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Safety Data Sheet Material Name: , ADSORBED SDS ID: 00232050

* * *Section 1 - IDENTIFICATION* * *

Product Identifier: PHOSPHINE, ADSORBED Trade Names/Synonyms HYDROGEN PHOSPHIDE; PHOSPHORUS TRIHYDRIDE Chemical Family hydrides Product Description This gas may be packaged in an SDS®, SAGE® or PDS ® gas source package. This cylinder contains an adsorbent material that allows gas contents to be at sub-atmospheric pressures. There is no possibility of contact or exposure to the adsorbent. This SDS addresses only the hazards of the gas. Recommended Use semi-conductor fabrication, general synthetic chemical Restrictions on Use None known.

Entegris, Inc. 129 Concord Road Building 2 Billerica, MA 01821 USA

Telephone Number: +1-952-556-4181 Telephone Number: +1-800-394-4083 (toll free within North America)

Emergency Telephone Number: CHEMTREC - U.S. - 1-800-424-9300 CHEMTREC - Intl. - 1-703-527-3887

Email of Competent Person [email protected] * * *Section 2 - HAZARDS IDENTIFICATION* * * Classification in accordance with 29 CFR 1910.1200 Flammable gas, Category 1 Acute Toxicity (Inhalation), Category 1 Skin Corrosion / Irritation, Category 1 Eye Damage / Irritation, Category 1 Specific Target Organ Toxicity - Single Exposure, Category 1 (cardiovascular system, digestive tract, liver, nervous system, and respiratory system) ______Page 1 of 10 Issue Date 07/23/15 Revision 3.0000 Print Date: 08/12/15

Safety Data Sheet Material Name: PHOSPHINE, ADSORBED SDS ID: 00232050

Specific Target Organ Toxicity - Repeated Exposure, Category 1 (nervous system and respiratory system) Hazardous to the Aquatic Environment - Acute Hazard, Category 1 GHS LABEL ELEMENTS Symbol(s)

Signal Word DANGER Hazard Statement(s) Extremely flammable gas Fatal if inhaled Causes severe skin burns and eye damage Causes damage to cardiovascular system, digestive tract, liver, nervous system, and respiratory system. Causes damage to nervous system and respiratory system through prolonged or repeated exposure. Very toxic to aquatic life Precautionary Statement(s) Prevention Keep away from heat, sparks, open flame, and hot surfaces - No smoking. Do not breathe gas. Use only outdoors or in a well-ventilated area. Wear respiratory protection. Wash hands thoroughly after handling. Wear protective gloves/clothing and eye/face protection. Do not eat, drink, or smoke when using this product. Avoid release to the environment. Response Leaking gas fire: Do not extinguish, unless leak can be stopped safely. Eliminate all ignition sources if safe to do so. IF exposed: Call a POISON CENTER or doctor/physician. IF INHALED: Remove person to fresh air and keep comfortable for breathing. Immediately call a POISON CENTER or doctor/physician. Specific treatment is urgent, see first aid section of Safety Data Sheet. IF ON SKIN (or hair): Take off immediately all contaminated clothing. Rinse skin with water/shower. Wash contaminated clothing before reuse. Immediately call a POISON CENTER or doctor/physician. IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing. Immediately call a POISON CENTER or doctor/physician. IF SWALLOWED: Rinse mouth. DO NOT induce vomiting. Immediately call a POISON CENTER or doctor/physician. Collect spillage. Storage Store in a well-ventilated place. Keep container tightly closed. Store locked up. Disposal Dispose in accordance with all applicable regulations. Hazard(s) Not Otherwise Classified None known. * * *Section 3 - COMPOSITION / INFORMATION ON INGREDIENTS* * *

CAS Component Percent 7803-51-2 PHOSPHINE 100

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Safety Data Sheet Material Name: PHOSPHINE, ADSORBED SDS ID: 00232050

