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Progresses in Synthesis and Application of Sic Films: from CVD to ALD and from MEMS to NEMS
micromachines Review Progresses in Synthesis and Application of SiC Films: From CVD to ALD and from MEMS to NEMS Mariana Fraga 1,* and Rodrigo Pessoa 2,* 1 Instituto de Ciência e Tecnologia (ICT), Universidade Federal de São Paulo (Unifesp), São José dos Campos SP 12231-280, Brazil 2 Laboratório de Plasmas e Processos (LPP), Instituto Tecnológico de Aeronáutica (ITA), São José dos Campos SP 12228-900, Brazil * Correspondence: [email protected] (M.F.); [email protected] (R.P.) Received: 2 August 2020; Accepted: 20 August 2020; Published: 24 August 2020 Abstract: A search of the recent literature reveals that there is a continuous growth of scientific publications on the development of chemical vapor deposition (CVD) processes for silicon carbide (SiC) films and their promising applications in micro- and nanoelectromechanical systems (MEMS/NEMS) devices. In recent years, considerable effort has been devoted to deposit high-quality SiC films on large areas enabling the low-cost fabrication methods of MEMS/NEMS sensors. The relatively high temperatures involved in CVD SiC growth are a drawback and studies have been made to develop low-temperature CVD processes. In this respect, atomic layer deposition (ALD), a modified CVD process promising for nanotechnology fabrication techniques, has attracted attention due to the deposition of thin films at low temperatures and additional benefits, such as excellent uniformity, conformability, good reproducibility, large area, and batch capability. This review article focuses on the recent advances in the strategies for the CVD of SiC films, with a special emphasis on low-temperature processes, as well as ALD. In addition, we summarize the applications of CVD SiC films in MEMS/NEMS devices and prospects for advancement of the CVD SiC technology. -
Transport of Dangerous Goods
ST/SG/AC.10/1/Rev.16 (Vol.I) Recommendations on the TRANSPORT OF DANGEROUS GOODS Model Regulations Volume I Sixteenth revised edition UNITED NATIONS New York and Geneva, 2009 NOTE The designations employed and the presentation of the material in this publication do not imply the expression of any opinion whatsoever on the part of the Secretariat of the United Nations concerning the legal status of any country, territory, city or area, or of its authorities, or concerning the delimitation of its frontiers or boundaries. ST/SG/AC.10/1/Rev.16 (Vol.I) Copyright © United Nations, 2009 All rights reserved. No part of this publication may, for sales purposes, be reproduced, stored in a retrieval system or transmitted in any form or by any means, electronic, electrostatic, magnetic tape, mechanical, photocopying or otherwise, without prior permission in writing from the United Nations. UNITED NATIONS Sales No. E.09.VIII.2 ISBN 978-92-1-139136-7 (complete set of two volumes) ISSN 1014-5753 Volumes I and II not to be sold separately FOREWORD The Recommendations on the Transport of Dangerous Goods are addressed to governments and to the international organizations concerned with safety in the transport of dangerous goods. The first version, prepared by the United Nations Economic and Social Council's Committee of Experts on the Transport of Dangerous Goods, was published in 1956 (ST/ECA/43-E/CN.2/170). In response to developments in technology and the changing needs of users, they have been regularly amended and updated at succeeding sessions of the Committee of Experts pursuant to Resolution 645 G (XXIII) of 26 April 1957 of the Economic and Social Council and subsequent resolutions. -
Gas-Phase Chemistry of Methyl-Substituted Silanes in a Hot-Wire Chemical Vapour Deposition Process
