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IDT Wafer Dicing Guidelines

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IDT Wafer Dicing Guidelines IDT Wafer Dicing Guidelines Introduction This guideline describes the requirements for dicing wafers manufactured by IDT. It applies to both IDT internal sawing operations and to sawing procedures used by customers purchasing un-sawn wafers. Failure to follow these guidelines could result in lower yields and immediate or delayed operational failures including data loss – particularly failures related to EEPROM data retention. Disclaimer: These dicing practices are industry standard norms. IDT is not responsible for issues related to dicing performed by wafer sawing service providers; it is the responsibility of the customer or subcontractor to ensure adherence to industry standards. 1 Dicing Guidelines These industry standard guidelines must be followed for dicing IDT products: • Dicing equipment and all related infrastructure used during sawing processes must meet the common ESD safety standards of the semiconductor industry. • Ionizers must be installed in areas where sawing processes are completed. • Important Recommendation: The resistivity of water used for sawing or assembly (after CO2 bubbler) must be ≤ 0.5 MΩ cm. (IDT requirements exceed the industry standard. The industry standard is approximately 1 MΩ cm.) • Use contactless wafer mounting. • Use UV tape if die size < 1mm x 1mm. • If using a step cut sawing mode, use a double-spindle sawing machine. © 2016 Integrated Device Technology, Inc. 1 April 1, 2016 IDT Wafer Dicing Guidelines 2 Related Documents For product-specific die dimensions and additional important information, please submit a support request at www.IDT.com/go/support. Visit the product page for the specific IDT IC on IDT’s website www.IDT.com or contact your nearest sales office for the latest version of this document and the product’s data sheet. Note: For some products, special precautions are needed before sawing to preserve EEPROM settings. In this case, the recommended procedures are documented in the product’s data sheet. 3 Document Revision History Revision Date Description 1.00 September 11, 2009 First release of document 1.10 November 15, 2013 Addition of requirements for contactless wafer mounting and UV tape. Addition of equipment requirements when using step cut sawing mode. Update for contact information and imagery for cover and headings. Addition of “Related Documents” section. April 1, 2016 Changed to IDT branding. Corporate Headquarters Sales Tech Support 6024 Silver Creek Valley Road 1-800-345-7015 or 408-284-8200 www.IDT.com/go/support San Jose, CA 95138 Fax: 408-284-2775 www.IDT.com www.IDT.com/go/sales DISCLAIMER Integrated Device Technology, Inc. (IDT) reserves the right to modify the products and/or specifications described herein at any time, without notice, at IDT's sole discretion. Performance specifications and operating parameters of the described products are determined in an independent state and are not guaranteed to perform the same way when installed in customer products. The information contained herein is provided without representation or warranty of any kind, whether express or implied, including, but not limited to, the suitability of IDT's products for any particular purpose, an implied warranty of merchantability, or non-infringement of the intellectual property rights of others. This document is presented only as a guide and does not convey any license under intellectual property rights of IDT or any third parties. IDT's products are not intended for use in applications involving extreme environmental conditions or in life support systems or similar devices where the failure or malfunction of an IDT product can be reasonably expected to significantly affect the health or safety of users. Anyone using an IDT product in such a manner does so at their own risk, absent an express, written agreement by IDT. Integrated Device Technology, IDT and the IDT logo are trademarks or registered trademarks of IDT and its subsidiaries in the United States and other countries. Other trademarks used herein are the property of IDT or their respective third party owners. For datasheet type definitions and a glossary of common terms, visit www.idt.com/go/glossary. All contents of this document are copyright of Integrated Device Technology, Inc. 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