Network Thinking Microelectronics in From Pizza Wafers to Software Solutions

Silicon wafer produced by GLOBALFOUNDRIES

n Made in : World-Class Technologies Now home to 1,500 companies and around is recognized and valued in , and 48,000 employees in the sector, Dresden has throughout the world as an outstanding location for high technology in truly emerged as Europe’s leading location for the ICT sector (information and communication technology). In addition microelectronics and information technology. to its strong , the region also boasts expertise in Business activities at local companies cover the fields of microelectronics and microsystems, mobile communica- the entire value creation chain, with the goods tions, software, photovoltaics and future-oriented organic semiconduc- produced ranging from chips to end user tor technology (OLEDs). In all these fields, world-leading concerns such ­products. as GLOBALFOUNDRIES, Infineon, Siltronic, SolarWorld, Heliatec and This broad spectrum of companies of all sizes n Pizza Wafers for Chips Novaled have settled here in order to benefit from seamless integration fosters both the exchange of knowledge and Most chips are produced on 300 mm silicon into a high-tech landscape characterized by strong partners. Based in establishment of service and supply networks. wafers. After processing, these innovative Dresden, the Silicon Saxony e. V. association is named after this dynam- “pizza wafers” create cost advantages of over ic region and represents Europe’s largest microelectronics network. It 30 percent for chip foundries. They are devel- systematically promotes partnerships and bolsters existing competen- oped and produced close to Dresden in the city cies by supporting unique cooperative interplay between manufacturers, of Freiberg, where Siltronic AG – the world’s suppliers, service providers, universities and scientific institutes across third-largest wafer producer – has constructed Saxony. Highly motivated, qualified experts and close cooperation an ultra-modern 300 mm wafer production between business, science and politics make the region particularly facility at a cost of around 430 million Euros. attractive for further investment. The base product required for chip production All our ideas and activities are supported by competent partners within is naturally also manufactured by other local the political structures of both the city of Dresden and the state of Sax- companies such as Freiberger Compound ony. Working in cooperation, we make every effort to bring continued Materials AG – the global market leader for gal- development to this first-rate business location. Last but not least, the lium arsenide wafers. creativity and dedication of the Saxon population and workforce under- line why the region will remain a center for innovative, highly proficient, future-oriented microelectronics for a long time to come.

Heinz Martin Esser President of Silicon Saxony e. V. Six-core AMD OpteronTM processor Zentrum Mikroelektronik Dresden AG Photomasks in the AMTC clean room

n “Made in Saxony” for the Global Market The Fraunhofer Center Nanoelectronic Tech- n Masks for Nano-Scale Components n Interface of the Future The development and production of electronic nology (CNT) was established in the spring of Lithographic masks serve as templates for the Dresden-based activity in the field of chip tech- components and integrated circuits is one of 2005. Its objective is to carry out production- optical preproduction of individual circuit pat- nology for fourth-generation mobile communi- the region’s key business sectors, with items related research in order to accelerate the terns onto silicon wafers, and facilitate the fast, cation (LTE) is characterized by strong innova- such as chips and processors manufactured in transfer of innovations into products. Partnered cost-efficient production of even smallest chip tion and expertise. One example is Intel Mobile Dresden on a very large scale. Infineon Tech- by a number of semiconductor manufacturers dimensions. Amongst other products, AMTC Communications Dresden GmbH (formerly Blue nologies specializes in the production of logic (including GLOBALFOUNDRIES) and equipment (Advanced Mask Technology Center GmbH & Co. Wonder Communications GmbH), which Intel chips used in systems such as cars, chip cards, and material suppliers, its scientists develop KG – a joint venture between GLOBALFOUNDRIES has operated as an LTE development facility and cell phones. new concepts and solutions in the fields of and Toppan Photomasks) develops chips with since May 2011. Its workforce has grown to The GLOBALFOUNDRIES joint venture was nanoelectronic materials, processes, structur- structural widths of less than 20 nm. Even smal- around 100 experts tasked with the develop- established by AMD and the Advanced Tech- ing, metrology and analytics, as well as func- ler structures are made possible by “Extreme ment of energy-efficient, super-fast data trans- nology Investment Company (ATIC) of Abu tional modules for smart systems. Ultraviolet Lithography” (EUV) – a novel exposu- fer connections for smartphones, tablets and Dhabi in March 2009. By making its high-end Zentrum Mikroelektronik Dresden AG (ZMDI) is re technique which uses soft x-rays with a notebooks. The significant amount of research manufacturing capacity available on a contract a symbol of Dresden’s long tradition as a lead- wavelength of only 13.5 nm. Related develop- involved in both product and process develop- basis, it aims to take advantage of growing ing microelectronics location, and considered ment projects are bundled together at AMTC. ment has led to substantial investment and demand for independent, state-of-the-art semi­ to have already been the incubator for numer- expansion at the company in recent years. In conductor manufacturing services. The Fab 1 ous ­semiconductor-linked business setups. another example, Atmel Germany GmbH is set foundry in Dresden has a workforce of around X-FAB Semiconductor Foundries AG has been to expand its design center in order to refocus 3,200 employees, and is GLOBALFOUNDRIES’ producing analog/mixed-signal circuits in on the wireless and automotive sector. This will leading 300 mm facility. A significant capacity Dresden since early 2007. see its workforce more than double in size. The expansion project is ongoing at the site, with settlement of other companies such as PE IC well over seven billion USD invested there n Keeping an Eye on Applications n SAW Filters for Excellent Broadcast-Tech- Design GmbH and the construction of new, since 1996. The firm’s other facilities are locat- Founded in 1996, MPD (Microelectronic Pack- nology larger premises by DMOS GmbH have further ed in Singapore and New York State, and its aging Dresden GmbH) is a contract manufac- SAW (surface acoustic wave) filters and reso- strengthened Dresden’s already top-class clients include a range of prestigious compa- turer of microelectronic components and mod- nators are vital electronic components used to design expertise. After all, the Dresden region nies including AMD, STMicroelectronics, IBM ules produced using client-specific mount and ensure stable, secure radio communication. offers a pool of highly qualified developers, and Qualcomm. assembly technologies. As a result of the spe- They are therefore found in a wide variety of outstanding infrastructure and excellent invest- cial demands placed on product quality, all electronic consumer goods such as cell phones, ment climate. manufacturing processes take place in clean GPS receivers, satellite TV systems, electronic rooms. Products include photo sensors for car keys and wireless remote controls. They industrial and security-related systems, image belong to standard products of SAW COMPO- sensors for professional cameras and microe- NENTS Dresden GmbH, which is also placing lectromechanical sensors (MEMS) for the auto- increasing emphasis on highly innovative SAW mobile industry. applications such as RFID and sensors for reli- able industrial applications. SAW COMPO- NENTS has worked both as an independent system provider and in partnership with system developers to achieve a world-leading position in this field.