University of Calgary PRISM: University of Calgary's Digital Repository Graduate Studies The Vault: Electronic Theses and Dissertations 2013-08-27 Gas-phase Chemistry of Methyl-Substituted Silanes in a Hot-wire Chemical Vapour Deposition Process Toukabri, Rim Toukabri, R. (2013). Gas-phase Chemistry of Methyl-Substituted Silanes in a Hot-wire Chemical Vapour Deposition Process (Unpublished doctoral thesis). University of Calgary, Calgary, AB. doi:10.11575/PRISM/26257 http://hdl.handle.net/11023/891 doctoral thesis University of Calgary graduate students retain copyright ownership and moral rights for their thesis. You may use this material in any way that is permitted by the Copyright Act or through licensing that has been assigned to the document. For uses that are not allowable under copyright legislation or licensing, you are required to seek permission. Downloaded from PRISM: https://prism.ucalgary.ca UNIVERSITY OF CALGARY Gas-phase Chemistry of Methyl-Substituted Silanes in a Hot-wire Chemical Vapour Deposition Process by Rim Toukabri A THESIS SUBMITTED TO THE FACULTY OF GRADUATE STUDIES IN PARTIAL FULFILMENT OF THE REQUIREMENTS FOR THE DEGREE OF DOCTOR OF PHILOSOPHY DEPARTMENT OF CHEMISTRY CALGARY, ALBERTA August, 2013 © Rim Toukabri 2013 Abstract The primary decomposition and secondary gas-phase reactions of methyl- substituted silane molecules, including monomethylsilane (MMS), dimethylsilane (DMS), trimethylsilane (TriMS) and tetramethylsilane (TMS), in hot-wire chemical vapour deposition (HWCVD) processes have been studied using laser ionization methods in combination with time of flight mass spectrometry (TOF-MS). For all four molecules, methyl radical formation and hydrogen molecule formation have been found to be the common decomposition steps on both tungsten (W) and tantalum (Ta) filaments. -
Ionic Compound Ratios Time: 1 -2 Class Periods
Collisions Lesson Plan Ionic Compound Ratios Time: 1 -2 class periods Lesson Description In this lesson, students will use Collisions to explore the formation of ionic compounds and compound ratios. Key Essential Questions 1. What makes up an ionic compound? 2. Are ionic compounds found in common ratios? Learning Outcomes Students will be able to determine the ionic compound ratio of an ionic compound. Prior Student Knowledge Expected Cations are postiviely charged ions and anions are negatively charged ions. Lesson Materials • Individual student access to Collisions on tablet, Chromebook, or computer. • Projector / display of teacher screen • Accompanying student resources (attached) Standards Alignment NGSS Alignment Science & Enginnering Practices Disciplinary Core Ideas Crosscutting Concepts • Developing and using • HS-PS-12. Construct and • Structure and Function models revise an explanation for the • Construcing explanations outcome of a simple chemical and designing solutions rection based on the outermost electron states of atoms, trends int he periodic table, and knowl- edge of the partterns of chemi- cal properties. www.playmadagames.com ©2018 PlayMada Games LLC. All rights reserved. 1 PART 1: Explore (15 minutes) Summary This is an inquiry-driven activity where students will complete the first few levels of the Collisions Ionic Bonding game to become introduced to the concept of ionic bonding and compound ratios. Activity 1. Direct students to log into Collisions with their individual username and password. 2. Students should enter the Ionic Bonding game and play Levels 1-6 levels. 3. Have your students answer the following questions during gameplay: 1. What combination of ions did you use to successfully match a target? 2. -
A Study of Lithium Precursors on Nanoparticle Quality
