The Vacuum Technology Book Volume II Chambers and components Part 3.3 Chambers and components Page 2 / Part 3.3 www.pfeiffer-vacuum.com 3.3 Chambers and components 1 Vacuum solutions from a single source 2 Know-how book 3.1 Vacuum generation Addresses sales and service ..............................................4 Rotary vane pumps ......................................................8 Diaphragm vacuum pumps ..............................................124 Screw pumps ........................................................142 Multi-stage Roots pumps ...............................................158 Roots pumps .........................................................210 Side channel pumps ...................................................260 Turbopumps .........................................................266 Index ...............................................................460 3.2 Vacuum measurement, analysis, leak detection, leak testing Addresses sales and service ..............................................4 Measurement equipment .................................................8 Analysis equipment .....................................................86 Leak detectors ........................................................120 Contamination management solutions .....................................170 System technology ....................................................178 Index ...............................................................190 3.3 Chambers and components Addresses sales and service ...............................................4 Vacuum chambers ......................................................8 Components ..........................................................40 Valves ..............................................................218 Feedthroughs ........................................................298 Manipulators .........................................................354 Index ...............................................................384 www.pfeiffer-vacuum.com Part 3.3 / Page 3 3.3 Chambers and components / Addresses sales and service Addresses sales Argentina Indonesia RUVAC S.R.L. Chile Estonia APP Systems Services Pte. Ltd. Sales Agency Buenos Aires Bermat S. A. UAB Vildoma Jakarta C. F. Buenos Aires Sales Agency Santiago Sales Agency Vilnius T +6221 745 1687 T +54 11 4501 5129 Santiago Vilnius F +6221 745 3337 F +54 11 4504 4122 T +56 2 231 8877 T +37 05 236 36 56/57 [email protected] [email protected] F +56 2 231 4294 F +37 05 236 36 55 [email protected] [email protected] Ireland Australia Pfeiffer Vacuum Ltd Scitek Australia Pty. Ltd. China Finland Newport Pagnell Sales Agency/ServicePoint Sydney Hakuto Enterprises Ltd. SV Vacuumservice Oy T +44 1908 500600 Sydney Hong Kong Sales Agency Helsinki F +44 1908 500601 T +61 2 9420 0477 T +852 2512 5717 Helsinki [email protected] F +61 2 9418 3540 F +852 2807 0511 T +358-9-774 55 30 [email protected] [email protected] F +358- 9 774 55 330 Israel [email protected] ODEM Scientific Applications Ltd. Austria Pfeiffer Vacuum (Shanghai) Co., Ltd. Rehovot Pfeiffer Vacuum Austria GmbH Shanghai France T +972 8 9480780 Sales and Service Company Austria T +86-(0)21-33933940 adixen Vacuum Products SAS F +972 8 9480781 Wien F +86-(0)21-33933944 Sales and Service Company France [email protected] T +43 1 894 17 04 [email protected] Annecy F +43 1 894 17 07 T +33 4 50 65 77 77 Italy [email protected] Pfeiffer Vacuum (Shanghai) Co., Ltd. F +33 4 50 65 77 89 Pfeiffer Vacuum Italia S.p.A. ServiceCenter Wuxi [email protected] Paderno Dugnano (MI) Belgium Wuxi T +39 02 93 99 051 Pfeiffer Vacuum Benelux B.V. T +86-(0)510-85498888 Germany F +39 02 93 99 05 33 Culemborg F +86-(0)510-82239070 Pfeiffer Vacuum GmbH [email protected] T +31 345 478 400 [email protected] Headquarters F +31 345 531 076 Asslar Japan [email protected] Colombia T +49 6441 802-0 Hakuto Co., Ltd. APP Machines Ltda. F +49 6441 802-1202 Headoffice Bolivia Sales Agency Bogotá [email protected] Tokyo APP Machines Ltda. Bogotá T + 81 3 32 258 910 Sales Agency Bogotá T +57 1 704 2311 Trinos Vakuum-Systeme GmbH F + 81 3 32 259 011 Bogotá F +57 1 703 8648 Göttingen [email protected] T +57 1 704 2311 [email protected] T +49 551 99963-0 F +57 1 703 8648 F +49 551 99963-3010 Kazakhstan [email protected] Croatia [email protected] BLM Synergie SCAN, d.o.o., Preddvor Moscow Bosnia and Herzegovina Kranj, Slovenia Great Britain T +7 495 781 39 39 SCAN, d.o.o., Preddvor T +386 4 27 50 200 Pfeiffer Vacuum Ltd F +7 495 781 35 91 Kranj, Slovenia F +386 4 27 50 240 Livingston [email protected] T +386 4 27 50 200 [email protected] T +44 1506 418000 F +386 4 27 50 240 F +44 1506 418002 Korea [email protected] Cyprus [email protected] adixen Vacuum Technology Korea