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Vacuum Valves Vacuum Valves Manually Operated Electropneumatically Operated Electromagnetically Operated Special Valves Gate Valves 176.01.02 Excerpt from the Oerlikon Leybold Vacuum Full Line Catalog Product Section C14 Edition 2010 Contents General The Oerlikon Leybold Vacuum Valve Program . C14.03 Products Small Valves of the “micro” Range Overview . C14.07 Right-Angle and Straight-Through Valves, Bellows-Sealed, Various Drives . C14.08 Valves with ISO-KF Flanges Overview . C14.11 Nominal Width DN 16 ISO-KF to DN 50 ISO-KF Right-Angle and Straight-Through Valves, Bellows-Sealed, Manually Operated . C14.12 Right-Angle Valves, Bellows-Sealed, Electropneumatically Operated . C14.14 Straight-Through Valves, Bellows-Sealed, Electropneumatically Operated . C14.16 Right-Angle Valves, Bellows-Sealed, Electromagnetically Operated . C14.18 Valves with ISO-K Flanges Overview . C14.20 Nominal Width DN 63 ISO-K to DN 160 ISO-K Right-Angle Valves, Bellows-Sealed, Manually Operated . C14.21 Right-Angle Valves, Bellows-Sealed, Electropneumatically Operated . C14.22 Nominal Width DN 250 ISO-K Right-Angle Valves, Bellows-Sealed, Electropneumatically Operated . C14.24 Special Valves with ISO-KF / ISO-K / CF Flange Overview . C14.26 Nominal Width DN 10 ISO-KF to DN 40 ISO-KF or ISO-K SECUVAC Vacuum Safety Valves . C14.27 Safety Valve . C14.30 Power Failure Venting Valves, Electromagnetically Actuated . C14.31 (Coarse) Variable-Leak Valves with and without Isolation Valve . C14.32 Venting Valves, Various Drives . C14.34 Vacuum Locks and Sealing Valves . C14.36 Ball Valves . C14.38 Right-Angle Valve for Mobile Systems according to DOT . C14.39 Accessories for the Electropneumatically Operated Valves, Valves with ISO-KF / ISO-K Flange . C14.40 Special Valves for Turbomolecular Pumps . C14.42 Nominal Width DN 16 CF to DN 63 CF UHV Valves All-Metal Right-Angle Valves . C14.43 All-Metal Variable Leak Valves . C14.44 Gate Valves with ISO-KF / CF / ISO-F Flange Overview . C14.45 Miniature UHV Gate Valves, ISO-KF and CF Flange Manually Operated, . C14.46 Electropneumatically Operated, . C14.50 HV Gate Valves, ISO-F Flange Manually Operated . C14.52 Electropneumatically Operated . C14.54 UHV Gate Valves, Manually Operated, CF Flange . C14.56 UHV Gate Valves, Electropneumatically Operated ISO-F Flange . C14.58 CF Flange . C14.60 C14 02 Oerlikon Leybold Vacuum Full Line Catalog General The Oerlikon Leybold Vacuum It is the aim of Oerlikon Leybold All applications have the following Valve Program Vacuum to meet, through the offered requirements in common: range of isolation components and val- The long-standing experience of - Quiet opening action with very ves, the customers requirements re- Oerlikon Leybold Vacuum in the area of little vibration garding the design of such compo- vacuum engineering is reflected in the nents. For this reason all valves are - Compact design, low weight selection and the design of the valves available with different driving systems. and vacuum protection components - Highly visible, unambiguous positi- for a wide variety of applications. The With the exception of the special val- on indicator ves you may select between a stepped range of products is such that a relia- - For use within the pressure range rotary knob manual drive, an electrop- ble solution can be offered for every from 10-8 to 2500 mbar, if not neumatic drive or an electro-magnetic vacuum engineering application. Many stated otherwise years of service and the reliability of the drive system. valves is ensured by design. Oerlikon - Fully operational within the entire Right-angle valves DN 16 ISO-KF to Leybold Vacuum valves are well-proven specified pressure range DN 40 ISO-KF as well as DN 63 ISO-K in many widely varying areas of rese- to DN 160 ISO-K are either available Oerlikon Leybold Vacuum valves arch and industry. with an aluminium or stainless steel meet these requirements, unless body (the latter up to DN 100 ISO-K otherwise stated by the technical The Design of a Vacuum Valve only). data. Scope of the Range of Valves The special characteristics of the Quality Assurance application in each case result in special requirements concerning The various markets, like Analytical or Valve cover Type of operation: -stepped rotary knob features of the valves, for example: Coating, for example are very demand- -electropneumatic -electromagnetic ing regarding certain important features Housing - Coating seal for the valves which are to be used in - Short switching cycles the new generation of instruments cur- Bellow (e.g. 1.5 s) rently under development. Demanded - Very high number of opening are, among other things, high reliability Valve disk with and switching cycles (e.g. over Vacuum vacuum seal during the entire service life, high inte- 10 million cycles) Housing Valve gral leak tightness, a high number of - Analytical engineering Vacuum opening/closing cycles as well as a - High conductance (similar to fast response. the corresponding flange The valves from Oerlikon Leybold The range of Oerlikon Leybold components, like bends, for Vacuum meet all these demanding Vacuum valves comprises: example) requirements! - High integral leak tightness for - Small valves micro For further information on flange the valves (leak rates below connections and flange components - Right-angle and straight-through 10-9 mbar l/s) valves (no slanted seat valve) with please refer to Product Section C13 a nominal width of DN 16 to DN 40 - Lamps and tubes manufacture “Vacuum Fittings ISO-KF, ISO-K, ISO-F, with ISO-KF flanges - Temperature resistant CF and Feedthroughs”. - Permissible ambient tempera- - Right-angle valves with a nominal tures, 50 °C max. width of DN 63 to DN 250 with ISO-K flanges - Accelerator technology - Materials capable of resisting - Gate valves with a nominal width radiation, high temperatures of DN 16 to DN 250 with various and corrosion at the same time flanges - Metallurgy and furnace manufac- - Ball valves ture - Special valves - Rugged and insensitive to con- tamination - Chemistry - Choice of materials in contact with the medium for the valve body Oerlikon Leybold Vacuum Full Line Catalog 03 C14 Flange Designations Gaskets The flange designations used in this - The inside of the housing in contact Shown in the table at the end of the Product Section are in line with the with the medium is sealed off section “General” are the types of gas- international standards and the against the atmosphere by a bello- ket used in the valves together with nomenclature used in practice: ws type seal which is absolutely free their brief or chemical designations and Flange Type Standard Designation of any lubricants. their thermal ratings. with standardized All further technical data as well possi- nominal width 1) ble deviations from the general specifi- (DN) Other Materials Small flanges ISO 2861/I “ISO-KF” cations stated here can be found along DIN 28 403 e.g. DN 40 ISO-KF with the descriptions for the individual Plastic: Polyamide 6 (PA 6) Clamp flanges ISO 1609 “ISO-K” valve types. Grey cast iron: GG 20 (0.6020) DIN 28 404 e.g. DN 100 ISO-K Brass: Ms 58 Fixed flanges/ ISO 1609 “ISO-F” Brass For various applications and special collar flanges DIN 28 404 “F” for fixed flange (nickel-plated): CuZn39Pb3 with retaining ring e.g. DN 250 ISO-F design requirements Oerlikon Leybold Nimonic Vacuum offers a range of special val- Bronze In the case of gate valves equipped ves: Spring steel with CF flanges the following must be - SECUVAC vacuum safety valves noted: (DN 16 ISO-KF to DN 100 ISO-K) 1) The standardized nominal width (DN) corre- The designation DN 35 CF for UHV sponds approximately to the inside diameter, flanges has been changed to - Venting valves / power failure but need not necessarily be identical to the DN 40 CF with the sealing parameters venting valves inside diameter. remaining unchanged; the same app- - Vacuum locks / sealing valves 2) High vacuum systems are very demanding as lies to DN 150 CF which has changed to the leak tightness of the vacuum compo- to DN 160 CF. - Variable leak valves nents used. For this reason each individual - Ball valves (straight-through valve) Oerlikon Leybold Vacuum valve is subjected to a helium leak test before delivery. The valves Advantages to the User - Right-angle valves for mobile are only considered as leak tight, if a leak rate of less than 10-9 mbar x l x s-1 can be measu- systems which comply with the - Compact design red for the body and the valve seat. American standard of the Depart- In the case of our high vacuum valves with - Integral leak rate less than ment of Transportation (DOT) ISO-KF and ISO-K flanges a leak rate of less -9 -1 10-8 mbar l x s-1 than 10 mbar x l x s is maintained also during actuation. - FPM (FKM) sealed This means that in the case of a gas flow of the Accessories mentioned order of magnitude the pressure - For pressures up to 2000 mbar All connecting components like cen- would increase only by 3 mbar in a vessel of 1 liter and in 100 years. - Seal in both directions 2) tering rings, clamps or clamping rings needed to connect the valves - Principal dimensions comparable to must be ordered separately (see Oerlikon Leybold Vacuum flange Product Section C13 “Vacuum components of the same nominal Fittings ISO-KF, ISO-K, ISO-F, CF width and Feedthroughs”). - Reliable operation ensured regard- less of the valve’s orientation Materials - Optical valve position indicator as The valve bodies and the inside parts standard (not for valves of the are made of selected, vacuum compa- “micro” range) tible materials, like wrought aluminum - Electrical valve position indicator as or cast stainless steel. standard (not for valves of the The raw components are subjected to “micro” range) a 100% test before they are further - Operation of electromagnetic processed.
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