StrategicStrategic NanotechnologyNanotechnology GlobalGlobal Networking:Networking: CurrentCurrent StatusStatus andand ProposalProposal ofof AISTAIST

HiroshiHiroshi YokoyamaYokoyama

NanotechnologyNanotechnology ResearchResearch InstituteInstitute NationalNational InstituteInstitute ofof AAdvanceddvanced IIndustrialndustrial SSciencecience andand TTechnology(AIST)echnology(AIST)

AIST Nanotechnology “Creation of Useful Materials, Devices and Systems by Manipulation of Materials with Atomic and Molecular 1mm Precision.” This concept of nanotechnology has existed since or even from before the famous APS address byBusiness:Business: Nobel Physicist, Richard LayerLayer Feynman 5 5 in 1959. Owing to the tremendous 100µm WhatWhatdevelopment is is ofcrucial: crucial:nanometer scale science in the last two decades, such as the invention of the scanning probe microscopy, the nanotechnology is now evolving into a real from hype with a great deal of industrial expectations in the 21st century in diverse fields from Productiveelectronics,Productive Development:informationDevelopment: Alliancetechnology,Alliance material for Layer forLayers engineering Leveraging Leveraging 44 to biotechnology. Individual Individual The start 10 µR&D R&Dm Efforts Efforts of the National Nanotechnology Initiative in USA in the year 2000 was, among others, the epoch that fueled the field to become as active as it is today. Basic Research: Layer 3 andand Basic Research: Layer 3 1µm MakingMaking PossiblePossible Continual Continual Stream Stream of of Innovations Innovationsfrom from Basic Basic InfrastructureInfrastructure / / Facility: Facility: Layer Layer 22 ResearchResearch to to Market Market Place Place 100nm StrategyStrategy && Policy:Policy: LayerLayer 11 10nm Ex.Ex. Adaptive Adaptive / / On-demand On-demand Production Production System System enablingenabling Less Less Costly Costly & & More More Environmental Environmental 1nmFriendly Friendly Manufacturing Manufacturing

AIST QuantumQuantum LeapLeap ofof IndustrialIndustrial TechnologyTechnology

DestructiveDestructive Technology!Technology! ForFor ExistingExisting IndustriesIndustries

NanotechnologyNanotechnology

AIST TOYOTA’s latest hybrid car on the market: 35 km/l !

WhatWhat ifif wewe couldcould makemake itit 100km/l100km/l oror largerlarger byby nanotechnology?nanotechnology?

ConsumersConsumers areare becomingbecoming moremore andand moremore environmentenvironment andand costcost conscious.conscious.

SoSo areare we!we! AIST 従来の 超微細超微細 Conventional従来の Inkjet Super-Inkjet インクジェット技術インクジェット技術 インクジェット技術インクジェット技術 ２pl ２ μ Less than 1 fl 従来の 1/10001/1000 空気中In Air ～16μm 以下の体積

>>20 μm サブSub μm

基盤上Substrate

AIST Super Inkjet Technology: Trend in On-Demand Manufacturing

10µm

AIST Multi-stable Liquid Crystal Device: AFM-Fabricated Microscopic Surface Pattern

Appl. Phys. Lett. 78 (3035) 2001.

20µm Nature, November 14, 2002. AIST AIST SpintronicSpintronic Device:Device: SingleSingle--crystalcrystal--junctionjunction TMRTMR forfor GbitGbit MRAMMRAM

TMR: Tunneling Magnetic Resistance, MRAM: Magnetic RAM

AIST Carbon Nanotube Quantum Effect Transistor Carbon Source Nanotube

Gate Drain Source Drain

(a) Single electron transistor（SET) (b) CNT channel

Gate Drain Source

Defect Induced CNT

SiO2 Si Substrate (c) Schematic view of SET with defect induced CNT channel (d) I-V characteristics of SET Collaboration with Fujitsu AIST Nanotechnology “Creation of Useful Materials, Devices and Systems by Manipulation of Materials with Atomic and Molecular 1mm Precision.” This concept of nanotechnology has existed since or even from before the famous APS address byBusiness: Nobel Physicist, Richard Layer Feynman 5 in 1959. Owing to the tremendous 100µm development ofBusiness: nanometer scale science Layer in the last 5 two decades, such as the invention of the scanning probe microscopy, the nanotechnology is now evolving into a real from hype with a great deal of industrial expectations in the 21st century in diverse fields from electronics, Development:informationDevelopment: technology, material Layer Layers engineering 44 to biotechnology. The start 10µm of the National Nanotechnology Initiative in USA in the year 2000 was, among others, the epoch that fueled the field to become as active as it is today. Basic Research: Layer 3 Basic Research: Layer 3 1µm InfrastructureInfrastructure / / Facility: Facility: Layer Layer 22 100nm StrategyStrategy && Policy:Policy: LayerLayer 11 10nm

