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Phosphine, Adsorbed Sds Id: 00232050 Safety Data Sheet Material Name: PHOSPHINE, ADSORBED SDS ID: 00232050 * * *Section 1 - IDENTIFICATION* * * Product Identifier: PHOSPHINE, ADSORBED Trade Names/Synonyms HYDROGEN PHOSPHIDE; PHOSPHORUS TRIHYDRIDE Chemical Family hydrides Product Description This gas may be packaged in an SDS®, SAGE® or PDS ® gas source package. This cylinder contains an adsorbent material that allows gas contents to be at sub-atmospheric pressures. There is no possibility of contact or exposure to the adsorbent. This SDS addresses only the hazards of the gas. Recommended Use semi-conductor fabrication, general synthetic chemical Restrictions on Use None known. Entegris, Inc. 129 Concord Road Building 2 Billerica, MA 01821 USA Telephone Number: +1-952-556-4181 Telephone Number: +1-800-394-4083 (toll free within North America) Emergency Telephone Number: CHEMTREC - U.S. - 1-800-424-9300 CHEMTREC - Intl. - 1-703-527-3887 Email of Competent Person [email protected] * * *Section 2 - HAZARDS IDENTIFICATION* * * Classification in accordance with 29 CFR 1910.1200 Flammable gas, Category 1 Acute Toxicity (Inhalation), Category 1 Skin Corrosion / Irritation, Category 1 Eye Damage / Irritation, Category 1 Specific Target Organ Toxicity - Single Exposure, Category 1 (cardiovascular system, digestive tract, liver, nervous system, and respiratory system) ____________________________________________________________ Page 1 of 10 Issue Date 07/23/15 Revision 3.0000 Print Date: 08/12/15 Safety Data Sheet Material Name: PHOSPHINE, ADSORBED SDS ID: 00232050 Specific Target Organ Toxicity - Repeated Exposure, Category 1 (nervous system and respiratory system) Hazardous to the Aquatic Environment - Acute Hazard, Category 1 GHS LABEL ELEMENTS Symbol(s) Signal Word DANGER Hazard Statement(s) Extremely flammable gas Fatal if inhaled Causes severe skin burns and eye damage Causes damage to cardiovascular system, digestive tract, liver, nervous system, and respiratory system. Causes damage to nervous system and respiratory system through prolonged or repeated exposure. Very toxic to aquatic life Precautionary Statement(s) Prevention Keep away from heat, sparks, open flame, and hot surfaces - No smoking. Do not breathe gas. Use only outdoors or in a well-ventilated area. Wear respiratory protection. Wash hands thoroughly after handling. Wear protective gloves/clothing and eye/face protection. Do not eat, drink, or smoke when using this product. Avoid release to the environment. Response Leaking gas fire: Do not extinguish, unless leak can be stopped safely. Eliminate all ignition sources if safe to do so. IF exposed: Call a POISON CENTER or doctor/physician. IF INHALED: Remove person to fresh air and keep comfortable for breathing. Immediately call a POISON CENTER or doctor/physician. Specific treatment is urgent, see first aid section of Safety Data Sheet. IF ON SKIN (or hair): Take off immediately all contaminated clothing. Rinse skin with water/shower. Wash contaminated clothing before reuse. Immediately call a POISON CENTER or doctor/physician. IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing. Immediately call a POISON CENTER or doctor/physician. IF SWALLOWED: Rinse mouth. DO NOT induce vomiting. Immediately call a POISON CENTER or doctor/physician. Collect spillage. Storage Store in a well-ventilated place. Keep container tightly closed. Store locked up. Disposal Dispose in accordance with all applicable regulations. Hazard(s) Not Otherwise Classified None known. * * *Section 3 - COMPOSITION / INFORMATION ON INGREDIENTS* * * CAS Component Percent 7803-51-2 PHOSPHINE 100 ____________________________________________________________ Page 2 of 10 Issue Date 07/23/15 Revision 3.0000 Print Date: 08/12/15 Safety Data Sheet Material Name: PHOSPHINE, ADSORBED SDS ID: 00232050 There are no additional ingredients present which, within the current knowledge of the supplier and in the concentrations applicable, are classified as hazardous to health or the environment and hence require reporting in this section. Occupational exposure limits, if available, are listed in Section 8. * * *Section 4 - FIRST AID MEASURES* * * Description of Necessary Measures Inhalation If adverse effects occur, remove to uncontaminated area. Give artificial respiration if not breathing. If breathing is difficult, oxygen should be administered by qualified personnel. Get immediate medical attention. Skin Wash skin with soap and water for at least 15 minutes while removing contaminated clothing and shoes. Get immediate medical attention. Thoroughly clean and dry contaminated clothing and shoes before reuse. Destroy contaminated shoes. If frostbite or freezing occur, immediately flush with plenty of lukewarm water (100-105 