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Illumination of DLP® with Laser Light Sources Illumination of DLP® with Laser Light Sources Dr. Reinhard Voelkel SUSS MicroOptics SA, Neuchâtel, Switzerland www.suss.ch, [email protected] Our MicroOptics set the Standards SUSS MicroOptics – We Set The Standards World leading supplier of Micro-Optics 8‟‟ Wafer Technology, Wafer-Level Packaging, SUSS Imprint Lithography More than 200 active customers, e.g. to SEMI equipment manufacturers, Laser & Optics industry, Sensors & Metrology and Medical Part of the SUSS MicroTec Group (www.suss.com) Neuchâtel, Swiss Watch Valley SMO is “Preferred Supplier” for Carl Zeiss SMT AG: DUV Laser Beam Shaping Solutions (ASML Steppers) 2 R. Völkel, “Illumination of DLP® with Laser Light Sources”, 4th International Symposium on Emerging and Industrial DLP® Applications”, Frankfurt, Germany, Nov 12, 2009 SUSS MicroOptics Mean -0.10 Unwrapped phase / lambda RMS 0.34 1260.77 P-V 2.94 0.72 1008.62 Refractive Microlens Arrays (ROE) Binary Optics Diffractive Optical Elements (DOE) 0.13 756.46 -0.46 y / norm. radius -1.04 Phase / lambda 504.31 -1.63 252.15 Random Diffusers Microlens Imprint Wafer-Level MO Exposure Optics (Mask Aligner) -2.22 Lithography Camera (WLC) 0.00 0.00 252.15 504.31 756.46 1008.62 1260.77 R. Völkel, “Illumination of DLP® with Laser Light Sources”, 4th International Symposium on Emerging and Industrial DLP® Applications”, Frankfurt, Germany, Nov 12, 2009 3 x / norm. radius 10.02.2005 Zeiss Diffusor 6101 HH, 10-02-05 RV 14:49:32 SUSS MicroOptics Micro-Optics Solutions Semiconductor Technology Industrial Optics & Vision Mean -0.10 Unwrapped phase / lambda RMS 0.34 1260.77 P-V 2.94 Healthcare & Life Science Metrology 0.72 1008.62 Laser & Material Processing 0.13 Information Technology 756.46 Research -0.46 y / norm. radius -1.04 Phase / lambda 504.31 -1.63 252.15 -2.22 0.00 0.00 252.15 504.31 756.46 1008.62 1260.77 R. Völkel, “Illumination of DLP® with Laser Light Sources”, 4th International Symposium on Emerging and Industrial DLP® Applications”, Frankfurt, Germany, Nov 12, 2009 x / norm. radius 10.02.2005 Zeiss Diffusor 6101 HH, 10-02-05 RV 14:49:32 SUSS MicroOptics DLP®? What are we talking about? The Holy Grail of MEMS Technology! Larry J. Hornbeck: „The Weirdest Technoloy Ever Invented“ A very sucessful device that our customers want to illuminate! 5 R. Völkel, “Illumination of DLP® with Laser Light Sources”, 4th International Symposium on Emerging and Industrial DLP® Applications”, Frankfurt, Germany, Nov 12, 2009 DLP® Standard Mirror Postitions 6 R. Völkel, “Illumination of DLP® with Laser Light Sources”, 4th International Symposium on Emerging and Industrial DLP® Applications”, Frankfurt, Germany, Nov 12, 2009 Illumination: Optics Is Light Work! Light Sources Devices, Systems „Collect all photons and illuminate the DLP®!“ Performance (brightness, contrast, color, uniformity, efficiency) Size (large, smaller device) Costs (manufacturing, energy saving, lifetime) 7 R. Völkel, “Illumination of DLP® with Laser Light Sources”, 4th International Symposium on Emerging and Industrial DLP® Applications”, Frankfurt, Germany, Nov 12, 2009 Illumination Today: More Power – Less Energy! Uniformity Efficiency Costs 8 R. Völkel, “Illumination of DLP® with Laser Light Sources”, 4th International Symposium on Emerging and Industrial DLP® Applications”, Frankfurt, Germany, Nov 12, 2009 Optics: Our Gurus Thousands of books and patents on optical lens design How many books are describing illumination systems? Illumination is always the “little brother” of the glorious lens design – nobody wants to play with – except if we really have to! 9 R. Völkel, “Illumination of DLP® with Laser Light Sources”, 4th International Symposium on Emerging and Industrial DLP® Applications”, Frankfurt, Germany, Nov 12, 2009 The Köhler Illumination Concept A success-story since 1893 Our MicroOptics set the Standards 1893: August Köhler invented Köhler Illumination In 1893 August Köhler (1866–1948) from Carl Zeiss in Jena, introduced a new and revolutionary method for uniform illumination of specimen in an optical microscope in his doctoral thesis. The Köhler method allows to adjust the size muenchen.de/koehler.html and the numerical aperture of the object - illumination in a microscope independent from each other. Image: http://www.mikroskopieImage: August Köhler, Zeitschrift für wissenschaftliche Mikroskopie, Band X, Seite 433-440 (1893) 11 R. Völkel, “Illumination of DLP® with Laser Light Sources”, 4th International Symposium on Emerging and Industrial DLP® Applications”, Frankfurt, Germany, Nov 12, 2009 The Basic Principle of Köhler Illumination Field Aperture Diaphragm Diaphragm Object Light Plane Source C B A Collector Condensor Lens Lens A. The collector lens images the light source to the plane of the aperture diaphragm B. The aperture diaphragm is located in the front focal plane of the condenser lens C. The field diaphragm is imaged to the object plane by properly adjusting the distance of the condenser lens to the object plane. 