100“ 168\A166\1::: 1:1 162 { 164C 1
US 20060180895Al (19) United States (12) Patent Application Publication (10) Pub. No.: US 2006/0180895 A1 Chen et al. (43) Pub. Date: Aug. 17, 2006 (54) CAPACITOR DEVICE WITH VERTICALLY (21) Appl. No.: 11/055,933 ARRANGED CAPACITOR REGIONS OF VARIOUS KINDS (22) Filed: Feb. 11, 2005 (75) Inventors: Yueh-You Chen, Hsin-Chu City (TW); Publication Classi?cation Chung-Long Chang, Dou-Liu city (TW); Chih-Ping Chao, Chu-Dong (51) Int. Cl. Town (TW); Chun-Hong Chen, Jhubei H01L 29/93 (2006.01) City (TW) (52) U.S. Cl. .......................................... .. 257/595; 257/E2l Correspondence Address: (57) ABSTRACT DUANE MORRIS, LLP IP DEPARTMENT A capacitor device selectively combines MOM, MIM and 30 SOUTH 17TH STREET varactor regions in the same layout area of an IC. TWo or PHILADELPHIA, PA 19103-4196 (US) more types of capacitor regions arranged vertically on a substrate to form the capacitor device. This increase the (73) Assignee: Taiwan Semiconductor Manufacturing capacitance per unit of the capacitor device, Without occu Company, Ltd. pying an extra layout area. 100“ 168\A166\1::: 1:1 162 { 164C 1:: . 160 158, F I /_\~ ’/'_‘\ 130 Bi- - + - +--E6_,154 /\_ A/A\ 128 i. - + - +--?, 152 122 ' 134 . ,/—\ 142 126 \_/—'—~ . + .. +_-\_, 150 /\'_ ‘/_\ 4 124 i. + - +--—2, 148 120% 118/1- ] 116f 108 112 112 104 10s \ p — /_/ 106 _ m _ 114 l_/114 110 Patent Application Publication Aug. 17, 2006 Sheet 2 0f 2 US 2006/0180895 A1 200“ - + - + + - + - - + - + + - + - FIG. 2 300% 316% + ' + 314“ 312% + + 310v“ ' 308 “w - + - + 306\___ 304“ + + FIG. 3 US 2006/0180895 A1 Aug.
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