Appendix A: Pioneers of Semiconductor Physics Remember...
Semiconductor physics has a long and distinguished history. The early devel- opments culminated in the invention of the transistor by Bardeen, Shockley, and Brattain in 1948. More recent work led to the discovery of the laser diode by three groups independently in 1962. Many prominent physicists have con- tributed to this fertile and exciting field. In the following short contributions some of the pioneers have recaptured the historic moments that have helped to shape semiconductor physics as we know it today. They are (in alphabetical order):
Elias Burstein Emeritus Mary Amanda Wood Professor of Physics, University of Pennsylvania, Philadelphia, PA, USA. Editor-in-chief of Solid State Communications 1969–1992; John Price Wetherill Medal, Franklin Institute 1979; Frank Isakson Prize, American Physical Society, 1986.
Marvin Cohen Professor of Physics, University of California, Berkeley, CA, USA. Oliver Buckley Prize, American Physical Society, 1979; Julius Edgar Lilienfeld Prize, American Physical Society, 1994.
Leo Esaki President, Tsukuba University, Tsukuba, Japan. Nobel Prize in Physics, 1973.
Eugene Haller Professor of Materials Science and Mineral Engineering, University of California, Berkeley, CA, USA. Alexander von Humboldt Senior Scientist Award, 1986. Max Planck Research Award, 1994.
Conyers Herring Professor of Applied Physics, Stanford University, Stanford, CA, USA. Oliver Buckley Prize, American Physical Society, 1959; Wolf Prize in Physics, 1985.
P.Y. Yu, M. Cardona, Fundamentals of Semiconductors, Graduate Texts in Physics, 4th ed., DOI 10.1007/978-3-642-00710-1, © Springer-Verlag Berlin Heidelberg 2010 554 Appendix A
Charles Kittel Emeritus Professor of Physics, University of California, Berkeley, CA, USA. Oliver Buckley Prize, American Physical Society, 1957; Oersted Medal, American Association of Physics Teachers, 1978.
Neville Smith Scientific Program Head, Advanced Light Source, Lawrence Berkeley Laboratory, Berkeley, CA, USA. C.J. Davisson and L.H. Germer Prize, American Physical Society, 1991.
Jan Tauc Emeritus Professor of Physics and Engineering, Brown University, Providence, RI, USA. Alexander von Humboldt Senior Scientist Award, 1981; Frank Isakson Prize, American Physical Society, 1982.
Klaus von Klitzing Director, Max-Planck-Institut fur¨ Festkorperforschung,¨ Stuttgart, Germany. Nobel Prize in Physics, 1985. Ultra-Pure Germanium 555 Ultra-Pure Germanium: From Applied to Basic Research or an Old Semiconductor Offering New Opportunities Eugene E. Haller University of California, Berkeley, USA
Imagine arriving one morning at the laboratory and somebody comes to ask you if single crystals of germanium with a doping impurity concentration in the 1010–1011 cm3 range can be grown! You quickly compare this concentra- tion with the number of Ge atoms per cm 3, which is close to 4 × 1022. Well, you pause and wonder how anybody can ask if a 99.999999999% pure sub- stance can be made. The purest chemicals available are typically 6 or 7 nines pure. Robert N. Hall of the General Electric Company proposed in 1968 [1] that such crystals could be grown and that they would be most useful in fab- ricating very large volume (up to 400 cm3) p-i-n junctions working as gamma- ray detectors [2]. When I arrived at Berkeley as a postdoc I joined the group of F.S. (Fred) Goulding, who headed one of the leading groups of semiconductor detector and electronics experts at the Lawrence Berkeley Laboratory (LBL), then called the Radiation Laboratory. There I met W.L. (Bill) Hansen, who had started the race towards the ultra-pure Ge single-crystal goal believed to be at- tainable by Hall. Bill was extremely knowledgeable in chemistry, physics, and general laboratory techniques. In addition, he was the fastest-working experi- mentalist I had ever encountered. Somewhat overwhelmed, I started to work with Bill and Fred on these Ge crystals. When Bill tried out various Czochral- ski crystal growth configurations [3], he rigorously pursued ultra-purity by us- ing the simplest crystal growth design, the purest synthetic silica (SiO2) con- tainer for the Ge melt, and hydrogen gas purified in a Pd diffusion system. I, on the other hand, tried to build up an arsenal of characterization techniques which would allow us to find out within hours the purity and crystalline per- fection we had achieved. The IEEE meetings on nuclear science, which were held every