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Ross Olson, HSE Coordinator Linde Electronic Gases and Specialty Products 470 West Antelope Road White City, OR 97503 RECEIVED JUL 2 7 2018
February 1.5, 2018
To Wayne Kauzlarich,
For the201 7 reportingyear we have changed how we calculate our operating hours, lbs/hrand / average hours per day. We are now using an estimated time weightedaverage forproduct fill v time. This will result in a more accurate estimate of our operating hours.
When you compare our operating hours, lbs/hr and average hours/day to 2016 you will see significant differences. I tried contacting you via phone on February 1st\ to. discuss, but your voicemail message saidyou were out of the officeuntil February20 th.
Please contact me if you have any questions.
Ross Olson
Office; 541-830-5300 Ext. 113 Mobile: 541-601-7058
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Linde Gas North America LLC Air Contaminant Discharge Permit #15... 0028 (
Annual Report forCalendar Year 2017 Ross Olson LindeLLC 4 70 W. Antelope Rd. White City, OR 97503 541--830-5300 ext. 113
A. Operating Parameters Facilityproduction 2017 I Product Production Unit of Measure
Boron Trichloride (BC13) 49;187 lbs
Chlorine (CI2) 118,089 lbs
Hydrogen Bromide (11Br) 131,468 lbs
Hydrogen Fluoride (HF) 23,277 lbs
Silane (SiH4) 21,402 lbs
Tungsten Hexafluoride(WF6) 144,200 lbs
Trichlorosilane 1,054,532 lbs
Dimethylamine 1,208 lbs
Fluorine 3,700 lbs
Disilane 9,722 lbs
Boron Trifluoride(BF3) 1,669 lbs
Deuterated Silane 7 lbs £�-"-· ------1\Wf'
• 2017 Average Operating Schedule (hrs/day, days/wk, wks/yr) Product : .OperatillgSchedule (basedon 346 davsunless noted) .
Boron Trichloride (BCI3) 0.8 hrs/day, 7 days/wk1 51 wks/yr Chlorine (Cl2) 1.7 hrs/day, 7 days/wk, 51 Wks/yr , Hydrogen Bromide (HBr) 1.2 hrs/day, 7 days/wk, 51 wks/yr Hydrogen Fluoride (HF) 1.5 hrs/day, 7 days/wk, 51 wks/yr Silane (SiH4) 23.9 hrs/day, 7 days/wk, 51 wks/yr Tungsten Hexafluoride(WF6) 2.9 hrs/day, 7 days/wk, 51 wks/yr Trichlorosilane 9.4 hrs/day, 7 days/wk, 51 wks/yr Dimethylamine 0 .. 2 hrs/day, 7 days/wk, 51 wks/yr Fluorine 3.6 hrs/day, 7 days/wk, 51 wks/yr Disilane 4.8 hrs/day, 7 days/wk, 51 wks/yr Boron Trifluoride (BF3) 1.8 hrs/day, 7 days/wk, 21 wks/yr • Deuterated Silane 0.0 hrs/day, 7days/wk, 19 wks/yr 2017 Total Operating Time (hrs/yr)
Product Operating Time
Boron TrichJoride(BC13) 264 hrs
Chlorine (CI2) 581 hrs Hydrogen Bromide (HBr) 400 hrs Hydrogen Fluoride (HF)* 527 hrs Silane (SiH4) 8,269 hrs Tungsten Hexafluoride (WF6) 1,013 hrs Trichlorosilane 3,254 hrs Dimethylamine 63 hrs Fluorine 1,258 hrs Disilane 1,652 hrs Boron Trifluoride 258 hrs Deuterated Silane 3,192 hrs B. Log of all planned or unplanned excess emissions.
January 6th, 2017: From approximately 9:00 AM to 10:30 AM the plantexceeded the 20% opacity limit fromthe emergency scrubber. This happened due to a failedVCR gasket located in one of our BF3 cabinets which asw subsequently repla�ed.
1 November 30 \ 2017: During a commissioning test of the new boron scrubber a small amountof BF3, <3 00 g, was released to atmosphere. Thishappened due to the circulating pump to thescrubber being inadvertentlyleft off causing the remaining BF3 in the pigtails to release to the atmosphere·.
C. Summary of air quality complaints received during year
No complaints were received during calendaryear 2017.
D� Explanation of permanentchanges made in the plant process or production that would effectair contaminant emissions� and indicate when changes were made.
None
E. List of all major maintenance performed on air pollution equipment.
The packed columns of the point of use scrubbers, and the emergency scrubberwere cleaned and rinsed of salt build-up.