Electronic Supplementary Material (ESI) for Nanoscale. This journal is © The Royal Society of Chemistry 2021 Electronic Supplementary Information Elucidating the role of precursors in synthesizing single crystalline lithium niobate nanomaterials: A study of lithium precursors on nanoparticle quality Rana Faryad Ali, Byron D. Gates* Department of Chemistry and 4D LABS, Simon Fraser University, 8888 University Drive Burnaby, BC, V5A 1S6, Canada * E-mail: [email protected] This work was supported in part by the Natural Sciences and Engineering Research Council of Canada (NSERC; Grant No. RGPIN-2020-06522), and through the Collaborative Health Research Projects (CHRP) Partnership Program supported in part by the Canadian Institutes of Health Research (Grant No. 134742) and the Natural Science Engineering Research Council of Canada (Grant No. CHRP 462260), the Canada Research Chairs Program (B.D. Gates, Grant No. 950-215846), CMC Microsystems (MNT Grant No. 6345), and a Graduate Fellowship (Rana Faryad Ali) from Simon Fraser University. This work made use of 4D LABS (www.4dlabs.com) and the Center for Soft Materials shared facilities supported by the Canada Foundation for Innovation (CFI), British Columbia Knowledge Development Fund (BCKDF), Western Economic Diversification Canada, and Simon Fraser University. S1 Experimental Materials and supplies All chemicals were of analytical grade and were used as received without further purification. Niobium ethoxide [Nb(OC2H5)5, >90%] was obtained from Gelest Inc., and benzyl alcohol (C7H7OH, 99%) and triethylamine [N(C2H5)3, 99.0%] were purchased from Acros Organics and Anachemia, respectively. Lithium chloride (LiCl, ~99.0%) was obtained from BDH Chemicals, and lithium bromide (LiBr, ≥99.0%), lithium fluoride (LiF, ~99.9%), and lithium iodide (LiI, 99.0%) were purchased from Sigma Aldrich. -
S41467-020-19206-W.Pdf
ARTICLE https://doi.org/10.1038/s41467-020-19206-w OPEN Unravelling the room-temperature atomic structure and growth kinetics of lithium metal Chao Liang 1, Xun Zhang1, Shuixin Xia1, Zeyu Wang1, Jiayi Wu1, Biao Yuan 1, Xin Luo1, Weiyan Liu1, ✉ Wei Liu 1 &YiYu 1 Alkali metals are widely studied in various fields such as medicine and battery. However, limited by the chemical reactivity and electron/ion beam sensitivity, the intrinsic atomic 1234567890():,; structure of alkali metals and its fundamental properties are difficult to be revealed. Here, a simple and versatile method is proposed to form the alkali metals in situ inside the transmission electron microscope. Taking alkali salts as the starting materials and electron beam as the trigger, alkali metals can be obtained directly. With this method, atomic resolution imaging of lithium and sodium metal is achieved at room temperature, and the growth of alkali metals is visualized at atomic-scale with millisecond temporal resolution. Furthermore, our observations unravel the ambiguities in lithium metal growth on garnet-type solid electrolytes for lithium-metal batteries. Finally, our method enables a direct study of physical contact property of lithium metal as well as its surface passivation oxide layer, which may contribute to better understanding of lithium dendrite and solid electrolyte interphase issues in lithium ion batteries. ✉ 1 School of Physical Science and Technology, ShanghaiTech University, Shanghai 201210, China. email: [email protected] NATURE COMMUNICATIONS | (2020) 11:5367 | https://doi.org/10.1038/s41467-020-19206-w | www.nature.com/naturecommunications 1 ARTICLE NATURE COMMUNICATIONS | https://doi.org/10.1038/s41467-020-19206-w t has been a long history for the research on alkali metals1, the to control the dose-rate of the electron beam. -
Ionic Conductivity of Solid Mixtures