F, 38-41 C). DO NOT USE HOT WATER. If warm water is not available, gently wrap affected parts in blankets. Get immediate medical attention. Eyes Immediately flush eyes with plenty of water for at least 60 minutes. Remove contact lenses, if present and easy to do. Continue rinsing. Then get immediate medical attention. Ingestion If swallowed, do not induce vomiting. Rinse mouth. Get immediate medical attention. Most Important Symptoms/Effects Acute Fatal if inhaled, respiratory tract burns, skin burns, eye burns, mucous membrane burns, cardiovascular system damage, digestive tract damage, liver damage, nervous system damage, respiratory system damage Delayed nervous system damage, respiratory system damage Indication of Immediate Medical Attention and Special Treatment For inhalation, consider oxygen. Avoid gastric lavage or emesis. * * *Section 5 - FIRE FIGHTING MEASURES* * * Suitable Extinguishing Media regular dry chemical, carbon dioxide, water spray, alcohol-resistant foam Let burn unless leak can be stopped immediately. Large fires: water spray or fog, alcohol-resistant foam Unsuitable Extinguishing Media Do not use halogenated extinguishing agents. Specific Hazards Arising from the Chemical Severe fire hazard. May ignite on exposure to air. Vapor/air mixtures are explosive. Containers may rupture or explode if exposed to heat. Hazardous Combustion Products Thermal decomposition or combustion products: oxides of phosphorus ____________________________________________________________ Page 3 of 10 Issue Date 07/23/15 Revision 3.0000 Print Date: 08/12/15 Safety Data Sheet Material Name: PHOSPHINE, ADSORBED SDS ID: 00232050 Fire Fighting Measures Move container from fire area if it can be done without risk. Cool containers with water spray until well after the fire is out. Stay away from the ends of tanks. For fires in cargo or storage area: Cool containers with water from unmanned hose holder or monitor nozzles until well after fire is out. If this is impossible then take the following precautions: Keep unnecessary people away, isolate hazard area and deny entry. Let the fire burn. Withdraw immediately in case of rising sound from venting safety device or any discoloration of tanks due to fire. For tank, rail car or tank truck: Evacuation radius: 800 meters (1/2 mile). Do not attempt to extinguish fire unless flow of material can be stopped first. Flood with fine water spray. Cool containers with water. Apply water from a protected location or from a safe distance. Avoid inhalation of material or combustion by-products. Stay upwind and keep out of low areas. Special Protective Equipment and Precautions for Firefighters Wear full protective fire fighting gear including self contained breathing apparatus (SCBA) for protection against possible exposure. * * *Section 6 - ACCIDENTAL RELEASE MEASURES* * * Personal Precautions, Protective Equipment and Emergency Procedures Wear personal protective clothing and equipment. Avoid release to the environment. Collect spillage. Notify Local Emergency Planning Committee and State Emergency Response Commission for release greater than or equal to RQ (U.S. SARA Section 304). If release occurs in the U.S. and is reportable under CERCLA Section 103, notify the National Response Center at (800)424-8802 (USA) or (202)426-2675 (USA). Methods and Materials for Containment and Cleaning Up Avoid heat, flames, sparks and other sources of ignition. Stop leak if possible without personal risk. Reduce vapors with water spray. Keep unnecessary people away, isolate hazard area and deny entry. Remove sources of ignition. Ventilate closed spaces before entering. * * *Section 7 - HANDLING AND STORAGE* * * Precautions for Safe Handling Keep away from heat, sparks, open flame, and hot surfaces - No smoking. Do not breathe gas. Use only outdoors or in a well-ventilated area. Wear respiratory protection. Wash thoroughly after handling. Wear protective gloves/clothing and eye/face protection. Do not eat, drink, or smoke when using this product. Subject to handling regulations: U.S. OSHA 29 CFR 1910.119. Conditions for Safe Storage, including any Incompatibilities Store and handle in accordance with all current regulations and standards. Store in a tightly closed container. Protect from sunlight. May ignite on exposure to air. Store in a cool, dry place. Store in a well-ventilated area. Avoid contact with water or moisture. Avoid heat, flames, sparks and other sources of ignition. Store locked up. Protect from physical damage. Subject to storage regulations: U.S. OSHA 29 CFR 1910.101. Notify State Emergency Response Commission for storage or use at amounts greater than or equal to the TPQ (U.S. EPA SARA Section 302). SARA Section 303 requires facilities storing a material
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