1nm

AIST GeneralGeneral CouncilCouncil ofof ScienceScience andand TechnologyTechnology

General Council of Science and Technology Chair: Prime Minister

Ministry of Economy, Ministry of Education, Trade & Industry (METI) Culture, Sports, Science and Technology (MEXT)

AISTAIST Universities National Institute for Materials Science RIKEN

AIST３ Japanese Government is ever more strongly committed to Science & Technology to revive her economy, making pledge to invest 250 Billion US$ over 5 years.

AIST Global Funding (M USD)

1200

1000

800

600

400

200

0 2003 EU 2002 USA

2001 Japan

Germany

Courtesy Lerwen Liu, NanoGlobe Ltd. AIST ResearchResearch BasesBases ofof AISTAIST aroundaround JapanJapan Researcher:Researcher: 24002400 Total:Total: 31003100 Hokkaido 68 Visitor:Visitor: 30003000 AnnualAnnual Budget:Budget: ~~ 11 BB US$US$ Tohoku 35 Kansai 188 Tsukuba 1,832 Chugoku 34 Tokyo Waterfront 39

Kyushu 56 Chubu 143 Shikoku 31

AIST FY2002FY2002 AISTAIST RevenueRevenue (total(total budget:budget: ～～1B1B US$)US$) + Extra: 700 M

R & D: 220 M Payroll: 310 M

Utility Expense & Others: 110 M

Grants from Government: 110 M Other Income: 30 M Contract Research & Funds from Sectors Research Grants: 180 M other than Government: 70 M

AIST FY2002FY2002 DistributionDistribution ofof R&DR&D InvestmentInvestment (total(total budget:budget: ～～1B1B US$)US$) + Extra: 700 M Geological Survey& Life Science & Geoscience, Marine Science Technology 9.2% 15.4% Standards & Measurement 7.7%

Nanotechnology, Materials & Information Manufacturing Technology 20.7% 19.0%

Environment & Energy 28.0% AIST Nanotechnology “Creation of Useful Materials, Devices and Systems by Manipulation of Materials with Atomic and Molecular 1mm Precision.” This concept of nanotechnology has existed since or even from before the famous APS address byBusiness: Nobel Physicist, Richard Layer Feynman 5 in 1959. Owing to the tremendous 100µm development ofBusiness: nanometer scale science Layer in the last 5 two decades, such as the invention of the scanning probe microscopy, the nanotechnology is now evolving into a real from hype with a great deal of industrial expectations in the 21st century in diverse fields from electronics, Development:informationDevelopment: technology, material Layer Layers engineering 44 to biotechnology. The start 10µm of the National Nanotechnology Initiative in USA in the year 2000 was, among others, the epoch that fueled the field to become as active as it is today. Basic Research: Layer 3 Basic Research: Layer 3 1µm InfrastructureInfrastructure / / Facility: Facility: Layer Layer 22 100nm StrategyStrategy && Policy:Policy: LayerLayer 11 10nm

1nm

AIST SequentialSequential DeploymentDeployment ofof NanotechNanotech OutputsOutputs forfor SustainableSustainable R&DR&D

•Molecular Device/ Quantum Computer •Artificial Photo-Synthesis •Computational Materials Design

Drug Delivery System: Display Technology: •Sugar/Protein DDS •CNT FED •Cubic LC Absorbent •Multi-Stabe LCD •Nano-particle (DNA Tag)

Characterization Tool: Manufacturing: •CNT Probe •Super-Inkjet •Probe fabrication

AIST CurrentCurrent NanotechnologyNanotechnology ProgramsPrograms inin AISTAIST

Nanostructure Polymer Project

Nanotechnology Glass Project

Nanotechnology Carbon Project Nano-Materials, Processing Nanostructure Coating Project

Nanotechnology Material Metrology Project Synthetic Nano-Function Materials Project AIST Nano- Nano Structure Forming for Ceramics Integration Project Nano- Manufacturing, technology R & D of 3D NanoScale Certified Reference Materials Project R&D Measuring

Advanced Nanocarbon Application Project Focus21 Advanced Diamond Technology Project

Advanced Semi- MIRAI (Millennium Research for Advanced Information Technologies) Project conductor Device Project

Nanotechnology Support Project MEXT

Yokoyama ERATO Project Tokura ERATO Project CREST” Functional High-Axial-Ratio Nanostructure Assembly JST Program for Nano-Space Engineering” AIST Billion US$ GovernmentGovernment RR && DD InvestmentInvestment 4 Extra Spending for Economic Stimulus 3 ?