fall, provided the forum where we “crossed swords” with Hall [4– 7]. It was a close race. Hall had the advantage of enormous experience, which started way back when Ge was first purified and single crystals were grown for transistors. We had the advantage of blissful ignorance but also excellent and helpful colleagues. Furthermore, nobody could match Bill’s agility in try- ing out new purification and crystal growth methods. One major development for us was learning, through Hall, about a super-sensitive photoconductivity technique which was capable of identifying extremely small numbers of im- purities in Ge single crystals. The technique had been discovered by Russian scientists at the Institute of Radio-engineering and Electronics in Moscow [8, 6.85]; see Figs. 6.39 and 6.40. They found that a two-step ionization process of 556 Appendix A
shallow hydrogenic donors or acceptors in a very cold crystal would lead to photoconductivity peaks which were very sharp and unique for each dopant species. Paul Richards, of the Physics Department at the University of Califor- nia at Berkeley, had a home-built Fourier-transform far-infrared spectrometer and the necessary liquid helium temperature dewar. By the end of the first day of experimenting we had a spectrum of a p-type high-purity Ge crystal with only 1010 cm 3 net amount of acceptors and we knew also that phosphorus and aluminum were the major residual impurities. In parallel with a number of novel and interesting physics studies we fabri- cated gamma-ray detectors at LBL. We broke records in the resolution of the gamma-ray photopeaks with our ultra-pure crystals [2]. Soon the commercial detector manufacturers became interested and started their own ultra-pure Ge crystal-pulling programs. In a few years several companies in the US and in Europe succeeded in developing large-diameter ( 8 cm) single crystals with incredibly good yield, excellent purity ( 2 × 1010 cm 3) and very small con- centrations (108 cm 3) of deep-level defects which would detrimentally affect the charge collection in large-size coaxial p-i-n diodes. In order to achieve the best spectral resolution, electrons and holes had to have mean-free-paths of up to several meters. Most semiconductor physicists simply shook their heads and could not comprehend these numbers. How pure is ultra-pure Ge? The person who cares only about electrically active impurities would say that crystals with a few 1010 cm 3 of impurities are routinely grown. But are there other inactive impurities? Yes, of course there are. Hydrogen, oxygen, silicon and carbon are usually present at con- centrations of up to 1014 cm 3, depending on the crystal growth conditions. These impurities do not interfere with Ge’s operation as radiation detectors provided certain rules are followed: no heating to temperatures above 350 C and no rapid temperature changes. Can we reduce the concentration of these four electrically inactive impurities? Yes, we can, but we pay a price. Elimi- nating hydrogen by growing in vacuum leads to the introduction of impurities which can no longer be “flushed” out of the crystal puller. Furthermore, hy- drogen will passivate the very small concentrations of deep-level defects and impurities which are always present. Free oxygen and silicon are generated by the reduction of the ultra-pure silica crucible by the liquid Ge. We do not know of any substance which can replace silica with, perhaps, the exception of graphite. Numerous attempts to grow ultra-pure Ge in graphite crucibles have failed so far because the resultant crystals contain too many Al acceptors. Most recently, the interest in Ge has sharply increased because isotopically pure Ge can be obtained from Russia. Isotopically pure Ge bulk crystals [9– 12] and isotope superlattices [13] have been grown. New phonon physics and electronic transport studies are currently being pursued by several groups with these isotopically controlled crystals and multilayers. Have we arrived at the ultimately ideal material: isotopically and chemi- cally pure and crystallographically perfect Ge single crystals? Perhaps the an- swer is no, but I certainly do not know of another parameter that can be con- trolled. Ultra-Pure Germanium 557
References