There are no additional ingredients present which, within the current knowledge of the supplier and in the concentrations applicable, are classified as hazardous to health or the environment and hence require reporting in this section. Occupational exposure limits, if available, are listed in Section 8. * * *Section 4 - FIRST AID MEASURES* * * Description of Necessary Measures Inhalation If adverse effects occur, remove to uncontaminated area. Give artificial respiration if not breathing. If breathing is difficult, oxygen should be administered by qualified personnel. Get immediate medical attention. Skin Wash skin with soap and water for at least 15 minutes while removing contaminated clothing and shoes. Get immediate medical attention. Thoroughly clean and dry contaminated clothing and shoes before reuse. Destroy contaminated shoes. If frostbite or freezing occur, immediately flush with plenty of lukewarm water (100-105 F, 38-41 C). DO NOT USE HOT WATER. If warm water is not available, gently wrap affected parts in blankets. Get immediate medical attention. Eyes Immediately flush eyes with plenty of water for at least 60 minutes. Remove contact lenses, if present and easy to do. Continue rinsing. Then get immediate medical attention. Ingestion If swallowed, do not induce vomiting. Rinse mouth. Get immediate medical attention. Most Important Symptoms/Effects Acute Fatal if inhaled, respiratory tract burns, skin burns, eye burns, mucous membrane burns, cardiovascular system damage, digestive tract damage, liver damage, nervous system damage, respiratory system damage Delayed nervous system damage, respiratory system damage Indication of Immediate Medical Attention and Special Treatment

For inhalation, consider oxygen. Avoid gastric lavage or emesis. * * *Section 5 - FIRE FIGHTING MEASURES* * * Suitable Extinguishing Media regular dry chemical, carbon dioxide, water spray, -resistant foam Let burn unless leak can be stopped immediately. Large fires: water spray or fog, alcohol-resistant foam Unsuitable Extinguishing Media Do not use halogenated extinguishing agents. Specific Hazards Arising from the Chemical Severe fire hazard. May ignite on exposure to air. Vapor/air mixtures are explosive. Containers may rupture or explode if exposed to heat. Hazardous Combustion Products Thermal decomposition or combustion products: oxides of phosphorus

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Safety Data Sheet Material Name: PHOSPHINE, ADSORBED SDS ID: 00232050

Fire Fighting Measures Move container from fire area if it can be done without risk. Cool containers with water spray until well after the fire is out. Stay away from the ends of tanks. For fires in cargo or storage area: Cool containers with water from unmanned hose holder or monitor nozzles until well after fire is out. If this is impossible then take the following precautions: Keep unnecessary people away, isolate hazard area and deny entry. Let the fire burn. Withdraw immediately in case of rising sound from venting safety device or any discoloration of tanks due to fire. For tank, rail car or tank truck: Evacuation radius: 800 meters (1/2 mile). Do not attempt to extinguish fire unless flow of material can be stopped first. Flood with fine water spray. Cool containers with water. Apply water from a protected location or from a safe distance. Avoid inhalation of material or combustion by-products. Stay upwind and keep out of low areas. Special Protective Equipment and Precautions for Firefighters Wear full protective fire fighting gear including self contained breathing apparatus (SCBA) for protection against possible exposure. * * *Section 6 - ACCIDENTAL RELEASE MEASURES* * * Personal Precautions, Protective Equipment and Emergency Procedures Wear personal protective clothing and equipment. Avoid release to the environment. Collect spillage. Notify Local Emergency Planning Committee and State Emergency Response Commission for release greater than or equal to RQ (U.S. SARA Section 304). If release occurs in the U.S. and is reportable under CERCLA Section 103, notify the National Response Center at (800)424-8802 (USA) or (202)426-2675 (USA). Methods and Materials for Containment and Cleaning Up Avoid heat, flames, sparks and other sources of ignition. Stop leak if possible without personal risk. Reduce vapors with water spray. Keep unnecessary people away, isolate hazard area and deny entry. Remove sources of ignition. Ventilate closed spaces before entering. * * *Section 7 - HANDLING AND STORAGE* * * Precautions for Safe Handling Keep away from heat, sparks, open flame, and hot surfaces - No smoking. Do not breathe gas. Use only outdoors or in a well-ventilated area. Wear respiratory protection. Wash thoroughly after handling. Wear protective gloves/clothing and eye/face protection. Do not eat, drink, or smoke when using this product. Subject to handling regulations: U.S. OSHA 29 CFR 1910.119. Conditions for Safe Storage, including any Incompatibilities Store and handle in accordance with all current regulations and standards. Store in a tightly closed container. Protect from sunlight. May ignite on exposure to air. Store in a cool, dry place. Store in a well-ventilated area. Avoid contact with water or moisture. Avoid heat, flames, sparks and other sources of ignition. Store locked up. Protect from physical damage. Subject to storage regulations: U.S. OSHA 29 CFR 1910.101. Notify State Emergency Response Commission for storage or use at amounts greater than or equal to the TPQ (U.S. EPA SARA Section 302). SARA Section 303 requires facilities storing a material with a TPQ to participate in local emergency response planning (U.S. EPA 40 CFR 355 Part B). Keep separated from incompatible substances.

