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X 9X^[i^^^##m^#3g ' C, 4 vt:? c x xq<} c, f xfi^P@^-X4/^x ^X^^Z 'fi###3g/f^'X:6%9vi&:!|g^#3## [^##aq ^>/^xz] 'a.a)9($a.^M^^q@^(Z)? x9#x^^m<;^ ^x^aAa - ax % ^fXKx-x^-^-Egi ' ?3m^o ? x 9 'f!a_##&)X °9($a.wx ^#a#^x ^ ^ ^x^xx z (Z)^-x 4/^X ^X9^xqqx^fx^^^^^^'fi#3g^/:6xax4/^x ^XX- ^ c ^#9($x#^M#^s9x#^^x^<'qxx (#) [m^WAg^^^x^n G oxixfi x a- °9<$ y>/XMg^^^^m^m9xmm^ q '# ]#a):###aq ^>/^x(z) '3:#o^#s GAG-aa ^v^^g##Ag^^^X^ d) 'fix9#3 wm x/i%via.c^fj::i^#mm#m##2W^ ^%q XSgT '^9via.Xl#%)%fi#im^^#%9^^2iW*^#^ °9^:i&l^0)>#W ^#fi^-o)gr 'xmmxx ?M#q^wax3g 'fix^c,2imm#:%om^#sg#: °9($xa)^9X#m^a#x-^ q ^q^wm 'o<$a.#X9_^ma_xy-A'ao3q-^^^-^&)sdqoi ^### 2g(Z) q X T 9 sMI ? GAG ' GO ' 3^WX#^^g#X%9X# ^^x^x "fim##gg^^^x^q ^>/^xo% °9<$a_cm;/x ? ^ m ^ ? % 9xm#j-^>-^ rg##a^-x^^##xmj z:^9^ ^#0) #}###'fj q /; ^X The main aim of this research project is to propose and develop a concrete novel storage system with huge capacity and high data rate. The storage system based on the fundamental patents holding by the individual organizations of the project realizes 1 tera-byte data storage in a CD-size optical disk with high data rate reaching 1 Gbits per second. In addition, the storage system has upper compatibility with existing optical storage systems such as CD and DVD. No similar system has never been developed through the world and hence the proposed system is regarded as an innovative one which meets the recent explosive demands in information technology (IT.) Although the fundamental experiments of the proposed system have been achieved, no demonstrative platform of the tera-byte storage has become a reality. To demonstrate the technology, the project team is requested to (1) show experimental demonstration of the CD and DVD upper compatibility with the optical disk storage system, (2) fabricate the proto-type optical disks to be used in the present system, and (3) develop a novel spatial light modulator enabling the high speed data rate of the storage system. Then, in the joint project, research and development have been carried out by focusing on the three particular sub-topics as the following: [1 Optical disk evaluation system] The proposed system is based on the novel technique, called as collinear-polarization digital volume holography, which was originally developed by Optware Corp. in Japan. In this project, demonstration of the write/read process for a rotating optical disk was first attempted with the above technique. Based on the results, an optical disk evaluation system based on the collinear-polarization digital volume holography was developed. In addition, the CD/ DVD compatibility was also demonstrated with the system. [2 Hologram optical disk] Wright-once optical disks for the above system were developed. Optical disks with pre-formatted patterns were actually formed with the so-called CROP material, photopolymer material developed by Aprilis Inc. in USA, and were tested in the above storage system. Based on the results, developments in a re-wrightable material were also attempted by calculating the optical nature of nano-scale magnetic structures and by actually forming the composite materials. [3 Spatial light modulator] Data rate of the proposed storage system is predominated by the performance of the spatial light modulator which is used to produce information-carrying optical beam for recording. As a conventional spatial light modulator, liquid crystal type is now available, but the operation speed of the device is too