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High Purity Metalorganics (HPMO) High Purity Metalorganics High purity metalorganics (HPMO) High purity metalorganics We are Nouryon, your MO-sources We also operate a world-scale Nouryon high purity metalorganics trimethyl aluminum (TMAl) plant, partner in essential division was created in 2000 in order making us the only high purity chemistry for a to better serve the semiconductor metalorganics producer fully sustainable future industry. back-integrated into this important raw material. We use leading edge This allows us to focus on the specific transfilling techniques that ensure the We are a global specialty chemicals needs of this market while leveraging repeatable and consistent delivery of leader. Industries worldwide rely our global distribution and service the highest purity metalorganics in on our essential chemistry in the networks, manufacturing scale and every cylinder that we supply. manufacture of everyday products expertise, global R&D, and expertise such as paper, plastics, building in safe handling of metalorganics. Our La Porte site is an OSHA VPP materials, food, pharmaceuticals, As such, we excel in safety, quality, Star site, and is ISO 9001 and and personal care items. Building consistency and innovation. 14001 certified, recognizing strict on our nearly 400-year history, the compliance with environmental dedication of our 10,000 employees, We focus on the production of regulations and adherence to state- and our shared commitment to high purity MOsources based on of-the-art quality systems. business growth, strong financial indium, gallium, aluminum, zinc performance, safety, sustainability, and magnesium. These products Our products are distributed globally and innovation, we have established have >99.999% purity and are sold using regional transfilling and/or a world-class business and built in electropolished stainless steel warehousing distribution centers, strong partnerships with our bubblers to the semiconductor ensuring close proximity to our customers. We operate in over 80 industry. We have grown over the customers. countries around the world and we past decade to become one of the supply customers around the world leading suppliers of these chemicals. Innovation with ingredients for the manufacture Our products are used in a huge We are committed to support the of life’s essentials. Specialty range of industrial and consumer continued steep growth of the chemicals are used in, among others, products. These include LED lighting, industries we serve by supplying the paints, detergents, foods, plastics, solar cells, lasers and many other growing volumes of MO-sources cosmetics, construction, pulp and electronic devices. required, building on the advantages paper, pharmaceuticals, electronics, of integration in our overall large- agriculture and for plastics. World-scale production and scale metalorganics production backward integration environment. A long history Our La Porte, Texas manufacturing We have a long history in metal alkyls, site was the first to produce trimethyl Our bench mark bubbler designs starting with large scale production gallium in 1971, and has since then provide enhanced and stable of aluminum alkyls in 1959. Today been expanded significantly to delivery of our products. Meeting we are one of the leading global produce a wide range of MO-sources the growing volume demands we producers of these products with a in dedicated production equipment. offer various larger bubbler types, broad range of metal organics based Owing to our vast knowledge of including support to central delivery on aluminum, zinc, magnesium, the safe and efficient production systems building on our experience gallium, indium and boron, which of metalorganics for the polymer in the supply of bulk high purity are supplied to the polymer, industry, we produce our high purity metalorganics to the solar cell pharmaceutical and semiconductor MO-sources at relatively large scale, industry. industry. ensuring high purity and excellent product consistency. Our Products Our range of products to the compound semiconductor and Si-semiconductor industry includes ultra-high purity gallium-, indium-, aluminum-, magnesium- and zinc-based MO-sources. Element Chemical name Acronym Aluminum Trimethylaluminum TMAl Low Ox – Trimethylaluminum TMAl LO Triethylaluminum TEAl Gallium Trimethylgallium TMGa Triethylgallium TEGa Indium Trimethylindium TMIn Magnesium Bis(cyclopentadienyl)magnesium Cp2Mg Zinc Dimethylzinc DMZn Diethylzinc DEZn Cylinder and Equipment Offerings AkzoNobel Metalorganic cylinders are designed and manufactured to the highest standards in industrial semiconductor manufacturing technologies: • Semiconductor industry compatible cleaning, regeneration and handling • Interior surface is electro-polished • Constant and consistent