validation and EPoSS (European Platform of Smart monitoring of structures under severe uncertainty Systems) which is an industry- (2014) driven policy initiative, defining R&D and innovation needs as well as Integrated health monitoring (2013) policy requirements related to Smart Damage assessment of composite materials by Systems Integration and integrated acoustic emission Micro- and Nanosystems.

Reservoir computing workshop and conference (2013) Prof. M. Gauthier at the EPoSS annual Forum (Belgium, 2015)

18 Labex ACTION 19 Top 10 of our peer-review papers (2015) Some awards 2015-2016

7

ICRA* Automation 1 Best Paper Award 2015

2 Design, modeling and control of a modular contactless wafer 3 handling system Laurent G., Dahroug B., Guelpa V., Le Fort-Piat, N.

IEEE International Conference on 10 Robotics and Automation 6

Innovate Europe Design Contest 2015 (London) Winner category ”FPGA design” 5 8 Hardware-In-the-Loop (HIL) simulation provides an effective platform to validate an embedded controller before testing it on a real system. A real-time emulator of a DC machine and its control have been developed for educational activities 9 (students advisor: M. Hilairet, FEMTO-ST)

4

Pauline Butaud (FEMTO-ST) was Best poster award for Charles Excellent Oral Presentation Award awarded in 2015 a Bourse l’Oréal- Altuzarra (PhD co-supervised by C. at PTIM2015 (International Caparica UNESCO Pour les femmes et la Couteau, LNIO and UTN Singapore) Conference on Polluant Toxic Ions Science (20 awardees among 821 at Nanophotonics in Japan (Dec. and Molecules) for Ionescu Elena applicants) for her works on “Shape 2015) for his works on “Quantum (LNIO): “Optical detection of water 1 - Nature Photonics 5 - NL Dynamics 8 - ACS Photonics memory polymers are invited in Coherent Absorption of Plasmons polluants/nanoparticles and their Dual-Comb spectroscopy with Collective dynamics of periodic In-line concentration sensitivity in vehicles“. With Entangled Photons“, Nature toxicity to living microorganisms”. frequency-agile lasers NL oscillators single molecule dynamic-SERS commun. and Light (Guanghui Yuan Millot et al. [LICB] Bitar et al [FEMTO-ST] Finot et al. [LICB] et al.). 2 - Optics express 6 - Physical Review Letters 9 - Physical Review B Dense arrays of mm-sized glass lenses Optimally coherent Kerr combs Wave propagation in Best student poster at the Vincent Placet was awarded Albero et al. [FEMTO-ST] generated with crystalline WGM two-dimensional viscoelastic European Frequency and with the “Prix Daniel resonators, Chembo et al. metamaterials Time Forum (EFTF) 2016 for Valentin“ during the National 3 - Nano letters [FEMTO-ST & ICB] Laude et al. [FEMTO-ST] Souleymane Diallo (PhD at days of composite materials, On-Chip hybrid photonic-plasmonic FEMTO) for his works entitled a national scientific light concentrator 7 - IEEE Sensors Journal 10 - Scientific reports “Brillouin scattering in a Lithium conference organised by Blaize et al. [LNIO] Swept Source OCT endomicroscope Plasmonic mode interference fluoride crystalline resonator for the French association of Struk et al. [FEMTO-ST] & fano resonances microwave generation“. composite materials. 4 - Nature Communications Nicolas, Maurer et al [LNIO] Laser chimeras Larger et al. [FEMTO-ST]

20 Labex ACTION 21 Labex ACTION and EDUCATION In close collaboration with universities, doctoral and engineering schools, ACTION is willing to implement a higher education project which aims to guarantee the A national challenge taken up! excellence of its program. A hovercraft demonstrator designed by our students!

Eleven students (4 from the second year of the ”CMI SCUBE” and 7 in the first year of the Master ”Mechanics and engineering”) took up the national challenge launched by a french TV program called ”On n’est pas que des cobayes” (may Internships 2015, France 5) by designing and 29 developping within 1 month an air- The Labex ACTION offers internship opportunities to cushioned structure able to carry French and foreign students (from Bachelor to Master’s several people. degrees) which take place within one of its research (c) L. Godard/UFC labs from 4 to 6 months.