Incompatibilities: acids, halocarbons, halogens, metals, oxidizing materials, oxygen * * *Section 8 - EXPOSURE CONTROLS / PERSONAL PROTECTION* * * The following constituents are the only constituents of the product which have a PEL, TLV or other recommended exposure limit. At this time, the other constituents have no known exposure limits.

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Safety Data Sheet Material Name: PHOSPHINE, ADSORBED SDS ID: 00232050

Component Exposure Limits PHOSPHINE (7803-51-2) OSHA (final): 0.3 ppm TWA; 0.4 mg/m3 TWA OSHA (vacated): 0.3 ppm TWA; 0.4 mg/m3 TWA 1 ppm STEL; 1 mg/m3 STEL ACGIH: 0.3 ppm TWA 1 ppm STEL NIOSH: 0.3 ppm TWA; 0.4 mg/m3 TWA 1 ppm STEL; 1 mg/m3 STEL Europe: 0.1 ppm TWA; 0.14 mg/m3 TWA 0.2 ppm STEL; 0.28 mg/m3 STEL Component Biological Limit Values There are no biological limit values for any of this product's components. IDLH 50 ppm Appropriate Engineering Controls Ventilation equipment should be explosion-resistant if explosive concentrations of material are present. Provide local exhaust or process enclosure ventilation system. Ensure compliance with applicable exposure limits. Individual Protection Measures, such as Personal Protective Equipment Eyes/Face Protection Wear splash resistant safety goggles with a faceshield. Contact lenses should not be worn. Provide an emergency eye wash fountain and quick drench shower in the immediate work area. Skin Protection Wear appropriate protective, cold insulating clothing. Glove Recommendations Wear insulated gloves. Protective Materials Responder®, Tychem® BR/LV, Tychem® TK Respiratory Protection The following respirators and maximum use concentrations are drawn from NIOSH and/or OSHA. 3 ppm Any supplied-air respirator. 7.5 ppm Any supplied-air respirator operated in a continuous-flow mode. 15 ppm Any air-purifying full-facepiece respirator (gas mask) with a chin-style, front-mounted or back-mounted canister providing protection against the compound of concern. Any self-contained breathing apparatus with a full facepiece. Any supplied-air respirator with a full facepiece. 50 ppm Any supplied-air respirator operated in a pressure-demand or other positive-pressure mode. Emergency or planned entry into unknown concentrations or IDLH conditions - Any self-contained breathing apparatus that has a full facepiece and is operated in a pressure-demand or other positive-pressure mode. Any supplied-air respirator with a full facepiece that is operated in a pressure-demand or other positive-pressure mode in combination with an auxiliary self-contained breathing apparatus operated in pressure-demand or other positive-pressure mode. Escape - ______Page 5 of 10 Issue Date 07/23/15 Revision 3.0000 Print Date: 08/12/15

Safety Data Sheet Material Name: PHOSPHINE, ADSORBED SDS ID: 00232050

Any air-purifying full-facepiece respirator (gas mask) with a chin-style, front-mounted or back-mounted canister providing protection against the compound of concern. Any appropriate escape-type, self-contained breathing apparatus. For Unknown Concentrations or Immediately Dangerous to Life or Health - Any supplied-air respirator with a full facepiece that is operated in a pressure-demand or other positive-pressure mode in combination with an auxiliary self-contained breathing apparatus operated in pressure-demand or other positive-pressure mode. Any self-contained breathing apparatus that has a full facepiece and is operated in a pressure-demand or other positive-pressure mode. * * *Section 9 - PHYSICAL AND CHEMICAL PROPERTIES* * *

Physical State: Gas Appearance: colorless gas Color: colorless Physical Form: gas Odor: fishy odor Odor Threshold: Not available pH: neutral in solution Melting/Freezing Point: -134 °C Boiling Point: -87.7 °C Flash Point: Not applicable Decomposition Temp.: 375-593 °C Evaporation Rate: Not available LEL: 1 % UEL: 98 % by volume (estimated) Vapor Pressure: 607 psia @20 °C Vapor Density (air = 1): 1.2 Density: 0.09 lbs/ft3 Water : slightly soluble Log Kow: Not available Auto Ignition Temp.: 37.8 °C : Not available Triple Point: -133.8 °C Volatility: Not available Molecular Weight: 34.00 Molecular Formula: P-H3 Coefficient of Water/Oil Dist: Not available Flammability (solid, gas): Flammable