Lithographic mask manufactured by AMTC It’s All About People

MPD (Microelectronic Packaging Dresden GmbH)

lishment of the business in 1991. Since then, What encouraged AMD to choose Dresden in n Universities and Research Institutes DAS has continued to expand, and now employs 1995? Former CEO Jerry Sanders is crystal n Dresden University of Technology 130 people and has 2,000 systems in operation clear on this issue: “It’s all about people.” The at 80 semiconductor clients around the world. people in question are those who work, n Dresden University of Applied Sciences n Welcoming Expertise, Infineon ordered 50 DAS systems for its new research and teach in the city. The Dresden n 12 Fraunhofer Institutes production site in Dresden. University of Technology (TU Dresden) and a Exporting Excellence n 5 Leibniz Institutes Almost all leading equipment producers have variety of non-university research and educa- established large semiconductor foundries in tional institutions combine to make Dresden an n 3 Max Planck Institutes Dresden. , Inc. has even relo- n Navigating the Data Flood attractive microelectronics and IT location from n Helmholtz-Zentrum Dresden-Rossendorf e. V. cated its German headquarters from Munich to The Dresden region is now home to over 300 both a business and scientific perspective. the Saxon capital. The company develops, pro- companies involved in the development, appli- duces and markets integrated product solu- cation and marketing of operating systems, n Sector-Specific and Practical n Other Educational Institutions tions for the manufacturing of multicrystalline application software and databases. SAP AG, The experts of tomorrow will not come from n dresden chip academy wafers, flat screens, solar cells, thin-film solar for example, has developed a system solution universities alone. Highly qualified, practically modules and a range of other energy-efficient for EADS subsidiary Elbe Flugzeugwerke GmbH trained young professionals are also provided n Dresden University of Cooperative Education products in the fields of glass, flexible sub- which replaces previous individual solutions for by educational institutions with sector-specific n Vocational College for Electrical Engineering strates and OLEDs. The NASDAQ-listed firm various business sectors and effectively inte- profiles which cater to regional demand. (Berufsschulzentrum Elektrotechnik) maintains a worldwide workforce of over grates huge data volumes in different fields. Mechatronics engineers, microtechnologists 13,000 employees, and achieved turnover of Biometric identification specialist Cognitec and electronics engineers specialized in auto- n b.i.b. International College (qualifications in around 10.5 billion USD in 2011. Systems GmbH supplies airports and nuclear mation technology are trained alongside skilled data-processing professions) The DAS Environmental Expert GmbH, in turn, power plants with customized software. workers and technical staff in the fields of n Private University of Applied Scienes has successfully entered the global market information technology and business informa- from Dresden. The company produces waste n Regional Networking tion systems. The dresden chip academy, for gas abatement systems tailored to toxic gases The establishment of the Operating Systems example, offers qualifications for skilled work- used or produced by the semiconductor indus- Research Center (OSRC) by AMD in 2006 not ers, specialists and process managers in addi- try, which include the dangerous spontane- only recognized the importance of software tion to degrees in mechatronics and microtech- ously combustible gas silane as well as harmful optimization at the interface between operating nology. chlorides and perfluorocarbons. DAS systems systems such as Windows and Linux and next- combust these wastes and bind the released generation processors, but also established n Skilled Worker’s Certificate with a materials in water. Horst Reichardt, one of the additional research capacity to Dresden. Bachelor’s Degree two founders and a former ZMDI employee, Another initiative – the “Working Group on Those looking for a practically-oriented course used this concept as the basis for the estab- Software” – was founded by the microelectron- of study are well-advised to consider the 4.5- ics cluster Silicon Saxony in 2006 in order to year cooperative Bachelor’s degree offered by bundle software activity in Saxony. It includes the dresden chip academy. The course can be the region’s key software companies amongst followed by an 18-month Master’s degree run its members. By setting up a regional network in cooperation with the West Saxon University for enterprises, universities and research insti- of Applied Sciences in Zwickau and Dresden tutes involved in the information and telecom- University of Applied Sciences. Students also munications sector, it aims to facilitate the joint complete an IHK qualification and spend practi- identification and exploitation of potential in cal phases at companies involved in the Silicon the fields of software technology and micro­ Saxony network during their course of study. electronics. 300 mm GLOBALFOUNDRIES wafer using 45 nm technology Dresden University of Technology Network Thinking

