Electron Microprobe Analysis Course 12.141 Notes Dr. Nilanjan Chatterjee The electron microprobe provides a complete micron-scale quantitative chemical analysis of inorganic solids. The method is nondestructive and utilizes characteristic x-rays excited by an electron beam incident on a flat surface of the sample. This course provides an introduction to the theory of x-ray microanalysis by wavelength and energy dispersive spectrometry (WDS and EDS), ZAF matrix correction procedures, and scanning electron imaging techniques using backscattered electron (BE), secondary electron (SE), x-ray (elemental mapping), and cathodoluminescence (CL) signals. Lab sessions involve hands- on use of the JEOL JXA-8200 Superprobe. MIT Electron Microprobe Facility Massachusetts Institute of Technology Department of Earth, Atmospheric & Planetary Sciences Room: 54-1221, Cambridge, MA 02139 Phone: (617) 253-1995; Fax: (617) 253-7102 e-mail:
[email protected] web: http://web.mit.edu/e-probe/www/ Nilanjan ChatterjeeMIT, Cambridge, MA, USA October 2017 2 TABLE OF CONTENTS Page number 1. INTRODUCTION 3 2. ELECTRON SPECIMEN INTERACTIONS 5 2.1. ELASTIC SCATTERING 5 2.1.1. Electron backscattering 5 2.1.2. Electron interaction volume 6 2.2. INELASTIC SCATTERING 7 2.2.1. Secondary electron generation 7 2.2.2. Characteristic x-ray generation: inner-shell ionization 7 2.2.3. X-ray production volume 10 2.2.4. Bremsstrahlung or continuum x-ray generation 11 2.2.5. Cathodoluminescence 12 3. QUANTITATIVE X-RAY SPECTROMETRY 13 3.1. MATRIX CORRECTIONS 14 3.1.1. Atomic number correction (Z) 14 3.1.2. Absorption correction (A) 16 3.1.3.