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Micro/Nano Manufacturing Micro/Nano Manufacturing Edited by Hans Nørgaard Hansen and Guido Tosello Printed Edition of the Special Issue Published in Micromachines www.mdpi.com/journal/micromachines Micro/Nano Manufacturing Special Issue Editors Hans Nørgaard Hansen Guido Tosello MDPI • Basel • Beijing • Wuhan • Barcelona • Belgrade Special Issue Editors Hans Nørgaard Hansen Guido Tosello Technical University of Denmark Technical University of Denmark Denmark Denmark Editorial Office MDPI AG St. Alban-Anlage 66 Basel, Switzerland This edition is a reprint of the Special Issue published online in the open access journal Micromachines (ISSN 2072-666X) in 2017 (available at: http://www.mdpi.com/ journal/micromachines/special_issues/micro_nano_manufacturing). For citation purposes, cite each article independently as indicated on the article page online and as indicated below: Author 1; Author 2. Article title. Journal Name Year, Article number, page range. First Edition 2017 ISBN 978-3-03842-604-2 (Pbk) ISBN 978-3-03842-605-9 (PDF) Articles in this volume are Open Access and distributed under the Creative Commons Attribution license (CC BY), which allows users to download, copy and build upon published articles even for commercial purposes, as long as the author and publisher are properly credited, which ensures maximum dissemination and a wider impact of our publications. The book taken as a whole is © 2017 MDPI, Basel, Switzerland, distributed under the terms and conditions of the Creative Commons license CC BY-NC-ND (http://creativecommons.org/licenses/by-nc-nd/4.0/). Table of Contents About the Special Issue Editors ................................................................................................................... v Preface to “Micro/Nano Manufacturing” ................................................................................................... vii Emanuele Cannella, Emil Krabbe Nielsen and Alessandro Stolfi Designing a Tool System for Lowering Friction during the Ejection of In-Die Sintered Micro Gears Reprinted from: Micromachines 2017, 8(7), 214; doi: 10.3390/mi8070214 ............................................... 1 J. Israel Martínez-López, H.A. Betancourt, Erika García-López, Ciro A. Rodriguez and Hector R. Siller Rapid Fabrication of Disposable Micromixing Arrays Using Xurography and Laser Ablation Reprinted from: Micromachines 2017, 8(5), 144; doi: 10.3390/mi8050144 ............................................... 16 Toshiyuki Obikawa and Mamoru Hayashi Ultrasonic-Assisted Incremental Microforming of Thin Shell Pyramids of Metallic Foil Reprinted from: Micromachines 2017, 8(5), 142; doi: 10.3390/mi8050142 ............................................... 30 Matthew Bahr, Yasa Sampurno, Ruochen Han and Ara Philipossian Slurry Injection Schemes on the Extent of Slurry Mixing and Availability during Chemical Mechanical Planarization Reprinted from: Micromachines 2017, 8(6), 170; doi: 10.3390/mi8060170 ............................................... 40 Nicolas Blondiaux, Raphaël Pugin, Gaëlle Andreatta, Lionel Tenchine, Stéphane Dessors, Pierre-François Chauvy, Matthieu Diserens and Philippe Vuillermoz Fabrication of Functional Plastic Parts Using Nanostructured Steel Mold Inserts Reprinted from: Micromachines 2017, 8(6), 179; doi: 10.3390/mi8060179 ............................................... 52 Cheng Guo, Jun Qian and Dominiek Reynaerts Fabrication of Mesoscale Channel by Scanning Micro Electrochemical Flow Cell (SMEFC) Reprinted from: Micromachines 2017, 8(5), 143; doi: 10.3390/mi8050143 ............................................... 65 Federico Baruffi, Paolo Parenti, Francesco Cacciatore, Massimiliano Annoni and Guido Tosello On the Application of Replica Molding Technology for the Indirect Measurement of Surface and Geometry of Micromilled Components Reprinted from: Micromachines 2017, 8(6), 195; doi: 10.3390/mi8060195 ............................................... 86 Axiu Cao, Hui Pang, Jiazhou Wang, Man Zhang, Jian Chen, Lifang Shi, Qiling Deng and Song Hu The Effects of Profile Errors of Microlens Surfaces on Laser Beam Homogenization Reprinted from: Micromachines 2017, 8(2), 50; doi: 10.3390/mi8020050 ................................................. 104 Byungjoo Choi, Jiwoon Kwon, Yongho Jeon and Moon Gu Lee Development of Novel Platform to Predict the Mechanical Damage of a Miniature Mobile Haptic Actuator Reprinted from: Micromachines 2017, 8(5), 156; doi: 10.3390/mi8050156 ............................................... 112 iii Lili Gao, Zai-Fa Zhou and Qing-An Huang Modeling of the Effect of Process Variations on a Micromachined Doubly-Clamped Beam Reprinted from: Micromachines 2017, 8(3), 81; doi: 10.3390/mi8030081 ................................................. 