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Scientific and Technical Report 2010 CSEM SA Jaquet-Droz 1 CH-2002 Neuchâtel CSEM Alpnach Untere Gründlistrasse 1 CH-6055 Alpnach Dorf CSEM Basel Mattenstrasse 22 CH-4016 Basel CSEM Landquart Bahnhofstrasse 1 CH-7302 Landquart CSEM Muttenz Tramstrasse 99 CH-4132 Muttenz 2010 CSEM Zurich Technoparkstrasse 1 SCIENTIFIC AND TECHNICAL REPORT CH-8005 Zurich www.csem.ch [email protected] CSEM Centre Suisse d’Electronique et de Microtechnique SA Since its creation in 1984, CSEM has evolved as one of the most renowned RTOs (Research and Technology Organizations) in Europe, in particular because of its ability to integrate technologies and to convert them into commercial success stories. The technological excellence of our people is complemented by a range of tools, internal and external, that are well adapted to our mission. Professional researchers and permanent employees of CSEM, stimulated by young doctoral and post-doctoral scientists, are the driving force behind our activities. Their work is accompanied by professional marketing, financial and legal services. Important additional elements are our national and international partnerships with industry and well-defined R&D and academic partners such as the prestigious Swiss Institutes of Technology (EPFL, ETHZ). The successful results of these cooperations are documented in this report. In 2010, CSEM handled more than 190 projects, the majority of which were technology development, integration and transfer contracts with Swiss industry. In 58 of these projects, our Swiss academic partners made a significant contribution. Furthermore, CSEM contributed to a record volume of projects in 2010 with Switzerland's Commission for Technology and Innovation (CTI). Thus, CSEM confirmed its important contribution to Switzerland’s leadership in innovation, the main driver of growth and economic well-being in our country. Beyond our strong technology integration and transfer capability, we have established a supportive and enabling start-up creation process. In tandem with our partner Jade Invest SA, an early-stage venture fund, we have created a strong tool for value creation for the Swiss economy. A vital asset in generating value is the knowledge accumulated year after year, and even more so the capability to work at the interfaces of multiple disciplines, such as microelectronics, microsystems and nanotechnology, as well as on their integration. At the end of 2010, the total number of employees at CSEM was 390, of which 29 were Ph.D students. CSEM ended 2010 with positive net results, the final income reaching CHF 68.5 million. We hope that you enjoy reading this document, and would be delighted if you identify ideas and concepts that can be adapted, developed and commercialized in the marketplace. 1 CONTENTS A 290 μA, 3.2 MHz 4-bit Phase ADC for Constant PREFACE 5 Envelope, Ultra-low Power Radio 37 A Low-cost Electronically Steerable Switched Parasitic Array for GNSS Applications 38 RESEARCH ACTIVITIES IN 2010 7 A Low-power Fully Integrated RF locked Loop for 3D Face Detection and Identification System 9 Miniature Atomic Clocks 39 Phase Contrast X-ray Imaging 10 High Performance MEMS-based Frequency Synthesizer 40 Time References – Progress on the Realization of a Miniature Atomic Clock 11 Antenna Design Rules for Self powered 13.56 MHz RFID Systems 41 Time References – Silicon Flexures for the Sugar- Cube Delta Robot 12 A 2.4 GHz BAW-based Transceiver for Wireless Body Area Networks 42 Time References – Hermetic Packaging of Miniaturized MEMS 13 C-EIT – Unsupervised Identification of Heart and Lungs PHOTONICS 43 Function using Electrical Impedance Tomography 14 Sensing Small Angle Scattering with an X-ray Grating IMS-eye – Concept for Implantable Surgery Eye 15 Interferometer 44 WiseFIELD – An Autonomous, Self-recharging Phase Sensitive X-ray Imaging: Towards Medical Ultra-low Power Wireless Platform for Environmental Applications 45 Monitoring 16 Single-photon Pulse Detectors 46 CHAP – Cell Handling and Analysis Platform 17 Ultra-high Speed Digital Image Sensor 47 Optical Flow Correlator 48 NANO-TERA ACTIVITIES IN 2010 19 High-speed CMOS-compatible Demodulation Imagers GreenPower – Connecting Renewable Energy to for Temporal Waveform Analysis 49 Green Mobility 20 Stereo Omniview Camera System and Time-of-flight LiveSense – Environmental Sensors based on Living Camera for Mars Rover 50 Cells 21 SelfSys – Fluidic Mediated Self-assembly of Mesoscale THIN FILM OPTICS 51 Objects 22 Colorimetric Visual Gas Sensors 52 PATLiSci – Probe Array Technology for Life Science Applications 23 The Morphology of Inkjet Printed Organic Photovoltaic Cells 53 TecInTex – An Integrated Biosensor for the In-situ Monitoring of Wound Healing 24 Design for Organic Electronics 54 NexRay – Next Generation X-ray Systems 25 