low to maintain the data rate of 1 Gbits/s. To overcome this problem, an attempt was made for materializing a new-type spatial light modulator based on the magnetophotonic crystal technology. — 2 — The joint team for the project was composed of three domestic companies (Optware Corp., Memory-Tech Corp., and Ryowa Electronic Corp.), one domestic national university (Toyohashi Univ. Tech.), one overseas company (TuiOptics GmbH, Germany), two overseas universities (Massachusetts Inst. Tech., USA, and Gyeongsang National Univ., Korea.) in§ inf w Hi vji -\ T & Hi A >4 nn|i ru s M B 8 US $ ms 1.1 (d: C A lc hi/ —h 7^- —^icov^ T#mi-6o t (7) ^ i"6o 1 . 2 * □ ?' 7 A IE B (D# — — A&IEEAf — ^ "C t — < z^(iz<^6^T^ 60^07'77/ 77K%-7 7 hi/- 1 ^ 0 602^^/ x 3k-y ^ h^ x t? # (C Gabor ^ »9 , 1963 ^(C van Heerden lCj;^!:#n7"77-r&^Z 7 7h7-^(D#^^##^^L^: [4]o :&## Heerden — 5 — I i • a i am • uiaiiiai i ■ aaa a ii « iiai i i 11 aaa it » i 11« a i ■tf i i ii i ibki ii aaiia c * a n ii m a a a bib a ae • n a i • in i an ii i i ii ii i an tie ai i if I a ma i HMiai ■ ti min* I it in ■ s in mi ii i ii i a ft III III 1111 B B B B ■ 111 ■ B KB tl 111 I I t an i ia e b at • a a mi tana I s iii ■ • i ■ m a e m mu ■ in iiitni bb b a i a « i« iibi i in i bbb an ii m BBB ills BBS B K 1B BBB felt IB bb b k i a a bbb iii a a m bbb i iii ft e fti lama in i a a a i ■ it* iii BBB III • a 99 ■ K ■ BB BBB BB III ft f f» 11* B* I 11 B llllI ft ■ BB • BIBB B V Hill BB I BBB I bbb a ■ aaa bibb a a unit a a a a a a a a fti i iii ifce a aa i ** 11 a biii iiiii b a aim a bbb am a ■ a * a a ft ft ft»a 1111 atfeiiitiii a ******* it a a a a a ft ■ bbb lias mm a bb a e # BBB MIIIIRI 9MI * ft # ft BIBB SB « ft ft ft a aa bbb ai a a bb a i a iiaiieiia • III a ft ft ft ft ft IlIRlItftl 9 8 IIIII I aa bbb aims* it 11 I iftftft aitll El 1.1 — f f61 SIBJtftiS* u—tfe-A Vx vNV? & 1.2 ^ (DE# f61 1973 ^ T$)6[5]o (Spatial Light Modulator: SLM) t $¥■ W: tl 6 S^f {$ b 7%y ^ y 3 ^ SLM 6o — 6 — : * " * ^ ,\>y C? :r: 1.3 g [61 5 : SLM 9 2 0:^(7) ^CeBU^^L'-A (#M) SLM ^gg###^(7)^(c^>X SLM ——^%-C$)6o ZcDgj —9Z«!:t)T#6o j; ^###(7)#%^#: 5,000 K#i'6m^6^of7A^em^^6o Z(7)yn-t X Lt ^-SiL (multiplexing) t t^2 ti' il *5 0 ^0^77/7^ 1^(1, m#L7cm^ (^n^7A) A^##(7) #^(±, gi 1.3 9 - #^(7)#,%^: (^lol) (7)^.^^(7))Pj-j^i-6 ^6$7:)Uc##'T&6o C(7)^(±7^ hTT j; t u ^mixyx^ ##% i^y f'-r ^ i%- (k (D^icj#A 6 — 7 — n 7 7 A#E##db(D#&&%l\/<7cd7 LT t) Z # 1 . 3 /fr □ 7 7 A IB BE E ^ CD T 7 b 2v V 77gmu, C^L^-e#^T^< (D^7b7^^^^^LT# &1.M::, 1960 4Ht^W990 4HtK::^#Tf^&fL7cT^f/l/'#nf'7A#2 ##EC0-^"C&6o L7)^L 1960 ^ft^l970 ^{t-C(j:x # 1.1 x '/^ )V • p 7 7 ^fEfg##CDfl^ ^ ^ ^ m # jc# 1968 - ##](/)# o 77 7 / 7 ^ ' 7 i7 7/I^ - T —7 - 7 b 7—7## (^// [8] #%Bf) 1970 7 ^7^-^0 77 7/ 77 - 7 b b-^E# (HOSP) [9] (IBM) 1973 . 10" bit 9-K77b^n777/777^ [10] 9 — (RCA) -777/ 7 7 A93 7/W m %^L^9-K^79-^n [H] 777 / 777^9 (NEC) 1974 -7 MB ^0 77 7/ 7 7:2### (3M) [12] -A^#m(':Z6 9-K7/'b7^9 (Thompson-CSF) [13] • HE# b — b 4 X 106 holograms/s^ Ijc {±5 L 7'— b 50Mbits/s CO /b n 7 7 [14] HE # b 7 7 -A (Harris-Intertype) • M 00 “ 7 CO xb p 7 7 b ROM (Optical Data Systems) [15] 1976 • 300mm H CO 7 / 7 7 Ul 30 Tj-CO 9? 7 ~ E"7'7 T^lIX# «T ft ft xh n 7' 7 2* [16] Ef'tfV 7 7 (Hitachi) 1978 . 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"f- 5 b X>X — 9 — Alignment, shutter and Galvo Control PC VME Cl CCD Camera Decoder xl6___ streams E] 1.6 1 Gbits/s (O'T — ^ foils X’— h 6 Is]^ X 1000, 1000 fps IBM-Display Tech #) t ^ -k y^%Yk\^7 1/ — (1000 X 1000, lOOOfps, Kodak#) v^6o i.6 T i Gbit/s £HfiE LTl^o 1 . 