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Laser Sources Laser Sources Solid State Lasers – Overview Dieter Hoffmann Workshop: Laser technology and optics design Fraunhofer ILT Aachen, 4 – 6 November 2013 © Fraunhofer ILT Outline Introduction Fraunhofer ILT Diode Lasers for Pumping Rod Lasers and their Limitations Innoslab – Comparison to Fiber and Thin Disk Lasers © Fraunhofer ILT Fraunhofer Profile 66 Institutes 7 Groups: more than 22,000 Information and Communication Technology employees Life Sciences An annual research Microelectronics volume of €1.9 billion, Light & Surfaces of which €1.6 billion is Production generated through Materials and Components – MATERIALS contract research Defense and Security © Fraunhofer ILT The Fraunhofer-Gesellschaft in Germany 66 Institutes more than 22,000 Employees © Fraunhofer ILT Facts and Figures of Fraunhofer ILT About 30 Mio Euro operating budget (without investments) About 6 Mio Euro investments per year 394 Employees DQS certified according to DIN EN ISO 9001 2 branches abroad : - Center for Laser Technology CLT in Plymouth, MI, USA - Coopération Laser Franco-Allemande CLFA in Paris, France One patent application per month on average Approx. 10 participations in trade fairs / 20 organized events per year © Fraunhofer ILT Structure of Fraunhofer ILT, LLT, TOS, NLD - RWTH Aachen © Fraunhofer ILT Lasers and Laser Optics – Groups at ILT A1.31 A 1.32 A1.33 A1.34 A 1.35 A 1.36 Optics design Solid State - Ultrafast Fiber Lasers Nonlinear Packaging und Lasers Lasers Optics Diode lasers and Tunable Lasers Beam Forming ns, ps Oszillators fs Oszillators Oszillators Frequency- Single conversion UV, emitters, Beam Guiding and Amplifiers and Amplifiers and Amplifiers VIS, NIR, MIR Arrays Beam Combining Single Frequency Pulse Components Lasers Compression Tunable TiSa, Laser crystals Splicing, Refractive / Alexandrite, Cleaving, Optics Diffractive Optics Dye-Laser Characterizati Free Form Optics on Seite 7 © Fraunhofer ILT Tailored Lasers for Industrial Use Laser Beam Sources Applications Power / Energy Manufacturing Technology Spatial Quality Measurement Technology Temporal Quality Microelectronics (EUV) Spectral Quality Life Sciences © Fraunhofer ILT Solid State Laser for Sparc Ignition of Gas Engines Design and Parameters Q-switched DPSSL Multi 10 mJ output Applications stationary energy supplies Automotive ? © Fraunhofer ILT Solid State Laser for Fusion based Power Plants EUROPEAN Fusion Power Plant HiPER NIF is operational now Only pulse generation stages are diode pumped High power amplifier is lamp pumped Laser based Fusion Plants like HIPER more than 1.000.000 DL bars initially required for fully diode pumped laser Source: Lawrence Livermore National Laboratory © Fraunhofer ILT Parameter Range of Solid State Lasers 1.000 2w 0 F#4 focusing transformation hardening optics (NA 0,12) plastics melting, milli-cw f welding brazing 100 cleaning Diode lasers (2003) soldering selective micro laser powder deep penetration remelting metal welding metals 10 sheet cutting nano Printing therm. marking CO2-laser 1 pico lamp-pumped BPP = · w0 Nd:YAG-laser DPSSL 0.1 femto Beam Parameter Product BPP [mm mrad] 1 10 100 1.000 10.000 Laser Power P [W] atto Gamma X-rays soft-X EUV VUV UV VIS IR Wave A mA A nm 10 nm 20 nm 120 nm 0,3 m 1 m 100 m cm h GeV MeV keV 50 eV 4 eV eV meV eV © Fraunhofer ILT Laser building blocks Beam Source Beam delivery Process optics Rod Disc Beam Single Emitter Slab shaping Beam guiding Beam Bars Fiber system Pol. and - forming,Bearbeitungs Stacks combining (often -optik focusing external Fiber based) optics Resonator © Fraunhofer ILT Basic Laser Designs – Diode Pumped Rod Laser Fiber Laser ThinDisc Laser Slab Laser side pumped end pumped side pumped end/cladding end pumped side pumped end pumped pumped ROFIN / ILT LLNL IPG IFSW CEO/TRW ILT FANUC LZH SPI/Trumpf Trumpf (Spectra CEO/TRW Trumpf Trumpf IAP Jena ROFIN Physics / HRL Mitsubishi Mitsubishi HOYA ILT JENOPTIK Newport) EdgeWave Toshiba ROFIN AMPHOS NEC Laserline Hughes Res. © Fraunhofer ILT Required Pump Beam Quality for a 1kW Module transversally pumped Pump Source rodlaser Mode BPP Concept Focus Volume [mm*mrad] slow Rod side Cylindrical Line 4800 BPP w pumped 0 60mm100mrad INNOSLAB 6000mmmrad Disc fast BPP w0 Fiber 0.5mm500mrad 250mmmrad © Fraunhofer ILT Required Pump Beam Quality for a 1kW Module INNOSLAB laser Pump Source Moden BPP Concept Focus Volume [mm*mrad] slow / unstable Rod side Cylindrical Line 4800 BPP w pumped 0 20mm200mrad INNOSLAB rectangular Line 900 4000mmmrad Disc fast / stable BPP w0 Fiber 6mm8mrad 48mmmrad © Fraunhofer ILT Required Pump Beam Quality for a 1kW Module Pump Source Moden BPP Concept Fokus [mm*mrad] Volume thin Rod side Cylindrical Line 4800 disk laser pumped INNOSLAB rectangular Line 