Electrical and Computer Engineering Publications Electrical and Computer Engineering 2006 Electron mobility in nanocrystalline silicon devices Daniel Stieler Iowa State University,
[email protected] Vikram L. Dalal Iowa State University,
[email protected] Kamal Muthukrishnan Iowa State University Max Noack Iowa State University,
[email protected] Eric Schares Iowa State University,
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[email protected]. Electron mobility in nanocrystalline silicon devices Abstract Electron mobility in the growth direction was measured using space charge limited current techniques in device-type nin structure nanocrystalline Si:H and nanocrystalline Ge:H structures. The films were grown on stainless steel foil using either hot wire or remote plasma enhanced chemical vapor deposition techniques. Grain size and crystallinity were measured using x ray and Raman