High-Index Glass Waveguides for AR Roadmap to Consumer Market

Dr. Xavier Lafosse Commercial Technology Director, Advanced Optics

SPIE AR / VR / MR Conference February 2-4, 2020 Outline

• Enabling the Display Industry Through Glass Innovations

• Our Solutions for Augmented Reality Applications

• The Challenges for Scalable and Cost-Effective Solutions

Cathode ray tubes for Liquid crystal display (LCD) EAGLE XG® Glass is the black and white televisions glass for monitors, laptops LCD industry standard

Cover Glass Glass For AR/MR Display for Display Waveguides

Display Technologies

Introduced glass panels for 1st active 12 years of innovation in cover Corning Precision Glass Solutions matrix LCD devices in 1980s glass for smartphones, laptops, (PGS) was the first to market with tablets & wearables ultra-flat, high-index wafers for top- Have sold 25 billion square feet of tier consumer electronic companies ® ® ® ® flagship Corning EAGLE XG Corning Gorilla Glass is now on pursuing augmented reality and more than 7 billion devices worldwide mixed reality waveguide displays

Advanced Low-loss, low Wafer-level Waveguide displays packaging nonlinearity RF optics for augmented reality components Applications

Glass Carriers Glass Substrates Optical Glasses High-Index AR Glass

® • CTEs: 3.4-12.6 ppm/°C • HPFS has exceptionally low • HPFS® fused silica: FEOL- • Refractive Indices ≥ 1.7 dielectric loss tangent: 10-4 @ • Select glasses available compatible & near-zero CTE • TTV ≤1µm 10GHz & is FEOL-compatible with high transmission & • Other optical glass • Wedge < 0.02 arcmin • Other compositions may be applications in CTEs from • Wafer diameters: 150-300 mm high stiffness properties FEOL-compatible with coatings 3.4-10.0 ppm/°C Corning Offers

1. Wider field of view 2. Higher equipment 3. Demanding 4. Higher throughput & lighter device & material utilization flatness requirements Customer Challenges: Corning Solutions: High refractive-index Larger-diameter Ultra-flat wafers Automated laser glass- glass & thinner form wafers measured with world- cutting machines factors class metrology

Precision Glass Solutions © 2020 Corning Incorporated 6 Corning’s Augmented Reality Solutions deliver industry- leading substrates for superior image quality Glass Attributes Corning Offerings Refractive Index ≥ 1.7 Diameter (mm) 150 – 300 Thickness (mm) 0.3 – 1.0 TTV (µm) ≤ 1 Wedge (arcmin) < 0.02 Bow (µm) ≤ 20

Corning has the longest experience providing ultra- flat, high-index glass to OEMs for waveguide-based AR/MR. Demonstrated capacity >50K wafers/month

RI 2018 2019 2020 2021 2022

1.7

High RI 1.8 Compositions 1.9

2.0

Wafers: 150mm / 200mm / 300mm (0.3 – 1.0mm thick) 1.7 Wafers: 150mm / 200mm (0.3 – 1.0mm thick) D300mm (0.3 – 1.0mm thick) 1.8

Form Factor Wafers: 150mm / 200mm (0.3 – 1.0mm thick) D300mm (0.3 – 1.0mm thick) 1.9

150mm - D300mm (0.3 – 1.0mm thick) 2.0

All high-index substrates delivered with leading geometric tolerances

Processability Density (cost)

Refractive Index

Optical Chemical durability, transmission mechanical (Blue) reliability

Trade-offs between density and optical transmission (Index >1.9) 1.9 glasses in R&D improved (vs production )

Target

Production 1.9/31 (80230)

Composition move Process move Internal Transmission(10mm) 460 nm @

Density (g/cc)

 Refractive Index  Flatness  Wafer / Substrate Size  Optical Transparency  Density  Cost

2015 Gen 10.5 – 2940 x 3370 2009 AR/MR: You are here Gen 10 – 2880 x 3130

2009 Gen 8.5 – 2200 x 2500 2006

2005 Gen 8 – 2160 x 2460 2005 Gen 7.5 – 1950 x 2250

2003 Gen 7 – 1870 x 2200

Gen 6 – 1500 x 1800 2002

Gen 5 – 1100 x 1250

2000 Gen 4 – 680 x 880 1995 1993 Gen 3 – 550 x 650

Gen 2 – 370 x 470

Process of Record Vs. Continuous Sheet Process Technical Challenges Glass block

• Devitrification Core drilling • Low viscosity

Wire Saw • Warp • Thickness control Lapping $$ (TTV, wedge)

Polishing

Glass For AR/MR Waveguide We are addressing key challenges…

 Product Performances • Very High Index • Optical Transmission (Blue) • Outstanding flatness

 Cost-effective glass forming process