NASA TECHNICAL NOTE NASA-- TN D-4606 d./ *o 0 *o nP LOAN COPY: RRURN TO AFWL (WLIL-2) KIRTLAND AFB, N MEX IONIC CONDUCTIVITY OF SOLID MIXTURES by William L. Fielder Lewis Research Celzter 3 ._i _... Cleveland, Ohio r I t , 1 NATIONAL AERONAUTICS AND SPACE ADMINISTRATION WASHINGTON, D. C. MAY 1968 ,/ I I TECH LIBRARY KAFB, NM ,lllllllllll__ .llllllllll I1111 lllllllllllllllll I 023L03b NASA TN D-4606 IONIC CONDUCTIVITY OF SOLID MIXTURES By William L. Fielder Lewis Research Center Cleveland, Ohio NATIONAL AERONAUTICS AND SPACE ADMINISTRATION For sale by the Clearinghouse for Federal Scientific and Technicol Information Springfield, Virginia 22151 - CFSTI price $3.00 IONIC CONDUCTIVITY OF SOLID MIXTURES by William L. Fielder Lewis Research Center SUMMARY The conductivities of four solid mixtures were determined as a function of tempera ture: (1) the lithium fluoride - lithium chloride eutectic, (2) the lithium chloride - potassium chloride eutectic, (3) the lithium fluoride - sodium chloride eutectic, and (4) a 50-mole-percent mixture of sodium chloride and potassium chloride. Two conductivity regions were obtained for each of the four mixtures. The activation energies for the conductivity for the lower-temperature regions ranged from 14 to 27 kilocalories per mole (59 to 114 kJ/mole). These energies were similar to the cation migration energies for the single crystals of the alkali halides. The conductivity of the mixtures in the lower-temperature regions is best explained by the following mechanism: (1) formation of cation vacancies primarily by multivalent impurities, and (2) migration of the cations through these vacancies. The activation energies for the conductivity of the solid mixtures in the upper- temperature regions ranged from 5 to 9 kilocalories per mole (20 to 39 kJ/mole). -
Process for Separation of Methyltrichlorosilane from Dimethyldichlorosilane
Europaisches Patentamt (19) European Patent Office Office europeen des brevets (11) EP 0 776 902 A1 (12) EUROPEAN PATENT APPLICATION (43) Date of publication: (51) IntCI.6: C07F7/20 04.06.1997 Bulletin 1997/23 (21) Application number: 96119093.1 (22) Date of filing: 28.11.1996 (84) Designated Contracting States: • Halm, Roland Lee DE FRGBITNL Midland, Michigan 48640 (US) • Mclntyre, Michael Andrew (30) Priority: 29.11.1995 US 564550 Midland, Michigan 48640 (US) • Wilding, Oliver K. (71) Applicant: DOW CORNING CORPORATION Lagrange, Kentucky 40031 (US) Midland, Michigan 48686-0994 (US) (74) Representative: Spott, Gottfried, Dr. (72) Inventors: Patentanwalte • Diaz, Michael Spott, Weinmiller & Partner Lexington, Kentucky 40507 (US) Sendlinger-Tor-Platz 11 80336 Munchen (DE) (54) Process for separation of methyltrichlorosilane from dimethyldichlorosilane (57) A process is disclosed for separating methyl- trichlorosilane from dimethyldichlorosilane in a mixture. The process comprises contacting a mixture comprising methyltrichlorosilane and dimethyldichlorosilane with activated carbon, where the methyltrichlorosilane is selectively adsorbed by the activated carbon. The proc- ess allows for the recovery of a dimethyldichlorosilane fraction reduced in methyltrichlorosilane concentration. The methyltrichlorosilane is recovered by desorption from the activated carbon. The present process is espe- cially useful for removing low levels of methyltrichlorosi- lane present as a contaminate in dimethyldichloro- silane. < CM O <7> CO r»- o Q_ LU Printed by Rank Xerox (UK) Business Services 2.14.7/3.4 EP 0 776 902 A1 Description The present invention is a process for separating methyltrichlorosilane from dimethyldichlorosilane in a mixture. The process comprises contacting a mixture comprising methyltrichlorosilane and dimethyldichlorosilane with activated 5 carbon, where the methyltrichlorosilane is selectively adsorbed by the activated carbon. -
