Proceedings of the ASME 2017 International Technical Conference and Exhibition on Packaging and Integration of Electronic and Photonic Microsystems InterPACK2017 August 29-September 1, 2017, San Francisco, California, USA IPACK2017-74132 INTEGRATED VAPOR CHAMBER HEAT SPREADER FOR POWER MODULE APPLICATIONS Clayton L. Hose Dimeji Ibitayo Advanced Cooling Technologies, Inc. U.S. Army Research Laboratory 1046 New Holland Avenue Sensors and Electron Devices Directorate Lancaster, PA, USA 2800 Powder Mill Rd
[email protected] Adelphi, MD, USA
[email protected] Lauren M. Boteler Jens Weyant U.S. Army Research Laboratory Advanced Cooling Technologies, Inc. Sensors and Electron Devices Directorate 1046 New Holland Avenue 2800 Powder Mill Rd Lancaster, PA, USA Adelphi, MD, USA
[email protected] [email protected] Bradley Richard Advanced Cooling Technologies, Inc. 1046 New Holland Avenue Lancaster, PA, USA
[email protected] ABSTRACT spreaders. Experimental results show a 43°C reduction in This work presents a demonstration of a coefficient of device temperature compared to a standard solid CuMo heat thermal expansion (CTE) matched, high heat flux vapor spreader at a heat flux of 520 W/cm2. chamber directly integrated onto the backside of a direct bond copper (DBC) substrate to improve heat spreading and reduce INTRODUCTION thermal resistance of power electronics modules. Typical vapor There is a strong demand in the power electronics industry chambers are designed to operate at heat fluxes > 25 W/cm2 for modules with higher power densities and increased with overall thermal resistances < 0.20 °C/W. Due to the rising reliability [1-3].