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International Interconnect Technology Conference (IITC) 2021 ONLINE

July 6-9, 2021

Manual for Registrants V3 The IITC Committee gratefully acknowledges the following companies for their support

Gold Sponsors

Silver Sponsors

Bronze Sponsors

IITC 2021 2 to IITC 2021 Virtual Attendee Hub

• If you have already registered for the conference, here is the instruction to go into IITC 2021 virtual attendee hub (VAH) for joining conference and exhibition. • The IITC 2021 VAH is open. Please visit IITC 2021 exhibit booths where you will find the latest technology showcases related to IITC 2021 theme. • The program schedule in your local time is available too.

1. Click here. 2. Enter your name and email address. 3. Enter verification code which will be sent to your email box. (You need to register for the conference in order to receive verification code) Verification code is one-time code. 4. You will join IITC 2021 virtual attendee hub. 5. Due to security reason, the link will be expired in 24H if you do not use it. Then, please start from 1.

The conference online proceedings will be available from July 6. ( time) If you have not registered IITC 2021, please visit online registration website.

IITC 2021 3 If you see red dot, please check for event Entry view announcement

Your profile can be edited here. Please add your photos, bio, etc.

On-going and coming sessions

Event URL

IITC 2021 4 Sessions view

Sessions ① ② All sessions will be displayed. ③ 1. Select the date 2. Select the session for view among the listed sessions.

When you click the session, it will show you the paper listing by presentation order.

IITC 2021 5 Presentation view

3-min prior to the session start time, you will see “Join Session” button to click for view. IITC 2021 6 Presentation view

Q&A button for asking questions. Questions are available through on-demand period. Please write speaker name to whom you send your question.

You can control screen size, Chat button for chatting with volume of sounds other session participants. by yourself. IITC 2021 Private chat is not available.7 Live Q&A

Q&A during presentation Send questions by “Live Q&A” even during presentation period. The session chairs will moderate the questions to ask to the speakers Q&A will be done among the session chairs and the speakers verbally.

IITC 2021 8 Exhibitors’ listing

Exhibitors are listed by alphabetical order.

The participants can change the view by selecting “Sponsors Level” or “Virtual Meeting Room”.

IITC 2021 9 Sponsors’ listing

Sponsors are listed by sponsor level.

By click sponsor, you will be guided to their exhibit booths.

IITC 2021 10 Exhibit Booth If the exhibitor has “Join virtual meeting”, click the button and visit their booth through zoom meeting.

Please feel free to contact Exhibit Content with selected booth staff You can send individually either by asking chat to the Click files: You web meeting or sending exhibitor can download message. during on- the files demand period. Click Links: It will lead you to links. IITC 2021 11 IITC 2021 Exhibitors Presentation and Virtual Booth Tour

Date Time (JST) Exhibitor Presentation Guided Meeting with Exhibitor (Virtual Booth Tour) 4-min talk plus 2-min Q&A Group A Group B Sessioin Chairs: Hiroyuki Nagai, Electron & Mansour Moinpour, EMD Performance Materials (Merck) July 7 13:00-13:07 TOYO Corporation July 7 13:07-13:14 SCREEN Semiconductor Solutions Co., Ltd. Join IITC 2021 July 7 13:14-13:21 Moses Lake Industries, Inc. July 7 13:21-13:28 EMD Electronics(Merck) exhibitors Guided by Hiroyuki Nagai, Ltd. Guided by Tatsuya Usami, presentation July 7 13:30-13:40 SCREEN Semiconductor Solutions Co., Ltd. EMD Electronics(Merck) July 7 13:40-13:50 Moses Lake Industries, Inc. SCREEN Semiconductor Solutions Co., Ltd. and virtual July 7 13:50-14:00 EMD Electronics(Merck) Moses Lake Industries, Inc. guided booth Sessioin Chairs: Shinichi Ogawa, AIST & Luke Hnderson, BASF Electronic Materials tour on July 7-9. July 8 13:00-13:07 Chemical Corporation (w/o Q&A) July 8 13:07-13:14 TAIYO NIPPON SANSO CORPORATION/RASIRC, Inc. July 8 13:14-13:21 Tokyo Ohka Kogyo Co.,LTD. Participate in July 8 13:21-13:28 CMC Materials Inc. Guided by Shinichi Ogawa, AIST Guided by Kazumichi Tsumura, Corp. the booth tour July 8 13:30-13:40 TAIYO NIPPON SANSO CORPORATION/RASIRC, Inc. CMC Materials Inc. guided by IITC July 8 13:40-13:50 Tokyo Ohka Kogyo Co.,LTD. TAIYO NIPPON SANSO CORPORATION/RASIRC, Inc. July 8 13:50-14:00 CMC Materials Inc. Tokyo Ohka Kogyo Co.,LTD. 2021 committee Sessioin Chairs: Takeshi Furusawa, HD Micro member. Systems & Yasuhiro Kawase, Mitsubishi Chemical July 9 13:00-13:07 Tower Partners Semiconductor Co., Ltd (w/o Q&A) July 9 13:07-13:14 TOKYO ELECTRON LIMITED (w/o Q&A) July 9 13:14-13:21 APOLLOWAVE Corporation July 9 13:21-13:28 EBARA CORPORATION (w/o Q&A) July 9 13:28-13:35 Showa Denko Materials Co., Ltd. Guided by Takeshi Furusawa, HD Micro Systems Guided by Yasuhiro Kawase, Mitsubishi Chemical July 9 13:35-13:43 APOLLOWAVE Corporation Showa Denko Materials Co., Ltd. July 9 13:43-13:51 EBARA CORPORATION APOLLOWAVE Corporation July 9 13:51-13:59 Showa Denko Materials Co., Ltd.IITC 2021 EBARA CORPORATION 12 Procedure of Networking