Download Author Version (PDF)
Physical Chemistry Chemical Physics Decomposition of Fluoroethylene Carbonate Additive and Glue Effect of Lithium Fluoride Products for Solid Electrolyte Interphase: An Ab-Initio Study Journal: Physical Chemistry Chemical Physics Manuscript ID CP-ART-12-2015-007583.R1 Article Type: Paper Date Submitted by the Author: 03-Feb-2016 Complete List of Authors: Okuno, Yukihiro; Fujifilm Corporation , Ushirogata, Keisuke; FUJIFILM Corporation, Research and Development Headquarters Sodeyama, Keitaro; National Institute for Materials Science, International Center for Materials Nanoarchitectonics Tateyama, Yoshitaka; National Institute for Materials Science, International Center for Materials Nanoarchitectonics Please do not adjust margins Page 1 of 12 Physical Chemistry Chemical Physics PCCP ARTICLE Decomposition of Fluoroethylene Carbonate Additive and Glue Effect of Lithium Fluoride Products for Solid Electrolyte Received 00th January 20xx, Interphase: An Ab-Initio Study Accepted 00th January 20xx ab ab bc bd DOI: 10.1039/x0xx00000x Yukihiro Okuno,* Keisuke Ushirogata , Keitaro Sodeyama and Yoshitaka Tateyama* www.rsc.org/ Additives in the electrolyte solution of lithium-ion batteries (LIBs) have a large impact on the performance of the solid electrolyte interphase (SEI) that forms on the anode and is a key to the stability and durability of LIBs. We theoretically investigated effects of fluoroethylene carbonate (FEC), a representative additive, that has recently attracted considerable attention for the enhancement of cycling stability of silicon electrodes and the improvement of reversibility of sodium-ion batteries. First, we intensively examined the reductive decompositions by ring-opening, hydrogen fluoride (HF) elimination to form vinylene carbonate (VC) additive and intermolecular chemical reactions of FEC in ethylene carbonate (EC) electrolyte, by using density functional theory (DFT) based molecular dynamics and the blue-moon ensemble technique for the free energy profile. -
United States Patent (19) 11) Patent Number: 4,552,973 Feldner Et Al
United States Patent (19) 11) Patent Number: 4,552,973 Feldner et al. (45) Date of Patent: Nov. 12, 1985 54 PROCESS FOR THE PREPARATION OF 2,647,912 8/1953 Barry et al. ......................... 556/469 DMETHYLDCHLOROSLANE 2,717,257 9/1955 Bluestein ............................. 556/469 (75. Inventors: Kurt Feldner; Wolfgang Grape, both 3,384,652 5/1968 Hamilton ............................ 556/469 of Cologne, Fed. Rep. of Germany 4,477,631 5/1984 Faure et al. ......................... 556/469 Primary Examiner-Paul F. Shaver 73 Assignee: Bayer Aktiengesellschaft, Attorney, Agent, or Firm-Sprung, Horn, Kramer & Leverkusen, Fed. Rep. of Germany Woods (21) Appl. No.: 713,501 57 ABSTRACT 22 Filed: Mar. 19, 1985 A process for the preparation of dimethyldichlorosilane (30) Foreign Application Priority Data from the low-boiling and high-boiling by-products of the direct synthesis of methylchlorosilane, comprising Mar. 23, 1984 (DE) Fed. Rep. of Germany ....... 3410644 reacting methyltrichlorosilane simultaneously with the 51) Int. Cl." ................................................ C07F 7/12 low-boiling components having a high content of 52 U.S.C. .................................................... 556/469 methyl groups and with the high-boiling non-cleavable 58 Field of Search ......................................... 556/469 components, in the presence of a catalyst, at a tempera 56) References Cited ture between about 250 C. and 400 C. and under a U.S. PATENT DOCUMENTS pressure of up to 100 bar. 2,647,136 7/1953 Sauer ................................... 556/469 4 Claims, No Drawings 4,552,973 1. 2 minum chloride which, however, is converted to the PROCESS FOR THE PREPARATION OF known catalyst AlCl3 by hydrogen chloride gas fed DIMETHYTLDICHLOROSLANE simultaneously into the reaction mixture. -
