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In Page.Indd Message from Chairman > After a long term service as a professorship at university, I was appointed as the Minister of National Science Council (NSC) in 2000. Before I came to the National Applied Research Laboratories (NARL) in 2004, I had served as the Chairman of Industrial Technology Research Institute (ITRI) since 2001. Therefore, I am quite familiar with the missions and operations of national laboratories originally established by NSC. I am glad to see that the national laboratories have been branched out from NSC and have been consolidated into NARL of a non-profit organization in 2003. Establishment of NARL implies that national laboratories are reset at a new staring point of challenge. NARL must have a new vision to enhance future science and technology development in Taiwan. The primary mission of national laboratories is to provide the large-scale experimental platform and facility to support the academic researches. Functionally speaking, NARL is a service-oriented institution. After reforming into a non-profit organization, NARL should not only provide high- quality services to academia, but should enhance its in-house R&D capability as well. With providing high-quality service and enhancing core R&D competence, NARL will reconstitute its contribution beneficial from a non-profit organization. In order to enhance NARL’s R&D capacity, each laboratory should sketch its short-term and long-term technical development roadmap based upon their specialties. The implementation plan should include: selection of advanced research topics, team-up of research personnel, allocation of budget, and establishment of thorough review mecha- nism. Additionally, NARL will also enhance the collaboration with other research institutions for building up the core competence. By doing these, it is anticipated that NARL will decrease the ratio of budget funded by the govern- ment year-after-year to constitute NARL’s operations into a non-profit organization. NARL has the responsibility to reform the national laboratories to face the challenge in the new era. NARL will work closely with you to become one of leading science and technology R&D institutions in Taiwan. Cheng-I Weng, Ph.D. Chairman, NARL > 1 > Message from President > > Established in 2003, National Applied Research Laboratories (NARL) proudly entered 2004 with renewed vitality and resolve. These past years have been very productive for NARL, thanks to the invaluable contributions from every one of NARL’s Board of Directors & Supervisors > Headquarters > colleagues. With skillful guidance provided by the Board of Directors, NARL has successfully evolved from a governmental > Chairman Cheng-I Weng > President Lou-Chuang Lee agency into a non-profi t organization consisting of nine dynamic > Manager Director Ferng-Ching Lin > Vice President Cheng-Hong Chen laboratories. The transformation from the earlier organization, > Manager Director F. C. Tseng which was individually operated by members for over ten years, > Director Nan-Hung-Piao Ting to NARL’s new synergetic structure has not always been an easy > Manager Director Robert Lai > Director Guey-Shin Chang task. How to constitute a common vision, effective business > Manager Director Ching-Jyh Shieh model, and build upon core competencies to the betterment of > Director Hsiang-Tsung Kung > Director Chii-Wen Hung NARL has been our challenge, which we must continually face > Director Se-Hwa Wu and resolve together. > Director Ching-Ping Lu > Director Maw-Kuen Wu In 2004, we warmly welcomed the National Science & Technol- > Director Wen-Hsiung Li ogy Center for Disaster Reduction (NCDR) as the seventh nation- > Director Shyi-Ming Lin al laboratory to the NARL family. We anticipate that NCDR will > Director Chenming Valvin Hu Laboratories > enhance its collaborations with other NARL laboratories to fully > Director Chun-Yeh Chang > National Nano Device Laboratories integrate and expand its technology throughout the NARL platform. � � � > Director Wei-Jao Chen Director Wei-Xin Ni NARL accomplished many research & development milestones during the year of 2004. Examples include National > Director Ovid JL Tzeng > National Laboratory Animal Center Space Organization’s (NSPO) successful launch and operation of FORMOSAT-2, the fi rst Taiwan-owned high- > Director Gwo-Jiunn Huang Director Ming-Hseng Wang resolution remote sensing satellite. Of note, FORMOSAT-2 carries a scientifi c payload (ISUAL) that is the fi rst > National Center for Research on Earthquake Engineering instrument in the world that observes the upper lightning phenomena (red sprites, blue jets, gigantic jets and elves) > Director Chau-Shioung Yeh Director Keh-Chyuan Tsai from space. Also, National Center for High-Performance Computing (NCHC) has built up