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Études De Nouvelles Architectures De Composants Intégrés Sensibles À La Lumière En Filière FDSOI Pour Les Applications De Type Imageur

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Études De Nouvelles Architectures De Composants Intégrés Sensibles À La Lumière En Filière FDSOI Pour Les Applications De Type Imageur THÈSE Pour obtenir le grade de DOCTEUR DE LA COMMUNAUTE UNIVERSITE GRENOBLE ALPES Spécialité : Nano Electronique et Nano Technologies Arrêté ministériel : 25 mai 2016 Présentée par Lina KADURA Thèse dirigée par Alexei TCHELNOKOV, CEA-LETI, et co-encadrée par Olivier ROZEAU, CEA-LETI et Laurent GRENOUILLET, CEA-LETI préparée au sein du Laboratoire d'électronique et des technologies de l'information (CEA-LETI) dans l'École Doctorale électronique, électrotechnique, automatique et traitement du signal (EEATS) Études de nouvelles architectures de composants intégrés sensibles à la lumière en filière FDSOI pour les applications de type imageur Thèse soutenue publiquement le 07/06/2019, devant le jury composé de : Pr. Pierre MAGNAN Professeur des Universités, ISAE Toulouse, Toulouse (Rapporteur) Dr. Yang Ni CTO à New Imaging Technologies, Paris area (Rapporteur) Pr. Albert THEUWISSEN Professeur des Universités, TU Delft, Pays-Bas (Examinateur) Pr. Francis CALMON Professeur des Universités, INSA de Lyon, Lyon (Président) Dr. Frederic LALANNE Ingénieur de recherche à STMicroelectronics, Crolles (Examinateur) Dr. Alexeï TCHELNOKOV Ingénieur de recherche au CEA-Leti, Grenoble (Directeur de thèse) Dr. Olivier ROZEAU Ingénieur de recherche au CEA-Leti, Grenoble (Co-encadrant) Dr. Laurent GRENOUILLET Ingénieur de recherche au CEA-Leti, Grenoble (Co-encadrant) Page|2 To all the seekers of knowledge lost in the Mediterranean Sea Page|3 Page|4 AKNOWLEDGEMENTS I conducted my three years thesis research at LETI, in the advanced CMOS integration laboratory (LICL) in CEA- Grenoble. One of the best assets of LETI is the availability of experts that are always willing and benevolent to help and share their knowledge on the campus. Thanks to them I was able to learn and develop many new competences, so I’d like to start by thanking all the people at LETI that helped me achieve this work. I’d like to thank the members of my jury, Pr. Pierre Magnan, Dr. Yang Ni, Pr. Francis Calmon, Pr. Albert Theuwissen, and Dr. Frederic Lalanne, for reading my manuscript, attending the defense and for all the positive and important feedback that helped me increase the quality of this manuscript. It was an honor having you all in my jury. My warmest gratitude to my supervisors: Olivier Rozeau, SPICE modeling master, thank you for your guidance despite me “Papillonner” way too much, and for answering my questions during the countless times I entered your office saying “Olivier, j’ai une question” (I never had only one question though). Thank you for challenging me and demanding rigor in my work, helping me become a much better researcher. Laurent Grenouillet, process integration master, thank you for the good vibes ;), your constant enthusiasm which always motivated me to do better, and for your encouragement and support. I learned the benefit of having a positive critical thinking from you. Thank you also for the “end of contract-defense” period where you were always responding and available to discuss the manuscript/poster/paper (or to listen to me complaining) at the rdc of the bcc building. My thesis director Alexei Tchelnokov for all your encouragement and advices, and for being available to participate to our periodic meetings and enriching the discussion every time. Finally, thank you all three for the guidance and the rehearsals and review of paper/manuscript/presentations, I learned so much during these three years thanks to you. I hope I’ll have the pleasure of working with you all again in the future! I’d like to thank my manager, Maud Vinet, for welcoming me in the LICL, and for your encouragement throughout the thesis. Thank you, the early morning technician team, Claude, Jean-Mi, Marie-Pierre, and Paul, for all the good memories around a nice Nespresso. Special thanks to Claude with whom I shared the office for three years. Thank you for all the conversations on variable topics, all the French grammar/movies/books/singers 70s pop culture knowledge that you shared with me (whether I wanted or not ;)). Thank you Louis (waaw), for genuine funny, interesting conversations. Thanks to all the people in the lab that I interacted with, whether it was in meetings, lunch, coffee or just discussions in the office: Bernard, Christophe, Valerie, Zdeneck, Hervé, Yves, Cyrile, Claire, Perrine, François, Laurent, Nils, Alexandre L, Sylvain, Laurent and Jean-Pierre. The electrical tests team: Jean and Alex V (you guys will always be my first mentors), Denis for your help with the IPE and all the fruitful discussions, Niccolo for negotiating on the equipment’s and wafers, Jacque, Xavier, Alain, Charles, the phd community Ilias, Artemisia, and Kostas (aka Istanbul) for making me a café frappé whenever I wanted one, and for the support through a good laugh whenever I had problems with my tests. Thank you Pascal Scheiblin from the simulation lab for your help with Silvaco and the VWF, and Christophe Licitra for the last minute simulations. Page|5 Thank you the Padawan team of the LICL that gave meso many wonderful memories of these three years spent in the lab. The old generation: Julien, Alex, Mathilde, Jose, thank you guys for the pause café, the magic music quiz, and for making me feel part of the team right away. Rémy-sempai, who I would ask questions instead of opening a book on semiconductor physics and thanks to whom I learned so much from new French vocabulary to animals walk…whatever. Luca (thanks for the Loacker!), Vincent (secret kawai at heart), Sotiris (Café frapé), Benoit, Corentin, Loic, and Fabien. My generation: Jessy (rose et papillon), Thomas, and Carlos, we made it! Thank you guys for the support, discussions, breaks, and advice. The new generation: Giulia (girls power!) thank you for being an example of confidence, and inspiring me to become stronger, Camila with whom it was a pleasure sharing the same office, thank you for your support during the difficult time that are deadlines, and for the encouragement and discussions, just chill you’re going to do great ;), Daphnée, zen and give you a sense of zénitude, thanks for your cheerfulness and the good laughs, Mariia, Elizabeth, Louise, for sharing the office for short yet memorable periods of time. I wish to all of you the best of the best in life. Thank you Marie, Faiza, and Amna for always maintaining my nostalgia for the other side of the Mediterranean Sea, and to Yumi-chan for maintaining my nostalgia for an even further away side. My best friends in Libya: Tasnim, Rawad, Elham, Nouran, and Arwa, who didn’t loosen their support and encouragement even though I missed all their important events. Thank you for everything guys, I’ve missed you a lot and I’ll see you soon! I’d like to thank my family for their support throughout my education. Thank you, aunts, uncles, and cousins in France and Libya. Special thanks to tata Salha for listening to me complaining and worrying during these 3 years, and for attending my defense. Thanks mom and dad, for your unconditional support and constant encouragement, my brothers Marwan, Hicham, Sofian, Yazid, and Walid, my Sis-in-law Hamida and my niece Boubou. You guys always find a way to make me laugh away all my problems. Finally, thank you everyone that helped me succeed and get where I am today. Sincerely Lina Kadura Page|6 Page|7 Page|8 TABLE OF CONTENT AKNOWLEDGEMENTS................................................................................................................5 TABLE OF CONTENT ...................................................................................................................9 GLOSSARY ..................................................................................................................................15 INTRODUCTION .........................................................................................................................19 CHAPTER 1 : IMAGE SENSORS AND LIGHT DETECTORS .................................................25 1.1. STANDARD CAMERA SYSTEM .......................................................................................................... 27 1.1.1. CMOS VS CCD ......................................................................................................................................... 28 1.1.2. CMOS IMAGE SENSORS STANDARD ARCHITECTURES ............................................................... 29 1.1.2.1. Passive Pixel Sensor (PPS) ................................................................................................................................... 29 1.1.2.2. Active Pixel Sensor (APS) ..................................................................................................................................... 29 1.1.2.3. Digital Pixel Sensor (DPS) ................................................................................................................................... 30 1.1.2.4. Standard pixel operation ...................................................................................................................................... 31 1.2. PIXEL DESIGN: KEY PARAMETERS AND ARCHITECTURES ............................................................ 31 1.2.1. PIXEL PARAMETERS ............................................................................................................................. 32 1.2.1.1. Size & Fill Factor (FF) ......................................................................................................................................... 32 1.2.1.2. Sensitivity & Quantum efficiency .........................................................................................................................
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