900 Disc Cylindrical Circle 500 BPP w0 2.5mm250mrad Fiber 500mmmrad © Fraunhofer ILT Required Pump Beam Quality for a 1kW Module fibre laser Pump Source end-pumped Moden BPP Concept Focus Volume [mm*mrad] Rod side fibre laser cylindrical Line 4800 “Y”-pumped pumped INNOSLAB rectangular Line 900 Das Bild kann zurzeit nicht angezeigt werden. Disc cylindrical Circle 600 Fiber cylindrical Circle 180 © Fraunhofer ILT Single Emitters - Fiber coupled Multi Emitter Module CW Output P = 75 W @ fiber: 100 μm / NA 0.15 industrial version available Dimensions of the housing: 95 x 62 x 30 mm3 Fiber port Electrical connectors © Fraunhofer ILT Single Emitters - Power scaling of fiber coupled Emitters © Fraunhofer ILT Single Emitter based kW Class Direct Diode Systems © Fraunhofer ILT High Power Diode Laser Bars – Average Power Trend 1200 1000 800 Newport (2007) 600 400 R&D 200 Fraunhofer ILT (2000) Single bar CW Output Power [W] Commercial 0 1985 1990 1995 2000 2005 2010 Year © Fraunhofer ILT High Power Diode Laser Bars – Beam Forming Diode Laser Diode Laser Diode Stack Diode Laser head Chip heat Sink © Fraunhofer ILT High Power Diode Laser Bars - Source Efficiency 12000 60,00% Wall plug power P[W] Electrical Input Power 10000 P[W] 50,00% Wall plug efficiency [%] 8000 40,00% 6000 30,00% Input Power [W] 4000 20,00% Efficiency [%] 2000 10,00% 0 0,00% 0 500 1000 1500 2000 2500 3000 3500 4000 Laser Output Power [W] © Fraunhofer ILT HPDL bars - Fiber coupled Diode Laser (LDF) Moveable diode laser (LDF) Laser power from 1000 up to 15.000 W Beam quality > 30 mm mrad Foot print 0,9 m² 15.000 W @ 100 mm mrad 4.000 W @ 30 mm mrad © Fraunhofer ILT High Power Diode Lasers based on bars - average power and beam quality trend 100 mm mrad 60 mm mrad 40 mm mrad 30 mm Laser power [W] In diesen Rahmen Excel-Tabelle einfügen mrad 20 mm mrad © Fraunhofer ILT Power scaling by dense wavelength multiplexing (DWDM) Wavelength selectivity Beam combiner Beam combining grating 1 2 Wavelength Micro stabilization channel-heat gratings FAC SAC sink Diffraction efficiency [-] efficiency Diffraction Volume Bragg Wavelength [nm] Diode laser grating bar (VBG) © Fraunhofer ILT DWDM - Advantages and perspectives of wavelength stabilization Increased yield due Reduced manufacturing to wavelength tolerance costs lifetime benefit due to no micro channel passive cooling, decreases heatsinks required costs Pump source wavelength matches the absorption maximum of laser active improvement of efficiency materials Increasing the brightness diode lasers replace solid by dense wavelength state lasers due to reduced multiplexing total cost of ownership © Fraunhofer ILT DWDM - Principle setup of a diode laser module beam fast- & slow spatial polari- wave- diode transform. axis multi- zation length laser collimation plexing multiplex. multiplex. beam homogeniz. 1 2 3 © Fraunhofer ILT DWDM - Wavelength externally stabilized passively cooled diode laser bar 984 982 980 [nm] 978 976 974 972 wavelength 970 968 20 40 60 80 100 injection current [A] Locking range = 20nm Thermal shift without cooling: 95% power inclusion: d c / dT = 0,006nm/A < 0.5nm Thermal shift with cooling: Stabilization causes no losses d c / dT = 0,003nm/A Stabilization prevents early roll over effect © Fraunhofer ILT DWDM - KW Class Diode Laser ILT Prototype 2x3 DWM units Collimating and Focusing Fiber coupling Optics The system has been demonstrated for: steel welding fiber laser pumping © Fraunhofer ILT DWDM by Diffraction Grating - TERADIODE 2 kW out of a 50…100μm fiber Bandwidth: about 20nm / kW © Fraunhofer ILT Vertical emitting high power diodes - VCSEL VCSELs are ideal for illumination and thermal processes requiring brightness better than LEDs but not yet a “perfect laser” Philips prototypes Philips Research, December 2010 © Fraunhofer ILT VCSEL - Wafer scale production and synergy with LEDs enable lowest cost a 3” wafer contains many 10,000s of fully processed and 100% tested VCSELs VCSEL assembly will profit from the upcoming LED developments: LED thermal challenges LED thermal challenges X10 X10 © Fraunhofer ILT VCSEL arrays for power scaling single emitters 3-100μm single chips multi-chip modules 5-500mW 1-100W 10-2000W 8 mm 2 mm 6W 60W Mesa 50 μm 150W 500W 25 mm © Fraunhofer ILT VCSEL - Monolithic Wafer Scale Integration of Micro-Optics Bonded optics Cross section Single laser GaAs substrate Gain DBR- region Mirrors Solder pad © Fraunhofer ILT Submount VCSEL - Tailored intensity distributions by Monolithic Wafer Scale Integration of Micro-Optics individual VCSELs are collimated arrays of μ-lenses preserves power density many VCSELs are superimposed by a field lens small differences are averaged out the μ-lens and the field lens image the shape of the VCSEL
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