University of Nebraska - Lincoln DigitalCommons@University of Nebraska - Lincoln Theses, Dissertations, and Student Research from Electrical & Computer Engineering, Department of Electrical & Computer Engineering Winter 12-7-2015 Ellipsometric Characterization of Silicon and Carbon Junctions for Advanced Electronics Alexander G. Boosalis University of Nebraska-Lincoln,
[email protected] Follow this and additional works at: http://digitalcommons.unl.edu/elecengtheses Part of the Electromagnetics and Photonics Commons, and the Semiconductor and Optical Materials Commons Boosalis, Alexander G., "Ellipsometric Characterization of Silicon and Carbon Junctions for Advanced Electronics" (2015). Theses, Dissertations, and Student Research from Electrical & Computer Engineering. 68. http://digitalcommons.unl.edu/elecengtheses/68 This Article is brought to you for free and open access by the Electrical & Computer Engineering, Department of at DigitalCommons@University of Nebraska - Lincoln. It has been accepted for inclusion in Theses, Dissertations, and Student Research from Electrical & Computer Engineering by an authorized administrator of DigitalCommons@University of Nebraska - Lincoln. ELLIPSOMETRIC CHARACTERIZATION OF SILICON AND CARBON JUNCTIONS FOR ADVANCED ELECTRONICS by Alexander George Boosalis A DISSERTATION Presented to the Faculty of The Graduate College at the University of Nebraska In Partial Fulfillment of Requirements For the Degree of Doctor of Philosophy Major: Electrical Engineering Under the Supervision of Professors Mathias Schubert and Tino Hofmann Lincoln, Nebraska December, 2015 ELLIPSOMETRIC CHARACTERIZATION OF SILICON AND CARBON JUNCTIONS FOR ADVANCED ELECTRONICS Alexander George Boosalis, Ph.D. University of Nebraska, 2015 Advisers: Mathias Schubert, Tino Hofmann Ellipsometry has long been a valuable technique for the optical characterization of layered systems and thin films. While simple systems like epitaxial silicon diox- ide are easily characterized, complex systems of silicon and carbon junctions have proven difficult to analyze.