Development of a miniaturised explosive detector based on Dynamic Raman Nanospectroscopy (internship made by Aurélien Griffart and supervised by E. Finot / ICB)

4 Masters of Engineering (CMI) An innovative educational program that fosters cross-pollination between research and engineering fields 25 Merit scholarships Each year, the Labex ACTION provides Founded in 2011, FIGURE is a national network that gathers scholarships to highly ranked students wishing more than 22 French Universities which has been implementing A new approach to acquire both technical to pursue studies at Phd level after their studies an innovative five-year Master called ”CMI” (Cursus Master and scientific skills from the bachelor’s to in one of the masters of the universities of en Ingénierie) in conformity with international educational the master’s degree: Burgungy-Franche-Comté and Troyes. standards. Applicants are selected by the Masters’ Specialization (theory, concept, The mission of FIGURE is to advance knowledge and educate technology) 20 managers on the following criteria: the students in a selective, highly demanding and stronger 20 • Excellence in academic results, Pre-requisites (mathematics, excellence engineering studies, within a major scientific informatics, physics...) • Interest in the Labex topics, research environment and along with the best training in Social % 10 • Willingness to pursue a PhD within one of the Socio-economic and cultural Sciences and Humanities. openness founding labs. 50 Openness towards other The international openness is also part of the major strategic disciplines priorities of the CMI (quality of partnerships, ambitious program of student mobility, scientific exchanges). The CMIs include 4 components, 3 projects and 3 internships in the area of: A national French Engineering Award 2015 exceeds 150°C. Thus, this kind of equipment can be ACTION gave its strong support to the University of - Engineering discovery, integrated into an industrial process that generates Franche-Comté for the launch of 4 CMIs and through the - Research lab experience, This award aims at rewarding players from the heat and converts this into electricity, or recycles the financial support of educational projects. - Industrial internships. engineering sector for the quality of the design and heat from vehicle exhausts to reduce its consumption. conduct of an exceptional project - in France or abroad, whether it deals with infrastructure and industrial products Pierre Ranc, who is a previous merit-based scholarships (transport, energy, networks), public facilities, buildings, award student of the Labex ACTION, has contributed to industrial buildings, complex systems (services and this project and now holds a Cifre thesis at ASSYSTEM. CMI SCUBE CMI Energy H3E methods) or industrial processes. Smart Structures & Energy, Hydrogen & Systems Energy Efficiencay The french company ASSYSTEM in collaboration with FEMTO-ST have been working on the development of a CMI PICS CMI Computing Photonics, versatile and innovative engine. Inspired by the Ericsson Software engineering, micro & nanotechnologies, cycle, the Energine engine can produce mechanical or distributed systems electrical energy from any source whose temperature time-frequency

Contact: [email protected] - http://figure-network.org

22 Labex ACTION 23 5 chairs of excellence

Key distinctions (CNRS medalists, ERC horlders, fellow members) In order to increase its research quality level and its attractiveness, the Labex ACTION has recruited top academic staff at international level whose mission is: • To undertake an ambitious research project with a visible impact, • To contribute to the ”Master of Engineering” curricula related to the Labex ACTION through specialized courses, He is involved in a H2020 ICT Project (Jan. 2016) • To develop international partnerships.

PLASMOfab is a 3-year collaborative project which aims to develop CMOS compatible plasmonics in a PhD Grenoble INPG 2007 (best thesis) Ausrine BARTASYTE generic planar integration Postdoc at Oxford Univ. & LMGP process as the means to FEMTO-ST and UFR ST/UFC consolidate photonic and Sabbatical leave @Harvard Univ. (2014-2017) electronic integration. 1 ANR JC grant 2013, 1 project TDK- EPCOS Chemical and strain engineering Alain Dereux The projects brings together 10 Bertrand Kibler Sarah Benchabane Michael Gauthier 43 papers in intl. journals, 8 invited leading academic and research of single crystals and thin films of CNRS Silver (2015) CNRS INP Bronze CNRS INSIS Bronze CNRS INSIS Bronze presentations institutes and companies. LiNbO3/LiTaO3 Nanophotonics and (2012) (2012) (2011) plasmonics Optics linked to Acousto-optics and Micro robotics hydrodynamics phoXonics Example of project: CIFRE fellowship with TDK EPCOS (2012-2015) Advanced materials and cost-effective industrial process for efficient acoustic devices Partners: TDK EPCOS (the world market leader in RF devices), Frec’n’sys, Femto engineering