IITC 2021

Making appointment You will see Click the list of all Attendees registrants. Select the person(s) to contact.

Your schedule will be Send your renewed with the request. request for Once the appointment appointment is approved, the meeting request will Select the be changed automatically as proposal for confirmed meeting. the meeting date/time IITC 2021 13 IITC 2021 Schedule IITC 2021

• IITC 2021： • Live：Tuesday, July 6 – Friday, July 9 • Exhibitors Presentation: Wednesday, July 7 – Friday, July 9 • On-demand Period：Tuesday, July 6 – Friday, August 20, 2021 • Questions to the speakers are available until August 20, 2021. • IITC 2021 Exhibition：Starts one week prior IITC 2021 • Tuesday, June 29 – Friday, August 20, 2021 • IITC 2021 Networking : • Tuesday, June 29 – Friday, August 20, 2021

IITC 2021 14 IITC 2021 Committee

ASIA North America General Chair Kazuyoshi Ueno Shibaura Institute of• Technology General Chair Paul Besser Entegris Program Chair Kuan-Neng Chen Yang Ming Chiao Tung Program Chair Hui Jae Yoo University Program Co-Chair Zhihong Chen Purdue University Program Co-Chair Soo-Hyun Kim Yeungnam University Workshop Chair Andrew Yeoh Treasurer Chair Tatsuya Usami Renesas Electronics Treasurer John Zhu Treasurer Takahiro Kouno Socionext Supplier Relations Mansour Moinpour Merck Workshop Chair Yasuhiro Kawase Mitsubishi Chemical Corp. Member Sanjeev Aggarwal Everspin Workshop Yoshihisa Kagawa Corporation Member Kathleen Dunn Suny Polytechnic Workshop Kazumichi Tsumura Toshiba Corp. Institute Supplier Relations Hiroyuki Nagai Tokyo Electron Ltd. Member Dan Edelstein IBM Publicity Chair Susumu Matsumoto Tower Partners Semiconductor Co. Member Daniel Gall Rensselaer Polytechnic Local Arrangement Shinichi Ogawa AIST Institute Local Arrangement Takeshi Furusawa HD MicroSystems Member Mark Kellam Rambus Member Sang Hoon Ahn Co. Member Nick Lanzillo IBM Member Chee Lip Gan Nanyang Technological University Member Tom Mountsier Member Rak-Hwan Kim Samsung Electronics Co. Member Kaoru Maekawa TEL Member Choon-Hwan Kim Hynix Semiconductor Member Mehul Naik Applied Materials Member Ming-Han Lee TSMC Member Todd Ryan Intel Member Yeow Kheng Lim National University of Singapore Member Valeriy Sukharev Mentor Graphics Member Chih-Chien Liu UMC Member Glen Wilk ASM Member Masayoshi Tagami Corp. Member Xiaopeng Xu Synopsys Member Tetsu Tanaka Tohoku University Member Mark Zaleski Micron Europe General Chair Stefan E. Schulz TU-Chemnitz Program Chair Axel Preusse GLOBALFOUNDRIES Program Co-Chair Robert Socha ASML Supplier Relations Luke Henderson BASF Electronic Materials Publicity Chair Christopher J. Wilson imec Member Jean-Marc Girard Air Liquide Electronics Member Claire van Lare ASML Member Romy Liske GLOBALFOUNDRIES Member Philippe Rodriguez CEA Leti IITC 2021 Member Zsolt Tokei imec 15 Contact IITC 2021 Secretariat Semiconductor Portal, Inc. [email protected] Tel: +81-3-6807-3970 IITC 2021 16