2

Investment (Billion US$) Investment 1

- 96 97 98 99 2000 2001 2002

AIST１７ Nanotechnology “Creation of Useful Materials, Devices and Systems by Manipulation of Materials with Atomic and Molecular 1mm Precision.” This concept of nanotechnology has existed since or even from before the famous APS address byBusiness: Nobel Physicist, Richard Layer Feynman 5 in 1959. Owing to the tremendous 100µm development ofBusiness: nanometer scale science Layer in the last 5 two decades, such as the invention of the scanning probe microscopy, the nanotechnology is now evolving into a real from hype with a great deal of industrial expectations in the 21st century in diverse fields from electronics, Development:informationDevelopment: technology, material Layer Layers engineering 44 to biotechnology. The start 10µm of the National Nanotechnology Initiative in USA in the year 2000 was, among others, the epoch that fueled the field to become as active as it is today. Basic Research: Layer 3 Basic Research: Layer 3 1µm InfrastructureInfrastructure / / Facility: Facility: Layer Layer 22 100nm StrategyStrategy && Policy:Policy: LayerLayer 11 10nm

1nm

AIST MEXT NanotechnologyNanotechnology SupportSupport ProjectProject NanoFoundry Group

NNanoanoPProcessingrocessing PPartnershipartnership PProgramrogram ((NPPPNPPP))

http://www.nanoworld.jp/nppp/index.htm [email protected]

AIST Resources/Activity Strengthening of R&D Infrastructure → Lowering the Entrance Barrier Lowering the Cost of R&D

•Expensive Equipments Infrastructure •Huge Know-Hows

Materials-----Devices------BioTech

AIST E-Beam

AIST NPF- NPPP

Waseda Univ. Tokyo Inst. Tech.

Osaka Univ. Hiroshima Univ.

AIST Nanotechnology “Creation of Useful Materials, Devices and Systems by Manipulation of Materials with Atomic and Molecular 1mm Precision.” This concept of nanotechnology has existed since or even from before the famous APS address byBusiness: Nobel Physicist, Richard Layer Feynman 5 in 1959. Owing to the tremendous 100µm development ofBusiness: nanometer scale science Layer in the last 5 two decades, such as the invention of the scanning probe microscopy, the nanotechnology is now evolving into a real from hype with a great deal of industrial expectations in the 21st century in diverse fields from electronics, Development:informationDevelopment: technology, material Layer Layers engineering 44 to biotechnology. The start 10µm of the National Nanotechnology Initiative in USA in the year 2000 was, among others, the epoch that fueled the field to become as active as it is today. Basic Research: Layer 3 Basic Research: Layer 3 1µm InfrastructureInfrastructure / / Facility: Facility: Layer Layer 22 100nm StrategyStrategy && Policy:Policy: LayerLayer 11 10nm

1nm

AIST Nanotechnology Business Creation Initiative, consisting of 300 member companies, is now being established in Japan by METI’s lead.

Its mission is to enhance competence of Japanese nanotech community in the highly competitive international arena.

AIST Nanotechnology “Creation of Useful Materials, Devices and Systems by Manipulation of Materials with Atomic and Molecular 1mm Precision.” This concept of nanotechnology has existed since or even from before the famous APS address byBusiness: Nobel Physicist, Richard Layer Feynman 5 in 1959. Owing to the tremendous 100µm development ofBusiness: nanometer scale science Layer in the last 5 two decades, such as the invention of the scanning probe microscopy, the nanotechnology is now evolving into a real from hype with a great deal of industrial expectations in the 21st century in diverse fields from electronics, Development:informationDevelopment: technology, material Layer Layers engineering 44 to biotechnology. The start 10µm of the National Nanotechnology Initiative in USA in the year 2000 was, among others, the epoch that fueled the field to become as active as it is today. Basic Research: Layer 3 Basic Research: Layer 3 1µm InfrastructureInfrastructure / / Facility: Facility: Layer Layer 22 100nm StrategyStrategy && Policy:Policy: LayerLayer 11 10nm