3. 2 Lucent Technologies jifl) vXf A [27] Lucent Technologies Tt li 1.3 # 1C j# % L7c%L cz 7 y < o 7^ (1) ^ n ^'7 6 WORM 7^ h D -?-## (2) Sr L V'1 /T n 7" y A (D (correlation multiplexing: CM) (3) |2®S®(7) tz. tf) (7)/jN§y • ###- • IS IS ft * m h HI {£ 7 w- if' (4) Sf LV' CMOS 7 7 — (5) 7 ^7/L - ^ 7- - 7/<^ 7 (DMD) (6) f f ^ 7 — IT IE, h 7 7 ^ 7 7" E) 1.7 h/KD LT, $il 480 kbits/page t)Oo g| 1.8 750 pm#:(D7d- ^7 h# 45 bits/pm^CjoV^-Cf--Y^;X%^% 4000 —11 — 1 . 4 ft ft ffi i-&T7/w h yc Z «k 6o PRISM yn^:nf h (Dj5&# ^ L"C Aprilis dfl% L /c CROP , _biSO Lucent Technologies t± /5* UH L tz~7 Jr h 4^° V *v “fcf 14 (1 WORM##«kL-C#.#A-C#t##%^iT-C^i9, Z^L^##(D lifetime, shelf time 3^(DA&^W4ci-6Z<> (7) WORM b frl & (1) ^n/y'77/E#(7)^^«>Ll:, Off-Axis 5 tzib' -C&6 Z C t o (4) #,m%^(D^fmM^&mv'TA^mix-h&mG%LTV'6dL #f ig#f$(D^M^ L°^ -k/Lm-C#^ T v^6 ^ Z (5) T^f/L###nf'77^,&:V'9M(DE#f5^;&zt(D/c#), ^#i-6# ^ h (Dsm^^^^c 7 «>o ±^(D^A(D^V^LV^^^;Lf$#^n j: 5 (2) CDf-/X (120mm(|)) (D^yH^fhH 1 TBytes ^l±(DE^#^ (3) T —lx— HI l Gbits/s — 13 — (4) CD&UCDVD (5) ^@#7^ -^(7X3 A/LT:a#i6^(D^±^igi5 9 ^i-6t(Di?^6o bit iFBiBS^fe't' 6 bit by bit jj ^"C h *9 „ Si l/ ~~ h (7) ^HL A* E5 H t V' x. <5 0 3 b DVD ^ #^Xi [1] G. Lippmann, J. de Phys., vol.3 (1984) 97. [2] H. Fleisher, P. Pengelly, J. Reynolds, R. Schools and G. Sincerbox, “An optically accessed memory usign the Lippmann process for information storage, ” in Optical and Electro-optical Information Processing, J. Tippett et al. Eds., MIT Press (1965) 1-30. [3] D. Gabor, Nature, vol.161 (1948) 777. [4] P. J. van Heerden, Appl. Opt., vol.2 (4) (1963) 393. [5] L. d’Auria, J. P. Huignard and E. Spitz, IEEE Tran. Magn., vol.MAG-9 (2) (1973) 83. [6] “Holographic Data Storage ”, H. J. Coufal, D. Psaltis, and G. T. Sincerbox eds., Springer (2000) 5. [7] “Holographic Data Storage ”, H. J. Coufal, D. Psaltis, and G. T. Sincerbox eds., Springer (2000) 6. [8] L. K. Anderson, Bell Laboratories Record, vol.45 (1968) 319. [9] J. Lipp and J. Reynolds, “A high capacity holographic storage system, ” in Applications of Holography, E. S. Barrakette et al. eds., New York: Plenum Press (1970) 377. [10] W. C. Stewart, R. S. Mezrich, L. S. Cosentino, E. M. Nagle, F. 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[7] Demetri Psaltis, Fai Mok, Holographic Memories, Scientific American, 70-76, November 1995. [8] “7^ , Xlz M3- n, 100-103, 1996 ¥ 5 [9] Myeongkyu Lee, Shunji Takekawa, Yasunori Furukawa, Kenji Kitamura, and Hideki Hatano, Quasinondestructive Holographic Recording in Photochromic LiNb03 , Physical Review Letters, Vol.84 No.5,17-20, January 2000. [10] #±99, “# #,Vol.8 No.2, 109-112, 1984. [11] HfflEA : m 3 1988) [12] H. Horimai, K. Seo, K. Toyota, and K. Saito, Optical Data Storage 95 , Intern. Soc. Opt. Engn., vol.2514, 118-128, 1995. [13] %mmA : 3fcr>f X^X hl/-y(DSiiJS| (#?######, 1995) [14] • /hJHISwi : n >A°7 hr^ X7E* 1988) [15] jt* —99 : DVD&DVC AHS* 18 $ (###%%, 1999) 54 mss mmwnmm 3 . 1 ii i: ik iz ^ n ^7 CD,DVD(7)j;9 *c, #:# (&#) ^me#-r$)6o # L-cm#^fl,-C^6o ^7TAT/<^7, #E### c t# ^ ^mfk^^goTv^v^#-e$)6o /noc o, D v o «> os LT,#ny7^% T%r770^^^cV^"C^^6o 3. 2#-C(j:yi; 7^—77 h#7^h9y^^: 7%r7^0f##(CC^T#"<6o 3. 