MICROSYSTEMS TECHNOLOGY 55 INTEGRATED & WIRELESS Batch Fabrication of Rubidium Vapor Cells for Atomic SYSTEMS 27 Clocks 56 Reliable MEMS for Space: How X-ray Techniques Detecting Shapes using a 3D Time-of-Flight Camera 28 Support Development 57 A Software Library to Accelerate the Prototyping of In-situ Structural and Mechanical Testing 58 Vision Applications 29 Defect and Strain Analysis for Epitaxial Grown Thick Infrastructure-free Car Localization in Parking Lots Germanium Layers on Structured Silicon Substrates 59 using Low-power Wireless Sensor Networks 30 Deployment of WiseNET Technologies in Extreme Conditions: the Case of the Bonnard Glacier 31 NANOTECHNOLOGY & LIFE Execution of Embedded Code in a Network Simulator 32 SCIENCES 61 An icyflex-based Multiprocessor Architecture 33 Molecular Vapor Deposition for Functionalized Applications using the icyflex1 Processor 34 Surfaces 62 Design of an Ultra-low Power SoC dedicated to Social A Compact Radioactivity Monitor for Medical Networking Products 35 Applications 63 Design Techniques to Combat Process Variation 36 Metallic Membranes for Chemical Sensing 64 3 MEMS Tunable Quantum Cascade Lasers for IR Smart Electrodes for Vital Sign Monitoring 97 Spectroscopy 65 Medical Multi-parameter Monitoring Sports Shirt 98 Fully Programmable MEMS Gratings for Space Applications 66 Manufacturing of Micro- Nano-structured Plastic MICROROBOTICS & PACKAGING 99 Components 67 Reliable Hermetic Chip-scale Packaging Targeting Ultrathin Nanoporous SiN Membranes for Biotech Wafer-level Bonding 100 Applications 68 Semi-automatic Assembly Process for High Power Silicon Nanostructures by Metal-assisted Chemical Single Emitter Diode Lasers 101 Etching 69 Miniature Carbon-nanotube-based X-ray Sources: Nanodispensing for Antibody Nanoarrays 70 Packaging Aspects 102 Towards Replacing Animal Test in Nanotoxicology 71 2Dplus Laser Micromachining 103 Ultra-thin Microporous Support for In Vitro Model of Customer-specific Small Series Production and Biological Barriers 72 Modeling of Microfluidic Components 104 Use of Biosensors for the Detection of Cocaine at Manufacturing Strips with Deep Channels for Pressure Airport Security Controls 73 Sensing Applications 105 Automated Optical Quality Control of Injection Moulded Micro Fluidic Devices 106 NANOMEDICINE 75 Self Alignment assisted MEMS Packaging 107 Lab-in-a-pipette-tip for Small Volume Rapid Biosensing 76 AC-electrokinetic Pump with Flow Rectifier for Cost-effective Infrared CO2 Sensor for Food Packaging Unidirectional Flow 108 Inspection 77 Microfluidic Devices for Superparamagnetic Angle Interrogating Optical Sensor ARGOS: Scanning Nanoparticle Handling 109 MEMS Mirror for Higher Performance Label-free Modular System for Automated Sorting and Optical Biosensing 78 Microinjection of Large Cells 110 Electrochemical Monitoring System for Hepatic Low Temperature Hermetic Sealing for Implantable Function Detoxification Capability 79 Medical Systems 111 Cell-based Microfluidic Platforms for Relevant 3D in- Contactless Gripper with Ultrasonic Air Cushion 112 vitro Models aimed at Personalized and Regenerative Medicine 80 TestChest: a Real-time Simulator of Human ANNEXES 113 Respiration including Heart-Lung Interaction 81 Publications 113 Phantom based System to Evaluate Electrical Proceedings 116 Impedance Tomography (EIT) Performance 82 Conferences and Workshops 119 HorseVent: A Novel Anesthesia Ventilator for Large Animals 83 Competence Centre for Materials Science and Technology (CCMX), Nano-Tera, National Centers of Competence in Research (NCCR) and Swiss National SYSTEMS 85 Science Foundation (SNSF) Projects 123 Swiss Commission for Technology and Innovation New Generation of Domestic Heat Controller 86 (CTI) 124 A Micro-robot for Astrophysics 87 European Commission Projects 126 Ball Bearing Fomblin Lubrication for Space European Space Agency (ESA), European Southern Mechanisms 88 Observatory (ESO) and Astrophysical Instrument Focusing Mechanism for Camera Focus System on Projects 129 Mars (ExoMars Rover) 89 Industrial Property 130 High Performance Stabilized Lasers 90 Collaboration with Research Institutes and Universities 130 Compact and Reliable Optical Bench for Industrial Teaching 133 Cesium Beam Clock 91 Theses 135 Towards Femtosecond Blue Laser Diode 92 Commissions and Committees 137 A 3D Laser Printer for the Fabrication of In-glass Microstructures 93 Prizes and Awards 140 A Chest Sensor for Continuous Measurement of Blood Pressure and Arterial Stiffness 94 Vital Parameter Sensing under Harsh Conditions 96 4 PREFACE Dear Reader, CSEM has always been focused on serving industry and the Swiss economy as a priority. Using technologies developed or integrated within our company, companies ranging from SMEs to multinationals have launched many successful
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