Electron Microscopy
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Electron microscopy 1 Plan 1. De Broglie electron wavelength. 2. Davisson – Germer experiment. 3. Wave-particle dualism. Tonomura experiment. 4. Wave: period, wavelength, mathematical description. 5. Plane, cylindrical, spherical waves. 6. Huygens-Fresnel principle. 7. Scattering: light, X-rays, electrons. 8. Electron scattering. Born approximation. 9. Electron-matter interaction, transmission function. 10. Weak phase object (WPO) approximation. 11. Electron scattering. Elastic and inelastic scattering 12. Electron scattering. Kinematic and dynamic diffraction. 13. Imaging phase objects, under focus, over focus. Transport of intensity equation. 2 Electrons are particles and waves 3 De Broglie wavelength PhD Thesis, 1924: “With every particle of matter with mass m and velocity v a real wave must be associated” h p 2 h mv p mv Ekin eU 2 2meU Louis de Broglie (1892 - 1987) – wavelength h – Planck constant hc eU – electron energy in eV eU eU2 m c2 eU m0 – electron rest mass 0 c – speed of light The Nobel Prize in Physics 1929 was awarded to Prince Louis-Victor Pierre Raymond de Broglie "for his discovery of the wave nature of electrons." 4 De Broigle “Recherches sur la Théorie des Quanta (Researches on the quantum theory)” (1924) Electron wavelength 142 pm 80 keV – 300 keV 5 Davisson – Germer experiment (1923 – 1929) The first direct evidence confirming de Broglie's hypothesis that particles can have wave properties as well 6 C. Davisson, L. H. Germer, "The Scattering of Electrons by a Single Crystal of Nickel" Nature 119(2998), 558 (1927) Davisson – Germer experiment (1923 – 1929) The first direct evidence confirming de Broglie's hypothesis that particles can have wave properties as well Clinton Joseph Davisson (left) and Lester Germer (right) George Paget Thomson Nobel Prize in Physics 1937: Davisson and Thomson 7 C. Davisson, L. H. Germer, "The Scattering of Electrons by a Single Crystal of Nickel" Nature 119(2998), 558 (1927) Wave-particle dualism. Tonomura experiment 8 A. Tonomura et al, Demonstration of single-electron buildup of an interference pattern. Am. J. Phys., 57, 117-120 (1989) Wave: period, wavelength, mathematical description A 2 y x Acos x 9 Plane, cylindrical, spherical waves 1 2U 2U ct22 Search solution in form U r, t u r eikct We obtain equation 22u k u 0 ikr 2 General solution u r A r e k 2 2 2 kr kx x k y y k z z const kr kr k x y z const x2 y 2 z 2 R 2 z k r r y k x 10 Plane, spherical waves Plane wave Spherical wave Surfaces where the phase is constant k 11 Wavefront propagation: Huygens-Fresnel principle expikr r Describes the wavefront propagation: every point on a wavefront is a source of secondary (spherical) wave. These secondary waves spread out in the forward direction, at the same speed as the source wave. 12 Christian Huygens (1629 - 1695), Augustin-Jean Fresnel (1788 - 1827) Scattering 13 Scattering. Light 14 http://www.atmo.arizona.edu/students/courselinks/spring08/atmo336s1/courses/fall13/atmo170a1s3/1S1P_stuff/scattering_of_light/scattering_of_light.html Scattering. X-rays X-rays are scattered by electron clouds 15 http://pd.chem.ucl.ac.uk/pdnn/diff1/scaten.htm Scattering. Electrons Electrons are scattered by potentials 16 https://www.microscopy.ethz.ch/elast.htm Electron-matter interaction 17 Electron scattering. Schrödinger equation Electron is scattered by atomic potential. The corresponding Schrödinger equation: H r E r where 2 H 2 V r . 2m We substitute 2 2 V r r E r 2m and re-write 22 2m k r 2 V r r where 2 2m kE 2 18 Electron scattering. Green functions The solution to this equation can be written in form: 2m r r G r r V r rd r 0 2 0 0 0 0 where 0 r is the solutions of the homogeneous equation 22 kr 0 0 and Gr is a solution of 22 k G r r . are the Green-functions: 1 eikr Gr 4 r For a stationary scattering wave we might choose G r G r 2m r r G r r V r rd r 0 2 0 0 0 0 meik r r0 r r V r rd r 0 2 0 0 0 2 rr 0 19 Electron scattering. Far-field approximation We suppose that scattering potential Vr is localized about , i.e. potential 0 r0 0 drops to zero outside of finite region. It is a typical case for a scattering problem. We would like to calculate the wave function far away from the scattering