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Design, Modeling, Fabrication and Control of PMN-PT Piezoelectric Systems

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Design, Modeling, Fabrication and Control of PMN-PT Piezoelectric Systems Design, Modeling, Fabrication and Control of PMN-PT Piezoelectric Systems. Adrian Ciubotariu To cite this version: Adrian Ciubotariu. Design, Modeling, Fabrication and Control of PMN-PT Piezoelectric Systems.. Engineering Sciences [physics]. Université de Franche-Comté, 2016. English. tel-01299667 HAL Id: tel-01299667 https://hal.archives-ouvertes.fr/tel-01299667 Submitted on 8 Apr 2016 HAL is a multi-disciplinary open access L’archive ouverte pluridisciplinaire HAL, est archive for the deposit and dissemination of sci- destinée au dépôt et à la diffusion de documents entific research documents, whether they are pub- scientifiques de niveau recherche, publiés ou non, lished or not. The documents may come from émanant des établissements d’enseignement et de teaching and research institutions in France or recherche français ou étrangers, des laboratoires abroad, or from public or private research centers. publics ou privés. Thèse de Doctorat école doctorale sciences pour l’ingénieur et microtechniques UNIVERSITÉ DE FRANCHE-COMTÉ Design, Modeling, Fabrication and Control of PMN-PT Piezoelectric Systems n DRAGOS ADRIAN CIUBOTARIU Thèse de Doctorat école doctorale sciences pour l’ingénieur et microtechniques UNIVERSITÉ DE FRANCHE-COMTÉ N◦ X X X THESE` present´ ee´ par DRAGOS ADRIAN CIUBOTARIU pour obtenir le Grade de Docteur de l’Universite´ de Franche-Comte´ Specialit´ e´ : Microfabrication and Electric Engineering Design, Modeling, Fabrication and Control of PMN-PT Piezoelectric Systems Unite´ de Recherche : FEMTO-ST, UMR CNRS 6174 Soutenue publiquement le 4 mars 2016 devant le Jury compose´ de : FRED´ ERIC´ LAMARQUE Rapporteur Professeur a` l’UTC, Compiegne` CONSTANTIN NITU Rapporteur Professeur a` l’UPB, Bucarest JACQUES LOTTIN Examinateur Professeur a` l’US, SYMME, Savoie SIMONA NOVEANU Examinateur Maˆıtre de Conferences´ a` l’UTCN, Cluj- Napoca PHILIPPE LUTZ Directeur de these` Professeur a` l’UFC FEMTO-ST / AS2M DINU COLTUC Directeur de these` Professeur a` l’UVT, Targoviste CEDRIC´ CLEVY´ Encadrant de these` Maˆıtre de Conferences,´ UFC, Besanc¸on IOAN ALEXANDRU IVAN Encadrant de these` Maˆıtre de Conferences,´ ENISE, Saint- Etienne “I have a friend who’s an artist and has sometimes taken a view which I don’t agree with very well. He’ll hold up a flower and say ”look how beautiful it is,” and I’ll agree. Then he says ”I as an artist can see how beautiful this is but you as a scientist take this all apart and it becomes a dull thing,” and I think that he’s kind of nutty. First of all, the beauty that he sees is available to other people and to me too, I believe. Although I may not be quite as refined aesthetically as he is ... I can appreciate the beauty of a flower. At the same time, I see much more about the flower than he sees. I could imagine the cells in there, the complicated actions inside, which also have a beauty. I mean it’s not just beauty at this dimension, at one centimetre; there’s also beauty at smaller dimensions, the inner structure, also the processes. The fact that the colours in the flower evolved in order to attract insects to pollinate it is interesting; it means that insects can see the colour. It adds a question: does this aesthetic sense also exist in the lower forms? Why is it aesthetic? All kinds of interesting questions which the science knowledge only adds to the excitement, the mystery and the awe of a flower. It only adds. I don’t understand how it subtracts.” Richard Feynman, BBC Interview, 1981 v This thesis is dedicated to my wife, Marina, who has not only been a constant support, but has put my well being above hers, has put her life on hold and has helped me improve. Without her, pushing through would have been an impossible feat. Thank you with all my being vii CONTENTS General introduction7 1 Integrated micro-actuators for micro-mechanical systems 11 1.1 Introduction . 11 1.2 Context of the work . 12 1.2.1 Micro-robotics used for assembly . 12 1.2.2 Micro-Opto-Electro-Mechanical Systems . 15 1.3 Current challenges . 22 1.4 Collaborative context of the PhD . 26 1.4.1 M.I.O.P. 26 1.4.2 A.D.M.A.N. 29 1.5 Smart materials commonly used . 30 1.6 Conclusion . 35 2 Specifications of PMN-PT 37 2.1 Introduction . 37 2.2 Main characteristics of the PMN-PT material . 38 2.2.1 PMN-PT production - obtaining the monocrystal . 40 2.2.2 Piezoelectric coefficients and the components ratio importance . 46 2.3 Advantages for integrability . 50 2.4 Electric and Mechanical properties . 53 2.4.1 PMN-PT [011] . 62 2.4.2 PMN-PT [001] . 64 2.5 Conclusion . 67 3 Beam actuator Based on PMN-PT [011] cut for Multi DoF displacements 69 3.1 Introduction . 69 3.2 Study of PMN-PT [011] through a duo-bimorph structure . 70 3.2.1 Design of a flexural actuator . 70 3.2.2 Theoretical performances - Static Displacement and Force Model . 