i2s GmbH temperature sensor Zentrum Mikroelektronik Dresden AG

One of the characteristics of Dresden as a n The Gold Sensor n Silicon Saxony microelectronics location is its excellent appli- The Knowledge and Technology Transfer Agen- Small businesses set up to serve larger con- cation-oriented research infrastructure. Coop- cy (GWT) markets research results and takes cerns such as Infineon, GLOBALFOUNDRIES, eration between universities, research insti- on scientific projects on behalf of commercial X-FAB and ZMDI offer networks a particularly tutes and companies in particular ensures the firms. Scientists in its “Aello In-Line-Sensor- solid platform for the successful development achievement of pioneering results. To give an Systems” unit have developed sensors able to and marketing of new products and technolo- example, research teams from the Institute of determine particle properties in a variety of gies. Here again, Dresden earns a superlative: Applied Photophysics at the TU Dresden, the substances. A plug-in system ensures that the Silicon Saxony is Europe’s largest industrial Fraunhofer Institute for Photonic Microsystems sensors can be used in a flexible, cost-efficient network in the semiconductor, electronics, (IPMS) and Novaled AG are currently engaged in manner – whether to measure pigment con- photovoltaics and microsystems sector. It has joint work aimed at the further development of centration or ascertain the grain size of gold made a significant contribution to the cemen­ organic light-emitting diodes (OLEDs). Primarily particles in rock samples. In short, this tech- ting of the Dresden region as Europe’s leading used in displays for cell phones, and nology is literally worth its weight in gold – center for microelectronics since its establish- televisions to date, OLED technology is now to especially in the eyes of large mines. ment in the year 2000, and unites 300 compa- be transformed into the light source of the nies, research institutes and public institutions future. OLEDs are flat, lightweight, extremely with the aim of exploiting joint potential and energy-efficient and offer up to ten times the bundling information and expertise. useful life of a light bulb – making them ideal for applications such as office lighting. n Business Meets Science n Cool Silicon There is method to this innovative interplay Cool Silicon is funded by the Federal Ministry of between business and science. Centers of Education and Research (in excess of 40 mil- excellence such as the Data Center for High- lion Euros, provided within the framework of Performance Networks and Multimedia at the the Leading-Edge Cluster Competition) and the TU Dresden create working conditions tailored Free State of Saxony (another 30 million Euros). to the interdisciplinary realization of research The aim of the Cool Silicon leading-edge clus- Furnace system at projects and the subsequent transfer of innova- ter is to establish the technological foundations tions into commercial and industrial applica- required for the significant enhancement of ICT tions. This is reflected in the goal pursued by energy efficiency throughout the ICT value n The Dresden Fab Automation Cluster the GWT: The commercialization of scientific creation chain. The last three years have there- The Dresden Fab Automation Cluster (DFAC) is findings. A subsidiary of the TU Dresden with a fore seen over 100 institutions and companies an example of successful cooperation within workforce of over 400 employees, the GWT is from Silicon Saxony conduct research into Silicon Saxony, and was founded in 2004 by amongst the top five providers of scientific potential solutions. Research is split into the Roth & Rau – Ortner GmbH, AIS Automation services in Germany. In 2006 its outstanding three thematic areas of micro- and nanotech- GmbH, HAP GmbH and SYSTEMA GmbH. This commitment saw the firm awarded the Saxon nology, communications systems and sensor strong alliance sees the four companies bundle Entrepreneurial Award by the German Associa- networks, which are interlinked by their tech- their hardware and software expertise in a way tion for Small and Medium-sized Businesses. nology and value-creation chains. Around 190 which enables them to develop complex auto- Established at the end of 2007, TU Dresden technical projects are currently in progress mation solutions for the semiconductor and subsidiary Nanoelectronic Materials Laboratory within the cluster. photovoltaics sector. An annual innovation gGmbH (NaMLab) is another example of a suc- forum sees the DFAC report on the latest devel- cessful link between business and science. The opments in the field of automation. Fraunhofer IPMS company aims to become a center for funda- www.automation-dresden.de Organic LEDs on a glass substrate mental research into semiconductor materials for next-generation, sub 30 nm chips.

