Information Technologies in Science, Management, Social Sphere and Medicine (ITSMSSM 2016) Mathematical Modeling of Discharge Plasma Generation and Diffusion Saturation of Metals and Alloys Nguyen Bao Hung1, T. V. Koval2, Tran My Kim An3 1,2,3 National Research Tomsk Polytechnic University Tomsk, Russia E-mail:
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[email protected] Abstract. This paper presents a mathematical modeling of the for which it is required to provide an ion current density of plasma generation in a hollow cathode and the diffusion ~1 mA/cm2 to a treated surface and a discharge operating saturation of metals and alloys by nitrogen atoms in the plasma voltage of hundred volts [8–11]. of a low-pressure non-self-sustained glow discharge. Characteristics of gas discharge are obtained. The relations The complexity and multiple relations of nitriding process between main technological parameters and structural-phase make difficult to define the general laws in the structuration of states of nitrited material are defined. Furthermore, this paper modified layers and their properties [12-16]. Such problems leads a comparison of calculated results with the experimental can be solved by mathematical modeling of the processes in data. plasma generation and material nitriding. This is also an effective way to establish the mechanisms of forming the Keywords: hollow cathode, glow discharge, low-pressure modified layer with specified properties and their dependences discharge, plasma, plasma cathode, plasma nitriding, diffusion on