center. Therefore, we can assume rr0 then we can expand 2 2rr rr rr rr rrrr22 2 rrrr 2 2 1 00 r 0 0 0 0 0 rr2 r r r r r where 00 r a unit-vector, indicating direction of , sometimes called “emission vector” We re-write: meikr r r eikr0 V r r rd r 02 2 r 0 0 0 where we introduced kk 20 Electron scattering. Incident plane wave In the case of scattering of a plane wave ikz 0 r Ae we obtain meikr r Aeikz eikr0 V r rd r 2 2 r 0 0 0 which we can re-write as eikr r Aeikz f , A r Here Ae ikz is the incoming wave eikr A is the outgoing spherical wave (similar to Huygens-Fresnel principle) r f , is the scattering complex-valued amplitude m f,d eikr0 V r r r 2 2 A 0 0 0 21 Electron scattering. Born approximation The scattered wave is given by where m f,d eikr0 V r r r 2 2 A 0 0 0 Note that r 0 is in the integral. Born approximation considers only the first term of series expansion. Let's assume that the potential doesikr not significantly alter the ikz e wave function (weak potentialr approximation) Ae f : , A r ikz0 ik 0 r 0 r0 0 r 0 Ae Ae where k0 kez is the vector in the incident direction. This gives the scattering amplitude in Born approximation which is Fourier transform of potential: m i k k00 r f,d e V r r 2 2 A 00 In Born approximation, the scattering amplitude is Fourier transform of potential.22 Scattering amplitude and cross-section 23 Scattering amplitude and cross-section The scattered wave is given by where is the complex-valued scattering amplitude. eikr r Aeikz f , A The differential cross-section: r d 2 f d f , 24 Scattering amplitude distributions 25 Scattering amplitude as a composition of partial waves The scattered wave is given by where can be approximated as a composition of partial waves: f 2 l 1 f k P cosikr lle r l0 Aeikz f , A 1 r f k eikl ()sin ( k ) llk where are the phase shifts. l ()k f , 26 NIST electron elastic cross-section database 27 Scattering amplitude for carbon (C) 30 keV 50 eV 28 Electron-matter interaction 29 Electron interaction with single atom incident wave exit wave u x, y u', x y u',,, x y u x y t x y atom t x, y ei Vz x, y 2me , V x, y V x , y , z d z - projected potential h2 z 30 Phase of transmission function of single carbon (C) atom at 200 keV 1 Å 0 ... 0.157 rad 31 Phase of transmission function of single tungsten (W) atom at 200 keV 1 Å 0 ... 1.415 rad Not a weak phase object 32 Weak phase object (WPO) approximation incident wave exit wave u x, y u', x y u',,, x y u x y t x y atom i V x, y 2me t x, y e z , V x, y - projected potential h2 z t x, y 1 i Vz x , y - weak phase object approximation 33 Transmission function t x, y ea x,, y e i x y Absorption properties Phase-shifting properties 34 Object phase and phase problem 35 Object phase and phase problem u', x y 2 exit wave: u x, y u',,, x y U X Y U X Y u',,, x y u x y t x y t x, y ea x,, y e i x y Missing wave exit detector Missing phase of the wavefront when intensity is recorded36 Elastic and inelastic scattering 37 Elastic and inelastic scattering of electrons 38 http://web.tiscali.it/barlini/affidabilita/sem/e_tesina/e_primolink.htm Elastic and inelastic scattering of electrons eikr 20 r eikz f i r e Z d 2 f d 39 R. Egerton, “Electron elergy loss spectroscopy in the electron microscope” Inelastic mean free path (IMFP) t I t I0 exp E t – the travelling distance into the solid E) – inelastic mean free path (IMFP), is defined as the distance an electron beam can travel before its intensity decays to 1/e of its initial value 40 M. P. Seah and W. A. Dench, Surface and Interface Analysis 1, 2–11 (1979) R. Egerton, “Electron energy loss spectroscopy in the electron microscope” Kinematic and dynamic diffraction theories Kinematic: single scattering event, neglecting multiple scattering Dynamic: takes multiple scattering events into account 41 Multiple scattering The probability for n scattering events Pn is given by Poisson statistics as [1] n 1 tt Pn exp n!()() E E t – thickness E) – inelastic mean free path, 80 nm for 200 keV [2] 1. R. F. Egerton, Electron Energy-Loss Spectroscopy in the Electron Microscope (book). Section “3.4 Single, Plural, and Multiple Scattering” 2. R. Henderson, “The potential and limitations of neutrons, electrons and X-rays for atomic-resolution microscopy of unstained biological42 molecules," Q.