1 R.N. Hall: in Proc. of the 12th Int. Conf. on Physics of Semiconductors, ed. by M.H. Pilkuhn (Teubner, Stuttgart 1974), p. 363 2 E.E. Haller, F.S. Goulding: Handbook on Semiconductors, Vol. 4, ed. by C. Hilsum (Elsevier, New York 1993), Chap. 11, p. 937–963 3 W.L. Hansen, E.E. Haller: Mater. Res. Soc. Proc. 16, 1 (1983) 4 R.N. Hall, T.J. Soltys: IEEE Trans. Nucl. Sci. NS-18, 160 (1971) 5 E.E. Haller, W.L. Hansen, F.S. Goulding: IEEE Trans. Nucl. Sci. NS-20, 481 (1973) 6 E.E. Haller, W.L. Hansen, G.S. Hubbard, F.S. Goulding: IEEE Trans. Nucl. Sci. NS- 23, 81 (1976) 7 E.E. Haller, W.L. Hansen, F.S. Goulding: Adv. Phys. 30, 93 (1981) 8 E.E. Haller: Physics 146B, 201 (1987) 9 E.E. Haller: Semicond. Sci. Technol. 5, 319 (1990) 10 E.E. Haller: Solid State Phenom. 32–33, 11 (1993) 11 G. Davies, J. Hartung, V. Ozhogin, K. Itoh, W.L. Hansen, E.E. Haller: Semicond. Sci. Technol. 8, 127 (1993) 12 H.D. Fuchs, P. Etchegoin, M. Cardona, K. Itoh, E.E. Haller: Phys. Rev. Lett. 70, 1715 (1993) 13 J. Spitzer, T. Ruf, M. Cardona, W. Dondl, R. Schorer, G. Abstreiter, E.E. Haller: Phys. Rev. Lett. 72, 1565 (1994) 558 Appendix A Two Pseudopotential Methods: Empirical and Ab Initio Marvin L. Cohen University of California, Berkeley, USA
It took a relatively long time to develop methods capable of determining the detailed electronic structure of solids. In contrast, for gases, unraveling the mysteries of atomic energy levels went hand in hand with the development of quantum theory. Atomic optical spectra yielded sharp lines that could be in- terpreted in terms of excitations of electrons from occupied to empty states. These studies provided important tests of the theory. However, compared to atomic spectra, solid-state spectra are broad, since the interactions between the atoms spread the allowed occupied and empty energy levels into energy bands. This made interpretation of spectra in terms of electronic transitions very difficult. Trustable precise electronic energy band structures were needed to interpret solid-state spectra, but these were difficult to obtain. In principle, the Schr ¨odingerequation can describe the behavior of elec- trons in solids; but without approximations, solutions for the electronic energy levels and wavefunctions are extremely difficult to calculate. Despite consider- able effort, the situation around 1960 was still unsatisfactory. Creative models of solids had been introduced to explain many physical phenomena such as electronic heat capacities and superconductivity with spectacular success. How- ever, calculations capable of yielding band structures and other properties for specific materials were not available. An important intermediate step was the introduction of the empirical pseudopotential model (EPM). Pseudopotentials had been around since 1934, when Fermi introduced the concept to examine the energy levels of alkali atoms. Since he was interested in highly excited atoms, he ignored the oscil- lations of the valence electron wavefunctions in the regions near the nucleus. By assuming a smooth wavefunction responding to a weak potential or pseu- dopotential, Fermi could easily solve for the outer electron energy levels. Since most solid-state effects, such as bonding, are principally influenced by the changes in the outermost electrons, this picture is appropriate. For the EPM it is assumed that the solid is composed of a periodic array of positive cores. Each core has a nucleus and core electrons. Each of the outer valence electrons moves in the electrostatic potential or pseudopotential produced by the cores and by the other valence electrons. In this one-electron model, each electron is assumed to respond to this average periodic crystalline pseudopo- tential. The periodicity allows Fourier decomposition of the potential and the EPM fits data to obtain Fourier coefficients. Usually only three coefficients per atom are needed. Two Pseudopotential Methods: Empirical and Ab Initio 559
The EPM stimulated interactions between theorists and experimentalists and the result was one of the most active collaborations in physics. Not only were optical and photoemission spectra of solids deciphered, the activities re- sulted in new experimental techniques and a much deeper understanding of the behavior of electrons in solids. The meeting ground between experiment and theory is usually response functions such as dielectric functions or reflec- tivity. In the early phases of this work the actual energy band structures, which are plots of energy versus wavevector, were the domain of theorists. However, the introduction of angular resolved photoemission spectroscopy (ARPES) gave energy bands directly and provided further tests of