Fluidized Bed Chemical Vapor Deposition of Zirconium Nitride Films
INL/JOU-17-42260-Revision-0 Fluidized Bed Chemical Vapor Deposition of Zirconium Nitride Films Dennis D. Keiser, Jr, Delia Perez-Nunez, Sean M. McDeavitt, Marie Y. Arrieta July 2017 The INL is a U.S. Department of Energy National Laboratory operated by Battelle Energy Alliance INL/JOU-17-42260-Revision-0 Fluidized Bed Chemical Vapor Deposition of Zirconium Nitride Films Dennis D. Keiser, Jr, Delia Perez-Nunez, Sean M. McDeavitt, Marie Y. Arrieta July 2017 Idaho National Laboratory Idaho Falls, Idaho 83415 http://www.inl.gov Prepared for the U.S. Department of Energy Under DOE Idaho Operations Office Contract DE-AC07-05ID14517 Fluidized Bed Chemical Vapor Deposition of Zirconium Nitride Films a b c c Marie Y. Arrieta, Dennis D. Keiser Jr., Delia Perez-Nunez, * and Sean M. McDeavitt a Sandia National Laboratories, Albuquerque, New Mexico 87185 b Idaho National Laboratory, Idaho Falls, Idaho 83401 c Texas A&M University, Department of Nuclear Engineering, College Station, Texas 77840 Received November 11, 2016 Accepted for Publication May 23, 2017 Abstract — – A fluidized bed chemical vapor deposition (FB-CVD) process was designed and established in a two-part experiment to produce zirconium nitride barrier coatings on uranium-molybdenum particles for a reduced enrichment dispersion fuel concept. A hot-wall, inverted fluidized bed reaction vessel was developed for this process, and coatings were produced from thermal decomposition of the metallo-organic precursor tetrakis(dimethylamino)zirconium (TDMAZ) in high- purity argon gas. Experiments were executed at atmospheric pressure and low substrate temperatures (i.e., 500 to 550 K). Deposited coatings were characterized using scanning electron microscopy, energy dispersive spectroscopy, and wavelength dis-persive spectroscopy.
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