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L°^d:/Lx conductor Switching process starts fed ad in connerofpixel d this comer Second 14.3 LIGHT-MOD (7) L°f dr/LX^ ^ 131 100 — 6 LIGHT-MOD LIGHT-MODTM.kPNf A 5 dA (7)* m I:#-f 5 ^ ^ 9 m#V4: < ^ t (DT^-o A. ^ ^ 128x128 (64kbitX 57x57pm (D LIGHT-MODTM ^±iCW$ B ^ A,TV^6o 1990 ^ft^A-oT, A^r — 9 y hX%:(!:(D#lp]#^ic ct o T P?i $ tl fc MOSLM ( R-MOSLM : Reflective Magneto-Optic Spatial Light Modulator) [4]#mjizW LIGHT-MOD ^(±#^0, L /c^#^(DSLM-e$)6o g]4.4L: R-MOSLM A#A:(7)#^m[s]^A^]E# d: ^ 0 , -oT 2 #(D7 % y ^#6^6(D-e=:yh7^h(D[p]±^#G^L6t)(D-e$)5o Z(D#f(l±iCEi4.5^ L°^t/^f-4'X22 pm, L°^4r/>^jrT7y^2pm ^#(1 100mA Zn6 200mA ^ A# < , ##(D LIGHT-MOD ^ Metal MO film Substrate .9. Positive rotation Linear polarization Light (ON) Dark (OFF) Random polarization Negative rotation Analyzer Polarizer 14.4 R-MOSLM (7)j^g [41 101 — POLARIZER AND FILTER LIGHT. MOD PLANE MIRROR AND DRIVERS CURVED MIRROR 16,0 cm \ mxm \ INPUT LIGHT - MOD Vl AND DRIVERS ' 64X64 CCD DETECTOR 14.5 v v — $ j± 4. 1. 2 *w%m3£ # 4.1 (IT ^ ^ n f'y 7 ^ ^ ^ SLM (D —6 [5]„ h) &t)"3Z "3 FLC — L ^ (7) FLC (7) L° ^ ^ o ^'7 C ^ DMD (k #XL 6^LTV^6o MOSLM LT 9 ^ (D-e, T/W ^^^(7)^#^9^ SLM #m, #4.2 9 K, B 7 h MOSLM (R-MOSLM) 2 (7) MOSLM (7) # 4.2 t^ 9 mA ^ —102— y/ y -Y y y y K - ^-7 640X480 y A 7 9 # el SLM Kopin 33 ms 10 Mpix/s (VGA) (LCSLM) # # # {$ # m SLM Displaytech 256X256 100 ps 650 Mpix/s (FLC) y y - y y yt/ - 3 Texas VGA or 7 — • y /< -Y y 20 ps 15-40 Gpix/s Instruments SVGA (DMD) 4.2 R-MOSLM, T-MOSLM Rtf FLC (Dftte.it IS R-MOSLM [4] T-MOSLM [6] FLC [7] ;i/#c Fe y — ^7 F f e y' '— y- y f /I/f Y X (pm2) 128X 128 128X 128 128X 128 /k ^ 4^ -Y y y (pm) 22X22 57X57 22X22 ; (lines/mm) 42 13 33 :E (V) 10 25 5-10 7 1/ A y — F (kHz) > 1 1 1 n y y x FJt 30:1 15:1 10:1 : (%) 1 0.5 — \t) (mW/frame) 0.1 1 10 X # ll#it (mA) 50 350 — Y# SMi (mA) 230 450 — &TWRK y ^ 6 Z«k^^^±(f6^,6oZ^L6^A(DzkV^ MOSLM 6 DMD (D j; 9 1) y KX?"- ^ SLM ^ ^ n y'7 7 ^ E#C/^7" t O b^ XL 6o Xy ^ (c:J^T(D MOSLM & f-yyh [# i x, v Ky^yy/ t somAmmcrnMLt L?E —^y h^<—X(DR-MOSLM x (#%y^-b^yy^^^ —y) O MOSLM [# 3 mi#] TTL v^<;V(7M6SE'e6SiMy E'i-;5#ES/<-x (D MOSLM —103 — $2 r -t0 Side £ ii/c^lSBixcDBII^ EpjJQ LfciS^lRl dc B#lc Z 9 t° 7 i? El 4.6 Id:, R-MOSLM Ky-ryy^y(D^fME|-e$)5o R-MOSLM R%ld: Ky ^ 7'y 5 ##&#]#-#-6 7c#», L°7-k;^(Df ^:lc 9.6X1.6 xo.3|iimTh^(7)#$r#^, X T^6o ^^Y Ky^yy^y^^yt/kcD^^^^TX Ky^yy^y^yoy ^dL6^#)l^, X K7^y7^V±lcmA#(7)mm#:#(6x6^m)^^LT#^:$^T V^6o Zfb^X, Y Ky/^y^yid:, Z(D X, Y K7^ y 7^ % zn-^ g >|c|d: ^ 4.2 iCEL^t 9 |C 100—200rnA#^(7)/ 3D Maxwell Electromagnetic field simulator) (DMtf&Sxpf & MM L /c 0 K y^7y^y(D#Kl:ld:Ai^m^L, C(D|^, #t# —^#l± 1.96%'C^c^o #(D K7^y'7-ry#iB^|gi4.7^^-to imEH-^-tz 91c:, #uv^ Ky-r^y-r y II, t-y-k^m-keiseicyjzyiy (El4.7l^a-e^L^) ^rt^, X, Y Ky-Y^y (a) -eg&^m@:^i6]m#^^^i-6Z9^M-^iT,T^6o $7c^ #%(?)#jm##&i5#)6 7b#), E°yLT# 9 ^-oTV^o C(D##(D Ky-f^y^yid: LPE ^f-^y h-yya##,&mv' ^v^-f fb(D MOSLM LT t BP t>, / #m##@#/x Ky^^y^y/^-^y h^/Y K7^y7^y/#@*^@i# ^ 9 f-y K^ y V' 9 #A^r to. t 9 ic, B#y h -y7^##^^mv^#f-ici±, x, Y Ky^yy^y&iTO^-CTML, 1 I t LTtJffl L/Co El4.6lC^L^B y hy% R-MOSLM (D Ky-fyy^y%#^El4.7^^L^:#TL <^#L^ K7^yy^y#^^M:^LT^ 6^mT(DZ 9 1-^6. 79^ —B#ld:##:^io] (z ^lo]) B#"C, —4^ y b # ^"Tld:^ 300 Oe B y b y% R-MOSLM l^m^ 6^,^: Ky^^y^y (0.2nm@) Kl00rnA(Dmm^mL^#^lC, Ky-ryy^y(D# (1.6nm#) (Hz) (D^lb^El4.8lC^-to M EH1, Ky^yy- — 106 0.2 p.m (a) z = 0.1 yim (b) z = 0.0 ^im (c) z = - 0.2 fim Current 100 mA -100 -200 -350- X (|im) m 4.8 R-MOSLM (D Y 7 4 7 y 4 V 100mA Z=-0.2^im "C(D Hz X -Ax Hz It # ±(7)m#^X=0 (7)Z=0.1^m (Blf(a)) -CHz=3750e^^ALTV^6o Ky^ ^y^ :/&### —;& y h f 1^ C 6: 2m 9 y h yf±o Ky ^ ^ y / ^lt, Z(D Bl 4.9 tc#b< ^;tb^ (1 R-MOSLM (D#^ «): 100mA b^#^(7) ^73: y jolt — 108— 0.2 pin (a) z = 0.1 pm (b) z = 0.0 pm (c) z = - 0.2 pm ^ Current 100 in A -200- -300- -500 - -700 -800- El 4.9 fr LV> K 7 ^ 7" 7 ^ we 100mA z(Hz) x (Hz) |iWf(a)Z=0.1pm%\ (b)Z=0^K7^y7/yTm, (c)Z=-0.2pm(±K7^y7^^TB^^6T (c 0.2pm Hz irfb^fb K7^ ^7^ y#J@X)^(DgE# X L^o X=0 (7)7^ Hz ^ , (a)Z=0.1pm 'Tfl El 4.8 (7) R-MOSLM (7)^] 2 860 Oe (7)##^^^L, 3 7b(b) Z=0, (c) Z=-0.2pm job^T t 300 Oe~400 Oe Hz C ^ 6o R-MosLM R-MOSLM oz ^ ^m*LTb^6o MOSLMf##%m^^:#^ —109 — LPE garnet film X drive line: A GGG Mesa 1 I wet etching Insulator: Si02 Planarization Y drive linerAl polishing 1 lx Passivation Dicing Wire bonding Photoresist Protector layer of PR Package (PR) -SiO, 4.13 LPE 13— *y b^<—7 MOSLM Z 9 1^, MOSLM 4 "7 7 7 1 (g| 4.12 (b)) (1 E7 ^ b#). 7 2 11 X (c))0'7 7 7 3 (1^ -7^^-r$)6o i ^ LT^m-L, i mmmic 9 b^ 100x100 5x5 E 16xl6(D2@M (Dt,(D^fb#Lybo LPE# —MOSLM |g|4.13^^i-{$#%m^^l^o GGG SE±b: LPE l&S L/cEt4# —y b JJf £ £ ^ y b ^y^yflzJ: 9 ir/ufL L, ^(D^L'f'ir/i/^^yytcyd-bi/v^b (PR) PRi% ## 4, 3. 2 LPE Ji-*y bM0e^-tr;btb (> 7) LPE # —^ y b#(D L°7 9 7 b ^ ^ g|4.l4(ci:°7'k/l/{h%#^|g|^i-6o 7^bt/7^b (PR) ^k°7'k/l/ ^ L, 97b:h7yi3-&;% H3P04 lc Z 6 1>3L y b b#^ 5gm (7)19$ 1C L°7 L^o #Z@b:j6# &##=& 1 t <£> T Sc 4.3 td 7j< " — 114 — Protector laverfSiO,) Lift off Wet etching at H3P04 Structured pixels (Mesas) Remove SiO, E) 4.14 4.1 LPE 7 y h fc°7 1. GGG 2. HMDS ^ — h (lOOOrpm, 5 sec & 3000rpm, 15 sec) 3. AZ5214 ^ — h (1 OOOrpm, 5 sec & 3000rpm, 15 sec) (1)7 7 4. Xlx^<—7 (100°C, 60 sec) 7 h 7 Cx y b 5. 7 7 'f 7 & 7 y zh° — X (7 sec with mask 1) AZ5214 A: V 6. #7. 7 (120°C, 50 sec) y b^-yyn±y 7. 7yyK7c7X/K —X (120 sec) m 4.14 (D±m) 8. ## (20 sec (AZ400k:DI-water=l:3)) 9. SiO; X /< y 7 ## (400nm) 10.SiO2(D97h^-7 (7"Lh7) ( 2 ) LPE ^ ^ y H US ^ x y h 1 y f y " H3PO4, 170°C, 120sec. (200t:a±T^y7L°yh#^) (El 4.14 ^T) (3) sio, a 1# ± 10% HFD180 sec (0 4.14 *T) Bl 4.15 (a)A^ L(d)|j:, .UzB^Xn-LyKj; MW LA: 5X5 1A7 X(D LPE Af —^ y h (Hz) ^&^/ j: ^ 9 c -eL (El 4.15(b), (c))o Bl4.15(d)(±Z(7))t);#TK#^^^m#^m] An LA: #^7^6 L7"L/ix(T)-^^^^L,a#(7)3^hyy h 6. 43.3 w-tajtmm. ±^(Dy o -Ly T L7-L;ix{L LA: LPE Af-$ y h#±^ X &AM Y Ky 7 7'y 7 7 — 115 — 4.2 (1) ynir f h ^ •5 tz. A) N 200nm i? CD A1 £■ N A: (D ± {z.$f £r -f6 B AilT 50nm (D t) R.F ^ k" — (El 4.16 ±) L^:o 1. (2) 7 h y h (PR) 2. HMDS ^— h (1 OOOrpm, 1 Osec& 2000rpmx 20 sec) (El4.16^"±) 3. AZ4620 ^— h (1000rpmx 10 sec & 2000rpm 20 sec) 4. — K^—A (250°C x 3 min) 1. MD-Mol it& y K /K ]J y 'y a- A p X Jr. X:\ 3mm A A ~T 4E- y K ^ — JX h Jk. XA PI t# ^J ^ V ^ 300rpm x 3min #e 3. MD-Mol #y K /K U y A =l A ^ -X Ji T;\ 1 mm A* (3) A T ^ y — X h Jk. 1API t#^!J V^ 300rpiru 2min (El 4.16 ^T) ## 4. 5. MD-Mol y K /l? U y A ^ A & y Ji ~A\ 0.25mm A A T ^ A K ^ — X h JA. t/PI yf M £r VA 3OOrpm "C ## (Cu@#^^-e) 6. 1. (4) 2. SiOz (lOOnm) PR###(D)M 4.17 L?E y ^ h k^t/l/##^#6^L-CV^5o El 4.18 (1 SiOzf^##^^ #(D 16X16 k°^-k/Lx#M^%(7)-^j-e^6o — 117 a a a \ a a $ ^ t a a a a * a eaeeaaee aaaaaaaa&aaaaaaa aaaaaaaaaaaaaa a aiaiia&itai.tr'. - • aaa #aaaa*am# a % a # ■ liiaiinai an a ■■a>^aaaaa*a" aaaaaa-aa .v aaa . aaaaa-aaaa- # a . - a - aaaaaaa . . * j a ^ 4.18 16 X 16 tr/lx 4. 3. 4 ^#^7 —CZ-eii 400nm#:(DAl#^mv^l:, ^ 4.3 7 h^7yn^7(C j; ^ X K7^7'7^ El 4.19 (3\ X K7^y7^7^^cf(D^:##;#^^Lyct(D-C$)6o El 4.20 X K7^7' —K7^ 7'7^ 4.2 X K7^ y 7^ 1. 2. HMDS coating (lOOOrpm 5 sec and SOOOrpm 15 sec) 3. AZ5214 coating (lOOOrpm 5 sec and 3000rpm 15 sec) 4. Prebaking (100°C, 60 sec) 5. Align and expose (7 sec using mask!) b 1/ 7 F AZ5214 6. Postbaking (120°C, 50 sec) 7 bzp 7. Flood expose (120 sec) 7 7" n -k 7 8. Develop (20 sec (AZ400k : DI water =1:3)) 9. A1 sputter deposition 10. Al@^7^>^ (TtbWcZ6D7b^7) ll.Si02$6#@(D^b)c (400nm) 118 — in x ~n I Ml X > H x!i W ilSISI X W> IIS1BI m V m # -B- a n 4. 