(12) United States Patent 20Um
USO08057654B2 (12) United States Patent (10) Patent No.: US 8,057,654 B2 M00re et al. (45) Date of Patent: Nov. 15, 2011 (54) ELECTRODEPOSITION OF DIELECTRIC 3,793,278 A 2f1974 De Bona COATINGS ON SEMCONDUCTIVE 3,928, 157 A 12/1975 Suematsu et al. 3,947.338 A 3, 1976 Jerabek et al. SUBSTRATES 3,947,339 A 3, 1976 Jerabek et al. 3,962,165 A 6, 1976 Bosso et al. (75) Inventors: Kelly L. Moore, Dunbar, PA (US); Michael J. Pawlik, Glenshaw, PA (US); (Continued) Michael G. Sandala, Pittsburgh, PA (US); Craig A. Wilson, Allison Park, PA FOREIGN PATENT DOCUMENTS (US) EP OO12463 A1 6, 1980 (73) Assignee: PPG Industries Ohio, Inc., Cleveland, OTHER PUBLICATIONS OH (US) Kohler, E. P. "An Apparatus for Determining Both the Quantity of (*) Notice: Subject to any disclaimer, the term of this Gas Evolved and the Amount of Reagent Consumed in Reactions patent is extended or adjusted under 35 with Methyl Magnesium Iodide'. J. Am. Chem. Soc., 1927, 49 (12), U.S.C. 154(b) by 345 days. 3181-3188, American Chemical Society, Washington, D.C. (21) Appl. No.: 12/405,299 Primary Examiner — Alexa Neckel (22) Filed: Mar 17, 2009 Assistant Examiner — Brian Cohen (65) Prior Publication Data (74) Attorney, Agent, or Firm — Robert P. Lenart US 2009/O236231 A1 Sep. 24, 2009 (57) ABSTRACT Related U.S. Application Data A method includes: immersing a semiconductive Substrate in (60) Provisional application No. 61/037,814, filed on Mar. an electrodeposition composition, wherein at least 20 percent 19, 2008. by weight of resin Solids in the composition is a highly cross (51) Int.
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