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Vacuum Technology Book Volume II

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Vacuum Technology Book Volume II The Vacuum Technology Book Volume II Know how book Part 2 Know how book Page 2 / Part 2 www.pfeiffer-vacuum.com 2 Vacuum Technology and Know how / Contents Contents Vacuum Technology and Know how 1 Introduction to vacuum technology 1.1 General 9 1.1.1 Vacuum – Definition .................................................9 1.1.2 Overview of vacuum .................................................9 1.2 Fundamentals 9 1.2.1 Definition of vacuum .................................................9 1.2.2 General gas equation ................................................11 1.2.3 Molecular number density ............................................12 1.2.4 Thermal velocity ....................................................12 1.2.5 Mean free path .....................................................12 1.2.6 Types of flow ......................................................14 1.2.7 pV throughput .....................................................15 1.2.8 Conductance ......................................................16 1.3 Influences in real vacuum systems 18 1.3.1 Contamination .....................................................18 1.3.2 Condensation and vaporization ........................................18 1.3.3 Desorption, diffusion, permeation and leaks ..............................19 1.3.4 Bake-out ..........................................................20 1.3.5 Residual gas composition ............................................20 1.3.6 Venting ...........................................................20 2 Basic calculations 2.1 General 22 2.2 Calculations 22 2.2.1 Dimensioning a Roots pumping station .................................22 2.2.2 Condenser mode ...................................................25 2.2.3 Turbopumping stations ..............................................27 2.2.3.1 Evacuating a vessel to 10-8 hPa with a turbopumping station ..........27 2.2.3.2 Pumping high gas loads with turbomolecular pumps ................29 2.3 Piping conductivities 30 2.3.1 Laminar conductance. 30 2.3.2 Molecular conductance ..............................................30 3 Mechanical components in vacuum 3.1 General 32 3.2 Materials 32 3.2.1 Metallic materials ...................................................33 3.2.1.1 Stainless steel ...............................................33 3.2.1.2 Carbon steel .................................................36 3.2.1.3 Aluminum ..................................................36 3.2.2 Sealing materials ...................................................36 3.2.2.1 Elastomer seals ..............................................36 3.2.2.2 Metal seals ..................................................37 www.pfeiffer-vacuum.com Part 2 / Page 3 2 Vacuum Technology and Know how / Contents Contents 3.3 Connections 38 3.3.1 Non-detachable connections ..........................................38 3.3.1.1 Welding ....................................................38 3.3.1.2 Brazing, fusing and metalizing ..................................39 3.3.2 Detachable flange connections ........................................40 3.3.2.1 O-Ring seals and grooves ......................................40 3.3.2.2 ISO-KF flange ................................................41 3.3.2.3 ISO-K/ISO-F flange ............................................42 3.3.2.4 CF flange ...................................................43 3.3.2.5 COF flanges .................................................44 3.3.2.6 Other flange standards ........................................44 3.3.2.7 Screws .....................................................44 3.4 Vacuum chambers 47 3.4.1 Processing – Surfaces ...............................................47 3.4.2 Processing – Cleaning ...............................................48 3.5 Components and feedthroughs 49 3.5.1 Hoses and flexible connectors .........................................49 3.5.2 Viewports .........................................................49 3.5.3 Electrical feedthroughs ..............................................49 3.5.4 Other feedthroughs .................................................50 3.6 Valves 50 3.6.1 Valve control .......................................................50 3.6.2 Angle valves .......................................................51 3.6.3 Inline and diaphragm valves ..........................................51 3.6.4 Gate valves ........................................................52 3.6.5 Butterfly and ball valves ..............................................52 3.6.6 Gas dosing valves and gas control valves ................................52 3.7 Manipulators and mechanical feedthroughs 52 3.7.1 Operating principles ................................................53 3.7.1.1 Translation sealed by diaphragm bellows ..........................53 3.7.1.2 Bellows-sealed rotation ........................................53 3.7.1.3 Magnetically coupled rotation and translation ......................54 3.7.1.4 Sealed elastomer rotation and translation ..........................54 3.7.1.5 Rotation via sliding gaskets with pumped interspaces ................54 3.7.2 Accuracy, repeatable precision and resolution ............................54 3.7.3 Technical equipment and characteristics .................................55 3.7.3.1 Design features of a Z-axis precision manipulator ...................55 3.7.3.2 Design features of an XY-axis precision manipulator .................56 4 Vacuum generation 4.1 Vacuum pumps – working principles and properties 58 4.1.1 Classification of vacuum pumps .......................................58 4.1.2 Pumping speed and throughput .......................................59 4.1.3 Ultimate pressure and base pressure ...................................59 4.1.4 Compression ratio ..................................................59 4.1.5 Pumping speed of pumping stages connected in series .....................59 4.1.6 Gas ballast ........................................................59 4.1.7 Water vapor tolerance / water vapor capacity .............................60 4.1.8 Sealing gas ........................................................60 Page 4 / Part 2 www.pfeiffer-vacuum.com 2 Vacuum Technology and Know how / Contents Contents 4.2 Rotary vane vacuum pumps 60 4.2.1 Design / Operating principle ..........................................60 4.2.2 Application ........................................................61 4.2.3 Portfolio overview ...................................................61 4.2.3.1 Single-stage rotary vane vacuum pumps ..........................62 4.2.3.2 Two-stage rotary vane vacuum pumps ............................63 4.2.3.3 Operating fluid selection .......................................66 4.2.3.4 Accessories .................................................66 4.3 Diaphragm vacuum pumps 68 4.3.1 Design / Operating principle ..........................................68 4.3.2 Application ........................................................68 4.3.3 Portfolio overview ...................................................68 4.3.4 Accessories .......................................................68 4.4 Screw vacuum pumps 69 4.4.1 Design / Operating principle ..........................................69 4.4.2 Application ........................................................69 4.4.3 Portfolio overview ...................................................70 4.4.4 Accessories .......................................................70 4.5 Multi-stage Roots pumps – Vacuum generation 4.5.1 Design / Operating principle ..........................................71 4.5.2 Application ........................................................71 4.5.3 ACP portfolio overview. 72 4.5.3.1 Air cooled multi-stage Roots pumps ..............................72 4.5.3.2 Accessories .................................................73 4.6 Multi-stage Roots pumps – Vacuum processes 4.6.1 Design / Operating principle ..........................................74 4.6.2 Application ........................................................75 4.6.3 Load locks and noncorrosive gases .....................................75 4.6.4 Process chemistry ..................................................76 4.6.5 Harsh process chemistry .............................................76 4.6.6 Portfolio overview ...................................................77 4.6.6.1 Water cooled, process pumps ...................................77 4.6.6.2 Accessories .................................................78 4.7 Roots vacuum pumps 78 4.7.1 Design / Operating principle ..........................................78 4.7.2 Application ........................................................80 4.7.2.1 Backing pump selection ........................................80 4.7.3 Portfolio overview ...................................................81 4.7.3.1 Standard pumps ..............................................81 4.7.3.2 Standard pumps with magnetic coupling ..........................81 4.7.3.3 Explosion-protected pumps .....................................81 4.7.3.4 Gas circulation cooled Roots pumps ..............................82 4.7.4 Accessories .......................................................82 4.7.5 Pumping stations ...................................................82 4.8 Side channel high vacuum pumps 83 4.8.1 Design / Operating principle ..........................................83 4.8.2 Application ........................................................83 4.8.3 Portfolio overview ...................................................83
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