MountainsMap® SPM Surface metrology for scanning probe

Highly intuitive, state of the art imaging and analysis

MountainsMap® SPM software is a best in class solution for Powered by industry-standard Mountains Technology®, SPM imaging and analysis for nanotechnology and MountainsMap® SPM runs in a highly intuitive desktop nanoscience applications . It inputs multi-channel images publishing environment that takes all of the pain out of (topography, phase, deflection, etc.) from SPM’s (AFM’s, creating a surface metrology report. The standard STM’s, NSOM’s). You can manipulate the images MountainsMap® SPM software can be enhanced by adding simultaneously, overlay any image (for example phase) on optional modules for surface stitching (the automatic

the surface topography to facilitate the study of correlations, assembly of multiple surface into a single surface), grains and of course study any image independently. Intelligent and particles analysis, force spectroscopy, advanced surface filters ensure that you see high quality images of everything texture analysis, nano-contour analysis, spectral analysis and that the SPM has measured. You carry out geometric filtering, the analysis of surface evolution, wavelets analysis,

analysis, analysis of roughness and surface texture, image co-localization and statistics. Report functional analysis and more, all in accordance with the latest

standards and methods.

Analyze Analyze Visualize Visualize

Powered by Mountains Technology® Work comfortably in a desktop publishing environment with full metrological traceability

Visual analysis reports Powerful automation features

Working in one of six European languages, Japanese, Any step can be fine tuned at any time and all of the Korean or Mandarin Chinese, you build a visual analysis dependent steps are recalculated automatically. Common report frame by frame, page by page, carrying out graphical sequences of steps can be saved in a library and inserted and analytical studies of the surface under study, applying into any document at any time to gain time. Once an analysis filters, calculating ISO and national parameters, inserting report has been completed it can be applied as a template to measurement identity cards, adding comments and automate the analysis of multiple measurement data files. illustrations. Every analysis step is recorded in a hierarchical Pass/fail criteria with tolerances can be defined for any analysis workflow that assures full metrological traceability. parameter. Green/red pass fail traffic lights are displayed You can navigate to any frame by clicking on it in the automatically together with instructions on how to handle workflow or in the page viewer. Numerical results can be failures. exported in an Excel .csv file, frames and pages can be exported as bitmaps, and finished reports can be exported as PDF files for easy circulation.

Two page document including studies in the Grains and Particles optional module

2 See everything that you measure Real time 3D imaging

Multi-channel imaging

MountainsMap® SPM inputs multi-channel images. You can manipulate all of the images simultaneously, zooming in on them simultaneously, rotating them to any angle, and extracting profiles between the same points on each image. You can extract individual images for visualization and analysis, applying different renderings, controlling the lighting level, selecting the height amplification and using any standard or user-defined palette for the vertical scale. The palette can be fine tuned automatically or interactively to highlight surface features, taking into account the distribution of data points on the surface. In addition, you can define a flight plan and fly over a surface, taking in all of the features of interest and output a video.

Overlays

Any image can be overlaid on the surface topography making it possible to visualize any correlations, for example between phase and topography.

Phase overlay (in degree units) on topography

Multi-channel imaging

3 Assuring the highest quality images Powerful tools for removing artifacts and eliminating noise

Notoriously SPM’s produce measurement artifacts and noise Correction that can obscure surface features. In addition surfaces may Aberrant scan lines can be removed and irregular scan lines need to be leveled or flipped prior to analysis. can be corrected. Thresholding removes anomalous spikes, MountainsMap® SPM provides a full set of normalization, tip deconvolution minimizes tip impact on measurement data, correction and denoising tools. and isolated artifacts can be removed by retouching.

Normalization Denoising Surfaces can be leveled by applying several techniques that Images can be denoised by applying a wide range of spatial can take selected zones into account and ignore others. filters with configurable matrices. The 3D Fourier Analysis They can also be flipped and rotated. Form can be removed, optional modules allows you to filter surfaces by directly for example prior to surface roughness and waviness editing the FFT and the 3D Advanced Surface Texture analysis. modules makes it possible to carry out filtering based upon

sub-surface extraction.

Background cleaning the sequence of operations includes form removal, surface segmentation and subtraction, and median denoising.

4 Analyzing surface geometry, surface roughness and more in accordance with the latest standards and methods

Geometric analysis

MountainsMap® SPM contains a full set of tools for studying surface geometry. You can measure distances, angles, areas of peaks and valleys, volumes of bumps and holes, and step heights on surfaces and profiles. Step height measurements can be used, for example to calculate the number unit cells there are in each step in a terraced nanostructure.

