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NA CSM Minutes 2015 CSMANTECH North America Compound Semiconductor Materials Technical Committee Chapter Meeting Summary and Minutes CS MANTECH 2015 20 May 2015, 0700 – 0900 (U.S. Mountain Time) Hyatt Regency Scottsdale, Resort & Spa at Gainey; Scottsdale, Arizona Committee Announcements Next Committee Meeting CS MANTECH 2016 Wednesday, May 18, 2016 Hyatt Regency Miami in Miami, Florida Table 1 Meeting Attendees Italics indicate virtual participants Co-Chairs: Jim Oliver (Northrop Grumman), Russ Kremer (Freiberger Compound Materials) SEMI Staff: Paul Trio Company Last First Company Last First Freiberger Compound Materials Kremer Russ National Research Council Canada Waldron Philip HexaTech Mills Greg NIST Davydov Albert International Consortium for Kumar Amit Northrop Grumman Oliver Jim Advanced Manufacturing Research (ICAMR) Lehighton Electronics Nguyen Danh NOVASiC Kronwasser Judy Lehighton Electronics Blew Austin SEMI Trio Paul Table 2 Leadership Changes Group Previous Leader New Leader None Table 3 Ballot Results Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review. Failed ballots and line items were returned to the originating task forces for re-work and re-balloting. Document # Document Title Committee Action 4979A New Standard: Specification for Polished Monocrystalline C-Plane Gallium Nitride Passed with editorial Wafers changes NA CSM TC Chapter 1 May 20, 2015 Meeting Minutes CS MANTECH in Scottsdale, AZ Table 4 Authorized Activities # Type SC/TF/WG Details 5886 SNARF NA CSM 5- Line Item Revisions to: Year Review TF • SEMI M9-0914, Specifications for Polished Monocrystalline Gallium Arsenide Wafers with title change to: Specification for Polished Monocrystalline Gallium Arsenide Wafers • SEMI M9.1-0813, Standard for Round 50.8 mm Polished Monocrystalline Gallium Arsenide Wafers for Electronic Device Applications with title change to: Specification for Round 50.8 mm Polished Monocrystalline Gallium Arsenide Wafers for Electronic Device Applications • SEMI M9.2-0813, Standard for Round 76.2 mm Polished Monocrystalline Gallium Arsenide Wafers for Electronic Device Applications with title change to: Specification for Round 76.2 mm Polished Monocrystalline Gallium Arsenide Wafers for Electronic Device Applications • SEMI M9.5-0813, Standard for Round 100 mm Polished Monocrystalline Gallium Arsenide Wafers for Electronic Device Applications with title change to: Specification for Round 100 mm Polished Monocrystalline Gallium Arsenide Wafers for Electronic Device Applications • SEMI M9.6-0813, Standard for Round 125 mm Diameter Polished Monocrystalline Gallium Arsenide Wafers with title change to: Specification for Round 125 mm Diameter Polished Monocrystalline Gallium Arsenide Wafers Correct nonconforming titles per Procedure Manual, Appendix 4 5884 SNARF NA CSM 5- Line Item Revision to SEMI M65-0306E2, Specifications for Sapphire Substrates to use Year Review TF for Compound Semiconductor Epitaxial Wafers with title change to: Specification for Sapphire Substrates to use for Compound Semiconductor Epitaxial Wafers Correct nonconforming title per Procedure Manual, Appendix 4 5885 SNARF NA CSM 5- Line Item Revision to SEMI M75-0812, Specifications for Polished Monocrystalline Year Review TF Gallium Antimonide Wafers with title change to: Specification for Polished Monocrystalline Gallium Antimonide Wafers Correct nonconforming title per Procedure Manual, Appendix 4 5882 SNARF NA CSM 5- Line Item Revision to SEMI M10-1296, Standard Nomenclature for Identification of Year Review TF Structures and Features Seen on Gallium Arsenide Wafers with title change to: Nomenclature for Identification of Structures and Features Seen on Gallium Arsenide Wafers Correct nonconforming title per Procedure Manual, Appendix 4 5887 SNARF NA CSM 5- Revision to SEMI M63-0306, Guideline: Test Method for Measuring the Al Fraction in Year Review TF AlGaAs on GaAs Substrates by High Resolution X-Ray Diffraction with title change to: Test Method for Measuring the Al Fraction in AlGaAs on GaAs Substrates by High Resolution X-Ray Diffraction Major revision to correct nonconforming title per Procedure Manual, Appendix 4 5883 SNARF NA CSM 5- Line Item Revision to SEMI M42-0211, Specification for Compound Semiconductor Year Review TF Epitaxial Wafers Move DIN standard reference from Referenced Standards and Documents section to a new Related Documents section. Note: SNARFs and TFOFs are available for review on the SEMI Web site at: http://downloads.semi.org/web/wstdsbal.nsf/TFOFSNARF NA CSM TC Chapter 2 May 20, 2015 Meeting Minutes CS MANTECH in Scottsdale, AZ Table 5 Authorized Ballots # When SC/TF/WG Details 5886 Cycle 1 or NA CSM 5- Line Item Revisions to: 2, 2016 Year Review TF • SEMI M9-0914, Specifications for Polished