Other Property Information No additional information is available. Solubility Soluble: alcohol, ether, cuprous chloride solutions, cyclohexanol * * *Section 10 - STABILITY AND REACTIVITY* * * Chemical Stability May ignite on exposure to air. Possibility of Hazardous Reactions Will not polymerize. Conditions to Avoid Avoid heat, flames, sparks and other sources of ignition. Minimize contact with material. Containers may rupture or explode if exposed to heat. Incompatible Materials acids, halocarbons, halogens, metals, oxidizing materials, oxygen Hazardous Decomposition Thermal decomposition or combustion products: oxides of phosphorus

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Safety Data Sheet Material Name: PHOSPHINE, ADSORBED SDS ID: 00232050

* * *Section 11 - TOXICOLOGICAL INFORMATION* * * Acute and Chronic Toxicity Component Analysis - LD50/LC50 The components of this material have been reviewed in various sources and the following selected endpoints are published: PHOSPHINE (7803-51-2) Inhalation LC50 Rat 11 ppm 4 h RTECS Acute Toxicity (selected) The components of this material have been reviewed, and RTECS publishes the following endpoints: PHOSPHINE (7803-51-2) Inhalation: 11 ppm/4 hour Inhalation Rat LC50 Acute Toxicity Level PHOSPHINE (7803-51-2) Highly Toxic: inhalation Information on Likely Routes of Exposure Inhalation burns, cardiovascular system damage, digestive disorders, liver damage, nervous system damage, respiratory system damage Ingestion burns Skin Contact burns Eye Contact burns Immediate Effects Fatal if inhaled, respiratory tract burns, skin burns, eye burns, mucous membrane burns, cardiovascular system damage, digestive tract damage, liver damage, nervous system damage, respiratory system damage Delayed Effects nervous system damage, respiratory system damage Medical Conditions Aggravated by Exposure None known. Irritation/Corrosivity Data respiratory tract burns, skin burns, eye burns, mucous membrane burns RTECS Irritation The components of this material have been reviewed and RTECS publishes no data as of the date on this document. Local Effects PHOSPHINE (7803-51-2) Irritant: inhalation Target Organs PHOSPHINE (7803-51-2) central nervous system Respiratory Sensitization No data available. Dermal Sensitization No data available.

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Safety Data Sheet Material Name: PHOSPHINE, ADSORBED SDS ID: 00232050

Carcinogenicity Component Carcinogenicity ACGIH, IARC, OSHA, NIOSH, and NTP lists have been checked for selected similar materials or those components with CAS registry numbers. Only those components found on any of these lists will be shown below. A component not appearing was not found on any of the lists and is not considered to be a carcinogen by these sources. The EPA has classified phosphine as D - not classifiable as to human carcinogenicity. Mutagenic Data Both positive and negative results have been reported in human and animal tests, however, generally considered not to be mutagenic. Reproductive Effects Data No reproductive effects were seen in two inhalation studies using rats. Tumorigenic Data No data available. Specific Target Organ Toxicity - Single Exposure respiratory system, cardiovascular system, digestive tract, liver, nervous system Specific Target Organ Toxicity - Repeated Exposure nervous system, respiratory system Aspiration Hazard Not applicable. * * *Section 12 - ECOLOGICAL INFORMATION* * * Ecotoxicity Very toxic to aquatic life. Component Analysis - Aquatic Toxicity Data may be available for the product or its components (if applicable, see below). Abiotic Degradation This substance is inert, but will oxidize under influence of radiation and UV light. Persistence and Degradability No data available. Bioaccumulative Potential No data available. Mobility May bind to sub-surface soil. Other Adverse Effects Is expected to volatilize rapidly from water and both moist and dry soil. * * *Section 13 - DISPOSAL CONSIDERATIONS* * * Disposal Methods Dispose in accordance with all applicable regulations. Component Waste Numbers PHOSPHINE (7803-51-2) RCRA: waste number P096

* * *Section 14 - TRANSPORT INFORMATION* * * US DOT Information Shipping Name: Phosphine, adsorbed

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Safety Data Sheet Material Name: PHOSPHINE, ADSORBED SDS ID: 00232050

UN/NA #: UN3525 Hazard Class: 2.3 Required Label(s): 2.3, 2.1 Additional Info.: Inhalation Hazard Zone A

Component Marine Pollutants (DOT) This material does not contain any chemicals listed on the Hazardous Materials Table required by US DOT to be identified as a marine pollutant. IATA Information Shipping Name: Phosphine, absorbed UN #: UN3525 Hazard Class: 2.3 Required Label(s): 2.3, 2.1

IMDG Information Shipping Name: Phosphine, Adsorbed UN #: UN3525 Hazard Class: 2.3 Required Label(s): 2.3, 2.1

