FIB-SEM) Tomography Hui Yuan, B Van De Moortele, Thierry Epicier
Accurate post-mortem alignment for Focused Ion Beam and Scanning Electron Microscopy (FIB-SEM) tomography Hui Yuan, B van de Moortele, Thierry Epicier To cite this version: Hui Yuan, B van de Moortele, Thierry Epicier. Accurate post-mortem alignment for Focused Ion Beam and Scanning Electron Microscopy (FIB-SEM) tomography. 2020. hal-03024445 HAL Id: hal-03024445 https://hal.archives-ouvertes.fr/hal-03024445 Preprint submitted on 25 Nov 2020 HAL is a multi-disciplinary open access L’archive ouverte pluridisciplinaire HAL, est archive for the deposit and dissemination of sci- destinée au dépôt et à la diffusion de documents entific research documents, whether they are pub- scientifiques de niveau recherche, publiés ou non, lished or not. The documents may come from émanant des établissements d’enseignement et de teaching and research institutions in France or recherche français ou étrangers, des laboratoires abroad, or from public or private research centers. publics ou privés. Accurate post-mortem alignment for Focused Ion Beam and Scanning Electron Microscopy (FIB-SEM) tomography H. Yuan1, 2*, B. Van de Moortele2, T. Epicier1,3 § 1. Université de Lyon, INSA-Lyon, Université Claude Bernard Lyon1, MATEIS, umr CNRS 5510, 69621 Villeurbanne Cedex, France 2. Université de Lyon, ENS-Lyon, LGLTPE, umr CNRS 5276, 69364 Lyon 07, France 3. Université de Lyon, Université Claude Bernard Lyon1, IRCELYON, umr CNRS 5256, 69626 Villeurbanne Cedex, France Abstract: Drifts in the three directions (X, Y, Z) during the FIB-SEM slice-and-view tomography is an important issue in 3D-FIB experiments which may induce significant inaccuracies in the subsequent volume reconstruction and further quantification of morphological volume parameters of the sample microstructure.
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