Analytical Instruments S.A. Hwasung-Si, Gyeonggi-Do Brazil Chalandri/Athens Newport Pagnell T +82 31 8014 7200 AVACO – Tecnologia em Vácuo T +30 210 67 48 973 T +44 1908 500600 F +82 31 8014 7227 Sales Agency São Paulo F +30 210 67 48 978 F +44 1908 500601 [email protected] São Paulo – SP [email protected] [email protected] T +55 11 4436 6994 Pfeiffer Vacuum Korea Ltd. F +55 11 4438-7571 Norm Electronics ltd. Greece Yongin-City, Kyungki-Do [email protected] Athens Analytical Instruments S.A. T +82 31 266 0741 T +30 210 3237698 Chalandri/Athens F +82 31 266 0747 Pfeiffer Vacuum Brasil Ltda. F +30 210 3237780 T +30 210 67 48 973 [email protected] Sales and Service Company Brazil [email protected] F +30 210 67 48 978 São Paulo – SP [email protected] Kosovo T +55 11 3130 7999 Czech Republic SCAN, d.o.o., Preddvor F +55 11 3130 7979 Pfeiffer Vacuum Austria GmbH, Office Norm Electronics ltd. Kranj, Slovenia [email protected] Prague Athens T +386 4 27 50 200 Praha 4 T +30 210 3237698 F +386 4 27 50 240 Bulgaria T +420 257 923 888 F +30 210 3237780 [email protected] Astel Ltd F +420 257 923 014 [email protected] Sales Agency/ServicePoint Sofia [email protected] Latvia Sofia Hungary UAB Vildoma T +359 2 958 78 85 Denmark Magnificat Vacuum Kft. Sales Agency Vilnius F +359 2 958 78 90 Pfeiffer Vacuum Scandinavia AB Budapest Vilnius [email protected] Taastrup T +3612317030 T +37 05 236 36 56/57 T +45 43 523 800 F +3612317035 F +37 05 236 36 55 Byelorussia F +45 43 523 850 [email protected] [email protected] BLM Synergie [email protected] Moscow Iceland Lithuania T +7 495 781 39 39 Ecuador Pfeiffer Vacuum Scandinavia AB UAB Vildoma F +7 495 781 35 91 APP Machines Ltda. Upplands Väsby Sales Agency Vilnius [email protected] Sales Agency Bogotá T +46 8 590 748 10 Vilnius Bogotá F +46 8 590 748 88 T +37 05 236 36 56/57 Canada T +57 1 704 2311 [email protected] F +37 05 236 36 55 Pfeiffer Vacuum Inc. F +57 1 703 8648 [email protected] ServiceCenter Nashua [email protected] India Nashua Pfeiffer Vacuum India Ltd. T +1 (800) 248-8254 Secunderabad F +1 (888) 658-7983 T +91 40 2775 0014 [email protected] F +91 40 2775 7774 [email protected] Page 4 / Part 3.3 www.pfeiffer-vacuum.com 3.3 Chambers and components / Addresses sales and service Luxembourg Peru South Africa Venezuela Pfeiffer Vacuum Benelux B.V. APP Machines Ltda. Air & Vacuum Technologies (Pty) Ltd. Secotec S.A. Culemborg Sales Agency Bogotá Gauteng Sales Agency Caracas T +31 345 478 400 Bogotá T + 27 11 318 3240/5 Caracas F +31 345 531 076 T +57 1 704 2311 F + 27 (0)86 522 9188 T +58 212 573 8687 [email protected] F +57 1 703 8648 [email protected] F +58 212 573 1932 [email protected] [email protected] Macedonia (FYROM) Spain SCAN, d.o.o., Preddvor Philippines Tecnovac Tecnologia de Vacio S.L. Vietnam Kranj, Slovenia APP Systems Services Pte. Ltd. Alcobendas (Madrid) APP Systems Services Pte. Ltd. T +386 4 27 50 200 Manila T +34 91 804 1134 Ho Chi Minh City F +386 4 27 50 240 T +63 2 846 84 17 F +34 91 804 3091 T +848 3933 0177 [email protected] F +63 2 846 84 20 [email protected] F +848 3933 0178 [email protected] [email protected] Malaysia Sweden APP Engineering Sdn. Bhd. Poland Pfeiffer Vacuum Scandinavia AB Office Kuala Lumpur APVACUUM Sp.z o.o. Upplands Väsby Kuala Lumpur Sales Agency/ServicePoint T +46 8 590 748 10 T +60 3 7984 6611 Suchy Las, k. Poznania F +46 8 590 748 88 F +60 3 7984 6616 T +48 61 6563530 [email protected] [email protected] F +48 61 6100312 [email protected] Switzerland APP Engineering Sdn. Bhd. Pfeiffer Vacuum (Schweiz) AG Office Kuching Portugal Zürich Kuching, Sarawak Tecnovac Tecnologia de Vacio S.L. T +41 44 444 22 55 T +60 82 363182 Tres Cantos (Madrid) F +41 44 444 22 66 F +60 82 362078 T +34 91 804 1134 [email protected] [email protected] F +34 91 804 3091 [email protected] Taiwan R.O.C. APP Engineering Sdn. Bhd. Pfeiffer Vacuum Taiwan Corporation Office Penang Romania Hsin Chu Penang VACUSERV srl T 886-3-5599230 T +60 4 646 7758 Sales Agency Romania F 886-5599231 F +60 4 646 7759 Bucharest [email protected] [email protected] T +40 744 500 119 F +40 21 314 0034 Thailand Mexico [email protected] Hakuto (Thailand) Ltd. INTERCOVAMEX Bangkok ServicePoint Cuernavaca Morelos Russia T +662 255 8910 Cuernavaca Morelos BLM Synergie F +662 255 8911 T +52 777 313 2260 Moscow [email protected] F +52 777 317 2701 T +7 495 781 39 39 [email protected] F +7 495 781 35 91 Turkey [email protected] An-Ka Analiz Ltd. Montenegro Istanbul SCAN, d.o.o., Preddvor Serbia T +90 212 274 97 10 Kranj, Slovenia SCAN, d.o.o., Preddvor F +90 212 274 97 22 T +386 4 27 50 200 Kranj, Slovenia [email protected] F +386 4 27 50 240 T +386 4 27 50 200 [email protected] F +386 4 27 50 240 Ukraine [email protected] BLM Synergie Netherlands Moscow Pfeiffer Vacuum Benelux B.V.