University of California Riverside
UNIVERSITY OF CALIFORNIA RIVERSIDE Thermal Decomposition of Molecules Relevant to Combustion and Chemical Vapor Deposition by Flash Pyrolysis Time-of-Flight Mass Spectrometry A Dissertation submitted in partial satisfaction of the requirements for the degree of Doctor of Philosophy in Chemistry by Jessy Mario Lemieux December 2013 Dissertation Committee: Dr. Jingsong Zhang, Chairperson Dr. Christopher Bardeen Dr. David Bocian Copyright by Jessy Mario Lemieux 2013 The Dissertation of Jessy Mario Lemieux is approved: Committee Chairperson University of California, Riverside ACKNOWLEDGMENTS Professor Jingsong Zhang Dr. Steven Chambreau Dr. Kevin Weber Paul Jones Jeff Lefler Mike Fournier Stan Sheldon Professor Christopher Bardeen Professor David Bocian iv DEDICATION This work is dedicated to my parents who taught me the value of curiosity and learning and have always been there for me. v ABSTRACT OF THE DISSERTATION Thermal Decomposition of Molecules Relevant to Combustion and Chemical Vapor Deposition by Flash Pyrolysis Time-of-Flight Mass Spectrometry by Jessy Mario Lemieux Doctor of Philosophy, Graduate Program in Chemistry University of California, Riverside, December 2013 Dr. Jingsong Zhang, Chairperson Flash pyrolysis coupled with vacuum-ultraviolet photoionization time-of-flight mass spectrometry was used to study the thermal decomposition mechanisms of molecules relevant to fuel combustion and the chemical vapor deposition (CVD) of SiGe, SiC, and GeC. For combustion research, the thermal decomposition of benzyl radical, n- alkanes CnH2n+2 (n = 5-8 and 10), 1-butyl radical, and 1-pentyl radical was performed. Benzyl was confirmed to decompose primarily by ejection of H atom after significant isomerization with loss of methyl observed as a minor decomposition pathway. -
(12) United States Patent (10) Patent No.: US 6,524,737 B1 Tanii Et Al
USOO6524737B1 (12) United States Patent (10) Patent No.: US 6,524,737 B1 Tanii et al. (45) Date of Patent: Feb. 25, 2003 (54) METHOD FOR CRUSHING CELL 5,478,664 A 12/1995 Kaneko et al. ............... 429/49 5,888,463 A * 3/1999 McLaughlin et al. ..... 429/49 X (75) Inventors: Tadaaki Tanii, Takasago (JP); Satoshi 6,150,050 A * 11/2000 Mathew et al. ............... 429/49 Tsuzuki, Takasago (JP); Shiro Honmura, Takasago (JP); Takeo FOREIGN PATENT DOCUMENTS Kamimura, Takasago (JP); Kenji Sasaki, Kobe (JP); Masakazu Yabuki, DE 4419.695 8/1995 ............ HO1M/6/52 Takasago (JP); Kiyonori Nishida, WO WO 94/25167 11/1994 ............ HO1M/6/52 Takasago (JP (JP) * cited by examiner (73) Assignee: Mitsubishi Heavy Industries, Ltd., Tokyo (JP) Primary Examiner Stephen Kalafut (*) Notice: Subject to any disclaimer, the term of this (74) Attorney, Agent, or Firm-Crowell & Moring LLP patent is extended or adjusted under 35 U.S.C. 154(b) by 0 days. (57) ABSTRACT This invention provides a safe and efficient method of (21) Appl. No.: 09/555,264 dismantling used lithium ion batteries. More Specifically, the (22) PCT Filed: Sep. 27, 1999 plastic cases which protect Sealed battery cells are removed from the system in a stable and reliable fashion. Valuable (86) PCT No.: PCT/JP99/05255 materials. Such as lithium cobalt oxide, an oxide of a lithium S371 (c)(1), tranStonition metal compound,COmpOund aluminum and copperCOoper must bbe (2), (4) Date: Jul. 25, 2000 Separated and recovered. The invention is distinguished by the fact that it entails the following processes.