Monocrystalline Gallium Arsenide Wafers with title change to: Specification for Polished Monocrystalline Gallium Arsenide Wafers • SEMI M9.1-0813, Standard for Round 50.8 mm Polished Monocrystalline Gallium Arsenide Wafers for Electronic Device Applications with title change to: Specification for Round 50.8 mm Polished Monocrystalline Gallium Arsenide Wafers for Electronic Device Applications • SEMI M9.2-0813, Standard for Round 76.2 mm Polished Monocrystalline Gallium Arsenide Wafers for Electronic Device Applications with title change to: Specification for Round 76.2 mm Polished Monocrystalline Gallium Arsenide Wafers for Electronic Device Applications • SEMI M9.5-0813, Standard for Round 100 mm Polished Monocrystalline Gallium Arsenide Wafers for Electronic Device Applications with title change to: Specification for Round 100 mm Polished Monocrystalline Gallium Arsenide Wafers for Electronic Device Applications • SEMI M9.6-0813, Standard for Round 125 mm Diameter Polished Monocrystalline Gallium Arsenide Wafers with title change to: Specification for Round 125 mm Diameter Polished Monocrystalline Gallium Arsenide Wafers Correct nonconforming titles per Procedure Manual, Appendix 4 5884 Cycle 1 or NA CSM 5- Line Item Revision to SEMI M65-0306E2, Specifications for Sapphire Substrates to use 2, 2016 Year Review TF for Compound Semiconductor Epitaxial Wafers with title change to: Specification for Sapphire Substrates to use for Compound Semiconductor Epitaxial Wafers Correct nonconforming title per Procedure Manual, Appendix 4 5885 Cycle 1 or NA CSM 5- Line Item Revision to SEMI M75-0812, Specifications for Polished Monocrystalline 2, 2016 Year Review TF Gallium Antimonide Wafers with title change to: Specification for Polished Monocrystalline Gallium Antimonide Wafers Correct nonconforming title per Procedure Manual, Appendix 4 5882 Cycle 1 or NA CSM 5- Line Item Revision to SEMI M10-1296, Standard Nomenclature for Identification of 2, 2016 Year Review TF Structures and Features Seen on Gallium Arsenide Wafers with title change to: Nomenclature for Identification of Structures and Features Seen on Gallium Arsenide Wafers Correct nonconforming title per Procedure Manual, Appendix 4 5887 Cycle 1 or NA CSM 5- Revision to SEMI M63-0306, Guideline: Test Method for Measuring the Al Fraction in 2, 2016 Year Review TF AlGaAs on GaAs Substrates by High Resolution X-Ray Diffraction with title change to: Test Method for Measuring the Al Fraction in AlGaAs on GaAs Substrates by High Resolution X-Ray Diffraction Major revision to correct nonconforming title per Procedure Manual, Appendix 4 5883 Cycle 1 or NA CSM 5- Line Item Revision to SEMI M42-0211, Specification for Compound Semiconductor 2, 2016 Year Review TF Epitaxial Wafers Move DIN standard reference from Referenced Standards and Documents section to a new Related Documents section. Table 6 New Action Items Item # Assigned to Details 2015May #01 Paul Trio Set-up bridge for upcoming M55 5-Year Review TF meetings. 2015May #02 Paul Trio Send a copy of SEMI M1 to Judy Kronwasser. 2015May #03 Paul Trio, Russ Send a copy of SEMI M79 to Hani Badawi (AXT) for review. Kremer NA CSM TC Chapter 3 May 20, 2015 Meeting Minutes CS MANTECH in Scottsdale, AZ Table 7 Previous Meeting Actions Items Item # Assigned to Details Status 2014Nov #01 Michael Tran Gather Global SiC TF inputs for M55 5-Year Review work. Open 2014Nov #02 Michael Tran Look into status of M65 5-Year Review. Open 2013May#02 Albert Davydov Assist Judy Kronwasser with the flats orientation of Gallium Open Nitride and Sapphire in Document 4979. 2013May#03 Michael Tran Work with Judy Kronwasser on DIN standards being Open referenced in Document 4979. 2011Sep #02 Paul Trio and Look into the mobility standard developed by the Japan Open Kevin Nguyen CSM committee. 2011Sep #03 Jim Oliver Help find volunteers, possibly from Cree or II-VI, to lead the Open SiC Task Force. 1 Welcome, Reminders, and Introductions Russ Kremer, committee co-chair, called the meeting to order at 7:05 AM. After welcoming all attendees, a round of introductions followed. The SEMI meeting reminders on membership requirements, antitrust, patentable technology, and meeting guidelines were then presented and explained. Attachment : 01, SEMI Standards Required Meeting Elements 2 Review of Previous Meeting Minutes The committee reviewed the minutes of the previous meeting held November 21 via teleconference and web meeting only. Motion: Accept the minutes of the previous meeting as written. By / 2 nd : Russ Kremer (Freiberger Compound Materials) / Danh Nguyen (Lehighton) Discussion: None Vote: 4-0 in favor. Motion passed. Attachment: 02, NA CSM Fall 2014 meeting (November 21) minutes 3 Liaison Reports 3.1 SEMI Staff Report Paul Trio (SEMI) gave
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