3. 5 Y SiOz X y -^^^7 h 7 y 7 V 7 h^-^yo-k^-e Y K7^y'7^ 7^H^^cL^o El 4.21 (IX, Y K7-f y'7-f ^^El 4.22 KTm^L^lRl %*%>!*! %!%!!!»&! 4.21 Y K7^f y 7^yBf&m&tpmi'^: — 120 — (b) y 4 y 4~ 'y M Sn "C ^ /c iff L ix Y y 4 ~f y 4 y f -k/Hk LT LPE^-^ ^ |g)4.25(a)(j:k°^-^/lx{kLl:V^V^LPE^ —#3: #+L/c#)K(D X (Al) yct(D-e^)6o y^XmEdSll^O^/^So g|4.25(b)H, m 4.25 (a) LPE 13 — 4 y Hf htc — 123 — 4ooe ^ xmg ^m^u-c^o, m#A]Ao^^Km L/cto-c&o, K7/ y 7^ >m#+m «p, 4imA LT, -t/HkL/c LPE 7h(7)^^7^^^T"^h #!mi±EL°f t/HkLTV'%V^#,k^-:0H4 L^: LPE 7 He X K7^ ^7^ %###(- 13 4.26(1, 16Xl6KL°^-k/k/fkL^:LPE#-^7 H#_Uc#M(D X K7^y7^^^#^LT, 3 4.26 (a)#M^#@:K: 500 (Oe)(D (Hz-0), X K^y^^yS^l^&Tc'P 32mA 3 4.26(b)-C&6o |RI3"C^^. —— -k/L-c$)6o a < u-c # 6T, MOSLM (D#^:(7) 1 9 %#^1< #,lbl:V^6o 3 4.26(e) (l±^(7)##i?^x4^^(C40 (Oe)(D#mm#&ML^:R#-C&6;5S, — 124 L< e#iL^ Ky-f »9 ws "T# ^ V^x.6o U ^ h y%(D R-MOSLM !?# 1 k°f »9 X, Y 7 ^ I' — f/I/-?#; 200mA ^inH$mLybt)(D-e(j: i if f-&/(/&;& 60mA (D@mT#mn?^6o Z(D#(m 7 hXtk(Dt)(D(Cjt^#ia 30%#^(7)/J^ — 125 — 1 h^yf ^(7)7 7^9- ' ^ n . k'-T^ ) T, 100 nm ——^ y F#& 9c # 13 4.27 fi — ffi\ t L X N 720 nm ^c % — y h StS h/ix-e$)6o (Si02/Ta205^/Bi:YIG/(Ta205/Si02)^^9###(7)#^6 2^(7)# ##:## (SiOz, TazO;) YIG=Bio.7Y2.3Fe50i2:Bi:YIG)^f-yKWyf'Lyc#^^t^)o l3 4.27(7)#^-e(d:, n^'tLcDSffft Si02=lllnmN Ta205=92nm N Bi:YIG=167nm ”C h 3 0 IH 3(b)(Z)^ l^H iUt Sim f+Sfgx 1 #C7r;Et£ 7 h ^ y ^ ^bbb(D#'Bs H&fiJt Bi:YIG (I67nm) C(7)##:ld:^#|"#& %?$)6 720 nm T^l 63% (7)##$ 6: -0.63 ^ ^ V^9 7 7 7%-|B]^A Z (7) 7 7 7 7='-13^ A Id: Bi:YIG #@j#(7)^ 10 # y h 100%ia^#iig#(!:###(D 100#lci#f-6±# MOSLM (7)#^##^: LTj@^$)6 t. # (b V'%.60 aTTId:Z(7)E^7^ 7(7) MOSLM " f# 4, 4. 2 E%7^- L —y<7^#/< —X MOSLM (Pit# (A)£ttfltJ$ M 4.28 ^Et4 7 * My^ (7) MOSLM(WT MPC-MOSLM £P&IS1“5) iH:iia?r/7to IrIHH-^ t X 0 (cs MPC-MOSLM —^ y #@:#^IS#i?f7 FV y f" to,, z Z-eid:####!# S1O2 #^^T=633nm ^ Z(7)«!:##@(7)l#$Id:^T(7)<>^0-r^6o Si02 IS : dSio2=A,T/4nSi02=l 11 nm (n§;o2= l .43)x ITO IS : diTo=^-T/4nn-o=l 10 nm (nno=l .43)N Ta205 IS : dTa205=^T/4nTa205=76 nm (nTa2O5:=2.089 ), Bi:YIG IB ft I25nm t V /cQ #f&&(CId:#mm^^7^-e^53-->^l737 &# (0.8mm#:) #m^#-@#ld:RF-7^ hD^7/ — 127 — L^dr/L# 7^r y^-Y ^il.LPE —$ y F^<—^.(D MOSLM !) 7 F^y-yc-k^F: d: «9 . # 4.5 ^O^iCg] 4.29 LTho # 4.6 (1 ITO #2)fF#^H4:-C&6o ITO #^/ (B) X K7^f 7 =5 4 > m 4.30 lz.TMnnfc£Mm-tfcBl& Ltz fc°* ir/HFd' X 100x100pm (D 5x5 MPC-MOSLM (D ITO-X F "7 ^ ^ o Ky^ y ^-Y >y/<^ K(D^^T. Xi± 120x260 pm. fmi^#40pmT&5o Bl4.31(a)(j:5x5L''^t/Ix^^(7)#m#^% & 4.5 ITO—X K7Y y 7 4 > ¥Hli pN W 1 Cleaning 2 HMDS coating : 3000rpm 30 sec 3 AZ5214 coating : 3000rpm 30 sec 4 Prebaking : 100°C, 60 sec 5 Align and expose : 10 sec 6 Postbake : 130°C, 60sec 7 Flood expose : 50 sec 8 Develop : 20sec (AZ400k : DI water =1:3) 9 ITO sputtering 10 Remove PR * * ♦ + > MM > ir m 4.29 MPC-MOSLM — 129 4.6 ITO #7% 5%#= ft ITO Substrate Corning #1737 glass Background pressure 3.6 X 10-?(Torr) Sputtering pressure 10 ( mTorr ) Gas Ar Substrate temperature Water cool Sputtering power 30W Thickness 110 nm Sputtering rate 2.75 nm/min J. Ill ] l 11 .11 1 T 111 ' ! [1 4.30 5 X 5 MPC-MOSLM (jjfrl + X K7 4 7J7 4V) . A (a) (b) H 4.31 5 x 5 b° 1 4r 130 — m 4,32 16 X 16MPC-MOSLM + x K7^^7>fy) (DHM K4;D#3i,V4c/<7--y7^3l,TW5Z^^^^6o g]4.32^, L^ir/k^^X ^ 100x100 ^m(D16xl6#9- (#m^### + XK7^X7^7) (C) / -y- MPC-MOSLM^yf-^#^ci-6m#^ —#Xr(Dk°7t/L/ 400 Oe 4: D /J^ < k XT !1 1 ^ & t ^ z CTd YIG (YsFesO.z) ^"<-X ^ LT, Bi Z «k T 7 7 7T-[si#SA^j#A[]^4ir, 4: 2 Dy-T@#L/Co $/:<% Ai ^m^L/co &(-,Dy L^V^#{b#m^m^(Bi,.5Y2)(Fe3.gAl,.2)Ox 7 F ^,Dy ^ 0.5, 1.0 mol %^mA0 Lfct 7 ^777-^7F L, 2:31,6 7 - 7" 7 F T RF-7 7^Fn>7/<77^m(:Z^m%#{k###^^^Ly2. #, ?5o°c, io e^(ommm^mm^4:i9#-^7F^#fk^'yr^o 231,6#^###^ #(DmM##&gl4.33F:7^i-o [mimXi^6^X)^64:2^, Dy@## (X) ^ri#^:i-6 ^^O^ikdi&TLyto 2(D^^^)^6, # % ^ 7 F ^ 14: Dy @j&a X=0.5 (D-k7^777-y7F t (D^m^5 Z ^ (:L/Co 131 — x=1.0 x=0,.0 -1000-800 -600 -400 -200 0 200 400 600 800 1000 H (Oe) El 4.33__CBil.5Y2-xDxxX£e3.8All.2)Qx i? V % v V $ — v 'X (X=0. 