the Taiwan Advanced > Director Chao-Han Liu > National Space Organnization Research and Education Network (TWAREN) and the Knowledge Innovation National Grid (KING) by construct- > Executive Supervisor Guo-Chung Chi Director Lance Wu ing the computing and networking infrastructure necessary for future decades to come. These tremendous accom- > Supervisor Fong-Yew Kuo plishments attest to the fact that NARL’s research & development capabilities are in step with those of leading > National Center for High-performance Computing > Supervisor John Yu institutions worldwide. Director Joe Juang > Supervisor Shaw-Liang Cheng For the near future, NARL’s goal is to focus on two key areas, “management and operation development” and “core > National Chip Implementation Center mission development.” As part of enhancing management and operation development, NARL will implement a Director Ging-Yang Jou project-oriented management model to effi ciently manage the costs and leverage the performance of all projects. > National Science and Technology Center for Disaster Reduction With respect to core mission development, NARL has preliminarily selected two important topics on which to focus, Director Liang-Chueng Chen “environment and disaster reduction” and “frontier technology innovation.” By consolidating this organization’s > Instrument Technology Research Center most competitive research capabilities, NARL’s core competencies will be strategically maximized. In conclusion, Director Chien-Jen Chen with its new organization and innovative research & development plans, NARL continues to dedicate its service and > Science & Technology Policy Research and Information Center research to the Taiwan’s science & technology community. Director Chia-Yin Tsai Respectfully submitted, Lou-Chuang Lee President, NARL July, 2005 > 2 > > 3 > 1988 Approval of the 5-year Plan “ National Introduction Sub-Micron Device Laboratory “ by the The National Nano Device Laboratories (NDL) is one of Executive Yuan the eight national laboratories operated by the National 1992 Opening of clean room Applied Research Laboratories (NARL). NDL is locat- 1993 Renamed as “National Nano Device ed in Hsinchu, Taiwan and is next to the Science-based Laboratories” Industrial Park. Construction of NDL started in 1988 Open to academic and industrial when the Executive Yuan, Taiwan, approved a 5-year research work “Submicron Technology Development Project”. Clean 2002 Opening of Tainan Offi ce National Nano Device Laboratories room facilities at NDL were completed in 1992, includ- 2003 Become a non- profi t research and ing class 10, 1000, and 10000 rooms with a total area of development organization > > 2245 m2. NDL has more than 80 pieces of equipment 2004 Opening of the Nanoelectronics Rsearch available to academia and the microelectronics indus- Building try. The rapid development of microelectronics technol- Mission of NDL National Nano Device Laboratories ogy has made the cost of R&D-related activities very The aim and goal of NDL is to develop nano devices expensive. This has encouraged a global trend in the and nano-related materials; train the high-tech personale microelectronics fi eld of sharing research resources. that is needed for nano techonology, and conduct indus- The main objective for NDL is to provide an up-to-date trial and academic cooperative research, with an eye to research environment for academia to conduct advanced make the most of our research power and resources, with microelectronics studies. To foster the high-caliber the purpose of enhancing Taiwan’s edge in the fi eld of talent needed in the semiconductor industry, NDL also semiconductors both academically and industrially. offers many training programs to graduate students from universities in Taiwan. Many contract-research Silicon-based semiconductor devices and materials programs between NDL and academia/industry not only with a special focus on nano devices and nano science promote high research quality in the area of microelec- technologies are the primary research objective at NDL. tronics, but also strengthen Taiwan’s competitiveness Technical modules for 6-inch CMOS integration have in the IC market worldwide. been produced to fulfi ll research targets and meet service requirements. In the advanced modules process technol- ogies, the focus is on e-beam direct writing, photoresist patterning, front-end and back-end technology, material characterization and high-frequency measurement and modeling. > 6 > > 7 > Accomplishments cal and electrical phenomena. Electronic struc- ing the measurement error due to probing condition cence at room temperature. ture as well as the transport properties for various variation. 12. Maskless Dry Etching Technique NDL specializes in the research of advanced nano
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