THIN-FILM DEPOSITION USING LASER ABLATION: APPLICATION to FERROMAGNETIC SHAPE-MEMORY MATERIALS and METHODS for SPATIAL SHAPING of LASER BEAMS Doctoral Dissertation

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THIN-FILM DEPOSITION USING LASER ABLATION: APPLICATION to FERROMAGNETIC SHAPE-MEMORY MATERIALS and METHODS for SPATIAL SHAPING of LASER BEAMS Doctoral Dissertation TKK Dissertations 38 Espoo 2006 THIN-FILM DEPOSITION USING LASER ABLATION: APPLICATION TO FERROMAGNETIC SHAPE-MEMORY MATERIALS AND METHODS FOR SPATIAL SHAPING OF LASER BEAMS Doctoral Dissertation Antti Hakola Helsinki University of Technology Department of Engineering Physics and Mathematics Laboratory of Advanced Energy Systems TKK Dissertations 38 Espoo 2006 THIN-FILM DEPOSITION USING LASER ABLATION: APPLICATION TO FERROMAGNETIC SHAPE-MEMORY MATERIALS AND METHODS FOR SPATIAL SHAPING OF LASER BEAMS Doctoral Dissertation Antti Hakola Dissertation for the degree of Doctor of Science in Technology to be presented with due permission of the Department of Engineering Physics and Mathematics for public examination and debate in Auditorium F1 at Helsinki University of Technology (Espoo, Finland) on the 8th of September, 2006, at 12 noon. Helsinki University of Technology Department of Engineering Physics and Mathematics Laboratory of Advanced Energy Systems Teknillinen korkeakoulu Teknillisen fysiikan ja matematiikan osasto Energiatieteet Distribution: Helsinki University of Technology Department of Engineering Physics and Mathematics Laboratory of Advanced Energy Systems P.O.Box 4100 FI - 02015 TKK FINLAND URL: http://www.tkk.fi/Units/AES/ Tel. +358-9-451 3198 Fax. +358-9-451 3195 E-mail: [email protected] © 2006 Antti Hakola ISBN 951-22-8282-8 ISBN 951-22-8283-6 (PDF) ISSN 1795-2239 ISSN 1795-4584 (PDF) URL: http://lib.tkk.fi/Diss/2006/isbn9512282836/ TKK-DISS-2161 Otamedia Oy Espoo 2006 HELSINKI UNIVERSITY OF TECHNOLOGY ABSTRACT OF DOCTORAL DISSERTATION P.O. BOX 1000, FI-02015 TKK http://www.tkk.fi Author Name of the dissertation Date of manuscript Date of the dissertation Monograph Article dissertation (summary + original articles) Department Laboratory Field of research Opponent(s) Supervisor (Instructor) Abstract Keywords ISBN (printed) ISSN (printed) ISBN (pdf) ISSN (pdf) ISBN (others) Number of pages Publisher Print distribution The dissertation can be read at http://lib.tkk.fi/Diss/ AB TEKNILLINEN KORKEAKOULU VÄITÖSKIRJAN TIIVISTELMÄ PL 1000, 02015 TKK http://www.tkk.fi Tekijä Antti Hakola Väitöskirjan nimi Thin-Film Deposition Using Laser Ablation: Application to Ferromagnetic Shape-Memory Materials and Methods for Spatial Shaping of Laser Beams Käsikirjoituksen jättämispäivämäärä 13.3.2006 Väitöstilaisuuden ajankohta 8.9.2006 Monografia X Yhdistelmäväitöskirja (yhteenveto + erillisartikkelit) Osasto Teknillinen fysiikka ja matematiikka Laboratorio Energiatieteet Tutkimusala Ohutkalvojen kasvatus laserablaatiolla sekä lasersäteen muokkaus Vastaväittäjä(t) Professori Peter E. Dyer Työn valvoja Professori Rainer Salomaa (Työn ohjaaja) TkT Timo Kajava Tiivistelmä Ferromagneettiset muistimetalliyhdisteet, ennen kaikkea Ni-Mn-Ga-metalliseokset, ovat aktiivisesti tutkittuja materi- aaleja, koska ne pystyvät muuttamaan palautuvasti muotoaan jopa 10 % ulkoisessa magneettikentässä. Tämä mahdol- listaa uudentyyppisten