Roughness analysis

Following form removal, surfaces are separated into their roughness and waviness components by applying the latest advanced filtering techniques defined in ISO 16610, including robust Gaussian and spline filters. Step height measurement Functional analysis

Analytical studies facilitate the assessment of friction and wear in nano-devices. They include the Abbott-Firestone bearing ratio curve and depth distribution histogram, the subtraction of one surface from another, and the calculation of the material/void volume ratio and thickness of up to three vertical slices of a surface.

ISO surface texture parameters

MountainsMap® SPM calculates ISO 25178 height and bearing ratio parameters (Sa, Sq, Ssk, Sku, Sz, etc., and Smr, Sdc, Sxp), ISO 4287 primary and roughness parameters (Ra, Rq, Rsk, Rmr, Rdc, Rdq, RPc, etc.).

The right standards wherever you are

Wherever you are, with MountainsMap SPM you can work with your national standards and international standards at the same time. MountainsMap® SPM not only calculates ISO ISO 25178 3D areal surface texture parameters parameters, it also calculates ASME B46.1 2D and 3D parameters (USA), displays GB/T (China), DIN (Germany), JIS (Japan), NF (France), BSI (UK), UNE (Spain) and UNI (Italy) equivalents of ISO parameters when they are available, and calculates the older EUR 15178 3D parameters.

Advanced analysis and parameters

More advanced analysis and additional parameters are available in optional modules.

5 Optional modules Everything you need for advanced imaging and analysis

Grains, particles, islands and motifs

The MountainsMap® SPM Grains & Particles module separates grains (particles, islands) from the horizontal background by binarization and it also detects them above a specified threshold height. Grain parameters are analyzed statistically and a large number of parameters are generated. Motifs analysis partitions a surface into motifs using segmentation by watersheds. calculates ISO 25178 features parameters (Spd, S10z, Sda).

Force curves

The Force Spectroscopy module automatically preprocesses force curve data, detects single adhesion events and detects protein unfolding events in accordance with the WLC (wormlike chain) model. Series of force curves can also be visualized and analyzed statistically.

Advanced surface texture analysis

The 3D Advanced Surface Texture allows you to extract and analyze a subsurface layer (for example a deposited layer on a memory cell) and analyze it in exactly the same way as a full surface measurement. It includes analytical studies of surface isotropy, directionality and periodicity, and fractal analysis. It also provides advanced functional volume analysis, calculating ISO 25178 functional volume parameters (Vmp, Vmc, Vvv, etc.) and presenting them graphically, and also calculating ISO 25178 hybrid and spatial, parameters (Sal, Str, Sdr, etc.) and ISO 12781 flatness parameters (FLTt, FLTp, FLTv, FLTq). Grains & Particles module: statistics on grains and particles The 2D Advanced Surface Texture module provides advanced analysis of 2D profiles including roughness / waviness filters from 2RC to ISO 16610, the creation and statistical analysis of series of profiles, and more.

The two modules are MATLABTM compatible, making it possible to apply user-defined operators including filters.

Image Co-localization

The Image Co-localization module automatically co- localizes images from different instrument families for example 3D topography measured by , confocal microscopes or SPM’s with SEM or fluorescence images.

Force Spectroscopy module: protein unfolding adhesion events (WLC model)

6 Optional Modules Everything you need for advanced imaging and analysis (continued)

Nano-contour analysis

The entry-level Contour Analysis module provides geometric dimensioning for profiles extracted on the Z axis and the XY axis. Geometric elements are associated with segments on the profiles and dimensions are calculated using auto-dimensioning and interactive tools.

The Advanced Contour module compares profiles with CAD models (DXF) or user-defined nominal forms, which can include large positional tolerances. It provides comprehensive form deviation analysis, displays magnified form deviation graphics, calculates form deviation parameters and generates a full analysis report. It is especially suitable for dimensional metrology on the nanometric scale.

Spectral analysis and denoising Advanced Contour module: nano-contour analysis

The 3D Fourier Analysis module is used to denoise surface images by directly editing the FFT and to analyze process interactions with the surface. It includes studies of the frequency spectrum, power spectrum density, isotropy, directionality, periodicity, autocorrelation and intercorrelation.

Wavelets analysis

The Wavelets Analysis module makes it possible to visualize and analyze both the scale levels and spatial locations where phenomena occur. It includes discrete wavelet filtering (3D surfaces and 2D profiles) and continuous wavelet decomposition (2D profiles).

Surface Stitching Wavelets Analysis module: continuous wavelet decomposition The Surface Stitching module assembles measurements that overlap on the horizontal axis or the vertical axis into a single surface ready for analysis.

