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University of Huddersfield Repository University of Huddersfield Repository Lan, Xiangqi The Development of a Flexible Characterisation System for Surface Metrology Original Citation Lan, Xiangqi (2014) The Development of a Flexible Characterisation System for Surface Metrology. Doctoral thesis, University of Huddersfield. This version is available at http://eprints.hud.ac.uk/20332/ The University Repository is a digital collection of the research output of the University, available on Open Access. Copyright and Moral Rights for the items on this site are retained by the individual author and/or other copyright owners. Users may access full items free of charge; copies of full text items generally can be reproduced, displayed or performed and given to third parties in any format or medium for personal research or study, educational or not-for-profit purposes without prior permission or charge, provided: • The authors, title and full bibliographic details is credited in any copy; • A hyperlink and/or URL is included for the original metadata page; and • The content is not changed in any way. For more information, including our policy and submission procedure, please contact the Repository Team at: [email protected]. http://eprints.hud.ac.uk/ THE DEVELOPMENT OF A FLEXIBLE CHARACTERISATION SYSTEM FOR SURFACE METROLOGY Xiangqi Lan A thesis submitted to the University of Huddersfield in partial fulfilment of the requirements for the degree of Doctor of Philosophy School of Computing and Engineering University of Huddersfield April 2014 Abstract Surface texture and its measurement are becoming more and more increasingly important in the field of high precision engineering and nano-technology. It is a significant and efficient way to predict the functional performance of an engineering product by characterising its surface. As the extraction and evaluation of surfaces features not only relies on analysis algorithms but also measurement techniques, most of surface characterisation software systems are embedded in the measurement instruments. At present, even though a series of Geometrical Product Specification (GPS) standards are released to guide the procedure of surface characterisation, there are no software systems give a fully support of them. As a consequence, evaluation results from different systems are incomparable, even worse, conflict with each other. Surface characterisation system needs to be updated constantly with the emergence of new algorithms and methods. However, the lack of good extensibility, reusability and maintainability is a serious obstacle to the innovation of existing surface characterisation systems. As functional modules in current surface characterisation systems are tightly coupled together, it is not conducive to the reuse of function modules and innovation of overall system. A lot of redundant and duplicate works have been raised in either enhancing present characterisation systems or building a new characterisation system. To improve the reusability of function modules and facilitate system extension, this research aims to establish a flexible surface characterisation system with an open architecture. By employing component based development technologies, the overall characterisation system is constructed by gluing various functional components together instead of being created from scratch. Each analysis algorithm or method is implemented as an independent functional component, which is separated from the system framework. And also it can be easily reused by other characterisation systems as an executable chunk. Any system functional components can be developed or maintained independently by different organisation as long as they comply with predefined protocols (interfaces). This thesis proposed a novel surface characterisation system, which can be reconfigured as end users‘ expectation at any time even when it has been installed and deployed already. Functional components can be added, removed or replaced dynamically without affecting other parts of the system. Furthermore, the system is flexible such that researchers and developers can concentrate on characterisation algorithms and methods themselves, and then develop their own functional components which can be easily added to this system. 1 Acknowledgements First of all, I would like to express my sincere gratitude to my supervisor, Prof. Xiangqian Jiang for setting up an appropriate research subject. She offers her unreserved help and guidance, and leads me to finish my thesis. Her words can always inspire me and bring me to a higher level of thinking. Many thanks also give to her for kindly support, advice and encouragement. Great appreciation also goes to my second supervisor, Prof. Liam Blunt, for his exceptional support and guidance throughout my thesis. Without his kind and patient instruction, it is impossible for me to finish this thesis. He gave lots of time helping me to improve my academic writing and the capability of carrying out professional researches. I am also indebted to Prof. Paul Scott, Dr. Shaojun Xiao and Dr. Feng Xie for their valuable guidance and suggestions. Special thanks to Dr. Wenhan Zeng and Dr. Haydn Martin. They squeeze time from their busy schedule to help me correct my thesis. I would like to show my appreciation to Taylor Hobson Ltd. for the support and sponsorship of my studies, and I am also grateful to the EPSRC Centre for Innovative Manufacturing in Advanced Metrology, the Centre for Precision (CPT) and the School of Computing and Engineering of the University of Huddersfield for providing me the opportunity and facilities to carry out this project. Sincere thanks to my colleagues for sharing their insights, many useful discussions and valuable suggestions, and my friends for their kindly support and encouragements. Finally, I would like to thank my family for supporting me throughout all my studies. Their love provided my inspiration and was my driving force. I owe them everything and wish I could show them just how much I love and appreciate them. 2 Contents Abstract ............................................................................................................................... 1 Acknowledgements ............................................................................................................. 2 List of Figures ..................................................................................................................... 7 List of Tables ...................................................................................................................... 9 List of Acronyms .............................................................................................................. 10 Chapter 1 Introduction ................................................................................................. 11 1.1 Background ................................................................................................................... 11 1.2 Aim and Objectives ....................................................................................................... 16 1.3 Approach ....................................................................................................................... 19 1.4 Thesis Structure ............................................................................................................. 21 Chapter 2 Surface Characterisation Techniques .......................................................... 24 2.1 Introduction ................................................................................................................... 24 2.2 Surface Verification Operator ....................................................................................... 24 2.3 Surface Measurement .................................................................................................... 32 2.3.1 Stylus Methods ...................................................................................................... 32 2.3.2 Optical Methods .................................................................................................... 35 2.3.3 Other Methods ....................................................................................................... 36 2.3.4 Range and Resolution ............................................................................................ 37 2.4 Fitting Techniques ......................................................................................................... 38 2.4.1 Least Squares fitting .............................................................................................. 39 2.4.2 Profile fitting ......................................................................................................... 40 2.4.3 Areal fitting ........................................................................................................... 42 2.5 Filtering Techniques ...................................................................................................... 44 2.5.1 The Process of Filtering ......................................................................................... 45 2.5.2 Filtering Methods .................................................................................................. 47 2.6 Parameterisation ............................................................................................................ 49 2.6.1 Statistical Methods ................................................................................................ 50 2.6.2 Geometrical Methods ...........................................................................................
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