toimilaitteiden ja anturien toteuttamisen. Tutkimus on tähän mennessä keskittynyt Ni-Mn-Ga:n bulkkiominaisuuksiin, mutta mikromekaanisten komponenttien tai jopa mikroskoopisten koneiden valmistamiseksi näistä materiaaleista olisi valmistettava ohutkalvoja. Laserablaatio on tehokas tapa kasvattaa hyvälaatuisia ohutkalvoja monikomponenttisista materiaaleista kuten Ni-Mn-Ga:sta. Laserablaatiossa käytetään suuritehoisia laserpulsseja siirtä- mään ainetta stoikiometrisesti kohtiolta kasvatusalustan pinnalle ohueksi kalvoksi. Väitöskirjassa kasvatettiin muuta- man sadan nanometrin paksuisia Ni-Mn-Ga-kalvoja eri alustoille kuten piille, NaCl:lle ja pienille Ni-Mn-Ga-paloille ja optimoitiin kasvatusparametrit kuten alustan lämpötila ja laserpulssien energiatiheys kohtiolla, jotta syntyvät kalvot olisivat ferromagneettisia, kiderakenteeltaan halutunlaisia ja pinnaltaan mahdollisimman tasaisia. Lisäksi kehitettiin menetelmiä kalvon ja alustan irrottamiseksi toisistaan, jotta havaittaisiin muistimetalli-ilmiön kannalta välttämätön faasimuutos matalissa lämpötiloissa. Erityisen lupaavia tuloksia saatiin NaCl-alustoja käyttämällä: magnetoituma oli lähes 70 % bulkkiarvosta, alustan poistaminen onnistui helposti etsaamalla sitä isotrooppisesti vedellä ja vapautetuissa kalvoissa havaittiin merkkejä faasimuutoksesta noin -100 °C:ssa. Myös piille kasvatetut kalvot olivat voimakkaan ferro- magneettisia, ja optimiparametreja käytettäessä pisararoiskeiden määrä kalvon pinnalla oli vähäinen. Tulokset osoitta- vat, että laserablaatio yhdistettynä kalvojen litografiseen kuviointiin on kilpailukykyinen teknologia ohutkalvopohjais- ten muistimetallirakenteiden valmistuksessa. Laserablaatiota varten lasersäteen intensiteettijakauman kohtiolla on oltava tasainen ja jyrkkäreunainen. Väitöskirjassa tämä toteutettiin diffraktiivisen optiikan avulla: periodiset diffraktiiviset elementit muuttivat käyttämämme eksimeeri- laserin säteen halutunlaiseksi jakaumaksi positiivisen linssin polttotasoon. Tämä uudenlainen tapa muokata lasersädettä pienentää merkittävästi laserablaatiolaitteistomme tehohäviöitä. Diffraktiivista optiikkaa käytettiin myös lähes hajaan- tumattomien, ns. Bessel-Gauss-säteiden tuottamiseen suoraan laserresonaattorissa. Lisäksi Bessel-tyyppisiä säteitä saa- tiin synnytettyä myös tietynlaisessa nestekiteessä tapahtuvan itseisfokusoitumisen seurauksena. Hajaantumattomat lasersäteet tarjoavat mahdollisuuden tarkkaan laserablaatioon sekä pienten rakenteiden kuvioimiseen ohutkalvoihin. Asiasanat laserablaatio, ferromagneettiset muotomuistimateriaalit, flat-top-jakauma, Bessel-Gauss-säde ISBN (painettu) 951-22-8282-8 ISSN (painettu) 1795-2239 ISBN (pdf) 951-22-8283-6 ISSN (pdf) 1795-4584 ISBN (muut) Sivumäärä 116 s. + liit. 27 s. Julkaisija Teknillinen korkeakoulu Painetun väitöskirjan jakelu Energiatieteet X Luettavissa verkossa osoitteessa http://lib.tkk.fi/Diss/2006/isbn9512282836 Preface The research summarized in this thesis has been carried out in the Advanced En- ergy Systems Laboratory at Helsinki University of Technology. The work has been made in close collaboration with the Optics and Molecular Materials Laboratory, the Laboratory of Physical Metallurgy and Materials Science, and the Laboratory of Biomedical Engineering of Helsinki University of Technology as well as with the Department of Physics