the EPM. The EPM band structures obtained in the 1960s and 1970s are still used to- day. In addition, the EPM produced the first plots of electronic charge density for crystals. These plots displayed covalent and ionic bonds and hence gave considerable structural information. Optical constants, densities of states, and many other crystal properties were obtained with great precision using EPM- derived energy levels and wavefunctions. Despite the success of the EPM, there was still considerable motivation to move to a first-principles or ab initio model. The approach chosen was sim- ilar to Fermi’s. Instead of an EPM potential, the interaction of the valence electron with the core was described using an ab initio pseudopotential con- structed from a knowledge of atomic wavefunctions. The valence electron– electron interactions were modeled using a density functional theory which, with approximations, allows the development of an electron–electron potential using the electronic charge density. However, the latter approach is appropri- ate only for calculating ground-state properties. Excited states such as those needed to interpret atomic spectra require adjustments to this theory. These adjustments are complex and require significant computer time compared to the EPM, but they are successful in reproducing the experimental data and the approach is completely ab initio. One of the most important applications of the ab initio pseudopotential model was the determination of structural properties. It became possible to explain pressure-induced solid–solid structural transitions and even to predict new structural phases of solids at high pressure using only atomic numbers and atomic masses. Bulk moduli, electron–phonon coupling constants, phonon spectra, and a host of solid-state properties were calculated. The results al- lowed microscopic explanations of properties and predictions. An example was the successful prediction that semiconducting silicon would become a super- conducting hexagonal metal at high pressure. The two types of pseudopotential approaches, empirical and ab initio, have played a central role in our conceptual picture of many materials. Often the resulting model is referred to as the “standard model” of solids. Unlike the standard model of particle physics, which is sometimes called a theory of ev- erything, the standard model of solids is most appropriate for those solids with reasonably itinerant electrons. Despite this restriction, the model is extremely useful and a triumph of quantum theory. 560 Appendix A The Early Stages of Band-Structures Physics and Its Struggles for a Place in the Sun Conyers Herring Stanford University, Stanford, USA
It is universally recognized today that among the components necessary for a theoretical understanding of the properties of semiconductors, their specific electronic band structures have an extremely fundamental place. Textbooks on semiconductors typically have, among their earliest chapters, one on band structure, which contains diagrams of energy versus wavevector for important semiconductors, usually obtained from first-principles numerical calculations. But obviously these calculations would not be so conspicuously featured if they did not agree with a great body of experimental information. What the present-day student may not realize is that, despite the spurt of activity in the early post-transistor years – roughly 1948–1953 – the workers of this pe- riod had almost no knowledge of band structures, and had to muddle through as best they could without it. The evolution of this aspect of semiconductor physics provides a thought-provoking perspective on how science moves to- ward truth by erratic diffusional steps, rather than with military precision. The possible range of band structures had, of course, long been known in principle. The standard generalities about Bloch waves and their energy spec- tra had been known for a couple of decades; symmetry-induced degeneracies had been classified; early band-structure calculations, though not quantitatively reliable, had suggested that degenerate and multi-valley band edges might of- ten occur. The trouble lay elsewhere. When so many possibilities for exciting work were opening up, people tended to avoid projects that would be tedious and time-consuming. Band-structure theorists, equipped only with mechanical calculators, often opted to use incomplete boundary conditions or limited basis sets. Experimentalists, despite