Vacuum Instrumentation and Components

Visionary sensor technology

The one stop shop for SEMI applications Product Overview

CVD

PVD

ALD

Oxidation/Gate Dielectrics EPI

Crystal Pulling Ion Implanting Lithography Etch RTP Back end processing

PROCESS PRESSURE CONTROL PROCESS PRESSURE CONTROL SYSTEM PRESSURE CONTROL PROCESS PRESSURE CONTROL PROCESS PRESSURE CONTROL Capacitance Family Capacitance Family Capacitance/Pirani/Hot Ion/Cold Cathode Family Capacitance Family Capacitance/Pirani Family Fittings SYSTEM PRESSURE CONTROL SYSTEM PRESSURE CONTROL SYSTEM PRESSURE CONTROL SYSTEM PRESSURE CONTROL Capacitance/Pirani Family Cold Cathode/Pirani Family Capacitance/Pirani/Hot Ion/Cold Cathode Family Capacitance/Pirani/Hot Ion/Cold Cathode Family INFICON VACUUM GAUGES AND COMPONENTS AT A GLANCE Fittings Fittings Fittings Fittings Heated Components Highy accurate pressure measurement instrumentation Wide range combination gauges Large variety of high quality vacuum fittings

CAPACITANCE DIAPHRAGM GAUGEE

STRIPE EDGE GEMINI PIRANI CAPACITANCE HEATED PORTER SKY SKY HEATED CDG045Dhs – CDG045D2, CUBE COLD CATHODE GAUGE COMBINATION GAUGE PIRANI HOT ION GAUGE COMPONENTS CDG020D CDG025D CDG045D –CDG200D CDG200Dhs CDG100D2 CDGsci MAG500, MPG500 PCG55x PSG5xx BPG, BCG, HPG FITTINGS AND ASSEMBLIESES

More gauge Unprecedented Excellent long term Faster than 1 ms Smallest instrument True high precision Long lifetime in harsh Double sensor technology Stainless steel Triple sensor technology Competitively priced Fully vulcanized for less Full scale stability stability response time in class pressure measurement environments Tungsten, Nickel or fully measuring cell 13 decades in one sensor – Worldwide logistics surface heater Smallest Environmental Outstanding span Proven ceramic sensor Proven ceramic Full stable output Zero maintenance ceramic coated sensor Streamlined design saves cost and tool space Designed to strict inter- Customized design in class independence and zero stability Excellent long term sensor Flexible communication Excellent ignition High accuracy and gas Replaceble sensor Long lifetime national standards with molded hard shell covers Outstanding Adaptable sensor High accuracy stability High precision properties type independence above Cool to the touch surface stability integration Gas type independent measurement 10 mbar

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Asia and Paciﬁca

CHINA KOREA INFICON Ltd. INFICON Ltd. Beijing Kyunggi-do Phone: +86.10.6590.0164 Phone: +82.31.783.2942 E-mail: reach.china@inficon.com E-mail: [email protected]

INDIA SINGAPORE and AUSTRALIA INFICON PVT. Ltd. INFICON PTE Ltd. Pune Singapore Phone: +91.20.4120.4854 Phone: +65.6631.0300 Europe, Middle East E-mail: reach.india@inficon.com E-mail: [email protected] Americas and Africa JAPAN TAIWAN INFICON Inc. INFICON GmbH INFICON Co. Ltd. INFICON Co. Ltd. East Syracuse, NY Cologne Yokohama-shi, Kanagawa-ken Chupei City Phone: +1.315.434.1100 Phone: +49.221.567.881.00 Phone: +81.45.471.3328 Phone: +886.3.552.5828 E-mail: [email protected] E-mail: [email protected] E-mail: [email protected] E-mail: [email protected]

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