ERC ”PULSAR”

Pushing Ultrafast LaSer PhD in Electrical Engineering 2009 mAterial processing into a new Project Manager @EIFER Germany Nadia STEINER Regime of plasma-controlled 2 patents FEMTO-ST and IUT BM ablation 14 papers in PR Journals (2014-2017)

PULSAR’s unconventional Diagnostic & Pronostic of concept is to control plasma generation, confinement, fuel cell Systems: towards Fault excitation and stability. An Tolerant Control François Courvoisier ambitious experimental and Alexandre Bouhelier Julien Fatome Yanne Chembo numerical research program ERC Advanced Grant will push the frontiers of laser ERC Starting grant ERC Starting grant ERC Starting grant (2015-2020) processing to unprecedented (2012-2017) (2012-2017) (2011-2016) precision, speed and SWIFT project: PETAL project: NextPhase: NEXT PhD Nancy 1978 Jean-Pierre AUBRY Prix Aimé coton Optical wireless Polarization generation of microwave predictability. Various positions (DT, CEO) in French FEMTO-ST and ENSMM (2016) communication at condEnsation for PHotonic systems for & Swiss industries up to 2012 - nanoscale assisted by Telecom AppLications AeroSpace Engineering (2015-2017) surface plasmons ERC PoC ”VERSYT” Consultant since 2012 (2013-2018) 50+ articles in journals & conf. High performance WGM optical proceedings resonators optimisation for low Robert E. Hopkins noise single/multiple wavelength Leadership Award devices (2016, OSA)

John received this award for his tireless support over Research Engineer 2009 - 2011 Julien PROUST many years of international PhD Troyes, 2014 LNIO and UTT (2015-2018) collaboration in science, in Postdoc @Institut Fresnel, 2015 particular his remarkable 2 patents leadership in creating the Pesticide DNA-damages probe 10 PR papers, 10 proceed. 2015 UNESCO International by optical nano-sensor Year of Light. John Dudley Thibaut Sylvestre Guy Millot Christophe Gorecki

CNRS INSIS Silver (2013) Fabry de Gramont Fellow OSA Elected in the Board ERC Advanced grant (2011-2016) MULTIWAVE prize from the member (2013) for of Directors of SPIE (2013) project: Studies of Extreme Nonlinear and Rogue Société Française numerous pioneering Annual prize of the Wave Phenomena d’Optique (2012) contributions in European Society of Optics ERC Proof of Concept Grant Nonlinear photonics nonlinear optical (2012) President of the European Physical Society until physics PhD in Optics 2011 Aurélien COILLET 2015 Postdoc positions @ ICB and UB (2015-2018) FEMTO-ST & NIST 24 articles in PR journals Smart Lasers: hybrid fiber- 3 invited talks nanophotonics lasers for 1 book chapter metrology, coherent data transmission, and spectroscopy

24 Labex ACTION 25 A CREATHES award for Joël Cabrel TCHAHAME NOUGNIHI Olivier DEMICHEL Dynamic Control of Opto-Electronic Properties of Plasmonic Nano-Antenna During the regional congress dedicated to ”PhD students & Industry” (Belfort, 2014), the French company CREATHES awarded Jöel in the category Olivier managed light-matter interactions at the nanoscale with an ultrafast dynamics. ”Industrial perspectives ” for his capacity to project his works towards a Metallic nano-structures are adequte for this purpose due to their ability to confine light concrete industrial application. at the nanoscale by plasmonic resonances. Olivier showed that the spatial or temporal shaping of an optical excitation provides Joël is a PhD supported by the Labex ACTION and works within the Optics a control on both nonlinear optical properties and electronic dynamics of such nano- department of FEMTO-ST in the field of Brillouin effects and is author of antenna. several high quality papers (Optics Letters, 2015 Frontiers in Optics 2015). This work provided publications in Optics Express, Physical Review Letters and ACS Photonics.