rapid improvements in purity and perfection of materials, continued to focus mostly on properties whose interpretation did not depend critically on anisotropies and other special features of the energy bands. Much of the blame for this neglect must be cast on the theorists, not only for their failure to agree on calculated band structures, but also because, for too long, they shied away from the tedium of making detailed calculations of properties such as magnetoresistance for various kinds of nonsimple band structures. My own experience provides a typical example. In December 1953 I deliv- ered an invited paper at an APS meeting with the title “Correlation of Elec- tronic Band Structures with Properties of Silicon and Germanium”. In it I tried to reason as logically as possible from the existing experimental and the- oretical literature, to draw plausible conclusions about the possible band-edge symmetries for these elements. While I got a few things right, it was distress- The Early Stages of Band-Structures Physics and Struggles 561 ing to learn over the next year or so that most of my inferences were wrong. How did I go astray? My first step, safe enough, was to classify the possible types of band-edge points: those at wavevector k 0, and those at k 0 (multi-valley); for each of these the states could be degenerate (two or more states of the same en- ergy and k) or nondegenerate. In surveying the experimental and theoretical evidence bearing on the choices among these numerous alternatives, I began by trying to limit the possible choices to those that could occur for band struc- tures qualitatively similar to that newly calculated by Herman [1] for diamond, which seemed more reliable than any others that had been made for any ma- terial with this crystal structure. Using the “k · p method” for qualitative es- timations of the energy-band curvatures on moving away from k 0, this meant that I neglected perturbations of the p-like k 0 states °25 , °15 by the anti-bonding s-like level °2 , which is quite high in diamond but, contrary to my assumption, much lower in silicon and germanium. This neglect turned out to make me omit the possibility of conduction-band edges on the [111] axes in k-space for n-germanium, and to retain the possibility of valence-band edges on the [100] axes for p-silicon. From this flawed start I tried to narrow the possibilities further by appeal- ing to experimental evidence, and especially to magnetoresistance. The near- vanishing of longitudinal magnetoresistance in [100]-type directions was ob- viously consistent with multi-valley band-edge regions centered on the [100]- type axes in k-space, and this proved to be the correct identification for n-type silicon. But, lacking explicit calculations, I assumed that the energy surfaces of a degenerate hole band at k 0 would be so strongly warped as to preclude the near-zero [100] longitudinal magnetoresistance observed for p-silicon. So my predictions were all wrong here. Finally, I had the tedious task of calcu- lating the complete anisotropy of magnetoresistance for multi-valley models, which a few months later were shown to give strong evidence for [111]-type valleys for n-germanium. What all this illustrates is that to achieve an acceptable understanding of band structures, each of three types of information sources had to reach a certain minimum level of sophistication. Band calculations from first princi- ples had to be made with accuracy and self-consistency in an adequately large function space. Experimental measurements of properties sensitive to band structure had to be made under well-controlled conditions. And theoretical predictions of these properties for different band structure models had to be available. There were gaps in all three of these sources up to the end of 1953; it is thus not surprising that Shockley, in writing what was intended as a basic text for the coming semiconductor age [2], stated, in spite of his awareness of the diversity of possible band structures, that the theoretical reasoning in the book would all be based on the simple model with an isotropic effective mass. Remarkably, in a year or so starting in 1954, each of the three sources filled itself in sufficiently so that they could pull together (e. g., better theoretical bands [3], cyclotron resonance [4], magnetoresistance theory [5]) and band- structure physics became a solid and accepted component of basic knowledge. 562 Appendix A
