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Evaluation of Material Surface Profiling Methods: Contact Versus Non-Contact

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Evaluation of Material Surface Profiling Methods: Contact Versus Non-Contact Evaluation of Material Surface Profiling Methods: Contact versus Non-contact A thesis submitted in partial fulfilment of the requirements of Brunel University London for the degree of Master of Philosophy by Supaporn Jaturunruangsri College of Engineering, Design and Physical Sciences, Brunel University London December 2014 1 Abstract Accurate determination of surface texture is essential for the manufacturing of mechanical components within design specifications in engineering and materials science disciplines. It is also required for any subsequent modifications to physical properties and functional aspects of the object. A number of methods are available to characterize any surface through the measurement of roughness parameters that can then be used to describe surface texture. These methods may be divided into those in that direct contact is made with the surface and those where such contact is not required. This report describes two methods approach for the surface profiling of a quartz glass substrate for step height, and tungsten substrate for roughness measure. A stylus profilometer (contact method) and vertical scanning interferometer, (VSI) or (non-contact optical method) were used for step height and roughness parameter measurements. A comparison was made with nominal values assigned to the studied surface, and conclusions drawn about the relative merits of the two methods. Those merits were found to differ, depending on the parameters under consideration. The stylus method gave better agreement of step height values for dimensions greater than a micron. Both methods showed excellent accuracy at smaller dimensions. Both methods also provided accurate average roughness values, although the VSI data significantly overestimated 35% above the peak-to-valley parameter. Likely sources and nature of such differences are discussed based on the results presented, as well as on the previous comparison studies reported in the literature. Because of such method-specific differences, the multi-technique approach used in this work for accurate surface profiling appears to be a more rational option than reliance upon a single method. Both contact and non-contact approaches have problems with specific roughness parameters, but a hybrid approach offers the possibility of combining the strengths of both methods and eliminating their individual weaknesses. 2 Acknowledgement First and foremost, I would like to express my gratitude to my supervisor, Dr Qingping Yang and Professor Kai Cheng for his valuable recommendations, guidance, motivations, encourages and support throughout this research process. I am grateful to the Department of Science Service in Thailand for my sponsorship support to my PhD study. The thanks are also extended to Brunel University for all the support for my PhD study. I am grateful to the Department of Dimensional Metrology, National Institute of Metrology (Thailand) and National Physical Laboratory for allowance to use instrument for my study. The special thanks are due to my colleagues, Mr. Anusorn Tonmueanwai, Dr. Jariya Buajarern, Mr. Thammarat Somthong, Dr. JIttakant Intiang for their valuable discussions in many regards on my research work and always helpful assistance and support. Finally, I am also thankful to my family who encourage and always standby me throughout this research study. 3 Table of Contents Abstract ........................................................................................................................................... 2 Acknowledgement .......................................................................................................................... 3 Chapter 1 ....................................................................................................................................... 12 1. Introduction .............................................................................................................................. 12 1.1 The importance of surfaces ................................................................................................. 12 1.2 Physical nature of manufactured surfaces .......................................................................... 15 1.2.1 Surface diagnostic parameters ..................................................................................... 15 1.2.2 Surface texture types.................................................................................................... 16 1.2.3 Describing roughness ................................................................................................... 17 1.3 Surface metrology ............................................................................................................... 21 1.4 Objectives of this work ........................................................................................................ 22 Chapter 2 ....................................................................................................................................... 25 2. Measurement methods ............................................................................................................ 25 2.1 Contact method – the stylus profilometer ......................................................................... 25 2.1.1 Profilometer components: stylus ................................................................................. 25 2.1.2 Profilometer components: skid .................................................................................... 27 2.1.3 Profilometer components: gauge ................................................................................. 28 2.1.4 Profilometer components: electronics ......................................................................... 29 2.1.5 Measurement considerations ...................................................................................... 30 2.1.6 Limitations and potential sources of error ................................................................... 31 2.2 Non-contact method – the white light interferometer ...................................................... 32 2.2.1 Light interference phenomenon .................................................................................. 33 2.2.2 Phase shifting interferometry....................................................................................... 35 4 2.2.3 Vertical scanning interferometry ................................................................................. 36 2.2.4 Processing of interferometric data ............................................................................... 39 2.2.5 Limitations of vertical scanning interferometry ........................................................... 41 2.3 Other surface profiling methods ......................................................................................... 43 2.3.1 Atomic force microscopy .............................................................................................. 44 2.3.2 Scanning tunneling microscopy .................................................................................... 45 Chapter 3 ....................................................................................................................................... 48 3. Instrument calibration and data processing ............................................................................. 48 3.1 Calibrating stylus-based profilometers ............................................................................... 48 3.2 Calibrating interferometric profilometers .......................................................................... 49 3.3 Data Filtering ....................................................................................................................... 50 3.4 Environmental considerations ............................................................................................ 53 Chapter 4 ....................................................................................................................................... 55 4. Measurement protocols ........................................................................................................... 55 4.1 Step height and roughness standards ................................................................................. 56 4.2 Stylus instrument: initial setup ........................................................................................... 57 4.3 Stylus instrument: step height measurement .................................................................... 59 4.4 Stylus instrument: roughness measurement ...................................................................... 61 4.5 VSI instrument: initial setup ................................................................................................ 62 4.6 VSI instrument: step height measurement ......................................................................... 64 4.7 VSI instrument: roughness measurement .......................................................................... 65 Chapter 5 ....................................................................................................................................... 68 5. Results and discussion .............................................................................................................. 68 5.1 Step height measurement: stylus method .......................................................................... 68 5 5.2 Step height measurement: VSI method .............................................................................
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