71 1 2 CONTENTS 3.2.3 Fabrication procedure . 76 3.2.4 Performances analysis: Displacement and Force model validation . 78 3.2.5 Conclusion . 85 3.3 Large stroke 6 DoF microgripper . 86 3.3.1 Microgrippers State of the Art . 86 3.3.2 Development and fabrication . 87 3.3.3 Capabilities . 88 3.4 Conclusion . 95 4 Patch actuator using the PMN-PT [001] cut for highly integrated piezo- systems 97 4.1 Introduction . 97 4.2 Integration of piezoelectric actuators in MOEMS . 98 4.2.1 Study of PMN-PT [001] as a patch actuator . 101 4.3 Modeling the actuator and the integrating structure . 103 4.3.1 The design of the micro-actuator . 104 4.3.1.1 The two derived scenarios: Fixed-Free and Free-Free . 105 4.3.1.2 Influence of actuator parameters over displacement and the generated shape . 106 4.3.1.3 Static and Dynamic behaviour . 110 4.3.2 Conclusion . 114 4.4 Fabrication of a RFS-MOB compatible element encompassing PMN-PT [001]114 4.4.1 Techniques used for fabricating the final structure . 114 4.4.2 The actuator and the final structure . 115 4.4.3 Prototype description and performances . 116 4.5 Conclusion . 119 5 Conclusion and Future Works 121 5.1 Contributions of the work . 121 5.2 Future works . 123 I Annexes 125 A The Czochralski Method 127 B Coefficients tables 129 CONTENTS 3 C Beam fabrication procedure 131 D Micro-actuator surface curvature 133 E Displacement and Laser beam diameter 135 F PMN-PT micro-actuator fabrication 137 G Si holder plus PMN-PT actuator and mirror assembly 139 Personal publications 141 LIST OF ACRONYMS ADMAN - Advanced Devices for micro- and nano-scale MANipulation and characteriza- tion AFM - Atomic Force Microscopy AS2M - Automatic Control and Micro-Mechatronic Systems CODE - COntrol and DEsign DE - Dielectric Elastomer DEA - Dielectric Elastomer Actuator DMD - Digital Micro-mirror Device DoF - Degree of Freedom DRIE - Deep Reactive Ion Etching EDS - Energy-Dispersive Spectroscopy FEM - Finite Elements Method FEMTO-ST - Franche-Comte´ Electronique, Mecanique,´ Thermique et Optique - Sciences et Technologies GLV - Grating Light Valve LN - Lithium(Li) Niobate(Ni) LT - Lithium(Li) Titanate(Ti) MEMS - Micro-Electro-Mechanical-Systems MIOP - Micro-systems for Instrumented OPtical chips MOB - Micro-Optical-Benches MOEMS - Micro-Opto-Electro-Mechanical-Systems MOT - Micro-Optical Table MPB - Morphotropic Phase Boundary OCT - Optical Coherence Tomography OXC - Optical Cross Connectors PCB - Printed Circuit Board PMN-PT - Lead(Pb) Magnesium(Mg) Niobate(Ni) - Lead(Pb) Titanate(Ti) PZN - Lead(Pb) Zinc(Zn) Titanate(Ti) PZT - Lead(Pb) Zirconium(Zr) Titanate(Ti) RFS-MOB - Reconfigurable Free Space - Micro Optical Bench 5 6 CONTENTS RFS-MOB - Reconfigurable Free-Space Micro-Optical Bench SEM - Scanning Electron Microscope SMA - Shape Memory Alloy SOI - Silicon-On-Insulator SSH - Synchronized Switch Harvesting STM - Scanning Tunnelling Microscopes GENERAL INTRODUCTION There is an ever increasing need for miniaturised systems in today’s technological world and this presents new challenges for scientists and industry. There are a number of advantages that miniaturization brings, such as increase in performances, reduction of energy requirements, low costs due to their batch fabrication, storage, transport and the ability to integrate several functions in small volumes. This has lead to the development of specific technologies aimed to the design, fab- rication and integration of special systems that incorporate mechanical, electrical and even optical features. Initially Micro-Electro-Mechanical Systems (MEMS) started being developed, focusing on the integration of, what are now called, smart materials, due to their capability to react to environment changes and giving a measurable reaction (temperature variations, electrical current intensity or potential etc.). After decades of research and development, optical capabilities have been added, thus creating Micro- Opto-Electro-Mechanical Systems (MOEMS). They have aided in the implementation of optical data communication, increasing speeds by using optical routers and optical stor- age mediums. They have also helped the development of new imaging technologies like Optical Coherence Tomography (OCT) and measurement tools like microspectrometers, laser vibrometers or interferometers. With newer materials being developed, these sys- tems too have been reduced in size, a trend that is still followed today. This trend has also been helped by the development of micro-fabrication tools and the reduction in size of complex systems. The use of smart materials also allowed for the micro-assembly tools used to gain in dexterity while reducing their overall complexity. This is the case of microgrippers. The fabrication of MOEMS using an approach combining advanced micro- fabrication and robotic micro-assembly techniques has been presented in several works [Bargiel et al., 2010, Dechev et al., 2004, Das et al., 2012] and has shown its effective- ness in the fabrication of complex, out-of-plane MOEMS structures.
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