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Brooks GF80 / GF81 Mass Flow Controllers Product Manuals Installation and Operation Manual X-TMF-GF80-GF81-Series-MFC-eng Part Number: 541B196AAG September, 2014 Brooks® GF80/GF81 Devices Brooks® GF80/GF81 Series MultiFloTM Capable Digital Thermal Mass Flow Devices Brooks® GF80/GF81 Series available with RS485, DeviceNetTM, Profibus® or EtherCAT® I/O Installation and Operation Manual X-TMF-GF80-GF81-Series-MFC-eng Part Number: 541B196AAG Brooks® GF80/GF81 Devices September, 2014 Installation and Operation Manual X-TMF-GF80-GF81-Series-MFC-eng Part Number: 541B196AAG September, 2014 Brooks® GF80/GF81 Devices Dear Customer, We appreciate this opportunity to service your flow measurement and control requirements with a Brooks Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their gas and liquid low-flow applications. Brooks provides an array of flow measurement and control products for various industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices, analytical instrumentation, semiconductor manufacturing, and more. The Brooks product you have just received is of the highest quality available, offering superior performance, reliability and value to the user. It is designed with the ever changing process conditions, accuracy requirements and hostile process environments in mind to provide you with a lifetime of dependable service. We recommend that you read this manual in its entirety. Should you require any additional information concerning Brooks products and services, please contact your local Brooks Sales and Service Office listed on the back cover of this manual or visit www.BrooksInstrument.com. Yours sincerely, Brooks Instrument Installation and Operation Manual X-TMF-GF80-GF81-Series-MFC-eng Part Number: 541B196AAG Brooks® GF80/GF81 Devices September, 2014 THIS PAGE WAS INTENTIONALLY LEFT BLANK Installation and Operation Manual Contents X-TMF-GF80-GF81-Series-MFC-eng Part Number: 541B196AAG September, 2014 Brooks® GF80/GF81 Devices Paragraph Page Number Number Section 1 Introduction 1-1 Introduction ................................................................................................................................... 1-1 1-2 How to Use This Manual ................................................................................................................ 1-1 1-3 Product Support References ......................................................................................................... 1-2 1-4 Warning, Caution and Notice Statements ...................................................................................... 1-2 1-5 Product Warranty .......................................................................................................................... 1-2 1-6 How to Order a GF80/GF81 Series Device .................................................................................... 1-2 1-7 Industry Standard References ....................................................................................................... 1-2 1-8 GF80 Series Gas Table.................................................................................................................. 1-3 1-9 Glossary of Terms and Acronyms .................................................................................................. 1-3 1-10 Description .................................................................................................................................... 1-5 1-10 Product Description for GF81 Devices .......................................................................................... 1-7 1-11 Specifications for GF80/GF81 Series Devices .............................................................................. 1-7 Section 2 Installation 2-1 General .......................................................................................................................................... 2-1 2-2 Receipt of Equipment .................................................................................................................... 2-1 2-3 Recommended Storage Practice ................................................................................................... 2-2 2-4 Return Shipment ............................................................................................................................ 2-2 2-5 Transit Precautions ........................................................................................................................ 2-2 2-6 Removal from Storage ................................................................................................................... 2-2 2-7 Gas Connections ........................................................................................................................... 2-3 2-8 In-Line Filter .................................................................................................................................. 2-3 2-9 Mechanical Installation .................................................................................................................. 2-3 2-10 Flow Controller Installation Arrangement ........................................................................................ 2-4 2-11 Purge the Gas Supply Line Before GF80/GF81 Series Installation ................................................ 2-5 2-12 Position and Mount the GF80/GF81 Series ................................................................................... 2-6 2-13 Perform a Leak Test ...................................................................................................................... 2-6 2-14 Performance Checks ..................................................................................................................... 2-6 2-15 Zeroing Setup Process .................................................................................................................. 2-6 2-16 Zeroing the GF80/GF81 Series ...................................................................................................... 2-7 2-17 Auto Shut-Off ................................................................................................................................. 2-7 2-18 Using the MultiFloTM Configurator .................................................................................................. 2-8 2-19 Electrical Connections .................................................................................................................. 2-10 2-19-1 DeviceNet Connections ................................................................................................................ 2-10 2-19-2 Analog/RS485 Connector ............................................................................................................. 2-11 2-19-3 Profibus Connections ................................................................................................................... 2-12 2-19-4 EtherCAT Connections ................................................................................................................. 2-12 2-19-5 Alarm Output (Analog I/O Version Only) ....................................................................................... 2-13 Section 3 Operation 3-1 General .......................................................................................................................................... 3-1 3-2 Theory of Operation for Flow Measurement................................................................................... 3-1 Section 4 Maintenance & Troubleshooting 4-1 Overview ........................................................................................................................................ 4-1 4-2 Maintenance .................................................................................................................................. 4-1 4-3 Troubleshooting ............................................................................................................................. 4-2 4-4 Troubleshooting Checklist .............................................................................................................. 4-3 4-5 GF80/GF81 Series Troubleshooting Guide .................................................................................... 4-4 Section 5 Product Description Code ...................................................................................................... 5-1 i Contents Installation and Operation Manual X-TMF-GF80-GF81-Series-MFC-eng Part Number: 541B196AAG Brooks® GF80/GF81 Devices September, 2014 Appendix A: GF80 Series Gas Table .......................................................................................................A-1 Appendix B: GF80/GF81 Series Patents ................................................................................................B-1 Appendix C: Essential Instructions ....................................................................................................... C-1 Warranty, Local Sales/Service Contact Information ....................................................................... Back Cover Figure Page Number Number 1-1 GF80/GF81 Series Digital Thermal Mass Flow Devices ................................................................. 1-1 1-2 Dimensions - GF80 Series ........................................................................................................... 1-10 1-3 Dimensions - GF81 Series ..........................................................................................................
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