of University of Joensuu. I would like to thank my supervisor, Professor Rainer Salomaa, for providing me the possibility to work in the laboratory and continue experimental research work with lasers after I had completed my master’s thesis and had only a vague thought of obtaining a doctoral degree some day. Dr. Timo Kajava has been my instructor ever since I came to Miilu as a summer student in 1999. I warmly thank Timo for his guidance and support during all these years. I am particularly indebted to him for our long discussions which provided us with several interesting ideas and new directions into which we could proceed. I am also grateful to Professor Jari Turunen and Dr. Kari Ullakko for their con- tributions to this work: they are both men full of ideas that just wait for their re- alization. I acknowledge Professor Matti Kaivola for organizing me funding from the Graduate School of Modern Optics and Photonics for my doctoral studies and giving me the opportunity to use the experimental facilities in Micronova after the Optics and Molecular Materials Laboratory moved there in 2004. I also thank all my colleagues and friends with whom I have had the pleasure to work during the past six years: Scott Buchter, Henna Elfström, Oleg Heczko, Antti Jaakkola, Ville Kekkonen, Andriy Shevchenko, Outi Söderberg, and all the other people, present and former, working in Miilu and in Micronova. Furthermore, I express my grati- tude to all the members of the Advanced Energy Systems Laboratory, especially to Taina Kurki-Suonio, for the pleasant working atmosphere and the opportunity to be involved in teaching and course planning. Financial support from the Graduate School of Modern Optics and Photonics, Jenny and Antti Wihuri Foundation, the Finnish Academy of Science and Letters, Vilho, Yrjö, and Kalle Väisälä Foundation, Tekniikan Edistämissäätiö, the Finnish Society of Sciences and Letters, Magnus Ehrnrooth Foundation, and Artturi and Aina Hele- nius Foundation of the Finnish Cultural Foundation is gratefully acknowledged. Finally, I acknowledge the support and encouragement that I have received from my parents and sisters. Espoo, March 2006 Antti Hakola v List of publications This thesis is a review of the author’s work on pulsed laser deposition of Ni–Mn– Ga thin films and laser-beam shaping. It consists of an overview and the following selection of the author’s publications in peer-reviewed journals: I. A. Hakola, O. Heczko, A. Jaakkola, T. Kajava, and K. Ullakko, ”Pulsed laser deposition of Ni–Mn–Ga thin films on silicon,” Applied Physics A 79, 1505– 1508 (2004). II. A. Hakola, O. Heczko, A. Jaakkola, T. Kajava, and K. Ullakko, ”Ni–Mn–Ga films on Si, GaAs, and Ni–Mn–Ga single crystals by pulsed laser deposition,” Applied Surface Science 238, 155–158 (2004). III. A. Hakola, O. Heczko, A. Jaatinen, V. Kekkonen, and T. Kajava, ”Substrate- free structures of iron-doped Ni–Mn–Ga thin films prepared by pulsed laser deposition,” Report TKK-F-A844 (2006), submitted to Journal of Physics, Conference Series (peer-reviewed, recommended for publication). IV. A. Hakola, T. Kajava, H. Elfström, J. Simonen, P. Pääkkönen, and J. Turunen, ”Diffractive shaping of excimer-laser beams for pulsed laser deposition,” Re- port TKK-F-A843 (2006), accepted
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