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Microscale Diagnostic Techniques.Pdf K.S. Breuer (Ed.) Microscale Diagnostic Techniques Kenneth S. Breuer (Ed.) Microscale Diagnostic Techniques With 117 Figures Editor Prof. Kenneth S. Breuer Brown University Division of Engineering, Box D 182HopeStreet Providence, RI 02912 USA ISBN 3-540-23099-8 Springer Berlin Heidelberg New York Library of Congress Control Number: 2004113698 This work is subject to copyright. All rights are reserved, whether the whole or part of the material is concerned, specifically the rights of translation, reprinting, reuse of illustrations, recitation, broadcasting, reproduction on microfilm or in other ways, and storage in data banks.Duplicationofthispublicationorpartsthereofispermittedonlyundertheprovisions of the German Copyright Law of September 9, 1965, in its current version, and permission for use must always be obtained from Springer-Verlag. Violations are liable to prosecution under German Copyright Law. SpringerisapartofSpringerScience+Business Media springeronline.com c Springer-Verlag Berlin Heidelberg 2005 Printed in Germany The use of general descriptive names, registered names, trademarks, etc. in this publication does not imply, even in the absence of a specific statement, that such names are exempt from the relevant protective laws and regulations and therefore free for general use. Typesetting: Data conversion by the authors. Final processing by PTP-Berlin Protago-TEX-Production GmbH, Germany Cover-Design: design & production GmbH, Heidelberg Printed on acid-free paper 62/3020Yu-543210 Preface The fields of micro- and nanotechnology have emerged over the past decade as a major focus of modern scientific and engineering research and technology. Driven by advances in microfabrication, the investigation, manipulation and engi- neering of systems characterized by micrometer and, more recently, nanometer scales has become commonplace throughout all technical disciplines. With these developments, an entirely new collection of experimental diagnostic techniques have been developed to explore and characterize such systems. The purpose of this book is to highlight some of the most innovative and powerful developments in micron-scale diagnostics that have been presented over the past few years, and to provide a resource for researchers and scientists interested in learning about the techniques themselves – their capabilities and limitations. As with any field at the leading edge of modern science, each day brings new ideas, and by the time these chapters were written and published, many new im- provements have been suggested, implemented. Nevertheless we hope that the contributions here will continue to have some value to researchers in the new fron- tier of micron and nano-scale science and technology. I must first and foremost thank the authors of each chapter who generously agreed to invest the considerable effort required to document their expertise. This effort started over two years ago and most of the contributions were submitted by the summer of 2003. It has taken this long to finish the formatting, assemble the various permissions and get the book to the printer. During this delay (which was due only to my own inefficiency busy schedule) , the chapter authors have been unreasonably patient, and I thank them for their good nature! Last, but not least, I must extend a special thanks to Shankar Devasenathipathy, who helped me with the final editing chores and gave that extra push to see the book out of the door. Providence RI Kenny Breuer June 2004 Table of Contents 1. Microrheology ................................................................................................... 1 M.L. Gardel, M.T. Valentine, and D.A. Weitz 1.1 Introduction............................................................................................ 1 1.2 Active Microrheology Methods ............................................................. 2 1.2.1 Magnetic Manipulation Techniques ............................................... 3 1.2.2 Optical Tweezers Measurements.................................................... 8 1.2.3 Atomic Force Microscopy Techniques......................................... 14 1.3 Passive Microrheology Methods.......................................................... 18 1.4 Practical Applications of One-Particle Microrheology ........................ 28 1.5 Two-Particle Microrheology................................................................ 30 1.6 Summary.............................................................................................. 33 Appendix: Descriptions of Experimental Apparati..................................... 34 A.1 Dynamic Light Scattering............................................................... 35 A.2 Diffusing Wave Spectroscopy ........................................................ 38 A.3 Video Microscopy .......................................................................... 39 & A.4 Obtaining G *(ω ) from ∆rt2 () .................................................. 42 References................................................................................................... 44 2. Micron-Resolution Particle Image Velocimetry ........................................... 51 S.T. Wereley and C.D. Meinhart 2.1 Introduction.......................................................................................... 51 2.2 Theory of µPIV .................................................................................... 53 2.2.1 In-Plane Spatial Resolution Limits............................................... 53 2.2.2 Out-of-Plane Spatial Resolution ................................................... 55 2.2.3 Particle Visibility.......................................................................... 57 2.3 Particle/Fluid Dynamics....................................................................... 60 2.3.1 Brownian Motion.......................................................................... 62 2.3.2 Saffman Effect.............................................................................. 65 2.4 Typical Micro-PIV Hardware Implementation .................................... 66 2.5 Algorithms and Processing for µPIV ................................................... 67 2.5.1 Processing Methods Most Suitable for µPIV ............................... 68 2.5.2 Overlapping of LID-PIV Recordings ............................................ 68 2.5.3 Correlation Averaging Method..................................................... 70 2.5.4 Processing Methods Suitable for Both Micro/Macro PIV............ 73 2.5.5 Central Difference Interrogation.................................................... 74 2.5.6 Image Correction Technique ........................................................ 75 2.6 Application Examples of µPIV ............................................................ 76 2.6.1 Flow in a Microchannel................................................................ 76 2.6.2 Flow in a Micronozzle................................................................... 82 2.6.3 Flow Around Blood Cell ............................................................... 85 VIII Table of Contents 2.6.4 Flow in Microfluidic Biochip........................................................ 87 2.7 Extensions of the µPIV Technique ...................................................... 89 2.7.1 Microfluidic Nanoscope ............................................................... 90 2.7.2 Micro-Particle Image Thermometry............................................. 96 2.7.3 Infrared µPIV .............................................................................. 107 2.8 Conclusions........................................................................................ 109 References................................................................................................. 110 3. Electrokinetic Flow Diagnostics................................................................... 113 S. Devasenathipathy and J.G. Santiago 3.1 Theory................................................................................................ 114 3.1.1 Electroosmosis............................................................................ 115 3.1.2 Electrophoresis ........................................................................... 119 3.1.3 Similarity Between Electric Field and Velocity Field for Fluid . 120 3.2 Diagnostics.......................................................................................... 121 3.2.1 Capillary Electrophoresis: Electrokinetic System Background.. 121 3.2.2 Simple Dye Visualization........................................................... 130 3.2.3 Photobleached Fluorescence Visualization ................................. 133 3.3 Caged-Fluorescence Visualization...................................................... 137 3.4 Particle Imaging Techniques............................................................... 141 3.5 Concluding Remarks.......................................................................... 149 References................................................................................................. 150 4. Micro- and Nano-Scale Diagnostic Techniques for Thermometry and Thermal Imaging of Microelectronic and Data Storage Devices........... 155 M. Asheghi and Y. Yang 4.1 Introduction ....................................................................................... 155 4.2 State-Of-Art Technologies and Relevant Thermal Phenomenon in Semiconductor Devices................................................... 157 4.3 State-Of-Art
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