Efficient Er/O Doped Silicon Light-Emitting Diodes at Communication Wavelength by Deep Cooling Huimin Wen1,#, Jiajing He1,#, Jin Hong2,#, Fangyu Yue2* & Yaping Dan1* 1University of Michigan-Shanghai Jiao Tong University Joint Institute, Shanghai Jiao Tong University, Shanghai, 200240, China. 2Key Laboratory of Polar Materials and Devices, Ministry of Education, East China Normal University, Shanghai, 200241, China. #These authors contributed equally * To whom correspondence should be addressed:
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[email protected] Abstract A silicon light source at communication wavelength is the bottleneck for developing monolithically integrated silicon photonics. Doping silicon with erbium ions was believed to be one of the most promising approaches but suffers from the aggregation of erbium ions that are efficient non-radiative centers, formed during the standard rapid thermal treatment. Here, we apply a deep cooling process following the high- temperature annealing to suppress the aggregation of erbium ions by flushing with Helium gas cooled in liquid nitrogen. The resultant light emitting efficiency is increased to a record 14% at room temperature, two orders of magnitude higher than the sample treated by the standard rapid thermal annealing. The deep-cooling-processed Si samples were further made into light-emitting diodes. Bright electroluminescence with a spectral peak at 1.54 µm from the silicon-based diodes was also observed at room temperature. With these results, it is promising to develop efficient silicon lasers at communication wavelength for the monolithically integrated silicon photonics. The monolithic integration of fiber optics with complementary metal-oxide- semiconductor (CMOS) integrated circuits will significantly speed up the computing and data transmission of current communication networks.1-3 This technology requires efficient silicon-based lasers at communication wavelengths.4, 5 Unfortunately, silicon is an indirect bandgap semiconductor and cannot emit light at communication wavelengths.