References
1 F. Herman: Phys. Rev. 88, 1210 (1952) 2 W. Shockley: Electrons and Holes in Semiconductors (Van Nostrand, New York 1950), esp. p. 174 3 For an early review of progress 1953–1955, see, for example, F. Herman: Proc. IRE 43, 1703 (1955) 4 See the following contribution by C. Kittel 5 B. Abeles, S. Meiboom: Phys. Rev. 95, 31 (1954); M. Shibuya, Phys. Rev. 95, 1385 (1954) Cyclotron Resonance and Structure of Conduction and Valence Band Edges 563 Cyclotron Resonance and Structure of Conduction and Valence Band Edges in Silicon and Germanium Charles Kittel University of California, Berkeley, USA
A prime objective of the Berkeley solid-state physics group (consisting of Arthur Kip and myself) from 1951 to 1953 was to observe and understand cy- clotron resonance in semiconductors. The practical problems were to gain reli- able access to liquid helium, and to obtain an adequate magnet and sufficiently pure crystals of Ge and Si. The liquid helium was obtained from the Shell Lab- oratories and later from the Giauque laboratory on campus. The magnet was part of a very early cyclotron (from what one may call the Ernest O. Lawrence collection), and the dc current for the magnet came from recycled US Navy submarine batteries. The semiconductor crystals were supplied by the Sylva- nia and Westinghouse Research Laboratories, and later by the Bell Telephone Laboratories. I think the microwave gear came from war surplus at MIT Ra- diation Laboratory. Evidently, very little of the equipment was purchased. The original experiments were on Ge [1], both n-type and p-type. There were too few carriers from thermal ionization at 4 K to give detectable signals, but the carriers that were present were accelerated by the microwave electric field in the cavity up to energies sufficient to produce an avalanche of carriers by impact ionization. This was true cyclotron resonance! A good question is, why not work at liquid hydrogen temperature, where the thermal ionization would be adequate? Hydrogen was then, and perhaps is still now, considered to be too hazardous (explosive) to handle in a building occupied by students. A better question is, why not work at liquid nitrogen temperature, where there are lots of carriers and the carrier mobilities are known to be much higher than at the lower temperatures? Cyclotron resonance at liquid nitrogen temperature had been tried at several other laboratories without success. The reason for the failures is that the plasma frequencies, being mixed with the cyclotron frequencies to produce a magnetoplasma frequency, are too high at the higher carrier concentrations – you are not measuring a cyclotron reso- nance but instead a magnetoplasma resonance [2]. Indeed, one can follow the plasma displacement of the original cyclotron lines when the cavity is allowed to warm up. In radio wave propagation in the ionosphere this effect is called magneto-ionic reflection, a subject I had learnt from the lectures of E.V. Ap- pleton at Cambridge. A better way to produce carriers at 4 K was suggested by the MIT group. They irradiated the crystal with weak light sufficient to excite both electrons and holes. With this method both electrons and holes could be excited in the same crystal. Alternatively, one can excite a known carrier type by infrared 564 Appendix A
irradiation of n- or p-type material. By modulating the optical excitation the detection of the absorption signal was made highly sensitive [3]. In addition, if there is any doubt about the sign of the carriers, circularly polarized mi- crowaves can be (and were) used to distinguish the sense of rotation of the carriers in the magnetic field. The most surprising result of the original experiments was the observation ∗ ∗ of two effective masses (m ) for the Ge holes: m /m0 0.04 and 0.3, both ap- proximately isotropic. Frank Herman and Joseph Callaway had calculated that the top of the valence band in Ge occurs at the center of thr Brillouin zone and is threefold degenerate (sixfold with spin), corresponding to p bonding or- bitals on the Ge atoms. This would have given rise to three hole masses. We suggested [4,5] that the spin–orbit (s.o.) interaction splits the p orbitals into fourfold degenerate (related to p3/2 orbitals) and twofold degenerate (related to p1/2 orbitals) bands at the zone-center. We found that the most general form of the energy of the upper valence bands in the diamond structure to second order in wavevector k is (2.62)