19 thesis (2012-2015) 30 post-doctoral missions (2012-2016)

SMART SKINS SMART SENSORS SMART SKINS SMART SENSORS • DOAN Dinh Dong (2012-2015) PHM of composite • PRASAD Rohit (2012-2015) Optimization of an ultra- • PELTIER Fabienne (2014-2015) Laser nano- • ARAPAN Lilia (Moldavia 2014-2015) Optimized Packaging structures based on acoustic emissions compact spectrometer for the realization of SPR sensor microstructuration laser for SHM of SAW Stress Sensors • DO Quan Huu (2012-2015) Semi-decentralized networks: Device Integration • SEMALTIANOS Nikolaos (Greece, 2014-2015) Laser • CAPUTO Roberto (Italy, 2015-2016) Development of approximation of optimal control of distributed systems • OUELLET Samuel (2014-2017) Multifunction nanoparticles: nano-microstructuration laser for SHM colour-changing stretchable materials. • KHARRAT Mohamed (Tunisia, 2013-2014) PHM of • APUZZO Aniello (Italy, 2013-2014) Integrated • BITAR Diala (2013-2016) Collective dynamics and soliton- Synthesis and proprieties composite structures nanoplasmonics for biosensing applications based waveguides in periodic nonlinear lattices for vibration • ORANDROU Stevens (Togo, 2014-2015) SHM using • RENAULT Mickael (2013-2013) Compact interferometer energy harvesting applications CMUTs transducer based on surface plasmon phase resonance • TRENCHANT Vincent (2014-2017) A port-Hamiltonian INFORMATION PROCESSING SYSTEMS • GALISULTANOV Ayrat (Russia, 2015-2016) SHM using • HMIMA Abdelhamid (Morocco, 2014-2015) Compact formulation of a 2D boundary controlled acoustic system • MEZZI Rania (2015-2019) Fault Tolerant Fuel Cell Systems CMUTs interferometer transducer based on surface plasmon • FERCHICHI Abdelkerim (Tunisia, 2015-2016) Fabrication phase resonance • OLIVERI Stefania (2014-2017) Thin films & heterostructures of CMUTS • MALAPERT Julien (2015-2016) Development of electric of LiNbO for acoustical/optical integrated devices 3 • FAUX Damien (2014) Virtual prototyping tool for robust vias MICRO MECHATRONICS • PENKOVSKYI Bogdan (2013-2016) Theory and Modeling design of structures • LE BERRE Matthieu (2014) Distributed estimation of • CHIKHAOUI Mohamed Taha (2013-2016) Embedded of Photonic Neuromorphic Computing with Nonlinear Delay physical fields by autonomous sensors actuation on deformable tubesApplication to an active micro- Dynamics MICRO MECHATRONICS endoscope • TCHAHAME NOUGNIHI Joel (2013-2016) Opto-Acoustic • MALAPERT Julien (2012-2013) Smart micro-convoyor INFO PROCESSING SYSTEMS • TANGUY Quentin (2014-2017) MOEMS mirror design, Interactions in Optical Microfibers • COT Amélie (2015-2016) Electrosynthesis and • NGUYEN Kim (Vietnam, 2014-2015) Surface Phonon- model, layout • MEISTERHANS Maiwen (2014-2017) Near-field dynamics characterization of polymer films on silicon substrates for plasmon interaction based on locally resonant • HUSSEIN Hussein (2012-2015) Digital Microrobotics: in nanostructured components applications in micromanipulation metamaterials Modeling, Design and Fabrication of Curved Beams, • OUADGHIRI IDRISSI Ismail (2014-2017) PlasmA Shaping • BELKHIR Walid (2015) A Multiscale Model Derivation and • WANG Yan-Feng (China, 2015-2016) Longitudinal near- U-shaped Actuators and Multistable Microrobots by bessel pulseS: novel optical Sources and ablation Simulation Tool for MEMS Arrays field coupling between resonant elements in acoustic • BOILLOT Nicolas (2012-2015) Nano-wireless network mechanisms • TUCCI Knychala (Brazil, 2014-2015) Simulator of micro metamaterials robots,VisibleSim • MARCHAL Rémi (2015-2016) Integrated resonators simulator for MEMS microrobots • XIE Zhihua (2012-2015) New antenna-fiber systems • ZEGGARI Rabah (2012-2014) Plasmonic-Actoustic • MORIN Philippe (2013-2014) Mid-infrared dual-comb • BILLOT Margot (2013-2016) Development of new research and development for nanoemission detection Device for Diagnosis spectroscopy in hollow core glass waveguides for human devices for multi-asperity micro-nanofriction and adhesion • STRUK Przemyslaw (Poland, 2014-2015) Endoscopic breath analysis characterization, and for analysis of controlled triboactive system for early cancer detection based on MOEMS Mirau • DEMICHEL Olivier (2012-2013) Dynamic control of opto- surfaces micro interferometer and Swept Source Optical Coherence electronic properties of plasmonic nano-antenna • MALOUM Fatah (2014-2017) dynamic mechanical Tomography method • BAYLON Antonio (Mexico, 2015-2016) Smart nonlinear characterization of isotropic materials by Scanning control unit based on a photonic reservoir computing Microdeformation Microscope experImental setup Financial partners: • AMRANI Foued (2013-2014) Nonlinear propagation 60% in optical fibers from UV to mid-IR spectral range: of PhDs and supercontinuum generation and optical rogue waves • BABILLOTTE Philippe (2015-2016) Development of an post-PhDs are ultra-short terahertz source and application to molecular Associated Doctoral schools: foreigners processes • SADANI Benattou (2013) Photonic crystals for EEG • ED SPIM (ED 37) analysis • ED CARNOT - PASTEUR (ED 553) • PETRONE Raffaele (Italy, 2014-2015) Accelerated aging • ED UTT (ED 361) of PEM fuel cells