0.5. 1.0). 4.7 # 14 3J — ^ v h Background pressure 3.6 X 10-?(Torr) Sputtering pressure 10 ( mTorr ) Target (Bi| sYzDyo.sXFeg gAli 2)0% Gas Ar Substrate temperature Water cool Sputtering power 60W Thickness 125 nm Sputtering rate 2.5 nm/min o t ^ (c Z »9 -kyixfk L^:o El 4.34 K X Fy ^ 7 L^:#t4 b^^h%L/c 5x5 $?4EI 4.35 132 — IE] 4.34 5 X 5 ^^- + X + h b°^ir/u) ^*-e^6o gi4.35-e, (iTo) ^ae##&##L yc^e-e, rro m 4.34 L/c#f (±,v Ky-r y 7 / #T ITO t (p) Y xyy y ^ YK7yy7y>#x K7yy7y^^iwii:^m'e/<^- ^>y L/Co Y K7-f y 7^ > ITO 300°(X 30 — 133 — m 4.36 X. Y Yyj Ltz. 5X5MPC-MOSLM /c,EI 4.36 ^ X,Y 5X5MPC-MOSLM#f (E) MPC-MOSLM ?5or, (300"C, 30^") ^:o Bl4.37^0^:gr^i-. 3-D(D#%#(D^iG;%^f E/Mcgg# A z «!: ^ ###### — 134 — Wavelength (nm) Ei 4.37 4.4.3 ai±7f —X MOSLM ##* (A) Lfc MPC-MOSLM 7 WK El 4.39 IC7 7 7T —[E]^A^^7 EI^#(±lt^(D^A(C#J^ L^: 125nrn@(Dm%#-^^h###(D#^-C^6o ^ y b J8 )BI (Dt§u'te \'XJ? '—/f y b Sil: 633nm tj" 80 %^_LX:'fc <5 7 T 0° f&o/Co 125nm ^#V^«k(Cj:6o MPC-MOSLM 550nm—800nm (D##-C7^- h^^7/ MPC-MOSLM F#(l, MPC-MOSLM (7)^6# - #M^##%(7)%#«F#^^:#(7)$^A-e#&i"6o 4. 5 MOSLMEWim Ky-f/ ’ttHm 4. 5. 1 na#m# ^yn^zc^ F L/c MOSLM (l.LPE ^ y F j#&0( 1 ^^#^7 F MosLMmmmcT) F'y//<[g%^B#+'{$#Lyc^m^^^i:m^6o zz -cmmLTzKy^M#, MOSLM (7) 2^Tc@a@L^#^(7)t:''^y7F^^, X Ky — 137 — 7 77 7 7&T7 Y K7 7 77 7 MOSLM ^%^L# l~3kO(D%#:## 4.5.2 MOSLM jg» [U8S (A) El 4.41 (c&^:[mg§^(7)7n ^ 7 MOSLM ^r#± 3kQ (k 100mA (D 6 soovicigi-a#-^ im%(D ^777^7^11 EtgSOOV, 3 A / E4.42 icAim@§Ei^^7o mmirngg-en, ^ig (B) ## m4.43^m^L/cmm[m^d6##(Dmmm^^^i'o iwum^, ±(D 3 o ^ <9, % 20ns #^(D3A^±^ D . AZT D Z ^ Tmf 260V 200 —300V ecl mmns 4.41 MOSLM mW)\u}$&(Dy' P y 7 H — 138 Z El3:#L/LZ o |c x y & fc zb 61c Z ^ ^ A 6 %xi 6E6. 6 LT, El 4.43 ~n£<£>EMc^-t-«fc5lc, 3kQO^f|:^lt 260V <7) ® E £: EP ;bD E 5 C drT* 4. 5. 3 tttxj 'y=rmM(Dtzisb TgA(c^^pT#-C^)6o ^#@(DE#^&4.8lC^Eo El4.44(C^^-TyE^(D 7" n 5/ 7 ilr/Tto IH 4.45 |C K71 7'^ ^ 6###E^(D#^e^Eo m 4.46 Ky^ 7^57:A####m 4.47 It, E EJ lx f + L /C A 7 1 y EBSb El $g <7) 7" n y 7 El £ tl £ tz., i 4.48, i 4.49 Em#wit, 777#j^®m##6-77E7^mmm 5EI%6 L^. 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Krumme, H. Heitmann, D. Mateika and K. Witter, J. Appl. Phys., vol.48 (1977) 366. [2] M. V. Lognnov, V. V. Randoshkin, Yu. N. Sazhin, V. P. Klin, B. P. Nam, and A. G. Solov ’ev, Sov. Phys. Tech. Phys., vol.36 (1991) 493. [3] W. E. Ross, D. Psaltis, and R. H. Anderson, Opt. Eng., vol.22 (1983) 485. [4] J. K. Cho, S. Santhanam, T. Le, K. Mountfield, D. N. Lambeth, and D. Stancil, J. Appl. Phys., vol.76 (1994) 1910. [5] Holographic Data Storage, Eds. H. J. Coufal, D. Psaltis, and G. T. Sincerbox, Springer (2000) 251. [6] W. E. Ross, J. P. Karins, T. Maki, J. Lucas, L. G. Kelly, J. Cho, D. N. Lambeth, T. Le, K. Mountfield, S. Santhanam, D. Stancil, M. Randles, J. Whitlock, and D. Garrity, Proc. SPIE vol.1959-21 (1993). [7] S. A. Serati, T. K. Ewing, R. A. Serati, K. M. Johnson, and D. M. Simon, Proc. 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If ^ hlx-^^g] — —f mf b ^T ^ 7 4"# bl%—Z (Dd @#«k^x.6o LXi^L*% b 7)^ 7='T f A-/ CD ^ DVD #g(D^A^@##X.