124 Tatsuhiko Aizawa and Kenji Wasa Low Temperature Plasma Nitriding of Inner Surfaces in Stainless Steel Mini-/Micro-Pipes and Nozzles Reprinted from: Micromachines 2017, 8(5), 157; doi: 10.3390/mi8050157 ............................................... 139 Ali Davoudinejad, Guido Tosello, Paolo Parenti and Massimiliano Annoni 3D Finite Element Simulation of Micro End-Milling by Considering the Effect of Tool Run-Out Reprinted from: Micromachines 2017, 8(6), 187; doi: 10.3390/mi8060187 ............................................... 148 Philipp Wilhelmi, Christian Schenck and Bernd Kuhfuss Handling in the Production of Wire-Based Linked Micro Parts Reprinted from: Micromachines 2017, 8(6), 169; doi: 10.3390/mi8060169 ............................................... 168 iv About the Special Issue Editors Hans Nørgaard Hansen is working in the field of Micro/Nano Manufacturing. He deals with establishing the basis of industrial production of products and components in metal, polymers and ceramics in the micro‐ and nanometer regime. Specific activities include product development, materials development and development of processes and production systems focused on micro mechanical systems. The core activities comprise micro product design and development, tooling technologies for micro injection moulding and micro metal forming, mass production technologies, chemical and electrochemical processes and laser technologies. Finally the integration of processes into coherent process chains is a key activity. Professor Hans Nørgaard Hansen is the Head of the Department of Mechanical Engineering at the Technical University of Denmark, is a Fellow of CIRP (International Academy of Production Engineering) and the 2015–2017 President of euspen (European Society of Precision Engineering and Nanotechnology). Guido Tosello is Associate Professor at the Technical University of Denmark, Department of Mechanical Engineering, Section of Manufacturing Engineering. Guidoʹs principal research interests are the analysis, characterization, monitoring, control, optimization and simulation of precision moulding processes at micro/nano scales of thermoplastic materials. Technologies supporting precision/micro/nano moulding processes are of research interest: advanced process chain for micro/nano tools manufacturing, precision and micro additive manufacturing, dimensional and surface micro/nano metrology. Guido Tosello is the recipient of the ʺTechnical University of Denmark Best PhD Research Work 2008 Prizeʺ for his PhD thesis “Precision Moulding of Polymer Micro Components”, of the 2012 Alan Glanvill Award by The Institute of Materials, Minerals and Mining (IOM3) (UK), given as recognition for research of merit in the field of polymeric materials, of the Young Research Award 2014 from the Polymer Processing Society (USA) in recognition of scientific achievements and research excellence in polymer processing within 6 years from PhD graduation, and of the Outstanding Reviewer Award 2016 of the Institute of Physics (UK) for his contribution to the Journal of Microengineering and Micromechanics. Guido Tosello is currently the Project Coordinator of the Horizon2020 European Marie Skłodowska‐ Curie Innovative Training Network MICROMAN “Process Fingerprint for Zero‐defect Net‐shape MICROMANufacturing” (2015–2019). v Preface to “Micro/Nano Manufacturing” Micro- and nano-scale manufacturing has been the subject of an increasing amount of interest and research efforts worldwide in both academia and industry over the past 10 years. Traditional lithography- based technology forms the basis of silicon-based micro-electro-mechanical systems (MEMS) manufacturing, but also precision manufacturing technologies have been developed to cover micro-scale dimensions and accuracies. Furthermore, these fundamentally different technology ecosystems are currently combined in order to exploit the strengths of both platforms. One example is the use of lithography-based technologies to establish nanostructures that are subsequently transferred to 3D geometries via injection molding. Manufacturing processes at the micro-scale are the key-enabling technologies to bridge the gap between the nano- and the macro-worlds, to increase the accuracy of micro/nano-precision production technologies, and to integrate different dimensional scales in mass-manufacturing processes. Accordingly, the present Special Issue provides recent developments inthe field of micro/nano manufacturing in terms of production techniques and key enabling technologies that push the boundaries of the state of the art mass-manufacturing of micro-scale and micro/nano structured components. The Special Issue consists of 13 original research papers, which cover both fundamental process technology developments as well as the application
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