Analysis of surface evolution

The 4D Analysis module allows you to view and fly over a 3D surface as its changes with respect to time, magnetic fields, and other physical dimensions. It generates statistics for monitoring selected parameters and highlights areas of preponderant change using principal components analysis.

Dynamic statistics

The Statistics module analyzes numerical results from static or dynamic measurement populations. It includes control charts, parameter tables, histograms, box charts, scatter plots and Cpk capability parameters.

Surface Stitching module: automatic surface assembly

7 Selected standard and optional features

MountainsMap® SPM Standard Features Desktop publishing environment Visual metrology reports - User interface in 6 European languages, Japanese, Mandarin Chinese or Korean - Save common sequences of analysis steps for reuse - Automatic analysis of series of measurements using templates - Single-click in-document navigation via page viewer - Analysis workflow for full metrological traceability - Pass/fail traffic lights and messages for any parameter - Excel-compatible ASCII data export – Auto-save Surface visualization Simultaneous multi-channel image manipulation (zoom, rotate, extract profile) – Real time display of any image at any zoom level and angle - selectable rendering, lighting and height amplification – standard and user defined z-axis color coding with data point distribution histogram - Contour diagrams - Photo-simulations Data correction and denoising Leveling - XY or Z inversion - Rotation - Form removal - Thresholding -- Retouching - Resampling – Spatial filtering with configurable matrices - Tip deconvolution - Scan line correction - Scan line removal. Analysis Measurement of distances, angles, areas, volumes, step heights – ISO 16610 3D roughness/waviness filters - Bearing ratio curve and depth histogram - Material/void volume and thickness of vertical slices - Surface subtraction Parameters ISO 25178 3D height and bearing ratio parameters and ISO 4287 2D primary and roughness parameters with national equivalents – ASME B46.1 3D and 2D parameters, EUR 15178 amplitude and area and volume parameters MountainsMap® SPM Optional Modules 3D Advanced Surface Texture Sub-surface analysis and filtering - Isotropy, directionality and periodicity - Fractal analysis - Graphical study of functional volume parameters - ISO 25178 volume, hybrid and spatial parameters – ISO 12178 flatness parameters – TM MATLAB compatibility for user-defined operators 2D Advanced Surface Analysis ISO 16610 2D roughness/waviness filters - 2D bearing ratio and depth distribution - 2D spectral and fractal analysis - TM Create and analyze series of profiles, generate statistics – MATLAB compatibility. 3D Fourier Analysis Filtering by direct edition of the FFT - Frequency spectrum - Power spectrum density – Fourier modulus - Autocorrelation and intercorrelation - Isotropy, directionality and periodicity Force Spectroscopy Automated pre-processing of force curve data (denoising, base line normalization, calibration) – force curve visualization – automatic adhesion event detection – interactive adhesion event definition – automatic protein unfolding event detection in accordance with WLC (wormlike chain) model – series of force curves visualization and analysis including statistics. Grains & Particles Grains analysis on horizontal axis - 3D grains (islands) analysis - 3D motifs analysis (applying segmentation by watersheds and Wolf pruning) - ISO 25178 features parameters – Statistics Wavelets Analysis Discrete wavelet filtering (2D profiles and 3D surfaces) – Continuous wavelets decomposition (2D profiles) Contour Analysis Associate geometric elements with vertical (Z) and horizontal (XY) profiles – calculate dimensions using auto- dimensioning and interactive tools Advanced Contour Analysis Comparison of profile with CAD model (DXF) or user-defined nominal form – definition of tolerances including large positional tolerances – magnified form deviation graphics - form deviation parameters 4D Analysis View or fly over a surface changing with respect to time or another physical dimension - generate statistics on selected parameters – locate areas of preponderant change using principal component analysis Statistics Monitor numerical results on one or more static or dynamic measurement populations – control charts – parameter tables – histograms – box charts – scatter plots – Cpk capabilty parameters. Surface Stitching Stitch together overlapping measurements made on the horizontal axis or the vertical axis into a single surface Image Co-localization Automatically co-localize measurement data and images generated by instruments of different types (for example co- localize surface topography with fluorescence images, SEM images)

MountainsMap® SPM Upgrades MountainsMap® Universal MountainsMap® Universal is compatible with optical microscopes, single point scanning profilometers and other Upgrade surface metrology equipment in addition to SPM’s. Additional optional modules are available for 3D Color Image Overlay, 2D Automotive Analysis and Lead (Twist) Analysis (automotive industry). MountainsMap® Premium MountainsMap® Premium is a top of the line package compatible with almost all surface metrology instruments that Upgrade contains all of the MountainsMap® SPM optional modules with the exception of Advanced Contour, Statistics, Force Spectroscopy and Image Co-localization.

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