1nm

AIST ExpectationExpectation onon NetworkNetwork

•• ComplementaryComplementary R&DR&D

•• MutualMutual BenefitBenefit (Technology,(Technology, Information,Information, Patent,Patent, BusinessBusiness……))

•• HumanHuman ResourceResource DevelopmentDevelopment

•• StandardizationStandardization

AIST TowardToward NanotechnologyNanotechnology GlobalGlobal NetworkNetwork

•••CNRS,CNRS,CNRS, FranceFranceFrance •••KISTI,KISTI,KISTI, KoreaKoreaKorea •••ITRI,ITRI,ITRI, TaiwanTaiwanTaiwan •••CambridgeCambridgeCambridge University,University,University, UKUKUK (in(in(in progress)progress)progress) •••etc.etc.etc.

AIST Global Public Funding Comparison

1400 1200 1000 800 600 Million USD 400 200 2004 2003 0 EU 2002 USA Asia

Courtesy Lerwen Liu, NanoGlobe Ltd. AIST Asian Funding during 2003-2007

1000 900 Korea 800 700 600 Million USD 500 China 400 Taiwan 300 200 100

0 Australia China Hong Kong Korea India Malaysia New Singapore Taiwan Thailand Zealand

Courtesy Lerwen Liu, NanoGlobe Ltd. AIST AIST Toward the Gateway to Nanotech Asia Across All Layers of Nanotechnology

-- 22nd AsianAsian NanotechNanotech ForumForum SummitSummit inin Thailand,Thailand, MarchMarch 2004.2004. JointlyJointly SponsoredSponsored byby RoyalRoyal ThaiThai GovernmentGovernment andand NEDO,NEDO, METIMETI && AISTAIST -- NetworkingNetworking ofof NanotechNanotech SupportSupport FacilitiesFacilities (MEXT)(MEXT) -- Nano2BNano2B AISTAIST SymposiumSymposium atat NanotechNanotech 20042004 inin March,March, 20042004

-- CallCall forfor FurtherFurther JointJoint ResearchResearch ProgramsPrograms

AndAnd MoreMore…… AIST LetLet’’ss enjoyenjoy nanotechnology!nanotechnology!

AIST GovernmentGovernment R&DR&D Investment:Investment: FY2001FY2001

Nanotechnology : US$ 500 M US$100M US$100M

MEXT IT

METI Environment Medical & Biotech

Grant Metrology Materials National Project

AIST Crossover of Top-down and Bottom-up Technologies

Top-down 1µm

Moore’s Law

1nm

Bottom-up

1970 1980 1990 2000 2010 2020

AIST Environment Materials Life Sciences Electronics Energy

Drug Delivery Single Electron Carbon Nanotube Transistor High-efficiency Solar Cell

Ultra-hight density Storage Molecular Machine DNA, Quantum Toxic Compound Filter Devices

Manipulation of Matter with atomic and molecular precision

AIST NextNext GenerationGeneration SemiconductorSemiconductor TechnologyTechnology MillenniumMillennium ResearchResearch forfor AdvancedAdvanced InformationInformation TechnologyTechnology (MIRAI)(MIRAI) ProjectProject (FY(FY 20012001--2007)2007) 70-50nm node and beyond for SoC

Schematic Cross Section of CMOS Transistor/Interconnect and Five R&D Focuses of MIRAI Project AIST Noritake-Ise Electric／AIST 40-Inch CNT FED Panel Nanotech 2003 + Future

AIST AIST Emitter-Grid Electron Emission Emitter-Grid Voltage

AIST 150 150 -30 210 30 30 90 90 90

Liquid Crystal

50µm Patterned Surface

Nature, November 14, 2002. Sate1 State2 State3 AIST The world's largest High-Tc superconducting film

a) YBa2Cu3O7 superconducting film b) Superconductive (30cm x 10cm) made by coating characteristic of the film. pyrolysis process.

AIST UseUse ofof CarbonCarbon NanotubeNanotube SPMSPM TipTip forfor DNADNA ImagingImaging

100 nm 20 nm

AIST Scanning Probe Electrons

Anodically Oxidized Scanning Line

Adsorbed Water

10 - 100 nm silicon, metal Oxide lines on n-type silicon. 10 V, 0.2 micron/s

AIST Environment Control + in situ Current Measurement

Environment SPM

Humidity Controller Sensor

Joint Development with Seiko Instruments

AIST