^m#-C# 60 Z (D#^"C t rtf###,!: LTlf# &bT^# <. 6,000mmv b 7-7 lo-C 5 10 ^Rrft#^l±hKAi"6 t (Z) k ^ ff C? fl <5 o 5. 2 ^ b, #&3ci; x b y o i7 oc 7 b (f, — g 6<] ^ LT^6 ^ A, 7" — h^^M-C^)6o TE5. m^iiaTfDmo'r&eds, CTh&^(7) —LTV^ 5.2.i y ^ N 1. J. H. Park, J. K. Cho, and M. Inoue, Numerical analysis of Faraday rotation and transmittance of one-dimensional magnetophotonic crystals, Annual Conf. of Korea Magnetic Society, Korea, November (1999). 2. J. H. Park, J. K. Cho, M. Inoue and H. Horimai, Numerical Analysis of Faraday rotation and transmittance of one-dimensional magnetophotonic crystals with an active layer of a highly Bi-substituted iron garnet, INTERMAG 2000, Canada, April (2000). 3. J. H. Park, J. K. Cho, and M. Inoue, Magneto-optic spatial light modulator based on magnetophotonic crystal, The 24th Annual Conf. on Magnetics in Japana, September (2000). — 165 4. J. H. Park, J. K. Cho, and M. Inoue, Numerical analysis of performance of one-dimensional magnetophotonic crystals as a function of refractive index of dielectric layer, The 8 th Intern. Conf. on Ferrite, Kyoto, September (2000). 5. J. H. Park, D. H. Lee, J. K. Cho, and M. Inoue, Design and fabrication of magneto-optic spatial light modulator , 2001 Korea-Japan Joint Workshop, Korea, June (2001). 6. J. H. Park, D. H. Lee, J. K. Cho, and M. Inoue, LPE-garnet base spatial light modulator, 2001 Intern. Conf. on Solid State Devices and Materials, Japan, September (2001). 7. J. H. Park, D. H. Lee, J. K. Cho, and M. Inoue, Magneto-optical spatial light modulator for volumetric digital recording system, Intern. Symp. on Optical Memory 2001 (ISOM 2001), Taiwan, October (2001). 8. H. Horimai, M. Kinoshita, P. B. Lim and M. Inoue, Volumetric optical disk storage system with the polarization-collinear holography technique, Intern Symp. on Optical Memory 2001 (ISOM 2001), Taiwan, Octorber (2001). 9. # 2 ^7" h f #:#, 8 ^ (2001). 5. 2. 2 tmfC ]) V' b 1. J. H. Park and J. K. Cho, Design of drive line shape for reflective magneto-optic spatial light modulator with high sensitivity by computer simulation, J. Magn. Soc. Korea, vol.10, No.3 (2000) pp. 2. J. H. Park, J. K. Cho, and M. Inoue, Numerical analysis of magneto-optic performance of one-dimensional magnetophotonic crystal, J. Magn. Soc. Korea, vol.10, No. 3 (2000) pp. 3. J. H. Park, J. K. Cho, M. Inoue and H. Horimai, One-dimensional magnetophotonic crystal spatial light modulator, Technical Report of IEE Jpn., MAG- (2000) pp. 147#R^#70E#%^## (2001) pp. 17-21. s. 3 9 ^ h — 166 1. #±m%, he 2000-164131 (2000). 2. #±3fcW. #%#, HE 2000-171 198 (2000). 3. ^6u:(c HE 2000-238326 (2000). ^btXlZ^ltlglE^J, HE 2000-31 1466 (2000). 5. # ##, H E 2000-335478 (2000). 5 . 4 It#, — f^b f ^ h b — b oTjy 9 TV'%v^ r^ y h 3 1 d (D ffl 2E £ fi , 1 7 ±# (#: # S # ±, #^0 %#y, ^±, M X y , ^#b±, ±1% m^x#, XR|%##^##, Xg^:, #xy:, ±imxy, ^xy, %#^y, m^y, mmxy, #M@x#y, it&xy), 26A# (#^m%#K# tbf—, ^^T-z^y^, NHK, NTT, ^yh^^y^ y^ —/ SONY, x#m#, b-Y-y, TDK, My-, ^:^:, 8^-7^-kz^, ^±^%7^zkA, / %r$) D , yb^zix#:#* oyy7/%(c:&^< @y%##E#^@ - 5.12 KL^dc 12 — 167 — 5.14 b (4# ro @ * # ~T — "7 • W 7= n ^'7 7 T ^ (1) High speed high capacity holographicdata storage system demonstration ¥hE 12 # 6 B 19 0 Lambertus Hesselink (Stanford Univ.): 13:00-18:30 1 ^ 7 (2) Holographic memories Fai Mok (Holoplex): (3) High density, high performance optical data storage via volume holography liability at last? 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