(12) United States Patent (10) Patent No.: US 9,174,853 B2 Arkles Et Al
US009 174853B2 (12) United States Patent (10) Patent No.: US 9,174,853 B2 Arkles et al. (45) Date of Patent: Nov. 3, 2015 (54) METHOD FOR PRODUCING HIGH PURITY B01D 2257/304; B01D 2257/406; B01D GERMANE BY A CONTINUOUS OR 53/52; B01D 53/8612; B01D 53/8671; B01D SEM-CONTINUOUS PROCESS 2253/108; B01D 2256/16; B01D 2257/55 (71) Applicant: Gelest Technologies, Inc., Morrisville, USPC .......................................................... 438/685 PA (US) See application file for complete search history. (72) Inventors: Barry C. Arkles, Pipersville, PA (US); (56) References Cited George A. Timberlake, Jr., Gilbertsville, PA (US) U.S. PATENT DOCUMENTS 4,668,502 A 5, 1987 Russotti (73) Assignee: Gelest Technologies, Inc., Morrisville, 7,087,102 B2 8/2006 Withers, Jr. et al. PA (US) (Continued) (*) Notice: Subject to any disclaimer, the term of this patent is extended or adjusted under 35 FOREIGN PATENT DOCUMENTS U.S.C. 154(b) by 0 days. CN 101486444. A T 2009 CN 1023908O8 A 3, 2012 (21) Appl. No.: 14/540,466 WO 2005.005673 A2 1, 2005 (22) Filed: Nov. 13, 2014 OTHER PUBLICATIONS Prior Publication Data Martin et al., “Gas Separation by pressure Swing adsorption' (65) advances in cryogenic engineering, prenum press, NY 1986. US 2015/O158738A1 Jun. 11, 2015 (Continued) Related U.S. Application Data Primary Examiner — Mark A Laurenzi (60) Provisional application No. 61/912,791, filed on Dec. (74) Attorney, Agent, or Firm — Panitch Schwarze Belisario 6, 2013. & Nadel LLP Int. C. (51) ABSTRACT HOIL 2L/214 (2006.01) (57) COIG 7/00 (2006.01) A continuous or semi-continuous process for producing a high purity germane includes (a) preparing a reaction mixture (Continued) containing hydrogen and crude germane and (b) separating (52) U.S.
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