Stripetm Cdg045dhs, Cdg100dhs, Cdg160dhs, Cdg200dhs High Speed Vacuum Gauge
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Visionary Sensor Technology StripeTM CDG045Dhs, CDG100Dhs, CDG160Dhs, CDG200Dhs High Speed Vacuum Gauge Smart Inside – Fast Outside CDG working principle Advanced heating concept Flexible integration fast readout Higher productivity Standard Stripe Direct pressure measurement • Temperature stabilized at ± 0.1°C Stripe CDG045Dhs, CDG100Dhs, by diaphragm p • Innovative insulation material - touchable surface at 200°C ΔCΔC Δd ~ p p 60°C - small footprint CDG160Dhs, CDG200Dhs Vacuum Gauge Capacitance readout • Immune to ambient environment Δd • SEMI S2 compliant 1 200°C ~ p • Excellent temperature stability ΔC p • Low power consumption • Fast warm up Settling time p Electrode Diaphragm p = pressure dead time Fully ceramic sensor Enabling process innovation Bonded ceramic structure combined with digital signal processing provides superior measurement performance. Si Standard Stripe Increased layer quality Process pressure settling time INFICON Stripe high-speed Capacitance Diaphragm Gauges are the fastest, highly accurate vacuum measurement instru- ments available. With a less than 1ms response time combined with the EtherCAT fieldbus interface it opens up a total new field of applications. The proven temperature controlled, corrosion resistant, ultra-pure ceramic sensor provides superior Gauge protection for increased lifetime Any mounting orientation Low noise /Advanced Pressure Control span stability over many years paired with state-of-the-art zero stability. Stripe Standard Level 1 Baffle U U Stripe comes with the INFICON patented unique sensor shield which protects the gauge from undesired process by-products. Stops coating, particles INFICON Stripe using an innovative heating concept, which provides a cool to the touch surface, and its unique speed Level 2 Heater capabilities, enabling an unprecedented productivity increase, making it the most advanced vacuum instrument of its kind. Prevents condensation/deposition a 8a Level 3 Shield Typical applications Protects diaphragm • Atomic layer deposition • High speed process control Level 4 Protective coating Stable butterfly valve position Butterfly valve position fluctuation • PVD, CVD, Etch • General high temperature vacuum applications Corrosion protection at 1ms readout rate T at 20ms readout rate T STRIPE ADVANTAGES AT A GLANCE • High productivity – Faster than 1ms response time • Flexible integration – EtherCAT fieldbus • Long lifetime – Proven ceramic sensor • Forget recalibration – 90 ppm /year full scale stability Diaphragm flexibility Outstanding ceramic technology enables real 10 mT measurement Speed/ Noise performance 12 11 10 9 8 7 6 5 Conventional CDG 4 Stripe 3 Noise level [mV RMS] 2 1 0 0.3 4 8 12 16 20 24 28 32 36 40 44 48 52 56 60 time [ms] Measurement ranges Full Scale (Torr) 0.01 0.1 1 10 100 Real 10 mTorr. 1000 Identify the new 10 mTorr 10-6 10-5 10-4 10-3 10-2 0.1 1 10 100 1000 fullscale Stripe 0.05 Pressure (Torr) ExcEllENT cuSToMER Support iS a coMMiTMENT INFICON provides a global network of sales and service centers. These centers are staffed with local service and application experts who can assist you in choosing the best solution for your individual product application and provide fast support if service is needed. Asia and Pacifica CHINA KOREA INFICON Ltd. INFICON Ltd. Beijing Kyunggi-do Phone: +86.10.6590.0164 Phone: +82.31.783.2942 E-mail: [email protected] E-mail: [email protected] INDIA SINGAPORE and AUSTRALIA INFICON PVT. Ltd. INFICON PTE Ltd. Pune Singapore Phone: +91.20.4120.4854 Phone: +65.6631.0300 Europe, Middle East E-mail: [email protected] E-mail: [email protected] Americas and Africa JAPAN TAIWAN INFICON Inc. INFICON GmbH INFICON Co. Ltd. INFICON Co. Ltd. East Syracuse, NY Cologne Yokohama-shi, Kanagawa-ken Chupei City Phone: +1.315.434.1100 Phone: +49.221.567.881.00 Phone: +81.45.471.3328 Phone: +886.3.552.5828 E-mail: [email protected] E-mail: [email protected] E-mail: [email protected] E-mail: [email protected] inficon.com [email protected] twitter.com/inficon Due to our continuing program of product improvements, specifications are subject to change without notice. tibc50e1-a ©2014 INFICON.