wall thickness which leads to defined thermal transfer • Optional purging valve configurations Our products For deliveryOur rangeof TMIn of we products have developed to the compound the Hiperquad semiconductor bubblers, which and offer Si-semiconductor the following benefits: industry includes ultra-high purity gallium-, indium-, aluminum-, magnesium- and zinc-based MO-sources. • Unique stability of the TMIn flow-rate and MO-concentration during the entire lifetime of the bubbler • CompleteElement utilization of the TMInChemical source up name to 98% Acronym Aluminum Trimethylaluminum TMAl Dimensions Low Ox – Trimethylaluminum TMAl LO Type Max. Max.Triethylaluminum Fitting Fill Fill TEAl width depth height height weight Gallium (mm) (mm)Trimethylgallium(mm) (mm) TMIn (gr) TMGa Hiperquad 350 89 87Triethylgallium300 152 350 TEGa Indium Trimethylindium TMIn Hiperquad 850 130 120 330 195 850 Magnesium Bis(cyclopentadienyl)magnesium Cp2Mg Zinc Dimethylzinc DMZn Heat exchangers and innovativeDiethylzinc thermostats DEZn Enabling customers to minimize downtime, we also offer convenient custom-designed heat-ex- changers that can be connected to traditional water baths, for several of our larger fill size bubblers. Cylinder and equipment offerings Nouryon metalorganic cylinders are designed and For delivery of TMIn we have developed the Hiperquad manufactured to the highest standards in industrial bubblers, which offer the following benefits: semiconductor manufacturing technologies: • Unique stability of the TMIn flow-rate and MO- • Semiconductor industry compatible cleaning, concentration during the entire lifetime of the bubbler regeneration and handling • Complete utilization of the TMIn source up to 98% • Interior surface is electro-polished • Constant and consistent wall thickness which leads to defined thermal transfer • Optional purging valve configurations Dimensions Type Max. Max. Fitting Fill Fill width depth height height weight (mm) (mm) (mm) (mm) TMIn (gr) Hiperquad 350 89 87 300 152 350 Hiperquad 850 130 120 330 195 850 Heat exchangers and innovative thermostats Enabling customers to minimize downtime, we also offer convenient custom- designed heat-exchangers that can be connected to traditional water baths, for several of our larger fill size bubblers. Our cylinders A variety of cylinder sizes with a range of volumes is available. The tables below provide a selection of cylinder dimensions and typical fill weight data for liquid MO-sources. More cylinder styles and sizes as well as other valve configurations are available on request. Cylinder volumes and dimensions Cylinder Gross Corpus Diameter Diptube Outlet Diptube Overall volume1 height height height outlet width (ml) (mm) (mm) (mm) (mm) (mm) (mm) 150 ml 150 108 51 235 248 83 219 400 ml 350 108 76 235 248 83 219 600 ml 540 164 76 291 303 83 219 1000 ml 980 168 102 295 308 83 219 3000 ml 2590 191 152 318 331 83 219 3800 ml 3800 195 168 335 348 83 219 8000 ml (8 L) 6400 400 168 514 527 83 220 20000 ml (20 L) 18250 403 273 511 524 83 319 Standard fill weights (gram)2 Cylinder TMGa TEGa TMIn TMAl DMZn DEZn Cp2Mg 150 ml 150 150 100 100 150 150 50 400 ml 350 350 250 230 400 400 100 600 ml 600 550 400 380 700 600 - 1000 ml 1000 1000 - 730 1100 1000 - 3000 ml 2900 2700 - 1900 3500 3000 - 3800 ml 3800 3600 - 2500 4700 4000 - 8000 ml (8 L) 7200 6600 - 4700 - - - 20000 ml (20 L) 20000 19000 - - - - - 1 Gross volume is defined as the maximum filling volume, 90% of total cylinder volume. 2 Fill weights based on maximum fill volume; smaller fill weights are available on request. Your safety is our priority Nouryon’s success in safely handling Metal Organics (MO) is due to our long-term commitment to safety. Knowledge of proper handling techniques, carefully designed facilities and thorough training of personnel can overcome the hazards. Personnel who understand and pay proper attention will be able to handle metal organics confidently and safely. Safety and handling Storage Safety services Our MO-sources like TMAl, TMGa MO sourches are stable when stored Nouryon is recognized as a global and TMln ignites upon exposure to air under a dry, inert atmosphere and leader in metal alkyl safety. We and reacts violently with water. They away from heat. MO’s may undergo always place safety as our top priority. must be handled under a dry, inert violent exothermic decomposition Sharing our experience in safety is atmosphere, e.g. nitrogen or argon. with flammable gas evolution if one of the most important resources TMAl may undergo exothermic stored at too high temperatures. we offer. Through our safety decomposition with evolution of Metal alkys should, in general, be kept programs we can provide expert flammable gas if heated above 6-12°C above their melting point. advice on the handling of these
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