26 Labex ACTION 27 R&T partners Main facilities National and international partners from 32 countries

Troyes NANO’MAT Nanophotonics Belfort Montbéliard Dijon ARCEN Besançon MIMENTO* Clean room Nanocharacterization Quartz-Tech pilot line PICASSO SAW devices Photonics characterization Labex FIRST-TF Equipex Robotex Equipex REFIMEVE+ Equipex OSC IMP

Legend: Lab sites Platforms

More than 100 international R&T partners among which 80 are co-authors of our peer-review papers MIMENTO (non-exhaustive list): A national level clean room microfabrication facility of 1200 m2 belonging to the • Algeria: Univ Tizi Ouzou • Iran: IUST • Singapore: CNRS Thales NTU RENATECH national network. • Australia: Australian Natl Univ, • Iraq: Univ Babylon • South Korea: Univ Sungkyunkwan Certified ISO 9001, this center includes: Swinburne Univ Technol • Israel: Weizmann Inst Sci • Spain: Donostia Int Phys Ctr, Inst • a “nanotechnology” module (nano-engraving, nano-lithography, etc.), • Austria: Vienna Univ Technol Photon Sci, Univ Autonoma Madrid, • a “micromanufacturing” module (3D structures, piezoelectric materials, hybrid • Italy: Univ Brescia, Univ Calabria, Univ Politecn Valencia micromechanics) • Belgium: Univ Libre Bruxelles Univ Ferrara, CNR • Sweden: Univ Uppsala • Quartz-tech, a pooled “R&D - Industrial innovation” module (industrial production line for • Cameroon: Polytech Sch Yaounde, • Japan: Toyota Technol Inst, Univ piezoelectric micro-nano components) Univ Yaounde I Tokyo • Switzerland: Univ Geneva • Canada: Univ McGill, Univ Alberta, • Lebanon: Amer Univ Beirut, Univ • Thailand: King Mongkuts Univ French National Network of Large Technological Univ Montreal, Univ Sherbrooke, Lebanese, Univ Balamand Technol Thonburi Facilities for Basic Technological Research Univ Laval http://www.rtb.cnrs.fr • Lithuania: Univ Vilnius • Tunisia: Tunis El Manar Univ UTM, • China: Univ Jinan, Univ Nanjing, IPEIN Univ Tsinghua, Beijing Jiaotong Univ • Poland: Warsaw Institute of Aviation, PICASSO Marie Curie Sklodowska Univ, • Ukraine: NAS Ukraine, Taras Optical telecommunications platform for design, analysis and simulation of optical • Colombia: Inst Tecnol Metropolitano Wroclaw Univ Technol, Nicholas Shevchenko National Univ Kyiv Copernicus Univ, Polish Acad Sci systems • England: Univ Aston, Univ Warwick, • USA: Argonne Natl Lab, CALTECH, Univ Southampton • Russia: ITMO Univ, Moscow State Carnegie Mellon Univ, Georgia NANO’MAT Univ, Russian Acad Sci, Russian Inst