Component Marine Pollutants (IMDG) This material does not contain any chemicals listed in Chapter 3.2 - Dangerous Good List - required by IMDG to be identified as a marine pollutant. Marine Pollutant(s) based on 2.9.3 of the UN Model Regulations PHOSPHINE * * *Section 15 - REGULATORY INFORMATION* * * Component Analysis U.S. Federal Regulations This material contains one or more of the following chemicals required to be identified under SARA Sections 302/304 (40 CFR 355 Appendix A), SARA Section 313 (40 CFR 372.65), CERCLA (40 CFR 302.4), TSCA 12(b), and/or require an OSHA process safety plan. PHOSPHINE (7803-51-2) SARA 302/304: 500 lb TPQ 100 lb EPCRA RQ SARA 313: 1.0 % de minimis concentration CERCLA: 100 lb final RQ; 45.4 kg final RQ OSHA (safety): 100 lb TQ SARA 311/312 Hazardous Categories

Acute Health: Yes Chronic Health: Yes Fire: Yes Pressure: No Reactive: Yes U.S. State Regulations The following components appear on one or more of the following state hazardous substances lists: Component CAS CA MA MN NJ PA PHOSPHINE 7803-51-2 Yes Yes Yes Yes Yes

Not regulated under California Proposition 65 U.S. Inventory (TSCA) Listed on inventory.

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Safety Data Sheet Material Name: PHOSPHINE, ADSORBED SDS ID: 00232050

Component Analysis - Inventory Component CAS US PHOSPHINE 7803-51-2 Yes Other U.S. Regulations This material is controlled by the U.S. Department of Commerce under ECCN 3C004. The material is controlled for NS2 & AT1 purposes. Check country chart for export license requirements. Contact the ATMI Trade Compliance Department for shipments of the material made outside the USA. EU - REACH (1907/2006) - Article 59(1) Candidate List of Substances for Eventual Inclusion in Annex XIV No component(s) of this material are listed. EU - REACH (1907/2006) - Annex XIV List of Substances Subject to Authorisation No component(s) of this material are listed. EU - REACH (1907/2006) - Annex XVII Restrictions of Certain Dangerous Substances, Mixtures and Articles No component(s) of this material are listed. * * *Section 16 - OTHER INFORMATION* * *

NFPA Ratings: Health: 4 Fire: 4 Reactivity: 2 Hazard Scale: 0 = Minimal 1 = Slight 2 = Moderate 3 = Serious 4 = Severe

SDS Update: 6/12/2015 Key / Legend ACGIH - American Conference of Governmental Industrial Hygienists; BOD - Biochemical Oxygen Demand; C - Celsius; CAS - Chemical Abstracts Service; CERCLA - Comprehensive Environmental Response, Compensation, and Liability Act; DOT - Department of Transportation; EPA - Environmental Protection Agency; F - Fahrenheit; IARC - International Agency for Research on Cancer; IDLH - Immediately Dangerous to Life and Health; IMDG - International Maritime Dangerous Goods; Kow - /water partition coefficient; LEL - Lower Explosive Limit; LOLI - List Of LIsts™ - ChemADVISOR's Regulatory Database; NFPA - National Fire Protection Agency; NIOSH - National Institute for Occupational Safety and Health; NJTSR - New Jersey Trade Secret Registry; NTP - National Toxicology Program; OSHA - Occupational Safety and Health Administration; RCRA - Resource Conservation and Recovery Act; RTECS - Registry of Toxic Effects of Chemical Substances®; SARA - Superfund Amendments and Reauthorization Act; STEL - Short-term Exposure Limit; TSCA - Toxic Substances Control Act; TWA - Time Weighted Average; UEL - Upper Explosive Limit; US - United States SDS History 6/12/2015 - Update to Section(s) 1, 2, 4, 11, and 14 Disclaimer The information in this (Material) Safety Data Sheet ("(M)SDS") is believed to be current and accurate as of the time of shipment of the product by Entegris. Entegris makes no warranties, express or implied, with respect to such information, including, without limitation, the implied warranties of merchantability and fitness for a particular purpose. Entegris assumes no liability for any loss or injury which may result from the use of the information contained in this (M)SDS. The chemical, physical and toxicological properties of the Entegris product described in this (M)SDS have not been thoroughly investigated. Users are responsible for exercising due care in using the Entegris product, and for conducting their own investigation to determine whether the product is fit for their particular purpose and suitable for their method of use or application. It is the user's responsibility to ensure that its activities comply with all applicable laws and regulations. Entegris is a registered trademark of Entegris Inc. or an affiliated company. © 2015 Entegris Inc. or affiliated company. All rights reserved.

End of Sheet 00232050

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