Economic Development – ­Supporting Skills and Promoting Ideas

Office of Economic Development Michael Kaiser · Sector Manager World Trade Center Ammonstraße 74 · 01067 Dresden · Germany Phone: +49 (0) 3 51 4 88 87 34 Fax: +49 (0) 3 51 4 88 87 33 [email protected]

n Combining Forces n Space for Development The Office of Economic Development in Dres- The strategic aim of the City of Dresden is to den assists and supports the development of build upon the skills which this high-techno­ companies and research institutes. logy location already possesses. The City of Its main tasks involve actively assisting with Dresden supports this geographical, thematic authorization processes, providing advice on concentration of researchers, companies, commercial locations for companies moving start-ups and specialized service providers by into the area or expanding, disseminating infor- setting up technology centers and business mation about current nanotechnology projects, parks, and providing commercial space. The and active networking. In this way, companies aim is for the synergies this creates to help investing in the area gain access to commercial develop and extend skills at an even greater floor space quickly and easily, helping them set rate, and for research results to find industrial up, expand or shift their businesses success- application at a faster pace. fully. The business service also provides advice Projects in this area include the new center for on funding, financing and start-ups. Dresden’s nanoelectronics on the Maria-Reiche-Straße – Office of Economic Development cooperates close to the Fraunhofer Institute for Photonic with the Saxony Economic Development Corpo- Microsystems, X-FAB, ZMDI, Solarwatt, Pho- ration and networks in the sector to prepare totronics and the TU Dresden in Dresden- trade show stands, exhibitions and events, and . Its 8,000 sq. meters of space spread can provide you with information about current across two buildings will provide optimum projects. working conditions, and are set to feature both Sector Manager Michael Kaiser is your contact user-specific and non-specific clean rooms person for microelectronics and ICT, answering available for start-ups, spin-offs or relocation specialist questions and helping companies get projects in the nanoelectronics sector. their projects off the ground.

In the north of Dresden, the capital is currently building a new technology and business incubator for companies in the microelectronics and nanoelectronics sectors. The first properties will be available to rent from summer 2012. www.dresden.de/business

Contact

City of Dresden Office of Economic Development World Trade Center Ammonstraße 74 01067 Dresden, Germany Phone: +49 (0) 351 4 88 87 00 Fax: +49 (0) 351 4 88 87 03 [email protected]

Imprint

Editor: City of Dresden The Mayor

Office of Economic Development Phone: +49 (0) 351 4 88 87 00 Fax: +49 (0) 351 4 88 87 03 [email protected]

Office of the Mayor Public Relations Department Phone: +49 (0) 351 4 88 23 90 Fax: +49 (0) 351 4 88 22 38 [email protected]

Postfach 12 00 20 01001 Dresden, Germany www.dresden.de

Photos: Silicon Saxony e. V., GLOBALFOUNDRIES Inc., AMD GmbH, Zentrum Mikroelektronik Dresden AG, AMTC Advanced Mask Technology Center GmbH Co. KG, creativ collection, MPD Microelectronic Packaging Dresden GmbH, J. Mädlow, i2s GmbH, Fraunhofer IPMS, Infineon Technologies AG, Sven Döring – AMD, NanoElektronikZentrum Dresden GmbH Cover photo: Comparison between 200 mm and 300 mm wafers – Infineon

Conceptual Design: Sandstein Kommunikation GmbH, Dresden www.sandstein.de

January 2012

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