Technol, IBM Almaden Res • Germany: Fraunhofer IEN, Quantum Ctr, Novosibirsk State Univ Ctr, Rensselaer Polytech Inst, Univ Nanoscale material characterization and fabrication Karlsruhe Inst Technol, Univ Arizona, Univ Cent Florida, Univ Stuttgart, EIFER, Max Planck, Univ • Saudi Arabia: Prince S. B. A. Univ Florida, Univ Maryland, NIST, Oak Munich ARCEN • Scotland: Heriot Watt Univ, Univ Ridge Natl Lab, Texas A&M Univ... Equipments for nano-characterization and other analysis techniques (certified ISO 9001) • Hungary: Hungarian Acad Sci Strathclyde

Other platforms: Industrial partners Technology transfer • Mechanical characterization & microfabrication platforms (ISO 9001) Airbone, Adamant Composites, AIXTRON, Kapteos, SATT Grand Est (Society for acceleration of technology • High power Fuel Cells experimental Platform AxynTeC, Cedrat Technologies, CHRU Besançon, Crystal transfer) device, Dixi microtechniques, Freq|n|Sys, GVR Trade, iXBlue, Lovalite, Mahytec, MT Aerospace, MyOCCS, Competitiveness clusters and european platform Nanolane, Nanovation, NASA, Percipio Robotics, Collaborations with other projects of Excellence: PSA Peugeot-Citroën, Resolution spectra SS, Safran, Labex FIRST-TF (Facilities for Innovation, Research, Services, Training in Aircelles, SENSeOr, SNECMA, Spitzer Eurovrac, ST- Time & Frequency) Microelectronics, TDK-EPCOS... Equipex REFIMEVE+ (European metrological fiber network) Equipex OSC IMP (Oscillator instability measurement platform) Technology development: FEMTO Engineering Equipex ROBOTEX (micronano-robotics platform)

28 Labex ACTION 29 Labex ACTION c/o Institut FEMTO-ST 15 B avenue des Montboucons 25030 Besançon Cedex - FR

www.labex-action.fr

Coordinator of the Labex ACTION Michel de Labachelerie [email protected] - Tel: +33 (0)3 63 08 24 10

Assistant Partnerships & Communications Sandrine Chatrenet Claudia Laou-Huen [email protected] [email protected] Tel: +33 (0)3 63 08 24 04 Tel: +33 (0)3 63 08 24 03

DEMO 1 DEMO 2 DEMO 3 DEMO 4 DEMO 5 M. Ouisse Y. Chembo L. Larger N. Andreff T. Maurer Y. Le Gorrec C. Finot J. Plain E. Lesniewska E. Finot

WP 1 WP 2 WP 3 WP 4 WP 5 R. Oltra V. Laude H. Maillotte C. Gorecki O. Kouchnarenko J.-C. Gelin S. Blaize G. Millot L. Markey S. Cogan

May 2016 Writing and editing: [email protected] ©Ludovic Godard/UFC, Eric Chatelain, sxc.hu, freepik, FEMTO-ST, UB, UTT Any reproduction forbidden without approval of the author.

30 Laboratory of excellence ACTION (contract N°: ANR-11-LABX-0001-01)