12 R. Völkel, “Illumination of DLP® with Laser Light Sources”, 4th International Symposium on Emerging and Industrial DLP® Applications”, Frankfurt, Germany, Nov 12, 2009 Light Sources Egyptian God Ra with Madame Taperet , 1000 BC (Louvre, Paris) Thomsas A. Edison (Patent 1880) 13 R. Völkel, “Illumination of DLP® with Laser Light Sources”, 4th International Symposium on Emerging and Industrial DLP® Applications”, Frankfurt, Germany, Nov 12, 2009 Lighting Roadmap 14 R. Völkel, “Illumination of DLP® with Laser Light Sources”, 4th International Symposium on Emerging and Industrial DLP® Applications”, Frankfurt, Germany, Nov 12, 2009 Types of LASERs Semiconductor lasers (laser diodes), quantum cascade lasers, surface- emitting semiconductor lasers (VCSELs, VECSELs) Solid-state lasers based on ion-doped crystals or glasses, pumped with discharge lamps or laser diodes (Nd:YAG, Nd:YVO4, Nd:YLF, Nd:glass, Yb:YAG, Yb:glass, Ti:sapphire, Cr:YAG and Cr:LiSAF). Fiber lasers, based on optical glass fibers which are doped with some laser-active ions in the fiber core. Gas lasers (e.g. helium–neon lasers, CO2 lasers, and argon ion lasers) and excimer lasers (ArF, KrF, XeF, and F2). Chemical and nuclear pumped lasers, free electron lasers, and X-ray lasers. http://www.rp-photonics.com/lasers.html 15 R. Völkel, “Illumination of DLP® with Laser Light Sources”, 4th International Symposium on Emerging and Industrial DLP® Applications”, Frankfurt, Germany, Nov 12, 2009 Richard Ulbricht Invented The Ulbricht Sphere Dr. Richard Ulbricht (1849 – 1923, Dresden) Invented the Ulbricht Sphere when he was trying to find the optimium optics for electrical illumination of Dresden„s train stations (≈ 1891) 16 R. Völkel, “Illumination of DLP® with Laser Light Sources”, 4th International Symposium on Emerging and Industrial DLP® Applications”, Frankfurt, Germany, Nov 12, 2009 Tasks for Micro-Optics Intensity LED Plastic, Glass LED Homogenization Reflector Substrate Beam Collimation Beam Shaping R. Völkel, “Illumination of DLP® with Laser Light Sources”, 4th International Symposium on Emerging and Industrial DLP® Applications”, Frankfurt, Germany, Nov 12, 2009 Conservation of Etendue – Lagrange Invariant Etendue is a property of an optical system, which characterizes how "spread out" the light is in area and angle. Lagrange invariant is a measure of the light propagating through an optical system. For a given optical system, the Lagrange invariant is a constant throughout all space, that is, it is invariant upon refraction and transfer. 18 R. Völkel, “Illumination of DLP® with Laser Light Sources”, 4th International Symposium on Emerging and Industrial DLP® Applications”, Frankfurt, Germany, Nov 12, 2009 Speckles When traveling through an optical system, the different laser modes acquire different phase shifts and a speckle pattern is observed in the flat-top. The contrast of this speckle pattern depends on the coherence length of the transmitted beam. It will vanish if the optical path length difference between the fastest and slowest modes exceeds the longitudinal coherence length of the laser beam. Temporary integration: A dynamic change in the speckle pattern from shot to shot results in an averaging out of the residual granularity contrast according to 1 N 19 R. Völkel, “Illumination of DLP® with Laser Light Sources”, 4th International Symposium on Emerging and Industrial DLP® Applications”, Frankfurt, Germany, Nov 12, 2009 The Köhler Integrator* – Multiple Köhler Illumination Systems in Parallel *Also known as Fly‟s Eye Condenser, Optical Integrator, Microlens Beam Homogenizer, Wabenkondensor, … Our MicroOptics set the Standards Köhler Integrator – Fly’s Eye Condenser Principle Ray Condenser Lens Object Plane Image Plane Image Light Source Example: Gaussian intensity distribution at lens array LA1 Field Lens Lens Array MLA1 Lens Array MLA2 (Conjugated to object) (Images of light source) Projection Lens (Multiple images of source) Multiple Köhler illumination in parallel to further improve illumination. Splitting of the field diaphragm. Source: Naumann, Schröder, Bauelemente der Optik, Hanser Verlag Hanser Optik, der Bauelemente Schröder, Naumann, Source: 21 R. Völkel, “Illumination of DLP® with Laser Light Sources”, 4th International Symposium on Emerging and Industrial DLP® Applications”, Frankfurt, Germany, Nov 12, 2009 Köhler Integrator – Fly‘s Eye Illumination 22 R. Völkel, “Illumination of DLP® with Laser Light Sources”, 4th International Symposium on Emerging and Industrial DLP® Applications”, Frankfurt, Germany, Nov 12,
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