Visionary sensor technology Vacuum Instrumentation and Components The one stop shop for SEMI applications Product Overview CVD PVD ALD Oxidation/Gate Dielectrics EPI Crystal Pulling Ion Implanting Lithography Etch RTP Back end processing PROCESS PRESSURE CONTROL PROCESS PRESSURE CONTROL SYSTEM PRESSURE CONTROL PROCESS PRESSURE CONTROL PROCESS PRESSURE CONTROL • Capacitance Family • Capacitance Family • Capacitance/Pirani/Hot Ion/Cold Cathode Family • Capacitance Family • Capacitance/Pirani Family • Fittings SYSTEM PRESSURE CONTROL SYSTEM PRESSURE CONTROL SYSTEM PRESSURE CONTROL SYSTEM PRESSURE CONTROL • Capacitance/Pirani Family • Cold Cathode/Pirani Family • Capacitance/Pirani/Hot Ion/Cold Cathode Family • Capacitance/Pirani/Hot Ion/Cold Cathode Family INFICON VACUUM GAUGES AND COMPONENTS AT A GLANCE • Fittings • Fittings • Fittings • Fittings • Heated Components • Highy accurate pressure measurement instrumentation • Wide range combination gauges • Large variety of high quality vacuum fittings CAPACITANCE DIAPHRAGM GAUGEE STRIPE EDGE GEMINI PIRANI CAPACITANCE HEATED PORTER SKY SKY HEATED CDG045Dhs – CDG045D2, CUBE COLD CATHODE GAUGE COMBINATION GAUGE PIRANI HOT ION GAUGE COMPONENTS CDG020D CDG025D CDG045D –CDG200D CDG200Dhs CDG100D2 CDGsci MAG500, MPG500 PCG55x PSG5xx BPG, BCG, HPG FITTINGS AND ASSEMBLIESES • More gauge • Unprecedented • Excellent long term • Faster than 1 ms • Smallest instrument • True high precision • Long lifetime in harsh • Double sensor technology • Stainless steel • Triple sensor technology • Competitively priced • Fully vulcanized for less Full scale stability stability response time in class pressure measurement environments • Tungsten, Nickel or fully measuring cell • 13 decades in one sensor – • Worldwide logistics surface heater • Smallest • Environmental • Outstanding span • Proven ceramic sensor • Proven ceramic • Full stable output • Zero maintenance ceramic coated sensor • Streamlined design saves cost and tool space • Designed to strict inter- • Customized design in class independence and zero stability • Excellent long term sensor • Flexible communication • Excellent ignition • High accuracy and gas • Replaceble sensor • Long lifetime national standards with molded hard shell covers • Outstanding • Adaptable sensor • High accuracy stability • High precision properties type independence above • Cool to the touch surface stability integration • Gas type independent measurement 10 mbar EXCELLENT CUSTOMER SUPPORT IS A COMMITMENT INFICON provides a global network of sales and service centers. These centers are staffed with local service and application experts who can assist you in choosing the best solution for your individual product application and provide fast support if service is needed. Asia and Pacifica CHINA KOREA INFICON Ltd. INFICON Ltd. Beijing Kyunggi-do Phone: +86.10.6590.0164 Phone: +82.31.783.2942 E-mail: [email protected] E-mail: [email protected] INDIA SINGAPORE and AUSTRALIA INFICON PVT. Ltd. INFICON PTE Ltd. Pune Singapore Phone: +91.20.4120.4854 Phone: +65.6631.0300 Europe, Middle East E-mail: [email protected] E-mail: [email protected] Americas and Africa JAPAN TAIWAN INFICON Inc. INFICON GmbH INFICON Co. Ltd. INFICON Co. Ltd. East Syracuse, NY Cologne Yokohama-shi, Kanagawa-ken Chupei City Phone: +1.315.434.1100 Phone: +49.221.567.881.00 Phone: +81.45.471.3328 Phone: +886.3.552.5828 E-mail: [email protected] E-mail: [email protected] E-mail: [email protected] E-mail: [email protected] inficon.com [email protected] inficon.com twitter.com/inficon Due to our continuing program of product improvements, specifications are subject to change without notice. tibb06e1-a ©2013 INFICON.